NEA GaN光电阴极的制备与评估

对GaN的结构性质进行了介绍,研究了NEAGaN光电阴极的制备方法,利用MOCVD生长了P型掺杂浓度为1.6×1017cm-3发射层厚度150 am的GaN样品,在进行了GaN表面净化处理得到原子级清洁表面后,在超高真空系统中对GaN光电阴极进行了Cs/O激活,获得了NEAGaN光电阴极.利用实验室制备的多信息量测试系...     

NEAGaN光电阴极第一性原理研究

采用基于密度泛函理论(DFT)框架下广义梯度近似投影缀加平面波方法,在六方结构GaN结构优化的基础上,计算了GaN(0001)A面吸附Cs后功函数变化,指出吸附系统表面形成了一个有效的GaN－Cs电偶极子层,降低了原本的GaN表面势垒,形成更加有利于电子逸出的外光电发射效应特性。接着图示吸附Cs、O后的电子结构,指出吸附原子和衬底之间的键合。六方结构GaN材料的光学性质通过Kramers-Kronig 关系得出。根据GaN的介电函数谱,得出了254nm光波长下以GaN为激活层材料的反射式光电阴极在不同少子扩散长度下的内量子效率。计算结果表明六方结构GaN(0001)A面是可见光盲光电阴极的优良发射表面,且254 nm处的量子效率可达到60%,远大于碱金属卤化物紫外光电阴极。     

NEA GaN光电阴极材料光学特性研究

针对NEA GaN光电阴极结构设计和制备工艺需进一步优化的问题,结合阴极量子效率表达式和影响量子效率的因素,采用理论和实验相结合的方法,分别研究了GaN光电阴极材料的表面反射率、光学折射率、光谱吸收系数以及透射光谱等光学参数。结果表明在250 nm到365 nm的波长范围内,表面反射率相对平稳,是影响量子效率的直接因素,而光学折射率则通过电子表面逸出几率间接影响着量子效率。给出了均匀掺杂GaN光电阴极的光谱吸收系数的特点,根据变掺杂NEA GaN光电阴极的结构特点,给出了光谱平均吸收系数的概念和等价计算公式,并对均匀掺杂与变掺杂NEA GaN光电阴极光谱吸收系数进行了对比。     

Pt/n-GaN肖特基接触的退火行为

在金属有机物气相外延 (MOVPE)方法生长的非故意掺杂的n GaN上用Pt制成了肖特基接触 ,并在 2 5 0～6 5 0℃范围内对该接触进行退火 .通过实验发现 ,Pt与非故意掺杂n GaN外延薄膜可以形成较好的肖特基接触 ,而适当的退火温度可以有效地改善Pt/n GaN肖特基接触的性质 .在该实验条件下 ,40 0℃温度下退火后的Pt/n GaN肖特基接触 ,势垒高度最大 ,理想因子最小 .在 6 0 0℃以上温度退火后 ,该接触特性受到破坏 ,SEM显示在该温度下 ,Pt已经在GaN表面凝聚成球 ,表面形成孔洞.     

梯度掺杂结构GaN光电阴极的激活工艺研究

利用自行研制的光电阴极多信息量测试评估系统,在线测试了梯度掺杂结构GaN光电阴极在激活过程中的光电流、Cs源电流和O源电流。根据激活后的阴极光谱响应曲线和量子产额曲线,分析了超高真空室真空度、激活前的阴极表面净化程度、激活中首次进Cs量、激活中的Cs/O比以及Cs/O源在激活中的供给方式等对阴极激活的影响,提出了梯度掺...     

不同Mg掺杂浓度的GaN材料的光致发光

研究了用低压金属有机物化学沉积方法生长得到的具有不同Mg掺杂浓度的GaN样品薄膜,经不同温度退火处理后的发光特性.实验发现随着退火温度的升高,不同掺杂浓度的Mg∶GaN材料的光致发光谱蓝带峰能量相差变小,经850℃退火后蓝带集中在2.92eV附近.利用Mg∶GaN材料内部补偿模型对此现象进行了分析,同时认为对于掺杂浓度较高的样品,850℃为最佳的退火温度.     

不同Mg掺杂浓度的GaN材料的光致发光

研究了用低压金属有机物化学沉积方法生长得到的具有不同Mg掺杂浓度的GaN样品薄膜,经不同温度退火处理后的发光特性.实验发现随着退火温度的升高,不同掺杂浓度的Mg∶GaN材料的光致发光谱蓝带峰能量相差变小,经850℃退火后蓝带集中在2.92eV附近.利用Mg∶GaN材料内部补偿模型对此现象进行了分析,同时认为对于掺杂浓度较高的样品,850℃为最佳的退火温度.     

NEA GaN和GaAs光电阴极的比较

针对GaN基光电阴极激活过程中Cs-O交替存在的光电流的增幅问题,本文主要比较了GaN和GaAs材料性质、表面结构以及激活过程中光电阴极的光电流。发现GaN的熔点高于GaAs,在制备GaN基光电阴极时则需要更高的热清洗温度;如果用双偶极子模型描述GaN(1000)和GaAs(100)表面的光电发射机理,GaN(1000)表面Cs原子与O原子形成第二偶极矩O-Cs,几乎"平躺"在表面,对光电发射贡献不大;GaAs(100)表面Cs原子与O原子形成第二偶极矩O-Cs几乎"垂直"于表面,降低了表面功函数,对光电发射贡献很大;Cs-O激活过程中,对于GaAs光电阴极,Cs、O交替过程形成的光电流与单纯Cs激活时的光电流相比,有几倍甚至上百倍的增长;GaN只提高了20%左右。通过第一性原理计算,与现在的GaN基(1000)面相比,GaN基的(11 2 0)和(10 1 0)面是极具潜力的光电发射面;预计闪锌矿GaN基(100)面会取得更好的结果。     

氮化镓光阴极薄膜材料表面光电压谱特性

在蓝宝石基底上外延生长了多层结构氮化镓光阴极薄膜材料并进行表面光电压测试;对比分析了掺杂类型、厚度和掺杂方式对氮化镓材料表面光电压的影响,确定了多层结构氮化镓材料表面光电压产生机理;借助亚带隙激光辅助,针对均匀掺杂和δ-掺杂氮化镓(GaN)光电阴极薄膜材料进行了表面光电压测试;实验数据表明,相较于均匀掺杂,δ-掺杂可以获得更好生长质量,但也提高了在能级(E_v+0.65)eV～(E_v+1.07)eV范围的缺陷态密度。     

缓冲层材料对纤锌矿结构GaN(0001)光电发射性能的影响研究

利用金属有机物化学气相沉积技术在蓝宝石衬底上异质外延生长了GaN光电发射层,为降低GaN发射层和蓝宝石衬底间的晶格失配与热失配,在蓝宝石衬底和GaN发射层间分别采用了AlN和AlxGa1-xN两种不同的缓冲层材料。对具有不同缓冲层材料的两种样品进行了表面清洗与激活,在激活结束后利用多信息量测试系统分别测试了样品的光谱响应,其最大量子效率分别为13%和20%,依据激活后光电阴极的光谱响应作为评估标准,可以得出,采用组份渐变AlxGa1-xN作为缓冲层激活出的阴极具有更高的光电发射性能,从而实现了GaN光电阴极结构的优化设计。     

Resolution Enhancement Technology:Integrated Process Solutions using OPC

DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Development of the readout system for waveguide multilayer optical card

Waveguide multilayer optical card （WMOC） is a novel storage device of three-dimensional optical information. An advanced readout system fitting for the WMOC is introduced in this paper. The hardware mainly consists of the light source for reading, WMOC, motorized stages addressing unit, microscope imaging unit, CCD detecting unit and PC controlling ＆ processing unit. The movement of the precision motorized stage is controlled by the computer through Visual Basic （VB） language in software. A control panel is also designed to get the layer address and the page address through which the position of the motorized stages can be changed. The WMOC readout system is easy to manage and the readout result is directly displayed on computer monitor.     

Study of waveguide coupling efficiency in hybrid silicon lasers

This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel＇s.     

Collinear phase-matching study of terahertz-wave generation via difference frequency mixed in GaAs and Inp

The collinearly phase-matching condition of terahertz-wave generation via difference frequency mixed in GaAs and InP is theoretically studied. In collinear phase-matching, the optimum phase-matching wave hands of these two crystals are calculated. The optimum phase-matching wave bands in GaAs and lnP are 0.95-1.38μm and 0.7-0.96μm respectively. The influence of the wavelength choice of the pump wave on the coherent length in THz-wave tuning is also discussed. The influence of the temperature alteration on the phase-matching and the temperature tuning properties in GaAs crystal are calculated and analyzed. It can serve for the following experiments as a theoretical evidence and a reference as well.     

Effects of the alloy compositions on the phonon-polaritons in ternary mixed crystals

Composition dependence of bulk and surface phonon-polaritons in ternary mixed crystals are studied in the framework of the modified random-element-isodisplacement model and the Bom-Huang approximation. The numerical results for Several Ⅱ - Ⅵ and Ⅲ- Ⅴ compound systems are performed, and the polariton frequencies as functions of the compositions for ternary mixed crystals AlxGa1-xAs, GaPxAS1-x, ZnSxSe1-x, GaAsxSb1-x, GaxIn1-xP, and ZnxCd1-xS as examples are given and discussed. The results show that the dependence of the energies of two branches of bulk phonon-polaritons which have phonon-like characteristics, and surface phonon-polaritons on the compositions of ternary mixed crystals are nonlinear and different from those of the corresponding binary systems.     

New insert layer structure OLEDs

An insert layer structure organic electroluminescent device（OLED） based on a new luminescent material （Zn（salen）） is fabricated. The configuration of the device is ITO/CuPc/NPD/Zn（salen）/Liq/LiF/A1/CuPc/NPD/Zn（salen）/Liq/LiF/A1. Effective insert electrode layers comprising LiF（1nm）/Al（5 nm） are used as a single semitransparent mirror, and bilayer cathode LiF（1 nm）/A1（100 nm） is used as a reflecting mirror. The two mirrors form a Fabry-Perot microcavity and two emissive units. The maximum brightness and luminous efficiency reach 674 cd/m^2 and 2.652 cd/A, respectively, which are 2.1 and 3.7 times higher than the conventional device, respectively. The superior brightness and luminous efficiency over conventional single-unit devices are attributed to microcavity effect.