人眼不同瞳孔直径波前像差特性分析

采用Hartmann-Shack人眼像差仪,测量了人眼在3.1mm,5.2mm和6mm瞳孔直径下的波前像差。波前像差的RMS值表明,随着瞳孔直径的增大,人眼各阶波前像差均随着增大。与瞳孔直径为3.1mm时相比,瞳孔直径为6mm和5.2mm时,Zernike2-10阶波前像差的RMS值分别增大1.2-7.7倍和1.1-4.8倍。用调制传递函数(MTF)和Strehl比评价了高阶波前像差对成像质量的影响,结果表明,大瞳孔高阶波前像差对成像质量的影响大于小瞳孔;在3.1mm,5.2mm和6mm瞳孔直径下,欲达到衍射极限的Strehl比率,分别需要矫正Zernike波前像差前2-4阶、前3-6阶和前5-7阶,需矫正的像差阶数随瞳孔直径的增大而增加。     

哈特曼传感器测量人眼波像差的特性研究

准确测量人眼波像差,对提高正常眼睛的视力和人眼屈光矫正手术具有重要的实验和临床 价值。对哈特曼传感器测量人眼波像差的精确性和重复性进行了研究,测量人眼离焦的精度为0.2D,波像差的平均偏差为0.065mm。     

高级像差对人眼成像质量和视觉的影响

定量地研究高级像差对人眼成像质量和视觉的影响对人眼像差矫正具有重要的实验和临床意义.利用Hartmann-Shack波前传感器人眼像差仪测量了正常人眼6mm瞳孔的波前像差,由波前像差计算出人眼光学系统的光学调制传递函数MTF和Strehl比率,并由MTF和视网膜空间像调制度AIM曲线计算出人眼视锐度和对比敏感度函数CSF.根据MTF和Strehl比率分析了高级像差对人眼成像质量的影响,根据视锐度和对比敏感度函数CSF分析了高级波像差对视觉的影响.研究表明Zernik前6级像差对人眼成像质量和视觉的影响是不可忽略的,更高级的像差对人眼成像质量和视觉的影响较小,甚至可以忽略.对Zemik前6级像差进行矫正,可以得到相当好的视觉.     

基于夏克-哈特曼传感器的星载望远镜波前测量技术研究

精确的测量和控制星载望远镜的波前像差是实现高效空间引力波探测的关键。本文提出了一种基于夏克-哈特曼波前传感器原理的星载望远镜波前像差测量方法,该方法采用经过频域阈值去噪处理后的频域上的互相关算法,使用子孔径数20×16、微透镜尺寸0.279 mm×0.279 mm、焦距34 mm的夏克-哈特曼波前传感器对算法的测量精确度进行验证。对实际点源图像生成已知RMS离焦值(0, 0.22, 0.44, 0.66 nm),从而产生具有偏移量的点源图像。使用模式法进行波前复原后,计算复原波面和残余波面的RMS值,用于比较频域上的互相关算法和传统质心算法的测量精度。结果显示,随着实际离焦值的增加,质心算法的测量误差呈现上升趋势,分别为0.0966 nm, 0.1378 nm,0.1284 nm和0.1463 nm。频域互相关算法可以使夏克-哈特曼波前像差均方根(RMS)误差分别减少13%, 7%, 18%和14%,为空间引力波星载望远镜地面波前像差的高精度测试提供了重要参考。     

基于部分岭估计的Zernike模式法人眼波前像差重建

为了提高自适应光学系统中人眼波前像差的重建精度,进而提高自适应光学图像中的点扩散函数重建精度,提出了一种基于部分岭估计的Zernike模式前重建算法。首先,基于Zernike模式波前重建模型,分析了常用的模式系数求解方法;其次,在最小均方误差意义下,将部分岭估计的概念引入到自适应光学系统的波前重建算法中,通过确定最优岭估计参数来改善最小二乘估计的奇异性,从而抑制波前探测中测量误差的进一步被放大;最后,讨论了在波前斜率误差的影响下由两种算法所产生的误差大小。仿真实验结果表明：在波前重建算法中引入部分岭估计可有效减小模式系数的均方误差,相对于奇异值分解法减小了8%~10%,在波前探测测量误差增大的情况下,部分岭估计的波前重建精度要高于最小二乘估计法,有利于自适应光学后期中基于波前探测的图像复原研究。     

高精度球面检测中调整误差的精确校正

针对高精度球面检测中球面的调整误差影响,分别研究了波前离焦和倾斜所引入的Zernike像差项,并以此为基础,提出了基于Zernike系数的高精度球面调整误差校正方法.利用Zygo干涉仪对大数值孔径的待测球面进行了检测,实验中对待测球面同时引入波前离焦和倾斜误差,再分别运用所提出的校正方法和传统的消倾斜离焦校正方法得到波面数据并进行对比,进而验证了所提出的校正方法的可行性.实验结果表明,利用该方法可有效地校正大数值孔径球面存在调整误差时所引入的球面像差,并且实验中的校正精度达到了0.002λ（λ为检测光波长）.提出的基于Zernike系数的球面调整误差校正方法可降低对于调节机构的精度以及检测人员的经验要求,在高精度球面检测中具有非常高的实际应用价值.     

光刻物镜波像差绝对检测技术综述

光刻物镜是光刻机核心部件，其波像差大小决定着光刻机的分辨率和套刻精度。随着光刻机性能的逐步提升，光刻物镜波像差要求已经降低到0.5 nm (RMS)以下，这对波像差的检测是一个极大的挑战。现行的光刻物镜波像差检测方法 (如哈特曼法，剪切干涉法和点衍射法等)的检测精度往往受限于其系统误差，而绝对检测技术是一种能够将系统误差分离出来的技术，最终突破精度极限。本文回顾了光刻物镜系统波像差检测方法和波前绝对检测技术，详细梳理了绝对检测技术在不同波像差检测方法中的应用和研究进展，重点总结了绝对检测技术在不同波像差检测方法中的技术难点，同时结合这些难点，展望了光刻物镜波像差绝对检测技术的未来发展趋势。     

泽尼克像差组合对人眼光学质量的影响

基于人眼光学质量客观评价标准区域调制传递函数（AreaMTF）、斯特列尔比（SRX）和同心相对瞳孔平面（PFWc）,分析了波前像差RMS为0．25μm时泽尼克像差项组合对人眼光学质量的影响。C4（离焦）与C12（球差）等组合后,像差比例在1．33到4．90的范围内AreaMTF和SRX有极大值;C6（三叶草）与C7（彗差）等组合后,像差比例在0．20到1．00的范围内它们有极小值。二阶像差（离焦和像散）组合时,C4（离焦）起着主导作用。三阶像差（彗差和三叶草）组合时,SRX和PFWc值的变化范围均较大,分别为0．066到0．228和0．048到0．656。     

90nm DUV光刻物镜重力变形及其对波像差影响分析

本文基于数值孔径为0.75,满足90 nm技术节点的DUV光刻物镜系统,采用在透镜边缘施加支撑力的方式进行重力变形控制。采用有限元法研究透镜表面非球面变形与补偿力的关系,分析补偿后透镜重力变形对系统波像差的影响并与补偿前系统进行对比。结果表明:加边缘补偿力后,透镜非球面变形均方根最大值由50.877 nm减小至26.675 nm,但补偿后系统波像差均方根最大值由0.041λ增大到0.055λ。由此可以得出结论:该补偿方式能够有效补偿透镜表面非球面变形,但补偿后系统波像差反而增大,所以要降低系统的波像差,不仅需要减小透镜变形,同时还需考虑各透镜变形之间的相互补偿作用。     

正支共焦非稳腔的失调特性实验分析

在理论分析基础上,采用Hartmann-Shack（H-S）波前传感器方法实验分析了无源正支共焦非稳腔失调后输出光束像差特性。结果表明,腔内倾斜像差对光束强度分布有显著的影响,约1′的腔内倾斜即可使强度分布呈现明显不均匀,并使相位中的倾斜像差Zernike系数增大。但小的腔内倾斜像差不会使波面中的高阶像差发生明显变化,当引入较大的腔内倾斜时相位中的离焦、像散等高阶像差则有所增大。大菲涅耳数,且腔长较长的非稳腔对于离焦像差有一定的容限度。因此,在进行腔内像差自适应校正时,应首先考虑腔内倾斜像差的校正。     

High-resolution retinal imaging with micro adaptive optics system

Based on the dynamic characteristics of human eye aberration, a microadaptive optics retina imaging system set is established for real-time wavefront measurement and correction. This paper analyzes the working principles of a 127-unit Hartmann-Shack wavefront sensor and a 37-channel micromachine membrane deformable mirror adopted in the system. The proposed system achieves wavefront reconstruction through the adaptive centroid detection method and the mode reconstruction algorithm of Zernike polynomials, so that human eye aberration can be measured accurately. Meanwhile, according to the adaptive optics aberration correction control model, a closed-loop iterative aberration correction algorithm based on Smith control is presented to realize efficient and real-time correction of human eye aberration with different characteristics, and characteristics of the time domain of the system are also optimized. According to the experiment results tested on a USAF 1951 standard resolution target and a living human retina (subject ZHY), the resolution of the system can reach 3.6?LP/mm, and the human eye wavefront aberration of 0.728λ (λ=785?nm) can be corrected to 0.081λ in root mean square (RMS) so as to achieve the diffraction limit (Strehl ratio is 0.866), then high-resolution retina images are obtained.     

恒星干涉仪延迟线系统地面随机振动响应分析

研究地面随机微振动对恒星干涉仪关键部件-光学延迟线系统性能的影响。利用美国蓝氏(Lansmont)集团生产的SAVER 3X型三轴振动仪实测地面随机振动信号,以输出的G加速度功率谱密度为激励,运用Workbench有限元分析软件计算该结构系统的随机振动响应;根据抛物镜面节点数据拟合出抛物镜面的Zernike多项式系数、抛物镜刚体平移量和抛物镜面PV和RMS值;将Zernike多项式系数导入光学系统中分析光学延迟线系统光学性能;最后利用ELCOWAT 3000电子自准直仪测量抛物镜刚体平移量,分析实际测量结果和计算理论结果偏差。分析计算结果与实验数据最大偏差7.6%,计算抛物镜面形RMS值为9.6 nm,PV值为46.1 nm,波前差为0.043λ。目前的光学延迟线的地面振动满足光学延迟线系统的稳定性要求。使用动态光学性能标准分析判断微振动对系统光学性能的影响程度,为恒星干涉仪其他子系统优化设计和隔振补偿措施提供参考。     

Response analysis of holography-based modal wavefront sensor

The crosstalk problem of holography-based modal wavefront sensing (HMWS) becomes more severe with increasing aberration. In this paper, crosstalk effects on the sensor response are analyzed statistically for typical aberrations due to atmospheric turbulence. For specific turbulence strength, we optimized the sensor by adjusting the detector radius and the encoded phase bias for each Zernike mode. Calibrated response curves of low-order Zernike modes were further utilized to improve the sensor accuracy. The simulation results validated our strategy. The number of iterations for obtaining a residual RMS wavefront error of 0.1λ is reduced from 18 to 3.     

Three-dimensional relationship between high-order root-mean-square wavefront error, pupil diameter, and aging

We report root-mean-square (RMS) wavefront error (WFE) for individual aberrations and cumulative high-order (HO) RMS WFE for the normal human eye as a function of age by decade and pupil diameter in 1 mm steps from 3 to 7 mm and determine the relationship among HO RMS WFE, mean age for each decade of life, and luminance for physiologic pupil diameters. Subjects included 146 healthy individuals from 20 to 80 years of age. Ocular aberration was measured on the preferred eye of each subject (for a total of 146 eyes through dilated pupils; computed for 3, 4, 5, 6, and 7 mm pupils; and described with a tenth-radial-order normalized Zernike expansion. We found that HO RMS WFE increases faster with increasing pupil diameter for any given age and pupil diameter than it does with increasing age alone. A planar function accounts for 99% of the variance in the 3-D space defined by mean log HO RMS WFE, mean age for each decade of life, and pupil diameter. When physiologic pupil diameters are used to estimate HO RMS WFE as a function of luminance and age, at low luminance (9 cd/m2) HO RMS WFE decreases with increasing age. This normative data set details (1) the 3-D relationship between HO RMS WFE and age for fixed pupil diameters and (2) the 3-D relationship among HO RMS WFE, age, and luminance for physiologic pupil diameters.     

光子计数式动态交变剪切干涉仪噪声分析

在自适应光学系统中，波前探测器的噪声是一个主要误差源，本文中分析了光子计数式动态交变剪切干涉仪波前探测器的噪声情况，从理论上推导了剪切干涉仪相位角均方根误差随光强和采样周期的变化以及变化关系，并首次引入等效噪声带宽对施加滤波后噪改善进行了分析。     

弱光61单元自适应光学系统的校正有效性分析

基于Ｚｅｒｎｉｋｅ多项式模式复原原理,分别就光学系统静态误差和大气湍流扰动引起的动态波前误差两种情况,定义了静态模式因子和动态模式因子两个变量,用来分析弱光６１单元自适应光学系统的校正有效性。     

Wavefront-guided correction of ocular aberrations: are phase plate and refractive surgery solutions equal?

Wavefront-guided laser eye surgery has been recently introduced and holds the promise of correcting not only defocus and astigmatism in patients but also higher-order aberrations. Research is just beginning on the implementation of wavefront-guided methods in optical solutions, such as phase-plate-based spectacles, as alternatives to surgery. We investigate the theoretical differences between the implementation of wavefront-guided surgical and phase plate corrections. The residual aberrations of 43 model eyes are calculated after simulated refractive surgery and also after a phase plate is placed in front of the untreated eye. In each case, the current wavefront-guided paradigm that applies a direct map of the ocular aberrations to the correction zone is used. The simulation results demonstrate that an ablation map that is a Zernike fit of a direct transform of the ocular wavefront phase error is not as efficient in correcting refractive errors of sphere, cylinder, spherical aberration, and coma as when the same Zernike coefficients are applied to a phase plate, with statistically significant improvements from 2% to 6%.     

光盘基片平整度的相移干涉测量方法

使用工作波长为10.6mm的红外激光平面干涉仪对光盘基片的表面面形进行了移相式干涉法测试,对测试的波面数据进行多项式拟合,并用计算机处理测试结果,实现了光盘平整度的自动化测量。所测光盘基片平整度的峰谷值为7.88mm,均方根值为2.0mm。     

直接斜率法复原矩阵误差分析

利用范数理论,对直接斜率法中的复原矩阵误差进行了理论分析,认为直接斜率法中的探测噪声和测试传递矩阵的电压矩阵是影响复原电压误差大小的主要因素.在61单元自适应光学系统中噪声相同的情况下,对用Hadamard模式和单位矩阵模式这两种模式得到复原矩阵的方法进行了仿真,并用这两个复原矩阵去校正像差,得到了两个残差波面.通过比较这两个残差波面,得出在相同的噪声条件下,用Hadamard模式得到的复原矩阵有较小误差.     

Novel methods to improve the measurement accuracy and the dynamic range of Shack–Hartmann wavefront sensor

As a wavefront sensor, the Shack–Hartmann wavefront sensor plays an important role in the wavefront measurement of human eyes. However, the low measurement accuracy and the small dynamic range of Shack–Hartmann wavefront sensor limit its application. In this paper, we present a matched-filter algorithm to improve the measurement accuracy by more than an order of magnitude. Moreover, we also introduce a new algorithm to extend the dynamic range of Shack–Hartmann wavefront sensor. With this method, the recorded spots of Shack–Hartmann wavefront sensor are not constrained to stay in the corresponding pixel area of the microlens. The result shows that the dynamic range can be extended from 57.1 to 160% for the first 24 items of Zernike wavefronts, respectively. The improvement by our methods makes the Shack–Hartmann more suitable for the measurement of highly aberrated eyes.