Dynamic behavior of amplitude detection Kelvin force microscopy in ultrahigh vacuum

The acquisition rate of all scanning probe imaging techniques with feedback control is limited by the dynamic response of the control loops. Performance criteria are the control loop bandwidth and the output signal noise power spectral density. Depending on the acceptable noise level, it may be necessary to reduce the sampling frequency below the bandwidth of the control loop. In this work, the frequency response of a vacuum Kelvin force microscope with amplitude detection (AM-KFM) using a digital signal processing (DSP) controller is characterized and optimized. Then, the main noise source and its impact on the output signal is identified. A discussion follows on how the system design can be optimized with respect to output noise. Furthermore, the interaction between Kelvin and distance control loop is studied, confirming the beneficial effect of KFM on topography artefact reduction in the frequency domain. The experimental procedure described here can be generalized to other systems and allows to locate the performance limitations.     

碳纳米管原子力显微镜针尖的制作研究

研究在光学显微镜下，运用两个独立的三维工作台分别控制针尖和碳纳米管的位置，将碳纳米管吸附在传统的原子力显微镜针尖上。首先将碳纳米管粘附在导电的胶带上，然后用涂胶的针尖与其接触将碳纳米管粘附到针尖上，最后运用电蚀的方法优化碳纳米管针尖的长度，以达到高分辨率的要求。运用制作的碳纳米管针尖对硅表面的深槽进行成像，获得了传统针尖无法得到的信息。     

具有三维力反馈的原子力显微镜纳米操作系统

在基于原子力显微镜的纳米操作过程中，由于缺乏实时反馈信息，造成纳米操作效率低下且灵活性差，同时探针因受力过大而损坏。为此，本文通过对探针受力-悬臂变形进行建模，并根据实时检测到的悬臂变形信号、新的参数获取与校准方法，从而获取探针所受的实时三维纳米力。将此三力经比例放大后送人力／触觉设备进行感知，操作者就可以实时调节施加在探针上力的大小及探针的运动轨迹，使得操作的效率及灵活性明显提高，且可以避免探针因受力过大而造成损坏。纳米刻画和多壁碳纳米管的操作实验验证了系统的有效性。     

基于AFM的化学机械抛光磨粒模拟研究

当前的化学机械抛光(CMP)磨损模型中大多数都缺少微观试验数据的支持。为进步揭示CMP中纳米磨粒对材料表面的磨损机制,提出了采用原子力显微镜(AFM)来模拟CMP中的单个磨粒的试验方案,并验证该模拟试验方案的可行性。结果表明:采用AFM探针来模拟CMP过程中单个磨粒对芯片表面的磨损与相互作用的试验方案是完全可行的;可以通过AFM探针对芯片表面的相互作用与磨损,模拟得出单个磨粒对芯片表面的作用与磨损状况,并可以在此微观试验数据的基础上建立起新的CMP磨损模型。     

Nanotribological Studies of Chromium Thin Films

Systematic nanotribological studies of Cr thin films using nanoscratch and AFM techniques are presented. Constant and ramped loading scratches were made using a Nano Indenter II system at various loads (1mN, 2.5mN and 5mN). Extensive AFM studies of the scratch wear tracks have been performed after scratching. The dependence of the displacement, residual wear depth, percent elastic recovery, and friction coefficient on load in constant load and ramped load tests is compared. Under the same (maximum) load, constant load tests exhibit higher displacements, residual depths and friction coefficients but lower percent elastic recoveries. Detailed AFM observations of the wear tracks indicate that significant differences in lateral deformation accompany the observed displacement differences.     

Stereoscopic display of atomic force microscope images using anaglyph techniques

This paper describes the use of a standard stereo-pair image display method for presenting the three-dimensional relief information found in atomic force microscope (AFM) images. The method makes use of commercially available image processing software packages. The techniques are illustrated on AFM images of the cuticle structure of a human hair fibre.     

Electrical discharge grinding of polycrystalline diamond – Effect of wheel rotation

Electrical Discharge Grinding (EDG) is an advanced machining process that becomes popular in manufacturing of Polycrystalline Diamond (PCD) tools. This research investigated the effects of wheel rotation as well as debris flow direction on the quality of PCD tools based on a series of EDG experiments. Experimental results showed the debris that flowed toward the cutting edge could significantly affect the edge sharpness and symmetry of the tool, which were critical for the smaller edge apex angle. Evidence of spark concentration caused by the debris accumulation phenomenon were found through microscopic analysis on the eroded surfaces. This research also revealed the unexplained phenomenon associated with the undercut that normally formed beneath the PCD cutting edge after erosion. By examining PCD samples using scanning electron microscopy (SEM) and Raman spectroscopy, the formation of the heat-affected layer caused by the high-temperature erosion process in the EDG was analyzed. Results also proved that the surface finish of tungsten carbide (WC) and notch width of the PCD tools, particularly on the tungsten carbide WC/PCD interface, should not be taken as the index to measure PCD tool quality.     

Imaging DNA molecules on mica surface by atomic force microscopy in air and in liquid

DNA molecules immobilized on mica surface by various methods have been observed by atomic force microscopy both in air and in liquid. Divalent cations and 3-aminopropyltriethoxysilane (APTES) modified mica surface have been used to immobilize the DNA molecules. Optimal DNA and divalent cations concentration for AFM imaging are presented. Among the different methods of modifying mica surface with APTES, the water solution modifying method appears to get the best results. When using high DNA concentration for AFM imaging, DNA networks can be formed. A simple method to extend long DNA molecules is demonstrated. The optimal imaging conditions and AFM operating techniques are discussed. Different DNA immobilizing methods have been compared and evaluated.     

ELID超精密磨削钢结硬质合金及其表面质量分析

运用铁基结合剂金刚石砂轮与专用高频脉冲电源相配合,对钢结硬质合金（ＧＴ３５）进行在线电解修整（ＥＬＩＤ）精密磨削。分析了ＥＬＩＤ超精密镜面磨削异相非均质材料钢结硬质合金表面的磨削机理,并通过原子力显微镜对其表面进行了微观表面形貌的分析。     

Finishing effect of abrasive flow machining on micro slit fabricated by wire-EDM

This experimental research use the method of abrasive flow machining (AFM) to evaluate the characteristics of various levels of roughness and finishing of the complex shaped micro slits fabricated by wire electrical discharge machining (Wire-EDM). An investigative methodology based on the Taguchi experimental method for the micro slits of biomedicine was developed to determine the parameters of AFM, including abrasive particle size, concentration, extrusion pressure and machining time. The parameters that influenced the machining quality of the micro slits were also analyzed. Furthermore, in the shape precision of the micro slit fabricated by wire-EDM and subsequently fine-finished by AFM was also elucidated using a scanning electron microscope (SEM). The significant machining parameters and the optimal combinations of the machining parameters were identified by ANOVA (analysis of variation) and the S/N (-to-noise) ratio response graph. ANOVA was proposed to obtain the surface finishing and the shape precision in this study.     

Tribological Properties of Self-Assembled Monolayers and Their Substrates Under Various Humid Environments

Using friction force microscopy (FFM) under controlled environments, we have systematically investigated the humidity effect on the frictional properties of two important classes of self-assembled monolayers (SAMs), i.e., N-octadecyltrimethoxysilane (OTE, CH₃(CH₂)₁₇Si(OCH₃)₃) on SiO₂(OTE/SiO₂), and N-alkanethiols on Au(111), together with their respective substrates. Experimental results show that both OTE and alkylthiol SAMs can decrease the friction force between a Si₃N₄ atomic force microscope (AFM) tip and substrates. The nearly humidity-independent friction of the two kinds of SAMs indicates that these SAMs are ideal lubricants in applications of micro-electro-mechanical systems (MEMS) under different environments. The humidity dependence—as the humidity increases, the friction first increases and then decreases—of the two substrates, SiO₂ and Au(111), can be explained by the adsorption of water. The decrease in the friction at high humidity is attributed to the low viscosity in the multilayers of water, while the increase in the friction at low humidity can be explained by the high viscosity between the water monolayer and the surfaces (AFM tip and sample), possibly due to the confinement effects. The effect of modification of the AFM tip with alkanethiol molecules on the humidity dependence of Au(111) friction has also been investigated.