双盘式渐开线测量仪测点位置调整方式

分析了双盘式渐开线测量仪中测点位置偏差对渐开线齿形测量的影响,探讨了高精度调整测点位置的两种方法:试验调整法与误差补偿调整法。试验调整法是根据测点偏离导轨平面测量渐开线齿形时,测量结果中齿形角小于实际值的原理,调整测头处于不同位置并测量渐开线齿形,齿形角最大的测量曲线对应的测点位置即为最佳位置。误差补偿调整法是在测点处于高于导轨平面的两个位置时,分别测量同一渐开线齿形,通过对测点偏移量逐次试值,补偿两次测量结果,使得测量结果中齿形偏差相同,获得测头偏移量。分析得出,上述两种方法调整测头位置的极限偏差分别为±0.010 mm和±0.015 mm,均可满足1级(GB/T10 095.1-2 001)渐开线齿形的测量要求。     

提高打印机速度及图形打印质量的关键问题研究

研究提高针式打印机打印速度及图形打印质量的关键技术.通过对打印机工作机理的分析,确定了打印机出针频率与打印头运行速度之间的关系.按照这一关系,同时提高打印头的运动速度和出针频率,并恰当控制打印头每行的初始出针时间,能有效提高打印速度及图形打印质量.     

The influence of stylus flight on change of surface topography parameters

Theoretical and experimental work on stylus flight is described. The paper describes the development of a simulation model for assessing the magnitude of surface topography distortion by stylus flight. Experiments on the surfaces support the theoretical model, which predicts stylus flight. The measurements of different surface topographies (including surfaces after grinding, turning, honing, milling) were done using Talyscan 150 measuring instrument with four traversing speeds (0.5, 1, 2 and 3 mm/s). The results of theoretical considerations and experiments were compared. The effect of stylus flight on surface topography parameters of measured surfaces basing on experimental investigation was assessed. The tendency was found that slope decreased, decrease of amplitude parameters and increase of horizontal parameters took place, but these effects were different for various surface types. The simulation procedure assured good accuracy of surface topography parameters changes.Based on theoretical investigation, the effect of stylus flight and stylus tip radius on parameters of computer-generated profiles was predicted. The choice of traversing speed to different types of surfaces was done. The parameters of biggest changes caused by error in measurement due to stylus kinematics were selected.     

Measurements of stylus radii

In stylus measurements of surface texture the measured results for roughness depend on the stylus radius. Therefore it is important to determine the stylus radius. Since stylus tips are not perfectly spherical, the local radius of curvature varies significantly over the surface which makes the determination of an effective radius difficult. Both the techniques used to generate stylus profiles and the subsequent algorithms used to derive an effective radius are discussed. Comparisons are made between three techniques: sharp-edge traces, optical microscopy and scanning electron microscopy. Several algorithms, including that prescribed by the American National Standard ANSI B46-1, are discussed. It is concluded that the radius scale method is accurate, unambiguous and easy to use for routine measurements in the laboratory.     

Quantitative characterization of abrasive surfaces using a new profile measuring system

An on-line computer-controlled profilometer is described for quantitative characterization of extremely rough surfaces such as grinding wheels and coated abrasives. Conventional profilometers offer difficulty in the characterization of such surfaces because of the tendency of the stylus to become stuck in the crevices. In this present system, the stylus oscillates while the surface below moves incrementally so that the surface is stationary when contacted by the stylus. Both stylus and wheel motion are controlled by a digital computer. Measurements of surface elevation are input to the computer for digital processing and various surface characteristics are computed. The use of the system is illustrated by showing the effects of grit size on coated abrasive topography.     

Error in measurement due to stylus kinematics

A study of the error in measurement due to the kinematics of the stylus of the measuring instrument is presented. A method of determining the point of separation of the stylus from the measured surface and the path of the stylus after separation is established. Stylus spring stiffness to prevent separation of the stylus and to attain a minimum measuring force is also established.     

压电微音叉扫描探针显微镜测头研究

压电微音叉具有良好的谐振特性，并易于实现其振动的检测。利用这些特性，与钨探针结合，构成了一种新型的表面轮廓扫描测头。该新型测头与X-Y压电工作台结合，采用与TM-AFM相同的工作原理，构成了扫描探针显微镜。介绍了压电微音叉扫描测头的构成、工作原理及主要特性，给出了所构成的扫描探针显微镜测量系统。通过实验及其结果，证明了新型测头具有高垂直分辨率、低破坏力等优点。除此之外，由于采用了有效长度大的钨探针，使大台阶微观表面的测量成为可能。     

Assessment of surface finish on bulk scattering materials: A comparison between optical laser stylus and mechanical stylus profilometers

The accuracy of autofocusing laser stylus measurement systems based on the compact disk pick-up technique has been discussed in recent years, in particular for surface roughness measurement in the submicron-micron range. In this article we present a thorough comparison between an optical laser stylus measurement system and a Talystep mechanical stylus profilometer. Sixteen surfaces having root mean square roughnesses from 0.002 μm to 3 μm for cut-off lengths <0.8 mm have been used in the study. Both bulk scattering (paper, white ceramic) and surface scattering (metal sheet) types of samples were included. Our study shows that the laser stylus exaggerates the surface profile, in particular on surfaces having laterally small but steep local slopes. For the paper surfaces the laser stylus data were on average off by a factor of two for a cut-off length of 0.68 mm.     

基于聚偏氟乙烯（PVDF）薄膜的新型SPM测头结构及性能研究

为了对柔软易损坏材料以及具有大台阶特征的表面实现高精度非破坏性测量,研制了一种采用PVDF薄膜和压电驱动器（PZT-actuator）结合钨探针构成的新型SPM测头。介绍了测头的构成和工作原理,并通过一系列相关实验,确定了测头的相关参数和性能（如薄膜的尺寸参数、所构成振动梁的品质因素及弹性常数等）,初步证实了该测头可以满足上述测量要求。     

A novel stylus profiler without nonlinearity and parasitic motion for FPD inspection system

There are increasing needs to inspect micro-pattern of flat panel display (FPD) device such as PDP and LCD. The inspection system should be able to measure over large size mother glass with high productivity and accuracy. Stylus profilers are adopted as an inspection system. To scan over large and heavy FPD device specimen, a “tip-scanning” head for stylus profiler is required. A simple method to realize a tip-scanning system is to miniaturize the whole scanning unit. In this study, a novel stylus profiler is proposed as a tip-scanning stylus profiler. The novel stylus profiler has leaf spring instead of conventional lever and pivot. To measure position of stylus an optical senor is used. Linear variable differential transformer is applied to feed-back scanning stage displacement. The stage is actuated by a voice coil motor (VCM). Target performances of the stylus profiler head are in the stroke over 20 μm with high accuracy. Specifications of xy-scanning stage are over 250 μm×250 μm and high bandwidth over 20 Hz. The magnetic and elastic characteristics of the mechanism are designed based on finite element (FE) analysis. After fabrication of the head and stage, they are integrated. Current amplifier and feedback controller are also developed. The performance of the stylus profiler is also validated by inspecting standard sample.     

Efficient microspark erosion-assisted machining of a monocrystalline microdiamond stylus using a heat-avoidance path

Monocrystalline diamond possesses covalent bonding making diamond extremely hard and difficult to machine. In this study, a microdiamond stylus typically used in measuring surface roughness is machined to exemplify the proposed ‘microspark erosion-assisted machining with heat-avoidance path’ technique. Based on the high thermal conductivity and weak electrical conductivity of boron-doped monocrystalline diamond, high-frequency pulsed discharge plasma is employed to efficiently perform microspark erosion machining on an extremely hard monocrystalline diamond blank. It was found that the pulse-on time and servo voltage respectively affect erosion plasma length and the erosion gap during diamond machining. Also, the safety distance and safety height of the erosion path dominate heat transfer to filler metal. These factors all affect the firmness of the brazed diamond blank on the substrate. Three mechanisms for removing carbon atoms from the diamond blank surface were observed. They are vaporization, melting, and graphitization of carbon atoms. This graphitized carbon atoms have weak electrical conductivity, which is conducive to inducing the wire-electrode to generate a greater electric field and secondary discharging, facilitating removal of additional carbon atoms. Experimental results indicate that a microdiamond stylus prototype with a tip of 10 μm can be safely formed using a ‘microspark erosion-assisted machining with heat-avoidance path’ technique, creating 93.7% repeatability of the minimum residual stylus diameter. The tangential micro-grinding facilitates the stylus tip to receive grinding from the grinding wheel's maximum tangential speed and create the precision microdiamond stylus with 1 μm in tip-radius. The applied microspark erosion-assisted machining had a diamond material removal rate that was 54% more efficient than conventional grinding of a commercial microdiamond stylus. The formed microdiamond stylus was inspected by Raman spectroscopy and verified by the surface roughness standard gauge to be up to industry standards.     

金刚笔(碟片)修整砂轮型面的轨迹分析

用金刚笔(碟片)修整成形砂轮是成形磨削巾的一个技术环节.对于金刚笔(碟片)修整成形砂轮中机床运动轨迹曲线进行了分析,认为轨迹线为工件轮廓线的法向偏置线,并对实例进行分析.     

Assembling ball-ended styli for CMM's tactile probing heads on micro EDM

This paper describes a hybrid gluing and assembling process on micro electrical discharge machine (EDM) to produce micro ball-ended spherical stylus tips for micro coordinate measurement machine's (CMM's) tactile probing heads. Combining wire electro-discharge grinding technology and position controlling function of EDM, a micro glass ball could be glued onto the cantilever successfully. The experimental results show that the roundness of the largest profile micro glass-ball-ended styli with a 0.07-mm diameter could be as small as 0.613 μm. The deviation and roundness of the stylus tips can be controlled more effectively by this gluing and assembling process. The adhesion strength of the gluing stylus tip is approximately 12 mN. These ball-ended stylus tips could be used on micro CMM's tactile probing head for micro component metrology in the near future.     

激光双法布里-珀罗干涉纳米测量系统的理论分析

本文设计了一种基于双法布里－珀罗干涉仪,采用计算机实时控制处理,以轻拍式探针为传感器的新型纳米测量系统,描述了系统的工作原理,详细进行了系统的理论分析。提出了通过测量双法布里－珀罗干涉仪透射光强基波幅值差或基波等幅值过零时间间隔的方法进行纳米测量的理论基础,分析了轻拍式探针的振动模型,给出了检测探针振幅变化的新方法及理论依据。     

Microscale Friction Behaviour of Single Crystal Si (111) When Rubbed with Diamond Spherical and Conical Styli

An experimental study is described of the friction behaviour of samples of single crystal Si (111) when they were rubbed with diamond spherical (radius of 0.18 mm) and conical styli of included angles of 120° and 136°. Several techniques were used including (1) a reciprocating friction machine, (2) Raman spectroscopy and (3) environmental scanning electron microscopy. Friction force was measured for a constant relative speed of 0.22 mm s^?1 between the rubbing stylus and the substrate. The normal load on the stylus was varied in the range 100–500 mN. In the case of the spherical stylus, the coefficient of friction was in the range 0.03–0.08, whereas for the conical styli, it was up to ten times higher, but it varied with the number of friction cycles. Raman spectroscopy revealed that in all cases, structural phase transitions of the silicon had occurred in the friction tracks and both amorphous silicon and Si-III phases were found. Environmental scanning electron microscope showed no debris in the friction tracks produced by the spherical stylus, whereas a considerable amount of debris was found within the friction tracks produced by the conical styli. This debris has been shown to be responsible for the gradual decrease in the coefficient of friction with increasing number of friction cycles. Calculations of the frictional heating between the spherical stylus and the Si (111) substrate have shown that only a negligible interfacial temperature rise would occur. It has been suggested that, in the absence of ploughing, the coefficient of friction between the spherical stylus and the Si (111) substrate is controlled by the adhesion between the two surfaces, whereas the very initial coefficient of friction between the conical styli and the Si (111) substrate is controlled by the ploughing process.     

Comparison of optical and stylus methods for measurement of surface texture

Optical methods are increasingly used for measurement of surface texture, particularly for areal measurements where the optical methods are generally faster. A new Working Group under Technical Committee (TC) 213 in the International Organization for Standardization is addressing standardization issues for areal surface texture measurement and characterization and has formed a project team to address issues posed by the optical methods. In this paper, we review the different methods of measuring surface texture and describe a classification scheme for them. We highlight optical methods and describe some of their characteristics as well as compare surface-profiling results obtained from three optical methods with those obtained from stylus profiler instruments. For moderately rough surfaces (Ra?≈?500 nm), roughness measurements obtained with white light interferometric (WLI) microscopy, confocal microscopy, and the stylus method seem to provide close agreement on the same roughness samples. For surface roughness measurements in the 50 to 300 nm range of Ra, discrepancies between WLI and the stylus method are observed. In some cases the discrepancy is as large as about 75% of the value obtained with the stylus method. By contrast, the results for phase shifting interferometry over its expected range of application are in moderately good agreement with those of the stylus method.     

Methods of measuring and characterising the surface geometry of road stones

Methods of measuring and characterising random rough surfaces have always been of interest in the field of engineering. Measurement and analysis of finer scales of texture of a surface are now mainly effected by the use of a stylus instrument.Because of the finite radius of the tip of the stylus, this instrument cannot sense all the scales of texture on a surface. Evaluation of scales of texture finer than that sensed by the stylus instrument is of interest in many fields of engineering and in the prediction of hysteretic friction and of abrasion of rubber in particular. Two new methods which meet this demand to a great extent are described and their application is illustrated by actual measurements on stone surfaces. A scanning electron microscope is used in one method and an optical microscope in the other. Numerical methods of solution using electronic computers are adopted for the evaluation of texture parameters in both methods.     

Uncertainty analysis of roughness standard calibration using stylus instruments

A stylus instrument was characterized and calibrated, including a dynamic calibration of the probe. This stylus instrument was used to calibrate ten roughness standards for six surface roughness parameters. The sensitivity of each parameter of each standard to such measurement conditions as stylus geometry, measurement force, cut-off wavelength, and so forth was determined experimentally. These results were used for an uncertainty evaluation of each parameter for each roughness standard. It is shown that the manufacturers’ specification for the stylus instrument (2% uncertainty in roughness parameters) is approximately correct for the most commonly used samples and parameters, but the uncertainty may range from 0.03% (for sinusoidal profiles) to 100% (for very fine surfaces), depending upon the standard and parameter to be calibrated.     

Dynamic modelling of the fidelity of random surface measurement by the stylus method

A numerical simulation has been used to systematically investigate the characteristics of a stylus surface profiling instrument. The model bridges together previously used concepts to incorporate both tip size and tip dynamics. The dynamics incorporate a tip flight phenomenon, inferring detachment from zero value of the reaction force and the trajectory from a free vibration solution to a second order system. Tip shape is handled by a rigid kinematic model. Following brief discussions of the modelling and the process for generating test profiles with defined correlation lengths, the influences of the inherent parameters of the stylus instrument and the testing method on the measurement fidelity are examined. The tip shape effect of the stylus instrument is also considered in the dynamic measurement. It is noted that the finite tip size can increase the critical scanning speed to avoid tip flight, but decreases the signal fidelity of the measurement due to the bridging effect.     

3-Dimensional profile distortion measured by stylus type surface profilometer

In this paper, the distortion effect in measured profiles caused by stylus tip radius size of stylus-typed surface profilometer was analyzed in terms of 2D and 3D. On the basis of our analysis results, we propose selection criteria for the stylus tip radius to improve the reliability of measurement results. For this purpose, a simulation algorithm has been devised and implemented for 2D and 3D measurement simulations, and the 3-dimensional surface texture used in simulation was obtained using an Atomic Force Microscope (AFM) on an actual machined surface to improve the reliability of simulation results. The simulation results are compared with the measured results from the same specimen using a roughness tester, and the validity of analysis via the simulation proposed in this study is confirmed. Cumulative power spectral analysis was performed for the 2D and 3D simulated profiles obtained from simulation. On the basis of the analysis results, an effective frequency components field using a stylus type profilometer is clarified, and the selection criteria of the stylus tip radius for measurement is proposed considering the surface texture characteristics of the specimen. The purpose of this paper is to provide a basis of a simple and effective method which could be an alternative of some engineering standard that specifies selection of stylus tip radius for the measurement using only nominal Rq for machined surface.