Single-frequency 1310-nm AlGaInAs-InP grating-outcoupled surface-emitting lasers

Single-frequency 1310-nm grating-outcoupled surface-emitting (GSE) semiconductor lasers with output slope efficiencies exceeding 0.1 mW/mA into multimode fibers, threshold currents below 22 mA, and >30-dB sidemode suppression ratios are reported. These GSE lasers consist of 500-/spl mu/m-long active ridges that excite one end of surface-emitting second-order outcoupling gratings with 200-/spl mu/m-long first-order distributed Bragg reflector gratings terminating the laser cavities at both ends. The grating outcouplers range from 10 to 50 /spl mu/m in length. These lasers have an open eye pattern for nonreturn-to-zero signals at 2.5 Gb/s into single-mode fibers. The full-width half-maximum far-field beam divergences range from 1.5/spl deg/ /spl times/ 8/spl deg/ to 5/spl deg/ /spl times/ 8/spl deg/.     

Electrically-pumped vertical-cavity lasers with Al/sub x/O/sub y/-GaAs reflectors

We have fabricated the first electrically-pumped vertical-cavity surface-emitting lasers (VCSELs) which use oxide-based distributed Bragg reflectors (DBRs) on both sides of the gain region. They require a third the epitaxial growth time of VCSELs with semiconductor DBRs. We obtain threshold currents as low as 160 /spl mu/A in VCSELs with an active area of 8 /spl mu/m/spl times/8 /spl mu/m using a two quantum well InGaAs-GaAs active region. By etching away mirror pairs from the top reflector, quantum efficiencies as high as 61% are attained, while still maintaining a low threshold current of 290 /spl mu/A.     

Uncooled high-temperature (130/spl deg/C) operation of InGaAs-GaAs multiple quantum-well lasers at 20 Gb/s

Short-haul fiber-optic communication systems require high-speed semiconductor lasers that can operate uncooled over a wide temperature range. In this letter, we describe high-speed short-cavity InGaAs-GaAs multiple-quantum-well lasers operating at 1.1-/spl mu/m wavelength. The Fabry-Perot lasers were fabricated in a triple-mesa geometry suitable for on-wafer probing. With 3/spl times/200 /spl mu/m/sup 2/ ridge-waveguide lasers, which showed the best compromise between high-temperature and high-speed performance, a 3-dB modulation bandwidth of 14.5 GHz at 130/spl deg/C was achieved. Uncooled 20-Gb/s operation of these lasers is presented over a wide-temperature range from 25/spl deg/C to 130/spl deg/C without automatic power control.     

Lasing characteristics of high-performance narrow-stripe InGaAs-GaAs quantum-well lasers confined by AlAs native oxide

High-performance narrow-stripe InGaAs-GaAs quantum-well lasers with integral buried AlAs native-oxide layers have been fabricated. AlAs native-oxide layers above and below waveguide region were employed for current and optical confinement to form narrow-stripe lasers. A low temperature (400/spl deg/C) anisotropic wet oxidation technique was used to selectively oxidize AlAs layers in the epitaxial structure. The devices demonstrated continuous wave threshold currents of 3.5 mA, external quantum efficiencies of 82%, and a characteristic temperature of 133 K for 1.8 /spl mu/m-wide aperture, 400 /spl mu/m-long devices. Threshold currents of 1.7 mA were obtained by applying HR/HR coatings.     

Low threshold current 1.3-/spl mu/m GaInNAs VCSELs grown by MOVPE

The structure of the conventional contact 1.3-/spl mu/m GaInNAs-GaAs vertical-cavity surface-emitting lasers (VCSELs) was optimized and low threshold current 1.3-/spl mu/m GaInNAs VCSELs grown by metal-organic vapor-phase epitaxy were reported. The idea is to optimize the active region, the doping profiles, and the pairs of p-distributed Bragg reflectors, and the detuning between the emission wavelength and the photoluminescence gain peak wavelength. The continuous-wave 1.0-mA threshold current was achieved for the single-mode VCSEL. For the multiple-mode VCSELs, the below 2-mA threshold currents at 5/spl deg/C-85/spl deg/C , the 1.13-mA threshold current at 55/spl deg/C, and 1.52-mA threshold current at 85/spl deg/C are the best results for 1.3-/spl mu/m GaInNAs VCSELs.     

Electrically pumped room temperature CW VCSELs with 2.3 /spl mu/m emission wavelength

Continuous wave (CW) operation at room temperature of electrically pumped InGaAlAs/InP vertical-cavity surface-emitting lasers (VCSELs) at emission wavelengths as high as 2.3 /spl mu/m is demonstrated for the first time. Devices with 15 /spl mu/m active region diameter show a maximum output power of 0.75 mW at 20/spl deg/C and a maximum CW operating temperature of 45/spl deg/C.     

Continuous-wave operation up to 36/spl deg/C of 1.3-/spl mu/m GaInAsP-InP vertical-cavity surface-emitting lasers

We introduced ion-beam assisted deposition in order to improve the quality of Al/sub 2/O/sub 3/ and SiO/sub 2/, which were used as part of the mirrors of 1.3-/spl mu/m GaInAsP-InP vertical-cavity surface-emitting lasers (VCSELs). The refractive index of Al/sub 2/O/sub 3/ was improved to 1.63 from 1.56 and the one of SiO/sub 2/ increased to 1.47 from 1.45. Low-threshold room-temperature continuous-wave (CW) operation of 1.3-/spl mu/m VCSEL with the improved mirrors was demonstrated. The threshold current was 2.4 mA at 20/spl deg/C. The CW operating temperature was raised to 36/spl deg/C, which is a record high temperature for 1.3-/spl mu/m VCSEL.     

Flip-chip bonded 0.85-/spl mu/m bottom-emitting vertical-cavity laser array on an AlGaAs substrate

We report high-performance 0.85-/spl mu/m bottom-emitting vertical-cavity surface-emitting lasers (VCSELs) on an AlGaAs substrate with 2.1 mA threshold current density 4.2 mW maximum output power, 11.7% power conversion efficiency and a maximum operating temperature of 130/spl deg/C. We also demonstrate a flip-chip bonded 0.85-/spl mu/m bottom-emitting VCSEL array, and confirm all pixels across the 8/spl times/8 VCSEL array operate at a f/sub 3/ dB bandwidth of 2.6 GHz at only 4.2 mA.     

1.5-mW single-mode operation of wafer-fused 1550-nm VCSELs

We demonstrate 1.5-/spl mu/m waveband wafer-fused InGaAlAs-InP-AlGaAs-GaAs vertical-cavity surface-emitting lasers (VCSELs) emitting high single-mode power of 1.5 mW at room temperature with sidemode suppression ratio of over 30 dB and a full-width at half-maximum far field angle of 9/spl deg/. These devices have thermal resistance value below 1.5 K/mW and are emitting 0.2 mW at 70/spl deg/C. VCSELs with a wavelength span of 40-nm emission are produced from the same active cavity material, which shows the potential of realizing multiple-wavelength VCSEL arrays.     

Efficient CW lasing and high-speed Modulation of 1.3-/spl mu/m AlGaInAs VCSELs with good high temperature lasing performance

The 1.31-/spl mu/m AlGaInAs vertical-cavity surface-emitting lasers achieved efficient single-mode (SM) continuous-wave lasing at temperatures up to 120/spl deg/C, with 2.0-mW output power and 31% slope efficiency, as well as multimode (MM) lasing with up to 9-mW output power and up to 39% slope efficiency. High-speed modulation at data rates up to 10 Gb/s and transmission through different lengths of SM and MM fiber are demonstrated.     

Low-threshold operation of 1.34-/spl mu/m GaInNAs VCSEL grown by MOVPE

Low-threshold operation was demonstrated for a 1.34-/spl mu/m vertical-cavity surface-emitting laser (VCSEL) with GaInNAs quantum wells (QWs) grown by metal-organic vapor-phase epitaxy. Optimizing the growth conditions and QW structure of the GaInNAs active layers resulted in edge-emitting lasers that oscillated with low threshold current densities of 0.87 kA/cm/sup 2/ at 1.34 /spl mu/m and 1.1 kA/cm/sup 2/ at 1.38 /spl mu/m, respectively. The VCSEL had a low threshold current of 2.8 mA and a lasing wavelength of 1.342 /spl mu/m at room temperature and operated up to 60/spl deg/C.     

High-performance 1.06-/spl mu/m selectively oxidized vertical-cavity surface-emitting lasers with InGaAs-GaAsP strain-compensated quantum wells

We present the first room-temperature continuous-wave operation of high-performance 1.06-/spl mu/m selectively oxidized vertical-cavity surface-emitting lasers (VCSEL's). The lasers contain strain-compensated InGaAs-GaAsP quantum wells (QW's) in the active region grown by metalorganic vapor phase epitaxy. The threshold current is 190 /spl mu/A for a 2.5/spl times/2.5 /spl mu/m/sup 2/ device, and the threshold voltage is as low as 1.255 V for a 6/spl times/6 /spl mu/m/sup 2/ device. Lasing at a wavelength as long as 1.1 /spl mu/m was also achieved. We discuss the wavelength limit for lasers using the strain-compensated QW's on GaAs substrates.     

All-epitaxial InAlGaAs-InP VCSELs in the 1.3-1.6-/spl mu/m wavelength range for CWDM band applications

All-epitaxial InAlGaAs-InP vertical-cavity surface-emitting lasers grown by metal-organic chemical vapor deposition were successfully demonstrated in the wavelength ranging from 1.3 to 1.6 /spl mu/m. The devices showed the high performances such as single-mode output power of higher than 1.1mW, sidemode suppression ratio of 37 dB, divergence angle of 9/spl deg/, and CW operation of temperature up to 80 /spl deg/C. We achieved the modulation bandwidth exceeding 2.5 Gb/s and power penalty free transmission over 30 km.     

Surface-emitting unstable-resonator lasers with integrated diffractive beam-forming elements

Grating-coupled surface-emitting semiconductor lasers have been integrated with focusing and spot array generating diffractive beam-forming elements. The lasers have an unstable resonator producing a 160-/spl mu/m-wide single spatial mode. The area of the outcoupler element is 160 /spl mu/m/spl times/240 /spl mu/m. For an outcoupler focusing at 500 /spl mu/m above the surface the spot size is 9 /spl mu/m/spl times/17 /spl mu/m The spot size is primarily limited by aberrations in the wavefront of the guided mode.     

90/spl deg/C continuous-wave operation of 1.83-/spl mu/m vertical-cavity surface-emitting lasers

Excellent lasing performance is demonstrated for a 1.83-/spl mu/m InGaAlAs-InP vertical-cavity surface-emitting laser (VCSEL) utilizing the buried tunnel junction technology. Threshold currents as low as 190 /spl mu/A at 20/spl deg/C and operating temperatures as high as 90/spl deg/C have been measured. These values are the best ones reported so far for long-wavelength VCSELs.     

Efficient Modulation of InP-based 1.3-/spl mu/m VCSELs with AsSb-based DBRs

We demonstrate efficient error-free 3.125-Gb/s modulation of InP-based 1.3-/spl mu/m vertical-cavity surface-emitting lasers with AsSb-based distributed Bragg reflectors up to 60/spl deg/C. These devices demonstrated high differential efficiencies [>60% at room temperature (RT)], which resulted in a required bias current for modulation of only 5.9 mA. The measured extinction ratios were greater than 8 dB up to 60/spl deg/C with a peak-to-peak drive voltage of only 800 mV. The 3-dB-down RT small-signal bandwidth was 4.4 GHz at a bias of 5.9 mA.     

High-speed Modulation of InGaAs: Sb-GaAs-GaAsP quantum-well vertical-cavity surface-emitting lasers with 1.27-/spl mu/m emission wavelength

1.27-/spl mu/m InGaAs: Sb-GaAs-GaAsP vertical-cavity surface-emitting lasers (VCSELs) were grown by metal-organic chemical vapor deposition and exhibited excellent performance and temperature stability. The threshold current changes from 1.8 to 1.1 mA and the slope efficiency falls less than /spl sim/35% as the temperature raised from room temperature to 70/spl deg/C. With a bias current of only 5 mA, the 3-dB modulation frequency response was measured to be 8.36 GHz, which is appropriate for 10-Gb/s operation. The maximal bandwidth is measured to be 10.7 GHz with modulation current efficiency factor (MCEF) of /spl sim/5.25 GHz/(mA)/sup 1/2/. These VCSELs also demonstrate high-speed modulation up to 10 Gb/s from 25/spl deg/C to 70/spl deg/C.     

Study on high-temperature performances of 1.3-/spl mu/m InGaAsP-InP strained multiquantum-well buried-heterostructure lasers

Stripe-width and cavity length dependencies of high-temperature performances of 1.3-/spl mu/m InGaAsP-InP well-designed buried-heterostructure strained multiquantum-well (MQW) lasers were investigated. The threshold currents as low as 4.5/10.5 mA and slope efficiencies as high as 0.48/0.42 mW/mA at 25/spl deg/C/85/spl deg/C were obtained in the MQW lasers with 1.5-/spl mu/m width, 250-/spl mu/m length, and 0.3/0.85 facet reflectivity. With temperature increasing from 25/spl deg/C to 85/spl deg/C, the MQW lasers exhibited lower output power degradation, the minimum value was 1.78 dB at an operation current of 45 mA. The MQW lasers were suitable for application in optical access networks.     

PCB-compatible optical interconnection using 45/spl deg/-ended connection rods and via-holed waveguides

In this paper, a new architecture for a chip-to-chip optical interconnection system is demonstrated that can be applied in a waveguide-embedded optical printed circuit board (PCB). The experiment used 45/spl deg/-ended optical connection rods as a medium to guide light paths perpendicularly between vertical-cavity surface-emitting lasers (VCSELs), or photodiodes (PDs) and a waveguide. A polymer film of multimode waveguides with cores of 100/spl times/65 /spl mu/m was sandwiched between conventional PCBs. Via holes were made with a diameter of about 140 /spl mu/m by CO/sub 2/-laser drilling through the PCB and the waveguide. Optical connection rods were made of a multimode silica fiber ribbon segment with a core diameter of 62.5 and 100 /spl mu/m. One end of the fiber segment was cut 45/spl deg/ and the other end 90/spl deg/ by a mechanical polishing method. These fiber rods were inserted into the via holes formed in the PCB, adjusting the insertion depth to locate the 45/spl deg/ end of rods near the waveguide cores. From this interconnection system, a total coupling efficiency of about -8 dB was achieved between VCSELs and PDs through connection rods and a 2.5 Gb/s /spl times/ 12-ch data link demonstrated through waveguides with a channel pitch of 250 /spl mu/m in the optical PCB.     

High-modal gain 1300-nm In(Ga)As-GaAs quantum-dot lasers

A semiconductor laser containing seven InAs-InGaAs stacked quantum-dot (QD) layers was grown by molecular beam epitaxy. Shallow mesa ridge-waveguide lasers with stripe width of 120 /spl mu/m were fabricated and tested. A high modal gain of 41 cm/sup -1/ was obtained at room temperature corresponding to a modal gain of /spl sim/6 cm/sup -1/ per QD layer, which is very promising to enable the realization of 1.3-/spl mu/m ultrashort cavity devices such as vertical-cavity surface-emitting lasers. Ground state laser action was achieved for a 360-/spl mu/m-cavity length with as-cleaved facets. The transparency current density per QD layer and internal quantum efficiency were 13 A/cm/sup 2/ and 67%, respectively.