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1.
Hydrogen sensor based on graphene nano-composite with Pd-Ag nanoparticles was fabricated by MEMS process. Structural and morphological properties of the sensing film were studied by an energy dispersive spectroscopy (EDS) and field emission scanning electron microscopy (FESEM), respectively. The H2 sensing properties of as-formed sensor were investigated by measuring the resistance changes at different H2 concentrations. The maximum gas response was 16.2% at 1000 ppm of H2 gas. The gas sensitivity of the as-formed H2 sensor showed linear behavior with the hydrogen concentration. Experimental results showed that the coupling of graphene with Pd/Ag alloy enhanced significantly hydrogen sensing performance.  相似文献   

2.
High-quality p-type semiconducting Co3O4 with mixed morphology of nanoparticles/nanorods are synthesized using a hydrothermal route for high response and selective hydrogen sulphide (H2S) sensor application. XRD and Raman studies revealed the crystal structure and molecular bonding for obtained Co3O4, respectively. The nanoparticles/nanorods-like structures were confirmed for Co3O4 using FESEM and TEM analysis. The EDS and XPS spectra analysis were carried out for elemental composition and chemical atomic states of Co3O4. The Co3O4 sensor is investigated for gas sensing properties in dynamic conditions. The sensor exhibited the highest selectivity towards H2S among various hydrogen-contained gases at 225 °C. The sensor revealed a high response of 357% and 44% for 100 and 10 ppm H2S gas concentrations, respectively. The Co3O4 sensor exhibited a systematic dynamic resistance response for 100–10 ppm range H2S gas. The excellent dynamic resistance repeatability of the sensor was shown towards 25 ppm H2S gas. The response of Co3O4 sensor was investigated at different operating temperatures and H2S concentrations. The sensor stability and H2S sensing mechanism for the Co3O4 sensor have been reported. Highly uniform and mixed nanostructures of Co3O4 can be the potential sensor material for real-time high-performance H2S sensor application.  相似文献   

3.
A highly sensitive H2 gas sensor was fabricated using a Micro Electromechanical Systems (MEMS) procedure having an embedded micro-heater. The palladium-silver (Pd/Ag having stoichiometric ratios 77:23) thin film was deposited by the RF/DC magnetron sputtering and used as the hydrogen sensing layer designed as a zig-zag pattern. Morphological and structural properties of the Pd/Ag thin film was studied by Field emission scanning electron microscope (FESEM), Atomic force microscopy (AFM) and Energy Dispersive Analysis of X-rays respectively. The working temperature of the micro heater showed a linear relation with variations of the heater voltage. The electro thermal properties of the H2 sensor were studied by finite element method (FEM). The sensing properties of the fabricated H2 sensor as the change of electrical resistance were studied with respect to hydrogen concentration and temperature. Experimental results showed high sensor response and response time after application of the heater voltage. The sensing properties of the alloyed Pd/Ag thin film were more improved than those of pure palladium. The maximum sensor response (Rs) of the fabricated H2 sensor was 14.26% for 1000 ppm H2. The sensor response of the fabricated H2 sensor showed linear behavior with the heater voltage (operating temperature) and positively corresponded with the hydrogen concentration.  相似文献   

4.
Highly sensitive hydrogen gas sensors were fabricated using a microelectromechanical system (MEMS) and anodic aluminum oxides (AAOs) process. MEMS based gas sensor platform was designed with the multi-layer type for Pd film morphology manipulations. The operating temperature of the micro heater was positively correlated with the heater. Hydrogen sensing response of the sensor showed a good positive linearity as the gas sensitivity increased with increasing hydrogen concentration. The hydrogen sensitivity (defined as ratio of sensor resistances in air and after the hydrogen gas injection) was 0.638% at hydrogen concentration of 2000 ppm. The H2 sensitivity was very dependent on the thickness and morphology of Pd-nanosized film. The gas sensitivity and response properties showed different behaviors when palladium film was deposited on the anodic aluminum oxide (AAO) layer. The hydrogen sensitivity for the Pd on AAO layer was about 0.783% at the hydrogen concentration of 2000 ppm. The sensitivity of the Pd-AAO layer improved with respect to the pure Pd thin film due to nanoporous nature of AAO.  相似文献   

5.
Hydrogen gas (H2) detection plays an important role in many fields. With the continuous demand and development of clean energy, it is urgent to study new hydrogen gas sensors for stable and accurate H2 detection. The purpose of this research is to develop a new H2 sensor based on the resonant photoacoustic (PA) cell as the sensing element. The sensitivity of the resonant PA cell to the resonant frequency is sufficiently utilized. The optimization of its resonance frequency was investigated minutely for the H2 sensor. Detection utilizes resonance frequency differences between H2 and air as a sensing mechanism. The resonance frequency tracking is adopted and implemented by the field-programmable gate array (FPGA) device. The minimum detection limit of about 74 ppm for H2 has been demonstrated by preliminary experiments. The response time of the sensor is about 5 s. This sensor detects concentrations ranging from 74 ppm to 100% in 1 atm. The preliminary test result shows that the H2 sensor based on this structure has a larger application perspective.  相似文献   

6.
In this article, a single step, chemically synthesized dumbbell-shaped ZnO microcrystal has been utilized to fabricate UV photodetectors and highly selective H2 gas sensors. The structural, morphological, chemical states and optical properties were investigated via using various characterization tools. The dumbbell-shaped morphology acquires 1.2–1.4 μm length and diameters of 300–400 nm respectively. The temperature-dependent photodetection and gas sensing characteristics has been studied in the temperature range 298.15–433.15 K respectively. The maximum relative change in photoresponse and gas sensor response has been found at 358.15 K. The rise time and fall time have been reduced from ~2.4 sec to ~1.0 sec and ~3.1 sec–~2.2 sec respectively in the applied temperature range. Such behavior is attributed to the increasing desorption rate with a higher operating temperature. The maximum sensor response towards H2 was found to be ~20% for 100 ppm concentration at an operating temperature of 358.15 K.  相似文献   

7.
In this work, we investigated the properties of resistivity type hydrogen (H2) sensor for monitoring in H2 gas. The H2 sensor was made of Pd nanocube (NCs) and TiO2 nanofiber (NFs) composites. The Pd NCs was synthesized by seed-mediated growth and TiO2 nanofiber was synthesized via electrospinning method. The two nanomaterials are then converted into nanocomposites by ultrasonication process. Pd NCs-TiO2 NFs composite was characterized by scanning electron microscope (SEM) and high resolution transmission electron microscope (HRTEM). The H2 sensing properties including the response/recovery time, the response value and linearity of the synthesized samples were investigated toward to various H2 concentrations (0.6, 0.8 and 1%). The response of H2 sensor is S = 40.8% and the response/recovery time are 25/1 s with 0.6% at working temperature of 150 °C. Moreover, the H2 sensor has excellent cross-selectivity for H2 compared to ethanol, nitrogen dioxide and isopropyl alcohol.  相似文献   

8.
The effects of Nafion® film thickness and charges passed for the preparation of Pt and nano-structured polyaniline (nsPANi) on the sensing properties of a planar solid-state amperometric hydrogen gas sensor are investigated. The surface morphology, Pt loading and electroactive surface area (ESA) are analyzed by FESEM, inductively coupled plasma (ICP) and cyclic voltammetry (CV), respectively. The specific sensitivity of the hydrogen gas sensor can be effectively promoted by decreasing the thickness of the Nafion® film and the charge passed for the electrodeposition of Pt and PANi (from 30 to 10 mC), respectively. The very low Pt loading of the sensing composite electrode is due to the use of the nanofibrous PANi as support, which remarkably promotes Pt utilization. The specific sensitivity and the response time of the hydrogen gas sensor based on the Nafion® (5.7 μm)/Pt/nsPANi/Au/Al2O3 electrode with a Pt loading of 1.87 μg are found to be 338.50 μA ppm?1 g?1 and 100–250 s, respectively, for measuring 10–10,000 ppm H2.  相似文献   

9.
The development and application of a hydrogen dual sensor (HDS) for the application in the fuel cell (FC) field, is reported. The dual sensing device is based on a ceramic platform head with a semiconducting metal oxide layer (MOx) printed on Pt interdigitated contacts on one side and a Pt serpentine resistance on the back side. MOx layer acts as a conductometric (resistive) gas sensor, allowing to detect low H2 concentrations in air with high sensitivity and fast response, making it suitable as a leak hydrogen sensor. The proposed Co-doped SnO2 layer shows high sensitivity to hydrogen (R0/R = 90, for 2000 ppm of H2) at 250 °C in air, and with fast response (<3 s). Pt resistance serves as a thermal conductivity sensor, and can used to monitor the whole range of hydrogen concentration (0–100%) in the fuel cell feed line with short response-recovery times, lower than 13 s and 14 s, respectively. The effect of the main functional parameters on the sensor response have been evaluated by bench tests. The results demonstrate that the dual sensor, in spite of its simplicity and cheapness, is promising for application in safety and efficiency control systems for FC power source.  相似文献   

10.
Synthesis of low cost, scalable, robust, and multifunctional nanomaterials for gas sensing application has been received increasing interest in recent years. Herein, we introduce the urea mediated synthesis of Ni(OH)2 nanowires and their conversion into NiO nanostructure for hydrogen gas-sensing application. The Ni(OH)2 nanowires were synthesized by a facile hydrothermal method, where the urea concentration was adjusted to get desired nanowire morphology. Conversion of Ni(OH)2 nanowires into single phase NiO was done by heat treatment of the as-synthesized product at temperature of 500 °C for 2 h. The morphology, crystal structure, crystallinity, and phase transformation of the products were examined by SEM, HRTEM, XRD, and XPS. Gas sensing properties were measured to various H2 concentrations ranging from 50 ppm to 1000 ppm at different temperatures. Results show that the synthesized NiO nanostructure can be used to detect H2 gas at the low concentrations ranging from 50 ppm to 1000 ppm. The sensor also showed good selectivity to CO, NH3 and CO2 gases.  相似文献   

11.
The plasma spray technique was well proven in producing metal oxide based gas sensors in the last two decades using different powder feedstocks. However, limited research was made to fabricate hydrogen gas sensor from tin oxide layer coated over tungsten oxide layer. This paper attempts to interpret the hydrogen gas sensing performances of plasma sprayed coating derived by depositing tin oxide layer over tungsten oxide (SnO2/WO3) layer. Plasma sprayed SnO2/WO3 sensor showed maximum response of 90% at 150 °C in contrast to stand-alone WO3 (89% at 350 °C) and stand-alone SnO2 (89% at 250 °C). The lower operating temperature of SnO2/WO3 sensor without compromising gas response was attributed to the WO3–SnO2 hetero-junction. SnO2/WO3 sensor showed selective sensing towards hydrogen with respect to carbon monoxide and methane gases. This sensor also possessed repeatable characteristics after 39 days from the initial measurement. In a nut-shell, plasma spayed SnO2/WO3 sensor showed stability of base resistance, repeatability after successive response and recovery cycles, selective sensing towards 500 ppm H2 with significant magnitude of gas response of 90%, response time of 35 s and recovery time of 269 s at a temperature of 150 °C.  相似文献   

12.
Hydrogen gas sensors were fabricated using mesoporous In2O3 synthesized using hydrothermal reaction and calcination processes. Their best performance for the hydrogen detection was found at a working temperature of 260 °C with a high response of 18.0 toward 500 ppm hydrogen, fast response/recovery times (e.g. 1.7 s/1.5 s for 500 ppm hydrogen), and a low detection limit down to 10 ppb. Using air as the carrier gas, the mesoporous In2O3 sensors exhibited good reversibility and repeatability towards hydrogen gas. They also showed a good selectivity for hydrogen compared to other commonly investigated gases including NH3, CO, ethyl alcohol, ethyl acetate, styrene, CH2Cl2 and formaldehyde. In addition, the sensors showed good long-term stability. The good sensing performance of these hydrogen sensors is attributed to the formation of mesoporous structures, large specific surface areas and numerous chemisorbed oxygen ions on the surfaces of the mesoporous In2O3.  相似文献   

13.
Large-scale synthesis of GaN nanowires was grown on c-sapphire substrate by chemical vapor deposition technique. X-ray diffraction, field emission scanning electron microscopy, μ-Raman and μ-photoluminescence analyses reveal that GaN nanowires crystallize within a hexagonal wurtzite-type structure with a considerably high yield, high aspect ratio of GaN NWs having an average diameter and length of 80 nm and up to several microns, respectively. A metal–semiconductor–metal (MSM) gas sensor using GaN nanowires was fabricated and hydrogen (H2)-sensing performances were examined over broad range of concentrations (7–1000 ppm) and at various operating temperatures (25,100, 150 °C). The NWs demonstrated high sensitivity up to 255% upon exposure to 1000 ppm of H2 gas at room temperature at a low power consumption of 60 μW. Additionally, at room temperature, the sensor exhibited a significant sensitivity of 83% when exposed to a very low H2 gas concentration of 34 ppm then becomes 15% at ultra low level of 7 ppm. The sensing measurements of NWs based sensor for H2 gas in the temperatures range of 25–150 °C were repeatable and reversible over a period of time of 50 min. The sensor exhibited free hysteresis phenomena after exposed to various H2 concentrations at various temperatures. The high performance of the fabricated sensor was attributed mainly to the large surface-to-volume ratio as well as the high crystallinity of the synthesized GaN NWs.  相似文献   

14.
A novel method for fabrication of a thermochemical hydrogen (TCH) gas sensor composed of platinum (Pt)-decorated graphene sheets and a thermoelectric (TE) polymer nanocomposite was investigated. The hydrogen sensing characterization for the device included gas response, response time (T90), recovery time (D10), and reliability testing, which were systematically conducted at room temperature with a relative humidity of 55%. Here, the Pt-decorated graphene sheets act as both an effective hydrogen oxidation surface and a heat-transfer TE polymer nanocomposite having low thermal conductivity. This property plays an important role in generating output voltage signal with a temperature difference between the top and bottom surfaces of the nanocomposite. As a result, our TCH gas sensor can detect the range of hydrogen from 100 ppm to percentage level with good linearity. The best response and recovery time revealed for the optimized TCH gas sensor were 23 s and 17 s under 1000 ppm H2/air, respectively. This type of sensor can provide an important component for fabricating thermoelectric-based gas sensors with favorable gas sensing performance.  相似文献   

15.
It is still a challenging task to achieve the rapid detection of hydrogen (H2) with the rapid development of hydrogen energy sector. In this work, the H2 sensing capabilities of pristine and Pd-modified SnO2 nanoparticles with the size of ~7 nm were systematically evaluated. The SnO2 nanoparticles were synthesized via hydrothermal method and Pd modification was performed using impregnation route. Pd modification remarkably upgraded the H2 sensing performances compared with the pristine SnO2 gas sensor. The working temperature of SnO2 decreased from 300 °C to 125 °C after Pd loading. Among the prepared Pd/SnO2 gas sensors, 0.50 at.% Pd/SnO2 sensor exhibited the highest response magnitude of 254 toward 500 ppm H2 and rapid response/recovery time of 1/22 s at 125 °C. The enhanced H2 sensing capabilities by Pd modification may be related to the catalytic effect and the resistance modulation.  相似文献   

16.
The film-based gas sensor owning high compatibility with semiconductor device fabrication, plays an important role in the miniaturization and integration of the devices. Here, simple metal organic decomposition method and calcining procedure were used to prepare dense WO3 thin film with PdO nanoparticles being homogeneously dispersed. After painting the silver paste on its surface as electrodes, the H2 gas sensor was fabricated. At the optimal operating temperature of 160 °C, with response values (Ra/Rg) of 1.2 & 45.1 and response time of 38 s & 4 s, towards 500 ppb and 100 ppm H2, respectively, the sensor presents high sensitivity and low detection limit together. It is rare to report the H2 gas sensor based on dense semiconductor film with such low detection limit. Towards 500 ppb and 100 ppm H2, it still shows the same response values more than half a year later, which proves its stability. A good linear behaviour between the response and relative humidity is observed too. The chief cause of the better performance of the sensor may be the homogeneous and optimal distribution of the p-type PdO nanoparticles in n-type WO3 film, which is the character of this structure. In addition, the repeatability of the preparing process is very well too. All the better performances suggest that the H2 sensor based on this structure has a huge potential in practical application.  相似文献   

17.
The micro-electro-mechanical system (MEMS)-based field effect transistor (FET) sensor for hydrogen detection was fabricated by modifying the gate electrode with boron nitride nanotubes (BNNTs) decorated Pd-ternary alloy (Pd63·2Ni34·3Co2.5) as a hydrogen sensing layer Electro-thermal properties of the micro-heater embedded under sensor membrane were analyzed by a finite element method (FEM) simulation. The structural and morphological properties of the gate electrode were studied by Raman spectroscopy, X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), and field emission scanning electron microscopy (FESEM). A variation in gate potential is observed due to the H2 atmosphere that leads to the variation in the depletion region, therefore, changing the current in the channel (BNNTs decorated Pd-ternary alloy). The BNNTs-decorated Pd ternary alloy displayed high sensing response, fast response and recovery time for H2 gas, low power consumption, long-term stability, and wide detection range from 1 to 5000 ppm H2. The drain current of the H2 FET sensor varied significantly at hydrogen gas exposure and increased with H2 concentration. As proposed H2 FET sensor can be utilized to the H2 leak detection system for safe applications.  相似文献   

18.
Uniform-sized orthorhombic MoO3 nanoribbons were synthesized by a simple hydrothermal method at 240 °C. The nanoribbons grew along the [001] orientation, with average length, width and thickness of approximately 20 μm, 270 nm and 90 nm, respectively. The obtained nanoribbons were further annealed in a hydrogen atmosphere at different temperatures to modify their surface states. The treatment of the nanoribbons at 300 °C significantly elevated the concentration of non-stoichiometric Mo5+ to 24.7%, much larger than the original concentration (∼14.8%). A positive relationship was found between the non-stoichiometric Mo5+, chemisorbed oxygen ion and sensor response. The sensor based on the MoO3 nanoribbons treated at 300 °C exhibited a faster response time of approximately 10.9 s, and a higher sensor response of 17.3 towards 1000 ppm H2, compared with the results of original tests (∼21 s and ∼5.7, respectively), indicating the significantly improved gas sensing performance of the treated MoO3. Meanwhile, the sensor also exhibited excellent repeatability and selectivity toward hydrogen gas. The enhancement of the hydrogen gas sensing performance of treated MoO3 nanoribbons was attributed to the more effective adjustment of the width of the depletion region on the nanoribbon surface and the height of the potential barrier at the junctions, induced by the interaction between hydrogen molecules and higher-concentration oxygen ions. Our research implied that the gas sensing performance of nanostructured metal oxides could be successfully enhanced through annealing in the reducing gas.  相似文献   

19.
In this study, a triple system for a hydrogen gas sensor was fabricated using graphene oxide, palladium nanoparticles, and porous silicon as a substrate. The fabricated sample was investigated by energy dispersive X-ray spectroscopy, field emission scanning electron microscopy, and Raman spectroscopy. Field emission scanning electron microscopy images displayed a relatively uniform distribution of Palladium nanoparticles over porous silicon. In addition, it was observed that the graphene oxide nanosheets accumulated over the Palladium nanoparticles. Hydrogen-sensing measurements demonstrated that the fabricated system can even detect hydrogen at 200 ppm and 15 °C. The formation of palladium hydride was the main mechanism for detection. In fact, this structure caused a change in resistance through the creation of new electron pathways. Furthermore, the H2 concentration showed a linear function to the reciprocal of the response time; this suggests that the sensing kinetics of the sample depends on the atomization of hydrogen molecules, which occurs via Pd nanoparticles. Moreover, the fabricated sample displayed significant selectivity for hydrogen gas compared to other examined gases.  相似文献   

20.
In this study, NiO and WO3 oxide semiconductors were fabricated on glass substrates by RF Magnetron Sputtering technique. Structural and optical characterizations of the semiconductors were performed using XRD, SEM, and optical absorption measurements. NiO and WO3 thin films were occasionally coated with palladium. In order to investigate the optical response of these semiconductors under hydrogen gas exposure, an optical gas sensor test system was installed and programmed. In both of the coated and uncoated cases, optical absorption changes due to hydrogen gas exposure on the surface were investigated. It was observed that these changes occur between 450 and 850 nm wave lengths range. The absorption in the NiO semiconductor was reduced between these wave lengths, while the absorption was increased in the WO3 semiconductor. In the uncoated state, only NiO gave an optical response to hydrogen gas. While the palladium coated NiO (Pd/NiO) sensor had the best response and recovery times of respectively 70 s and 206 s for 2% fraction of H2 gas at 300 °C constant temperature, the Pd/WO3 sensor gave the best response time of 340 s. Palladium coating resulted in approximately 150% increase in the responses of the NiO sensors at higher H2 concentration. The lower limit of H2 sensing of the Pd/NiO sensors at 300 °C was at the H2 fraction of 0.05%, while for Pd/WO3 sensors this value was 0.025%.  相似文献   

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