极紫外宽带Mo/Si非周期多层膜偏振光学元件

研究了极紫外宽带多层膜偏振光学元件,包括反射式检偏器与透射式相移片。基于Mo/Si非周期多层膜结构,采用解析与数值优化相结合的方法进行了多层膜的设计;采用磁控溅射技术制备了多层膜。利用X射线衍射仪对非周期多层膜的结构进行了表征,利用德国BESSY-II同步辐射实验室的偏振测量仪对多层膜的偏振特性进行了测试。测量结果表明,在13~19 nm波段,s偏振分量的反射率高于15％;在15~17 nm波段,获得了37％的反射率。宽带多层膜同样可作为宽角偏振光学元件,在13.8~15.5 nm波段,宽带透射相移片的平均相移为41.7°。采用所研制的宽带多层膜相移片与检偏器,建立了宽带偏振分析系统,并对BESSY-II的UE56/1 PGM1光束线的偏振特性进行了系统研究。这种宽带多层膜偏振光学元件可以极大地简化极紫外偏振测量。     

软X射线偏振光学元件的设计与制备

叙述了软X射线波段反射式多层膜起偏器和检偏器的设计原则和设计方法,优化计算了5.9nm波长处多层膜光学元件的偏振性能,阐述了其制备的过程,利用小角度衍射法对多层膜的厚度进行了测量,并对同步辐射测量的反射率结果进行了拟合分析。     

同步辐射软X射线多层膜分光反射率测试装置

采用多层膜反射镜作为分光元件,成功地研制了同步辐射软X射线反射率计。可完成对各种光学反射镀层的光学常数的测试和评价。工作波段(2-20)nm,角分辨率0.01°,扫描范围(0-80)°。该装置安装在BEPC同步辐射实验室3B1光刻光束线上。     

同步辐射软X射线多层膜反射率计测量控制系统

本文介绍我们首先使用一块软X射线多层膜反射镜作为色散元件而研制的同步辐射软X射线反射率计的软硬件结构、功能与特点,并报告了实测结果。     

高分辨率X射线衍射光学元件

评述了BESSY研制的用于X射线聚焦的各种衍射光学元件。基于布拉格-菲涅耳光学元件,设计了高效高分辨率X射线聚焦和色散光学元件。描述了对长焦距布拉格-菲涅耳透镜与可变曲率半径反射镜组合所做的实验研究。用一块反射菲涅耳波带板作聚焦和色散光学元件进行了短脉冲X射线吸收谱(XAS)的测量。     

软X射线多层膜反射镜的设计、制备与检测

本文提出一种图像直观、结果可靠的软X线多层膜设计方法,讨论了与软X射线多层膜制备有关的基板选择,膜厚控制等工艺问题。给出Mo/Si软X射线多层膜小角度衍射及171Å、231Å及256Å处软X射线反射率的测试结果,并对软X射线多层膜工作做了展望。     

空间调制外差干涉型偏振光谱测量系统

鉴于偏振光谱仪系统追求的目标是高偏振光谱分辨率、全Stokes谱静态测量、兼顾小体积轻质量，结合偏振光谱强度调制技术与空间外差干涉技术，提出空间调制外差干涉型偏振光谱仪系统。介绍了空间调制外差干涉型偏振光谱仪系统的结构原理，并对系统干涉图数据采集和全Stokes矢量解调复原进行了理论分析，给出了完整数学推导。结合空间外差光谱仪参数，匹配设计了调制器模块，给出一套完整的设计实例。在实验室搭台建立空间调制外差干涉型偏振光谱仪原理实验装置，通过对已知偏振态线偏振光的测量实验以及实验数据解析，验证系统原理及测量数据处理流程的正确性。结果表明：几种已知偏振态的线偏振光，由实验装置测量数据解析得到的Stokes矢量谱与理论分析结果基本一致，误差小于3%，验证了空间调制外差干涉型偏振光谱获取技术的可行性。     

类镍钽软X射线激光用多层膜反射镜的研制

设计并制备了工作波长为4.48 nm类镍钽软X射线激光用多层膜反射镜。选择C r/C、C r/Sc为多层膜材料对,模拟了多层膜非理想界面对多层膜反射率的影响。采用直流磁控溅射技术在超光滑硅基片上制备了C r/C、C r/Sc多层膜。利用X射线衍射仪测量了多层膜结构,在德国Bessy II同步辐射上测量了多层膜的反射率,C r/C,C r/Sc多层膜峰值反射率分别为7.50%,6.12%。     

窄光谱带宽X射线刻蚀多层膜光栅

结合X射线荧光分析和同步辐射单色器对窄光谱带宽多层膜的需求,开展了窄光谱带宽刻蚀多层膜光栅的理论和实验研究.用平均密度法从理论上阐明将多层膜刻蚀成不同刻蚀比的多层膜光栅后,光谱分辨率将得到提高.用磁控溅射方法制备了W/C多层膜,并用常规的光刻工艺对其进行刻蚀,得到了刻蚀后的多层膜光栅.掠入射X射线衍射测量表明,刻蚀后多层膜的衍射峰位置向小角方向移动,多层膜光栅没有改变剩余多层膜的结构,而且带宽减小,光谱分辨率得到提高,说明实验采用的工艺方法和工艺路线可以满足制作窄光谱带宽刻蚀多层膜光栅的要求,为今后进一步研究实用化元件打下了基础.     

用透射光栅谱仪测量多层膜的反射特性

软X射线多层膜是当前应用光学和工程光学的研究热点之一,反射率是其性能和膜层质量最直观的参数,它的测量对了解多层膜性能和改进多层膜制备工艺具有重要意义。本文介绍采用带有前置光学系统的大面积透射光栅光谱仪分光,让软X射线多层膜反射+1级或-1级软X射线,用国产的SIOFM型X射线胶片接受软X射线,通过测量可定性地判断多层膜制备质量,为改进多层膜制备工艺提供重要的参考依据。     

大型X射线光学仪器:单层镜和多层镜的制造与表征

150~500 mm长度的各种X射线光学元件可用于光束导引,光束调整,以及单色化。本文介绍了两种不同的大型X射线反射镜。第一种为单层反射镜,这种反射镜以2°掠入射角在软X射线区(50~200 eV)起全反射镜作用,可用于自由电子激光器,如德国汉堡的FLASH。第二种是多层镜,由于它的布喇格反射特性,适于作为反射镜以0.4~1°的入射角用于硬X射线区(20~50 keV),如层析光束线的同步辐射存储环中。两种反射镜都用最新物理汽相淀积法制备,并用磁控溅射来实现X射线光学应用所需要的优良光学品质。这一淀积工艺使不同批次的镀膜稳定性良好,有利于实际反射镜在优质衬底上的最后淀积。单层镜和多层镜在它们的相关能量范围内都有很高的反射率,表面粗糙度也很低,且在整个光学波长区这些特性表现均匀。文中所叙相关研究都是借助X射线反射计量(XRR)法,透射电子显微镜(TEM)、光学轮廓仪(OP),以及原子力显微镜(AFM)完成的。     

X-ray microscopy: experimental results with the Göttingen X-ray microscope at the electron storage ring BESSY in Berlin

An X-ray microscope and X-ray microscopy experiments with biological specimens are described. The experiments have been performed with a resolution of about 0.05 μm using the synchrotron radiation of the electron storage ring BESSY.     

A large‐field polarisation‐resolved laser scanning microscope: applications to CARS imaging

Laser‐scanning imaging techniques are frequently used to probe the molecule spatial orientation in a sample of interest by exploiting selection rules depending on the polarisation of the excitation light. For the successful implementation of these techniques the precise control of the polarisation at the sample level is of fundamental importance. Polarisation distortions induced by the optical elements are often the main limitation factor for the maximum size of the field‐of‐view in polarisation‐resolved (PR) laser‐scanning microscopy, since for large scanning angles the polarisation distortions may mask the real sample structure. Here we shall demonstrate the implementation of large‐field‐of‐view PR microscopy and show PR CARS imaging of mouse spinal cord thanks to a careful design of the laser‐beam optical path. We shall show that this design leads to strongly suppressed distortions and quantify their effects on the final images. Although the focus of this work is on CARS imaging, we stress that the approaches described here can be successfully applied to a wide range of PR laser‐scanning techniques.     

同步辐射高分辨率衍射光束线的设计

介绍了第三代同步辐射高分辨率X射线衍射光束线的总体设计。给出了高分辨率衍射的基本原理并描述了获得确定光子能量的近平行高强度X射线光束线所必需的光学元件。特别是用X射线动力学理论,解释了双晶及四次反射晶体单色器。作为一个实例,介绍了将于2009年开始在德国汉堡运行的一个新的同步辐射源PETRAⅢ的高分辨率衍射(HighRes)光束线的设置情况。通过优化光学部件,对微米尺寸光束,q空间的分辨减小到Δq=10^-5 nm^-1,光通量大于10¹¹ cts/s。     

KMC-1: a high resolution and high flux soft x-ray beamline at BESSY

The crystal monochromator beamline KMC-1 at a BESSY II bending magnet covers the energy range from soft (1.7 keV) to hard x-rays (12 keV) employing the (n,-n) double crystal arrangement with constant beam offset. The monochromator is equipped with three sets of crystals, InSb, Si (111), and Si (422) which are exchangeable in situ within a few minutes. Beamline and monochromator have been optimized for high flux and high resolution. This could be achieved by (1) a windowless setup under ultrahigh-vacuum conditions up to the experiment, (2) by the use of only three optical elements to minimize reflection losses, (3) by collecting an unusually large horizontal radiation fan (6 mrad) with the toroidal premirror, and (4) the optimization of the crystal optics to the soft x-ray range necessitating quasibackscattering crystal geometry (theta(Bragg,max)=82 degrees) delivering crystal limited resolution. The multipurpose beamline is in use for a variety of user facilities such as extended x-ray absorption fine structure, ((Bio-)EXAFS) near-edge x-ray absorption fine structure (NEXAFS), absorption and fluorescence spectroscopy. Due to the windowless UHV setup the k edges of the technologically and biologically important elements such as Si, P, and S are accessible. In addition to these experiments this beamline is now extensively used for photoelectron spectroscopy at high kinetic energies. Photon flux in the 10(11)-10(12) photons/s range and beamline resolving powers of more than E/DeltaE approximately 100.000 have been measured at selected energies employing Si (nnn) high order radiation in quasibackscattering geometry, thus photoelectron spectroscopy with a total instrumental resolution of about 150 meV is possible. This article describes the design features of the beamline and reports some experimental results in the above mentioned fields.     

Advanced experimental applications for x-ray transmission gratings spectroscopy using a novel grating fabrication method

A novel fabrication method for soft x-ray transmission grating and other optical elements is presented. The method uses focused-ion-beam technology to fabricate high-quality free standing grating bars on transmission electron microscopy grids. High quality transmission gratings are obtained with superb accuracy and versatility. Using these gratings and back-illuminated CCD camera, absolutely calibrated x-ray spectra can be acquired for soft x-ray source diagnostics in the 100-3000 eV spectral range. Double grating combinations of identical or different parameters are easily fabricated, allowing advanced one-shot application of transmission grating spectroscopy. These applications include spectroscopy with different spectral resolutions, bandwidths, dynamic ranges, and may serve for identification of high-order contribution, and spectral calibrations of various x-ray optical elements.     

The measurement of atomic number and composition in an SEM using backscattered detectors

The atomic number dependence of electron backscattering can be used as the basis of a microanalysis technique. The operating procedures and condition for quantitative measurements of specimen atomic number are outlined and an expression relating the accuracy of composition to the atomic number sensitivity has been derived. Some measurements of the spatial resolution of backscattered electron microanalysis are also presented and compared with the resolution of X-ray microanalysis. Although the range of application of this technique is limited, where it can be applied it has the following advantages: (i) higher spatial resolution than X-ray microanalysis for bulk specimens; (ii) very rapid measurement; (iii) can be applied to compounds of low atomic number elements, (e.g. borides, carbides, nitrides, etc.); (iv) specimen preparation is often relatively straightforward.     

Computed tomography of cryogenic biological specimens based on X-ray microscopic images

Soft X-ray microscopy employs the photoelectric absorption contrast between water and protein in the 2.34-4.38 nm wavelength region to visualize protein structures down to 30 nm size without any staining methods. Due to the large depth of focus of the Fresnel zone plates used as X-ray objectives, computed tomography based on the X-ray microscopic images can be used to reconstruct the local linear absorption coefficient inside the three-dimensional specimen volume. High-resolution X-ray images require a high specimen radiation dose, and a series of images taken at different viewing angles is needed for computed tomography. Therefore, cryo microscopy is necessary to preserve the structural integrity of hydrated biological specimens during image acquisition. The cryo transmission X-ray microscope at the electron storage ring BESSY I (Berlin) was used to obtain a tilt series of images of the frozen-hydrated green alga Chlamydomonas reinhardtii. The living specimens were inserted into borosilicate glass capillaries and, in this first experiment, rapidly cooled by plunging into liquid nitrogen. The capillary specimen holders allow image acquisition over the full angular range of 180 degrees. The reconstruction shows for the first time details down to 60 nm size inside a frozen-hydrated biological specimen and conveys a clear impression of the internal structures. This technique is expected to be applicable to a wide range of biological specimens, such as the cell nucleus. It offers the possibility of imaging the three-dimensional structure of hydrated biological specimens close to their natural living state.     

Absolute calibration of X-ray optical elements and detectors at a wavelength of 46.9 nm

The results are presented of the absolute calibration of X-ray optical elements (diffraction gratings and Sc/Si multilayers) and detectors (an УΦ-4 photographic film and a vacuum X-ray diode) used in diagnostic devices to study generation of X-ray laser radiation in an argon plasma of a capillary discharge (λ = 46.9 nm). The measurements have been performed at the soft X-ray and vacuum UV station of the VEPP-4 storage ring at the Siberian International Center of Synchrotron Radiation. An absolutely calibrated AXUV 100G photodiode has been used as a reference detector. The relative error of calibration is 10%. The measured reflectances of the multilayer mirrors and gratings are in good agreement (within the limits of errors) with the results of their calibration at the RKK-1-100 X-ray calibration facility.