共查询到19条相似文献,搜索用时 109 毫秒
1.
下一代光刻技术——压印光刻 总被引:3,自引:0,他引:3
通过分析集成电路制造工艺中的核心环节--光刻技术,采用机械微复形原理的压印光刻技术可避免传统光学光刻的光学衍射限制,能够对最小到6 nm特征尺寸的图形进行复制.通过研究压印光刻原理,详细分析对比热压印及常温压印的工艺特点、复形面积、模具结构和阻蚀胶固化过程等,揭示出常温压印更适用于多层套刻的图形制作.针对基于紫外光固化的常温压印光刻工艺在压印过程中的关键技术:阻蚀胶成膜控制、对准、套刻、精确加载、留膜厚度控制、阻蚀胶固化控制等进行深入研究,提出释放保形软压印工艺,能够实现基于常温软模具压印的大面积亚100 nm级特征尺寸图形的复制.最后,以SIL-Ⅰ型分步式常温紫外光固化压印光刻机的研究为例,对其结构特性做出深入分析,估算出系统的精度等级;通过试验,对系统的压印复形精度做出评估. 相似文献
2.
3.
4.
常温微压印中抗蚀剂流动的研究及工艺优化 总被引:2,自引:1,他引:1
为提高微压印中抗蚀剂的复型精度,利用POLYFLOW,基于流固耦合方法对常温压印过程中抗蚀剂的流动进行了有限元模拟,系统地分析了抗蚀剂的初始厚度,留膜厚度,模具的深宽比,占空比,模具下压速度等因素对抗蚀剂流动填充的影响规律。搭建了压印的可视化实验平台,通过该平台对不同工艺条件(包括抗蚀剂的初始厚度,留膜厚度以及模具的下压速度)及软模具结构(深宽比,占空比)下抗蚀剂的流动填充过程及其填充形貌进行了实时观测,并与数值计算结果进行比较。结果表明,在不影响填充效率的情况下,采用低速下压(≤1μm/s)方式,在占空比0.375,深宽比2时,填充度可达到90%以上。仿真和实验验证了优化的压印工艺条件和模具结构。另外,本文还引入了增加模板特征高度预留量的概念,可进一步提高复型精度。 相似文献
5.
针对压印过程中模具与晶圆密贴度和压印面积的矛盾,提出释放保型软压印光刻工艺。此工艺包括五步加载过程,可充分挖掘压印图型转印误差根源以及图型转印保真度与阻蚀胶留膜厚度的内在矛盾。通过目标载荷量的调节与控制将模具弹性回弹调整到紫外光固化步骤前,消除压印过程的内在矛盾,实现压印面积由2 cm2向8 cm2的提升,同时保证阻蚀胶留膜厚度的要求。基于创新的释放保型软压印工艺,一套低成本及结构简单的压印光刻原型机被设计构建,一系列压印结果证明应用此工艺的压印光刻机具有同场压印不同面积、特征尺寸结构图型的多次复制能力。 相似文献
6.
电驱动微纳米模塑技术较之常规压印光刻技术具有其独特的优势,其利用电场产生的Maxwell压强替代外部机械压力,实现对聚合物薄膜流变的有效驱动,可以避免压印光刻技术中机械压力引发的结构变形等问题,实现微纳米结构的保真复形。针对电驱动微纳米模塑技术中电场施加方式以及模具几何约束的差异,提出非接触式与接触式两种电驱动模塑成形方法,并采用理论分析、数值仿真以及试验等手段探究电场作用下聚合物的流变成形机理,分析电压、空气间隙和膜厚等工艺参数对复形模塑结构的影响,探讨非接触式与接触式两种电驱动微纳米结构成形方法的异同。研究结果表明,两种电驱动模塑技术都能有效避免常规压印光刻技术的不足之处,在无机械压力条件下实现微纳米结构的模板图案完整复型,但接触式电驱动微纳米模塑方式在图形复制精确性、成形效率和工艺可控性等方面更具优势,是一种具有广阔应用潜力的纳米结构图形化方法。 相似文献
7.
介绍了一种静电场辅助的新型微压印光刻技术,并对其工艺过程进行了深入的理论研究。首先,采用数值仿真软件COMSOL~(TM) Multiphysics,建立了静电场辅助的压印光刻瞬态仿真分析模型,讨论了不同时域微结构的演化过程。然后,详细分析了微结构的成型与仿真实验参数的定性关系,发现:适当地减小极板间距、模板凸起结构周期,同时增加模板的凸起高度、初始聚合物薄膜厚度和电压有助于微纳结构的成型。最后,通过仿真实验参数优化,得到了带有31μm中空结构的球冠微结构。与传统压印方法相比,静电场辅助的微压印技术工艺过程简单且成本较低,能够广泛应用于微电子机械系统、光子学、遗传学和组织系统等。 相似文献
8.
9.
研究了衍射效应对SU-8胶紫外光刻尺寸精度的影响。根据菲涅耳衍射理论建立了紫外曝光改进模型,预测微结构的尺寸,分析了光刻参数变化对尺寸的影响。为了更好地与数值模拟结果进行比较,以硅为基底,进行了SU-8胶紫外光刻的实验研究。实验分四组,实验中掩模的特征宽度分别取50 μm、100 μm、200 μm和400 μm,SU-8胶表面的曝光剂量取400 mJ/cm2。用扫描电镜测量了微结构的顶部线宽、底部线宽和SU-8胶的厚度,用MATLAB软件对紫外曝光过程中SU-8胶层内曝光剂量的分布情况进行了数值模拟,数值模拟结果与实验结果基本吻合。数值模拟结果为进一步的实验研究提供了光刻参数的参考值。 相似文献
10.
光栅在通信、光存储及光谱分析领域具有广泛的应用。对超声辅助UV-LIGA技术制备光栅的可行性进行了试验研究。试验中两次利用超声的特殊效应,实现不同的辅助功能。1)采用超声辅助显影,通过改善光刻胶模沟槽内的物质传输,提高光刻胶模结构的显影效率和显影质量。2)在后烘之后、显影之前对光刻胶结构进行超声处理,通过在空气中对光刻胶模结构进行超声处理,有效降低SU-8胶模在电铸过程中的溶胀。选取优化的工艺参数,采用侧向冲液电铸方式,获得了镍基光栅。 相似文献
11.
H. L. Zhang N. S. Ong Y. C. Lam 《The International Journal of Advanced Manufacturing Technology》2008,37(11-12):1105-1112
Micro injection molding presents many challenges in the injection-molding community. When the dimensions of the part (and thus the cavity of the mold) are small, micro-scale factors such as mold surface roughness may play an important role in the filling of polymer melt. This paper investigates the effects of mold surface roughness on cavity filling of polymer melt in micro injection molding. A disk insert, which has two halves with different surface roughness but with the same roughness mean lines, was used in the investigations. The ratio of flow area of the rougher half with the total flow area of the molded part is used to evaluate the significance of surface roughness effect. The experimental results revealed that mold surface roughness does resist the cavity filling of polymer melt in micro injection molding. For the limited range of injection rate investigated, it is not significant on the surface roughness effects. The increase of mold temperature will decrease surface roughness effects. The change of melt temperature within the range allowed by the process is insignificant for surface roughness effects. 相似文献
12.
Long Q Merrifield R Xu XY Kilner P Firmin DN G-Z Y 《Proceedings of the Institution of Mechanical Engineers. Part H, Journal of engineering in medicine》2008,222(4):475-485
A detailed investigation of left ventricle (LV) flow patterns could improve our understanding of the function of the heart and provide further insight into the mechanisms of heart failure. This study presents patient-specific modelling with magnetic resonance imaging (MRI) to investigate LV blood flow patterns in normal subjects. In the study, the prescribed LV wall movements based on the MRI measurements drove the blood flow in and out of the LV in computational fluid dynamics simulation. For the six subjects studied, the simulated LV flow swirls towards the aortic valve and is ejected into the ascending aorta with a vertical flow pattern that follows the left-hand rule. In diastole, the inflow adopts a reasonably straight route (with no significant secondary flow) towards the apex in the rapid filling phase with slight variations in the jet direction between different cases. When the jet reaches about two thirds of the distance from the inflow plane to the apex, the blood flow starts to change direction and swirls towards the apex. In the more slowly filling phase, a centrally located jet is evident with vortices located on both sides of the jet on an anterior-posterior plane that passes through the mitral and aortic valves. In the inferior-superior plane, a main vortex appears for most of the cases in which an anticlockwise vortex appears for three cases and a clockwise vortex occurs for one case. The simulated flow patterns agree well qualitatively with MRI-measured flow fields. 相似文献
13.
This work proposes a multi-scale simulation method that can simulate filling during the micro-injection molding process. The
multiscale simulation is comprised of two steps. In the first step, the macro-scale flow is analyzed using the conventional
method. In the second step, the micro-scale simulation is conducted taking the slip and surface tension into consideration
to investigate the filling of microcavity. Moreover, a conservative level set method is employed to accurately track the flow
front. First, numerical tests have been done for circular micro-channels. The results show that slip and surface tension play
important roles in the micro-regime. Second, to verify the multi-scale method, filling of a thin plate with micro-channel
patterns has been simulated. The results show that the proposed multi-scale method is promising for micro-injection molding
simulations. 相似文献
14.
15.
16.
步进电机控制器的研制与开发 总被引:1,自引:1,他引:0
在原荷兰进口粉针设备步进电机控制系统的基础上,针对原控制器存在的缺陷,增加了RS-485通讯接口和光电隔离元件,提高了控制器件的通信能力和抗干扰能力,经过一年多的实践验证,取得了较好的效果。 相似文献
17.
18.
19.
以产品信息模型为基础,将高层非几何信息映射到图纸空间,采用程序绘制与模板技术相结合的方法快速高效地生成工程图图框、标题栏。 相似文献