面向圆片级气密封装的表面活化直接键合技术

通过封装实验和性能检测,成功验证了表面活化直接键合技术应用于圆片级气密封装的可行性.实验中使用刻蚀出方形槽的硅圆片,通过化学表面活化方法.与基板硅圆片在室温下成功预键合,形成气密腔体;经过350℃、5 h的大气环境退火后强化了键合强度及气密性能.利用红外透射方法检测了键合后的硅圆片,其界面完整无明显空洞;键合界面横截面SEM图像显示键合界面均匀平整无显著缺陷.键合而成的气密腔体依次经过氦质谱仪和氟油检漏仪检测其气密性,平均漏率达到了1.175×10-8Pa·m3/s.     

基于Ka波段分布式MEMS移相器芯片微封装研究

本文提出一种适用于Ka波段分布式MEMS移相器的新型封装结构——具有垂直互连线的薄硅作为分布式MEMS移相器衬底，并用芯片微封装方法对移相器进行封装。采用CST模拟软件研究封装结构对移相器射频性能影响，模拟结构表明：当封装结构衬底厚度、垂直互连线半径和空腔高度分别为450μm、50μm和80μm时，Ka波段分布式MEMS移相器的插入损耗小于0．55dB，回波损耗优于12dB，相移量具有很好的线性关系，说明该新型封装结构非常适合RFMEMS器件低成本批量封装。     

Gasoline level sensor based on displacement sensor using fiber coupler

A simple and fire safe gasoline level sensor has been designed based on displacement sensor using fiber coupler. The sensing principle is to detect displacement of reflector, which is attached to membrane (reflector displacement device), due to the change of gasoline hydrostatic pressure. The displacement of reflector can be detected using fiber coupler from the change of optical power light reflected by the reflector. Three kinds of reflector displacement device used in this experiment are one-layer, two-layer, and three-layer membrane. The experimental results are 0–180 cm of dynamic range, 100–140 cm of linear range, 3.2 mV/cm of sensitivity, and 0.6 cm of resolution for reflector displacement device with one-layer membrane for emptying the tank process. The hysteresis data for emptying and filling the tank process yields the mean of difference 20% for one-layer membrane.