1Cr17Ni2压气机叶片多层膜制备及耐蚀性研究

采用真空电弧离子镀技术在1Cr17Ni2不锈钢基体表面沉积Ti/TiN/Zr/ZrN多层膜,并对膜的形貌、相结构、结合力以及极化曲线和交流阻抗等电化学性能进行分析和测试。结果表明:制备的Ti/TiN/Zr/ZrN膜界面清晰、结构致密、晶粒细小,膜层厚度约为2~3μm,膜层的主要物相为TiN和ZrN两相,以及少量的金属Ti和Zr;膜层与基体结合良好,结合力大于70 N,显微硬度(HV_(0.025))高达29 000 MPa,Ti/TiN/Zr/ZrN多层膜与1Cr17Ni2基材相比,具有更高的极化电位和极化电阻,更低的腐蚀电流密度,更大容抗弧。     

脉冲偏压对电弧离子镀Ti/TiN纳米多层薄膜显微硬度的影响

采用脉冲偏压电弧离子镀方法在高速钢基体上沉积Ti／TiN纳米多层薄膜,采用正交实验法设计脉冲偏压电参数,考察脉冲偏压对Ti／TiN纳米多层薄膜显微硬度的影响．结果表明,在所有偏压参数（脉冲偏压幅值、占空比和频率）和几何参数（调制周期和周期比）中,脉冲偏压幅值是影响显微硬度的最主要因素;当沉积工艺中脉冲偏压幅值为900V、占空比为50％及频率为30kHZ时,薄膜硬度可高达34．1GPa,此时多层膜调制周期为84nm,TiN和Ti单元层厚度分别为71和13nm;由于薄膜中的单层厚度较厚,纳米尺寸的强化效应并未充分体现于薄膜硬度的贡献中,硬度的提高主要与脉冲偏压工艺,尤其是脉冲偏压幅值对薄膜组织的改善有关．     

负偏压在电弧离子镀沉积TiN／TiCN多层薄膜中的作用

用电弧离子镀方法在高速钢、不锈钢与铜基体上沉积合成Ti/TiCN多层薄膜,在其他参数不变的情况下只改变负偏压,着重考察不同负偏压下薄膜的沉积深度、膜基结合强度、显微硬度以及表面形貌等,研究基体负偏压在沉积多层薄膜中所起的作用。结果表明,负偏压影响沉积温度,负偏压值越大,温度越高;负偏压值增大,表面形貌中的大颗粒数量减少,薄膜质量得到改善;负偏压在－300V左右时,膜基结合强度与硬度出现对应最佳性能点的峰值。     

925银基底镀覆Ti/DLC薄膜工艺试验

针对925银传统着黑色工艺存在的缺点,采用溅射镀膜与阳极层离子源相结合的镀膜工艺,在925银基底上镀覆Ti/DLC膜,检测了不同工艺参数下膜层的性能。结果表明,通过调整负偏压、工作气体分压及镀膜时间等工艺参数,可以使Ti/DLC膜层获得较纯正、有光泽的暗黑色,并可调节其显微硬度及临界划痕载荷;当负偏压为-120V、Ar气分压为0.40Pa、时间为10min时在925银基底上溅射Ti膜,以及负偏压为-180V,乙炔分压在0.25~0.30Pa、时间为40~45min在Ti膜上沉积DLC膜时,Ti/DLC膜层的外观装饰效果、耐蚀性和力学性能等较好。     

空心阴极离子镀(Ti,Zr)N膜层制备及应用研究

用空心阴极离子镀(HCD)技术制备了(Ti,Zr)N膜层,研究了氮分压对膜层硬度的影响.以结合强度为判据,采用基体温度、轰击气压、负偏压及中间层沉积时间作为试验的变化因素,用正交试验法优化了制备(Ti,Zr)N膜层的最佳工艺规范.应用优化的工艺参数对印制板(PCB)刀具进行了镀膜强化应用,结果表明,镀层性能良好,能够延长刀具的使用寿命.     

Ti/TiN/Zr/ZrN多层膜对1Cr17Ni2不锈钢疲劳性能的影响

采用真空阴极电弧沉积技术在1Cr17Ni2马氏体型不锈钢表面沉积Ti/TiN/Zr/ZrN多层膜。研究对比了在室温下膜层试样与基体试样的旋转弯曲疲劳强度、疲劳寿命和疲劳断裂机理。结果表明:在不锈钢基体上沉积厚度为11.7μm,硬度为3 220HV0.025,膜/基结合力为56N的Ti/TiN/Zr/ZrN多层膜后,其疲劳性能显著提高,膜层试样较基体试样的疲劳极限提高了约11.2%,当应力水平在540～650 MPa变化时,疲劳寿命增量变化范围为108%～246%;裂纹均起源于表面,在低应力水平下只有一个裂纹源,而高应力水平下有多个裂纹源;疲劳性能的提高主要是由于膜层能够弥补基体表面一定的缺陷,同时软硬交替的膜层结构有较强的抗裂纹扩展能力。     

钢领表面电弧离子镀TiAlCN薄膜

在低温(145℃)条件下,采用真空电弧离子镀技术在GCr15钢领表面制备TiAlCN薄膜。利用扫描电子显微镜(SEM)、电子探针(EPMA)、X射线衍射仪(XRD)、附着力测试仪和显微硬度计分析测试薄膜形貌和性质。结果表明,负偏压较小,液滴尺寸大;负偏压过高,液滴脱落后留下很多凹坑,薄膜组织性能恶化。随着弧电流的增大,液滴发生细化。当弧电流为50A、负偏压为-100V和镀膜时间为50min时,薄膜的均匀性和致密性好,薄膜表面的液滴分布均匀且尺寸小,液滴最大尺寸小于2μm,膜层平均厚度为2.2μm,膜层中有Fe0.975Ti0.025(110)、Ti2N(112)和AlTi3(CN)0.6等多种物质的存在,改善了膜层的组织结构,薄膜的附着力达到最大值39.8N,薄膜的硬度达到最大值1 776HV0.01,显著提高了钢领的表面硬度。     

电弧离子镀CrN薄膜的制备及性能研究

以气压、弧电流和偏压为影响因素设计正交试验,采用电弧离子镀技术在6Cr13Mo马氏体不锈钢表面沉积Cr N薄膜。利用扫描电镜、显微硬度计、划痕仪对Cr N薄膜的厚度、硬度、结合力进行检测,研究薄膜性能并优化其制备工艺。结果表明:靶电流对薄膜厚度及结合力影响最大,随着电流升高,膜层厚度急剧增大,而结合力逐渐降低;对薄膜硬度影响最大的为负偏压,随着偏压升高,膜层硬度先升高后降低。综合考虑Cr N薄膜的表面质量、硬度、结合力,得到最佳制备工艺为气压1.4 Pa、靶电流100 A、偏压-100 V。     

脉冲偏压占空比对TiN/TiAlN多层薄膜微观结构和硬度的影响

目的研究脉冲偏压占空比对TiN/TiAlN多层薄膜微观结构和硬度的影响规律。方法利用脉冲偏压电弧离子镀的方法,改变脉冲偏压占空比,在M2高速钢表面制备5种TiN/TiAlN多层薄膜,对比研究了薄膜的微观结构、元素成分、相结构和硬度的变化规律。结果 TiN/TiAlN多层薄膜表面出现了电弧离子镀制备薄膜的典型生长形貌,随着脉冲偏压占空比的增加,薄膜表面的大颗粒数目明显减少。此外,脉冲偏压占空比的增加还引起多层薄膜中Al/Ti原子比的降低。结论 TiN/TiAlN多层薄膜主要以(111)晶面择优取向生长,此外还含有(311),(222)和(200)晶相结构。5种多层薄膜的纳米硬度均在33GPa以上,当脉冲偏压占空比为20%时,可实现超硬薄膜的制备。     

硬质合金表面多弧离子镀(Ti,Al,Zr,Cr)N多元氮化物膜

采用Ti-Al-Zr合金靶和Cr靶,用多弧离子镀技术在WC-8%Co硬质合金基体上沉积(Ti,Al,Zr,Cr)N多元氮化物膜。分析了薄膜的成分、形貌、粗糙度和结构,研究了薄膜的显微硬度、膜/基结合力和抗高温氧化性能。结果表明,获得的多元氮化物膜仍是B1-NaCl型TiN面心立方结构;适当控制偏压条件可以改善薄膜的表面形貌;在不同的偏压条件下,(Al+Zr+Cr)/(Ti+Al+Zr+Cr)的成分比为0.41～0.43,当其比值趋于0.4时,薄膜的显微硬度和膜/基结合力达到最大值3600HV0.01和200N;同时薄膜的抗高温氧化性能提高,最高温度可达700℃左右。     

电弧离子镀CrN涂层的制备及性能研究

用电弧离子镀技术在W18Cr4V高速钢试样上制备了CrN涂层,采用X射线衍射仪、扫描电镜、能谱议、显微硬度仪、磨损试验机等对涂层的表面形貌、相结构、硬度和耐磨性进行了分析.对比研究了经工艺优化后的CrN涂层和TiN、TiAlN涂层以及未涂层钻头干式钻削7075铝合金的切削性能,得出了最佳的沉积偏压和切削转速.结果表明,偏压为-50～-150 V时,涂层均由Cr2N 相和CrN相组成,随偏压增加,涂层表面粗糙度降低,硬度和耐磨性增强;偏压过高,涂层的微观质量和性能反而下降.偏压为-100 V时,涂层的硬度和耐磨性最佳.CrN涂层可显著提高高速钢刀具的切削性能,减小刀具磨损,延长刀具寿命.其钻削性能优于TiN、TiAlN涂层,明显优于未涂层.2 230 r/min为CrN涂层的最佳切削转速,经工艺优化后的CrN涂层钻头平均寿命约为未涂层钻头的5倍,其破损机制属于粘着磨损.     

Corrosion Resistance of PAPVD TiN Coating on AISI 304 Stainless Steel

In this work the corrosion resistance of PAPVD TiN hard coatings on AISI 304 stainless steel with a titanium interlayer has been addressed. Cyclic voltammetry corrosion tests in NaCl 3.5% solutions were performed for samples prepared by depositing TiN/Ti onto steel using different deposition parameters. The surface morphology of the samples was examined by using a scanning electron microscope (SEM) and phase analysis was performed by X-ray diffraction (XRD). The cyclic voltammetry curves showed two distinct behaviours. Firstly, a reduction in corrosion resistance was observed when current density was increased for the whole potential range studied. The second observation, no less important, was the increase in corrosion resistance compared to the uncoated steel. The TiN films deposited showing (III) preferred orientation showed better corrosion resistance than films presenting other orientations.     

Tribological Behaviour and Cutting Performance of PVD-TiN Coating/Substrate System with Discontinuous Surface Architecture

TiN coating was deposited by arc evaporation PVD (physical vapor deposition) onto tool steel. A netted screen made of the stainless steel was placed between substrate and vaporizer in order to get discontinuous TiN coatings. Three kinds of surface condition (uncoated, continuous and discontinuous TiN coatings) were prepared and examined for their performance. Tribological behavior was investigated by means of dry and lubricated sliding tests at room temperature and 200 °C, on a disk-on-block and sphere-on-flat tribometer. The results show that the discontinuous TiN coating significantly decreases both the wear and the wearing speed of tool steel under sliding tests, and reduces friction under conditions of bidirectional sliding. In the three kinds of surface condition, the discontinuously coating has superiority for high speed cutting owing to its lifetime increasing compared with uncoated and continuously coated.     

负偏压对多弧离子镀TiN薄膜的影响

采用不同偏压,在201不锈钢表面进行多弧离子镀TiN薄膜,研究了偏压对薄膜表面形貌、硬度、相结构及耐蚀性的影响.研究表明:薄膜表面存在着许多液滴颗粒,随着偏压的增加,液滴减少,但过大的偏压会使表面出现凹坑;薄膜的显微硬度随偏压的升高先增大后减小,偏压为-200 V时的本征硬度为2 195HV;在3.5％的NaCl溶液中...     

偏压对离子源辅助HiPIMS制备纳米TiN薄膜力学性能和耐蚀性能的影响

为提高磁控溅射制备薄膜的致密度,减少结构缺陷,研究薄膜显微结构对硬度、韧性及耐蚀性能的影响,尝试在改变离子源和基材偏压的条件下,采用离子源辅助HiPMIS技术在304不锈钢和P型（100）晶向硅片上制备TiN纳米薄膜。采用扫描电子显微镜、小角X射线衍射仪对薄膜的形貌和晶体结构进行分析;采用纳米压痕仪和维氏硬度计分别测量计算薄膜的硬度和韧性,并通过电化学工作站对薄膜的耐蚀性能进行检测。结果表明：随着偏压的增加以及离子源的引入,离子的轰击效应增强,薄膜的沉积速率下降,致密度增加。偏压为-200 V时,薄膜的硬度达到最大值16.2 GPa,且对应的晶粒尺寸最小,（111）晶面衍射峰的强度最高。离子源的加入使所制备薄膜的硬度略有下降。此外,随着偏压的增加,薄膜的韧性和耐腐蚀性能也有一定提高。     

基体负偏压对TiAlN/TiN膜层组织成分及硬度的影响

采用多弧离子镀技术在40Cr基体上制备TiAlN/TiN复合膜层;利用金相显微镜、扫描电子显微镜和显微硬度仪研究基体负偏压对膜层硬度的影响.结果表明:基体负偏压对膜层性能有显著影响,过高或过低的基体偏压会使得膜层表面不平整,表面显微硬度降低.基体负偏压越高,膜层中Ti、Al原子的含量就越低.     

Study on the role of PVD TiN coating in improving the performance of electroplated monolayer superabrasive wheel

The monolayer grinding wheels, coated with a physical vapour deposited (PVD) coating (viz. TiN, HfN, TiN + ZrN etc.), have been reported to outperform their uncoated counterparts as claimed in some patented literatures. The present work aims at exploring the mechanism how PVD TiN augments the performance of nickel electroplated monolayer superabrasive wheels. This study also includes the effect of negative substrate bias voltage on performance of TiN coated electroplated cBN wheels during grinding of hardened bearing steel. TiN was deposited by pulsed DC closed-field unbalanced magnetron sputtering (CFUBMS) technique in an in-house PVD coating system. The structure of the TiN coating and post-grinding condition of the wheels were observed using scanning electron microscopy (SEM). Energy dispersive X-ray (EDX) line scan, Electron probe micro analysis (EPMA) and secondary ion mass spectrometry (SIMS) depth profiling at the junction of TiN and nickel layer indicated the occurrence of inter-diffusion between them and grazing incidence X-ray diffraction (GIXRD) confirmed the formation of Ni-Ti intermetallic phases at their interface. The scratch test revealed a significant increase in cohesive and adhesive strengths of nickel layer when TiN was deposited at a bias voltage of −60 V or beyond that. The uncoated cBN wheel exhibited large number of grit fracture at the bond level and some grit pull-out. Such failures of grit were significantly arrested with TiN coating deposited at the bias voltages of −60 V and −90 V.     

ZrN及其多层膜的性质和耐腐蚀性能

用磁过滤电弧制备了ZrN和ZrN／TiN多层膜，磁控溅射制备了ZrN薄膜。结果表明，ZrN／TiN多层膜，由于纳米多层化作用，硬度高于ZrN和TiN的26GPa和2lGPa，平均值达到34．5GPa。X射线衍射分析表明，ZrN／TiN多层膜由ZrN和TiN组成。过滤电弧制备的ZrN和ZrN／TiN多层膜的结合力为8lN和77N，磁控溅射制备的ZrN薄膜的结合力为26N。极化曲线的结果显示，过滤电弧制备的ZrN和ZrN／TiN多层膜的耐腐蚀性显著优于磁控溅射制备的ZrN薄膜，讨论了两种方法制备薄膜性能差异的原因。     

Wear mechanisms of PVD ZrN coated tools in machining

Medium-frequency magnetron sputtered PVD ZrN coatings (ZrN, ZrN/Zr) were deposited on YT15 (WC + 15%TiC + 6%Co) cemented carbide. Microstructural and fundamental properties of these ZrN coatings were examined. Dry machining tests on hardened steel were carried out with these coated tools. The wear surface features were examined by scanning electron microscopy. Results showed that deposition of the PVD ZrN coatings onto the YT15 cemented carbide causes great increase in surface hardness. The ZC-1 coated tool (ZrN/YT15 without interlayer) has the highest surface hardness; while the ZC-2 (ZrN/Zr/YT15 with a Zr interlayer) shows the highest adhesion load for the coatings to the substrate. The ZrN coated tools exhibit improved rake and flank wear resistance to that of the YT15 tool. The coated tools with a Zr interlayer (ZC-2) have higher wear resistance over the one without Zr interlayer (ZC-1). The rake wear of the ZrN coated tools at low cutting speed was mainly abrasive wear; while the mechanism responsible for the rake wear at high cutting speed was determined to be adhesion. Extensive abrasive wear accompanied by small adhesive wear were found to be the predominant flank wear mechanisms for the ZrN coated tools.