共查询到20条相似文献,搜索用时 15 毫秒
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《Electron Devices, IEEE Transactions on》2009,56(3):499-504
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测量计算金属-半导体接触电阻率的方法 总被引:3,自引:0,他引:3
如何测量、计算得到精确接触电阻值已凸显重要.介绍了多种测量计算金属-半导体欧姆接触电阻率的模型和方法,如矩形传输线模型、圆点传输线模型、多圆环传输线模型等,对各方法的利弊进行了讨论,并结合最新的研究进展进行了评述和归纳.综合多种因素考虑,认为圆点传输线模型是一种较好的测量金属半导体接触电阻率的方法. 相似文献
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《Electron Device Letters, IEEE》2009,30(12):1278-1280
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Chung-Yu Lu Edward Yi Chang Jui-Chien Huang Chia-Ta Chang Mei-Hsuan Lin Ching-Tung Lee 《Journal of Electronic Materials》2008,37(5):624-627
Tungsten, stoichiometric W2N, and nitrogen-rich W2N films were used as Schottky contacts on AlGaN/GaN heterostructures. The nitrogen content in the film was controlled by varying
the nitrogen-to-argon gas flow ratio during the reactive sputter deposition. The diode with the nitrogen-rich film exhibited
a higher Schottky barrier height and the leakage current was comparable to that of the Ni/Au Schottky contact. Analysis suggested
that this was due to the increase of the tungsten nitride work function as the result of higher nitrogen incorporation. Furthermore,
after 600°C thermal annealing, the diode was stable and showed no change in the leakage current. 相似文献
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蒙特卡罗方法模拟金属-半导体接触的直接隧穿效应 总被引:4,自引:2,他引:2
运用自洽的蒙特卡罗方法模拟了肖特基接触的隧穿效应 .模拟的内容包括具有不同的势垒高度的金属 -半导体接触在正向和反向偏置下的工作状态 .分析模拟结果可知 ,隧穿电流在反向偏置下起主要的作用 .同时还模拟了引入肖特基效应后 ,SBD的工作特性 ,验证了模拟使用的物理模型 .得到了与理论计算值符合的模拟结果 .分析模拟结果表明 ,由于肖特基效应形成的金属 -半导体接触势垒的降低 ,会在很大程度上影响金属 -半导体接触的输运特性 相似文献
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This paper reports on estimating the Schottky barrier height of small contacts using a thermionic‐field emission model. Our results indicate that the logarithmic plot of the current as a function of bias voltage across the Schottky diode gives a linear relationship, while the plot as a function of the total applied voltage across a metal‐silicon contact gives a parabolic relationship. The Schottky barrier height is extracted from the slope of the linear line resulting from the logarithmic plot of current versus bias voltage across the Schottky diode. The result reveals that the barrier height decreases from 0.6 eV to 0.49 eV when the thickness of the barrier metal is increased from 500 Å to 900 Å. The extracted impurity concentration at the contact interface changes slightly with different Ti thicknesses with its maximum value at about 2.9×1020 cm?3, which agrees well with the results from secondary ion mass spectroscopy (SIMS) measurements. 相似文献
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运用自洽的蒙特卡罗方法模拟了肖特基接触的隧穿效应.模拟的内容包括具有不同的势垒高度的金属-半导体接触在正向和反向偏置下的工作状态.分析模拟结果可知,隧穿电流在反向偏置下起主要的作用.同时还模拟了引入肖特基效应后,SBD的工作特性,验证了模拟使用的物理模型.得到了与理论计算值符合的模拟结果.分析模拟结果表明,由于肖特基效应形成的金属-半导体接触势垒的降低,会在很大程度上影响金属-半导体接触的输运特性. 相似文献
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Krishna Murali Medha Dandu Kenji Watanabe Takashi Taniguchi Kausik Majumdar 《Advanced functional materials》2021,31(18):2010513
Due to Fermi level pinning (FLP), metal-semiconductor contact interfaces result in a Schottky barrier height (SBH), which is usually difficult to tune. This makes it challenging to efficiently inject both electrons and holes using the same metal—an essential requirement for several applications, including light-emitting devices and complementary logic. Interestingly, modulating the SBH in the Schottky–Mott limit of de-pinned van der Waals (vdW) contacts becomes possible. However, accurate extraction of the SBH is essential to exploit such contacts to their full potential. In this study a simple technique is proposed to accurately estimate the SBH at the vdW contact interfaces by circumventing several ambiguities associated with SBH extraction. Using this technique on several vdW contacts, including metallic 2H-TaSe2, semi-metallic graphene, and degenerately doped semiconducting SnSe2, it is demonstrated that vdW contacts exhibit a universal de-pinned nature. Superior ambipolar carrier injection properties of vdW contacts are demonstrated (with Au contact as a reference) in two applications, namely, a) pulsed electroluminescence from monolayer WS2 using few-layer graphene (FLG) contact, and b) efficient carrier injection to WS2 and WSe2 channels in both n-type and p-type field effect transistor modes using 2H-TaSe2 contact. 相似文献
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通过硅(111)衬底淀积的单层Co或Co/Ti双金属层在不同退火温度的固相反应,在硅上形成制备了多晶和外延CoSi2薄膜.用电流-电压和电容-电压(I-V/C-V)技术在90K到室温的温度范围内测量了CoSi2/Si肖特基接触特性. 用肖特基势垒不均匀模型分析了所测得的I-V特性,在较高温度下(≥~200K)或较低温度的较大偏压区域,I-V曲线能用热激发和在整个结面积上势垒高度的高斯分布模型描述. 而在较低温度的较小偏压区域,电流由流过一些小势垒高度微区的电流决定,从而在低温I-V曲线上在约10-7A处有一个"曲折”. 在室温下,从I-V曲线得到的多晶CoSi2/Si的势垒高度为约0. 57eV. 对外延CoSi2,势垒高度依赖于最后退火温度,当退火温度从700℃升到900℃,势垒高度从0. 54eV升高到0. 60eV. 相似文献
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本文简述了肖特基二极管的原理,结构、性能特点,分析了生产中经常出现的异常击穿特性曲线,并提出了相应的改进措施. 相似文献
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Pt/n-GaN肖特基接触的退火行为 总被引:2,自引:1,他引:1
在金属有机物气相外延 (MOVPE)方法生长的非故意掺杂的n GaN上用Pt制成了肖特基接触 ,并在 2 5 0~6 5 0℃范围内对该接触进行退火 .通过实验发现 ,Pt与非故意掺杂n GaN外延薄膜可以形成较好的肖特基接触 ,而适当的退火温度可以有效地改善Pt/n GaN肖特基接触的性质 .在该实验条件下 ,40 0℃温度下退火后的Pt/n GaN肖特基接触 ,势垒高度最大 ,理想因子最小 .在 6 0 0℃以上温度退火后 ,该接触特性受到破坏 ,SEM显示在该温度下 ,Pt已经在GaN表面凝聚成球 ,表面形成孔洞. 相似文献
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