Deposition Velocity onto an Inverted Flat Surface in a Laminar Parallel Flow

Wafers and photomasks in the cleanroom are exposed to airflows not only vertical but also parallel to the surfaces. In this study, Gaussian Diffusion Sphere Model (GDSM) was adjusted to predict deposition velocity onto an inverted flat surface in a laminar parallel flow by considering Brownian diffusion and gravitational settling of aerosol particles. The GDSM was validated by comparing with the simulation of solving flow and aerosol-concentration fields for an inverted flat surface and also with the mass transfer correlation for a finite flat surface of circular or rectangular areal shape. The GDSM was proven to correctly predict the deposition velocities onto the inverted flat surfaces, by taking one hour with a 2.66-GHz-CPU personal computer to obtain deposition velocities for 20 particle sizes, which is a very much shorter time compared with the time for simulating the flow and aerosol-concentration fields. Deposition velocities onto the inverted 45-cm-wafer and 15.2-cm-photomask in parallel airflows were predicted using the GDSM, for the particle size ranging from 0.003 to 1.5 μ m and the airflow velocity varying from 5 to 500 cm/s. The deposition velocity decreased with increasing particle size, with a steep declination especially for particles larger than approximately 0.1 μ m. From the qualitative comparison of the deposition velocities onto the inverted square flat surfaces, representing the photomasks with different orientations in the parallel flow, it was suggested to transport the EUVL photomask with its side facing the airflow rather than with its corner confronting the airflow, in order to minimize particulate contamination.     

Local Behavior of Deposition Velocity onto a Flat Plate in Horizontal Airflow under the Influence of Thermophoresis

In this study, the Gaussian Diffusion Sphere Model (GDSM) and the Statistical Lagrangian Particle Tracking (SLPT) approach were employed and adjusted to calculate the local deposition velocity onto a flat plate in horizontal airflow. The GDSM and the SLPT approach were validated by comparing the predicted local deposition velocities with those determined by solving the equation of convective diffusion. Both the GDSM and the SLPT approach were found to be accurate in calculating the local deposition velocity onto a flat plate in horizontal airflow. In addition, the GDSM was much more efficient than the SLPT approach in terms of the calculation time. Finally, a parametric study on the local deposition velocity onto a flat plate exposed to horizontal airflow was performed using the GDSM with the consideration of the effects of the gravity, convection, diffusion, and thermophoresis.

Copyright 2015 American Association for Aerosol Research     

Statistical Lagrangian particle tracking approach to investigate the effect of thermophoresis on particle deposition onto a face-up flat surface in a parallel airflow

Thermophoresis can affect the particulate contamination of wafers and photomasks. Thermophoretic effect on particle deposition velocity in the cleanroom environment has been intensively investigated for the free-standing wafer situated perpendicular to the top-down airflow, but it has been examined by few studies for the wafers or photomasks in the parallel airflow. In this study, the particle deposition velocity onto a face-up flat surface under the influence of thermophoresis was numerically investigated, when the face-up flat surface was exposed to the parallel airflow. Statistical Lagrangian Particle Tracking (SLPT) model with the aid of commercial codes, i.e. FLUENT and DPM, was employed. The SLPT model was validated by comparing the numerically obtained particle deposition velocities with the theoretically predicted data, with and without considering the thermophoresis, and found to produce correct results. The effects of temperature difference (between the face-up flat surface and the ambient air), parallel airflow velocity, and particle density on the particle deposition velocity onto the face-up flat surface in the parallel airflow were investigated using the SLPT model, when the temperature of the face-up flat surface was either higher or lower than the ambient temperature.     

Study of gas streaming in a deep fluidized bed containing Geldart's Group A particles

The nature of gas streaming in a deep fluidized bed containing Geldart's Group A powder has been investigated in a 30-cm ID cold flow unit. Pressure fluctuations have been measured at 8 locations from 4 to 150 cm above the gas distributor for bed depths and gas velocities ranging from 0.4 to 1.6 m and 0.04 to 0.20 m/s, respectively. In order to study the effect of fines content on gas streaming, two particle size distributions with Sauter mean diameters of 48 and 84 μm were tested for each bed depth and gas velocity. Two distributor plates with differing percentage open area were also tested for their influence on gas streaming. Analysis of pressure fluctuations in the time and frequency domains, in combination with visual observations show that streaming flow emerges gradually at bed depths greater than 1 m. Increased gas velocity and fines content act to delay the onset of streaming, but cannot completely eliminate it over the range of velocities examined. The two different distributor designs had no measurable effect on the streaming flow.     

Particle image velocimetry for characterizing the flow structure of oil–water flow in horizontal and slightly inclined pipes

The simultaneous flow of oil and water in pipelines is a common occurrence in the chemical and process industry. An experimental investigation of oil–water flow in horizontal and slightly inclined pipes is presented in this paper. The experiments are performed in a 15 m long stainless steel pipe section with internal diameter 56 mm at room temperature and atmospheric outlet pressure. Exxsol D60 oil (density 790 kg/m³ and viscosity 1.64 mPa s) and water (density 996 kg/m³ and viscosity 1.00 mPa s) are used as test fluids. The pipe inclination is changed in the range from 5° upward to 5° downward. The measurements are made for two different mixture velocities, 0.50 and 1.00 m/s at water cut 0.50. The cross-sectional distribution of phase fractions in oil–water flow is measured using a traversable single-beam gamma densitometer. The different flow regimes are determined based on visual observations. The particle image velocimetry (PIV) is utilized in order to obtain non-invasive instantaneous velocity measurements of the flow field. Based on the instantaneous local velocities, mean velocities, root mean squared velocities and Reynolds stresses are calculated. Stratified flow with mixing at the interface is observed at mixture velocity 0.50 m/s. Interfacial waves are observed in upwardly and downwardly inclined flows. At mixture velocity 1.00 m/s, interfacial mixing is increased and dual continuous flows are observed. The degree of mixing largely depends on the pipe inclination. In general, higher water hold-up values are observed for upwardly inclined flows compared to the horizontal and downwardly inclined flows. The slip between the phases increases as the pipe inclination increases. The maximum mean axial velocity is detected in the more viscous oil phase at equal volumetric flow rates of oil and water. In addition, measured mean velocity and turbulence profiles show a strong dependency with pipe inclination. The largest root mean squared velocities and absolute values of the Reynolds stresses are observed close to the pipe wall due to higher mean axial velocity gradients. A damping effect of Reynolds stress is observed around the oil–water interface due to stable density stratification. The presence of interfacial waves enhances turbulence fluctuations in inclined oil–water flows.     

Gas–liquid two-phase flow division at a micro-T-junction

The phase distribution of a gas–liquid flow through a 1 mm T junction has been studied. Gas superficial velocities of 2.5 and 4.9 m/s and liquid superficial velocities 0.09–0.42 m/s were investigated. Increasing the liquid superficial velocity was shown to decrease the liquid taken off at the side arm. Increasing the gas superficial velocity was found to affect the phase split by increasing the fractional liquid taken off. It was noticed that pressure has no influence in the phase split when it was increased from 0.13 to 0.18 MPa. From examination of data from different pipe sizes, it was seen that the 1 mm T-junction shared similar split characteristics as those observed for larger diameter junctions. Finally, the gas–liquid flow pattern through the junction was observed to be slug for a range of gas and liquid superficial velocities.     

Effect of HCl on electrophoretic deposition of yttria stabilized zirconia particles in organic solvents

This study investigates the electrophoretic deposition (EPD) of YSZ particles onto a metal substrate from an organic solvent, the conductivity of which was manipulated by HCl additions. The green density is dependent on electrical conductivity and deposition time. It was found that a uniform coating with up to 67% relative green density could be produced after 10 min deposition from a 20 g/L suspension with electrical conductivity in the range of 10–15 μS/cm (0.5–0.7 mM HCl concentration). Direct measurements of the green YSZ coating density were supported by micro-indentation data using a spherical indenter.     

Saturation drift velocity measurement for CVD diamond by combination of a charge distribution measurement and a TOF method using a UV pulsed laser

Drift velocities of charge carriers in polycrystalline diamonds were measured by a self-triggered time-of-flight (TOF) method with alpha particles based on a radiation measurement technique. Based on these measured results, a synthesis method for polycrystalline diamond was verified, and the electric properties of polycrystalline diamonds were improved; drift velocity was increased from 5 × 10² to 3 × 10⁴ cm/s. The mean free paths (MFPs) of capture of charge carriers in a CVD single crystal diamond was obtained by induced charge distribution measurements with alpha particles, and drift velocity was measured by another TOF method using a UV pulsed laser. MFPs of capture of electron and hole in a CVD single crystal diamond were determined to be 5.4 and 9.6 μm, respectively; the hole and electron drift velocities were 5 × 10⁵ cm/s and 3 × 10⁵ cm/s in an electric field of 24.4 kV/cm, respectively. For diamond, short transit times of several nanoseconds and short MFPs of capture in several micrometers were successfully obtained for the first time by combining of these methods.     

Simulation of airflow and aerosol deposition in the nasal cavity of a 5-year-old child

As a human grows from birth to adulthood, both airway anatomy and breathing conditions vary that alter the deposition rate and pattern of inhaled aerosols. However, deposition studies have typically focused on adult subjects, results of which may not be readily extrapolated to children. Furthermore, because of greater ventilation rate per body weight, children receive a greater dose than adults and therefore are more susceptible to respiratory risks. This study is to evaluate the transport and deposition of respiratory aerosols in a nasal-laryngeal airway model based on MRI head images of a 5-year-old boy. Differences between this child and adults in nasal physiology and aerosol filtering efficiency will be emphasized. A validated low Reynolds number (LRN) k?ω turbulence model was employed to simulate laminar, transitional, and fully turbulent flow regimes within the nasal airways. Particle trajectories and deposition in the spectrum of 0.5–32 μm were evaluated using a well-tested Lagrangian tracking approach for inhalation flow rates ranging from sedentary (3 L/min) to heavily active (30 L/min) conditions. Simulation results of the inhalation pressure drop and particle deposition rate provided a reasonable match with existing experimental results in nasal airway casts of children. Much higher breathing resistance was observed in the 5-year-old child compared to adults. Furthermore, deposition patterns were sensitive to inhalation flow rate under low activity conditions. An empirical correlation of child nasal filtering efficiency was proposed for micrometer particles based on a wide range of test conditions. Results of this study demonstrate that significant child–adult difference exists in inhaled aerosol depositions, which should be taken into account for risk assessment of airborne toxicants on infants and children.     

NUMERICAL PREDICTION OF THE PERFORMANCE OF A MANIFOLD SAMPLER WITH A CIRCULAR SLIT INLET IN TURBULENT FLOW

The performance of a bioaerosol manifold sampler with a circular slit inlet in a turbulent flow field was modeled using a 3-D numerical approach. The standard κ–ε turbulence model was used for simulating the mean turbulent flow, and the Lagrangian approach was used for predicting the particle trajectories. The ratios of wind velocities to sampler inlet velocities were from 0.5 to 3.5. Calculations were conducted for particle sizes of 2, 8, 15,and26 μm. The agreement between numerical and empirical sampling efficiencies was good. It was found that lower sampling efficiencies at high R values were associated with increased positive pitch of the velocity vectors generated at the inlet slit. Unbalanced sampling velocities between the upstream and downstream arcs were found only at high R values. At an inlet velocity of 0.8 m/s, sampling efficiencies for 15 μm particles decreased about 24% as R was increased from 0.5 to 3.5. A similar effect was observed at an inlet velocity of 0.4 m/s. Turbulence decreased sampling efficiency and was related to the sum of the magnitudes of the wind and sampling velocity vectors.     

Evaluation of protection schemes for extreme ultraviolet lithography (EUVL) masks against top–down aerosol flow

Extreme ultraviolet lithography (EUVL) is considered as the next generation lithography for 32-nm-node or smaller in semiconductor manufacturing. One of the challenges is to protect the EUVL masks against particle contamination, due to the unavailability of conventional pellicles. In this study, the EUVL mask protection schemes of Asbach et al. (2006. Technical note: Concepts for protection of EUVL masks from particle contamination. Journal of Nanoparticle Research, 8, 705–708), who proposed to mount the mask upside-down, have a cover plate with particle trap and apply phoretic forces, were evaluated against top–down aerosol at atmospheric pressure. Experimental evaluation was performed using 150 mm wafers as witness plates, and PSL particles ranging from 125 to 700 nm. For the numerical assessment of the protection schemes against particles between 10 and 3000 nm, a statistical method using a Lagrangian particle tracking simulation tool was employed to calculate the deposition velocity. It was shown that the critical surface could effectively be protected against top–down aerosol.     

Free-standing diamond wafers deposited by multi-cathode,direct-current,plasma-assisted chemical vapor deposition

Free-standing diamond wafers, 100 mm in diameter, have been deposited by the multi-cathode (seven-cathode) direct-current (DC) plasma-assisted chemical vapor deposition (PACVD) method. The input power was 17.5 kW and the pressure was 100 torr. The methane concentration in hydrogen was between 3.5% and 8% at a constant flow rate of 150 sccm. Intrinsic tensile stress was controlled by introducing thermal compressive stress with step-down control of the deposition temperature during diamond deposition. A higher growth rate of 10 μm h⁻¹ was obtained by raising the methane concentration to 8%, and the deposited diamond wafer showed good thermal conductivity of 12–14 W cm⁻¹ K⁻¹. Crack-free, homogeneous and flat diamond wafers with 100 mm diameter were obtainable.     

Power Ultrasound Mass Transfer Enhancement in Food Drying

Power ultrasound application could constitute a way to enhance food drying in order to improve not only mass transfer but also product quality, since it does not significantly heat the material. The main aim of this work was to assess the influence of power ultrasound on the mass transfer process during drying of different products, carrot, persimmon and lemon peel.Convective drying kinetics were carried out with ultrasound (US experiments 21.8 kHz, 75 W), or without ultrasound application (AIR experiments) at air velocities ranging between 0.5–12 m s⁻¹. Different geometries were used for each of the products: cubes in carrots (2 L = 8.5 mm), cylinders in persimmon (2 L = 30 mm and 2 R = 13 mm) and slabs in lemon peel (L = 10 mm). Drying kinetics were modelled by considering different diffusion models according to the geometry.The results show that air velocity and raw material characteristics play a role in convective drying kinetics assisted by power ultrasound. Power ultrasound increased effective moisture diffusivity at low air velocities for all the products. However, in the case of lemon peel, ultrasound also improved the drying rate at high air velocities. This behaviour may be explained by the disruption of the acoustic field at high air flow rates and the different level of intensity required due to the structure of the products. Therefore, the raw material constitutes an important variable to establish the influence of power ultrasound on convective drying.     

Film and slug behaviour in intermittent slug–annular microchannel flows

Whilst there are numerous experimental, theoretical and computational studies of Taylor flow in microchannels, the intermittent slug–annular regime has largely been neglected. In this paper time-resolved micro-PIV data are collected and used to study the flow characteristics of a gas–liquid system for flow regimes spanning Taylor to annular flow. The experimental work used a 1.73 mm diameter channel with water and nitrogen as the working fluids, for gas and liquid superficial velocity ranges of 0.35–8.65 m s^?1 (40<Re_G<1000) and 0.071–0.18 m s^?1 (120<Re_L<300), respectively. Time-averaged velocity profiles were obtained in the liquid film surrounding the gas bubbles (or the gas core in the pseudo-annular flow regime) and in the liquid slugs (which changed from regular slugs to annular rings as the gas superficial velocity was increased). These data showed that the velocity in the liquid film relaxed back to an equilibrium value following the passage of each liquid slug or annular ring. In contrast rather flat velocity profiles were observed in the liquid slug. Based on a simple representation of the flow structure, average gas holdups were estimated using independent experimental data obtained by the micro-PIV technique and by direct observation of the flow structure. A phenomenological model of intermittent slug flow, based on the representation of the flow structure as a train of slugs and bubbles moving over a liquid film, is used to interpret the experimental data. The modelling work highlights the different behaviour of the limiting cases of slug and annular flow, in terms of the gas–liquid interfacial shear and its influence on the pressure field.     

Transparent semiconductor zinc oxide thin films deposited on glass substrates by sol–gel process

Transparent semiconductor ZnO thin films were spin-coated onto alkali-free glass substrates by a sol–gel process. The influence of ZnO sols synthesized via different solvents (2-ME, EtOH or IPA) on the surface morphologies, microstructures, optical properties and resistivities of the obtained films were investigated. The as-coated films were annealed in ambient air at 500 °C for 1 h. X-ray diffraction results showed all polycrystalline ZnO thin films to have preferred orientation along the (0 0 2) plane. The surface morphologies, optical transmittances and resistivity values of the sol–gel derived ZnO thin films depended on the solvent used. The ZnO thin films synthesized with IPA as the solvent exhibited the highest average transmittance 92.2%, an RMS roughness of 4.52 nm and a resistivity of 1.5 × 10⁵ Ω cm.     

Removal of Cu(II) by biosorption onto coconut shell in fixed-bed column systems

Biosorption of Cu(II) onto coconut shell, an agricultural biomaterial, was studied in a fixed-bed column. The Cu(II) biosorption column had the best performance at 10 mg L^?1 inlet Cu(II) concentration, 10 mL min^?1 flow rate and 20 cm bed depth. The equilibrium uptake of Cu(II) amounted to 7.25 mg g^?1. The simulation of the breakthrough curve was successful with the BDST and Yoon–Nelson models, but the entire breakthrough curve was best predicted by the Clark model. The design of a fixed bed column for Cu(II) removal from wastewater by biosorption onto coconut shell can be done based on these models.     

Experimental measurements and computational modeling of aerosol deposition in the Carleton-Civic standardized human nasal cavity

Aerosol deposition in the novel, “Carleton-Civic” standardized geometry of the human nasal cavity was studied both numerically and experimentally. Inhalation flow rates varied from 30 to 90 L/min in the experiments, and aerosol droplets had diameters ranging from 1.71 to 9.14 μm (impaction parameters ranging from 123.3 to 2527.6 μm L/min). For the numerical simulations, both the RANS/EIM (Reynolds averaged Navier–Stokes equations for the gas phase and eddy-interaction random walk models for the particulate phase) and large eddy simulations were used. The mechanism of aerosol deposition in the standardized nasal cavity was dominated by inertial impaction. Deposition data from the standardized nasal cavity transected cited in vitro data based on individual subjects. The data also correlated very well with cited in vivo measurements but generally showed less aerosol deposition for a given value of the impaction parameter. Regional deposition characteristics within the nasal passages were also investigated both experimentally and numerically and new trends of regional deposition versus impaction parameter are discussed. These trends provide new insight into the general deposition behaviour of various sized aerosols within the human nasal cavity.     

Development of A-scan ultrasound technique for measuring local particle concentration in slurry flows

The effects of solid particle concentration on hydraulic performance and wear need to be considered during the design of slurry transport equipment used in the petroleum and mining industries. The acoustic properties of slurry flows such as velocity, backscatter, and attenuation as a function of volume fraction of solid particles are examined in this study. An ultrasound A-mode imaging method is developed to obtain particle concentration in a flow of soda lime glass particles (diameter of 195 μm) and water slurry in a 0.0254 m diameter pipe. Based on the acoustic properties of the slurry, a technique is developed to measure local solid particle concentrations. The technique is used to obtain concentration profiles in homogeneous (vertical flow) and non-homogeneous (horizontal flow) slurry flows with solid particle concentrations ranging from 1 to 10% by volume using a window size of 0.159 cm. The profiles show average concentration within each window vs. distance from the transducer face. For horizontal flow, profiles are obtained for average flow velocities of 2.0, 3.0, and 3.5 m/s. The algorithm developed utilizes the power spectrum and attenuation measurements obtained from the homogeneous loop as calibration data in order to obtain concentration profiles in other (i.e. non-homogenous) flow regimes. A computational study using FLUENT is performed and a comparison is made with the experimental results. Reasonable agreement between the experimental and computational results is observed. The ultrasound technique has proven to be useful in characterizing slurry flows containing concentrations too high to be investigated using optical techniques.     

Computational fluid dynamics simulations of submicrometer and micrometer particle deposition in the nasal passages of a Sprague-Dawley rat

Computational fluid dynamics (CFD) simulations were conducted in a model of the complete nasal passages of an adult male Sprague-Dawley rat to predict regional deposition patterns of inhaled particles in the size range of 1 nm to 10 μm. Steady-state inspiratory airflow rates of 185, 369, and 738 ml/min (equal to 50%, 100%, and 200% of the estimated minute volume during resting breathing) were simulated using Fluent?. The Lagrangian particle tracking method was used to calculate trajectories of individual particles that were passively released from the nostrils. Computational predictions of total nasal deposition compared well with experimental data from the literature when deposition fractions were plotted against the Stokes and Peclet numbers for micro- and nanoparticles, respectively. Regional deposition was assessed by computing deposition efficiency curves for major nasal epithelial cell types. For micrometer particles, maximum olfactory deposition was 27% and occurred at the lowest flow rate with a particle diameter of 7 μm. Maximum deposition on mucus-coated non-olfactory epithelium was 27% for 3.25 μm particles at the highest flow rate. For submicrometer particles, olfactory deposition reached a maximum of 20% with a particle size of 5 nm at the highest flow rate, whereas deposition on mucus-coated non-olfactory epithelium reached a peak of approximately 60% for 1–4 nm particles at all flow rates. These simulations show that regional particle deposition patterns are highly dependent on particle size and flow rate, indicating the importance of accurate quantification of deposition in the rat for extrapolation of results to humans.