Low-power-Consumption metal oxide NO2 gas sensor based on micro-heater and screen printing technology

An NO2 micro gas sensor was fabricated based on a micro-heater using tin oxide nano-powders for effective gas detection and monitoring system with low power consumption and high sensitivity. The processes of the fabrication were acceptable to the conventional CMOS processes for mass-production. Semiconducting SnO2 nano-powders were synthesized via the co-precipitation method; and to increase the sensitivity of the NO2 gas rare metal dopants were added. In the structure of the micro-heater, the resistances of two semi-circular Pt heaters were connected to the spreader for thermal uniformity. The resistance of each heater becomes an electrically equal Wheatstone-bridge, which was divided in half by the heat spreading structure. Based on the aforementioned design, a low-power-consumption micro-heater was fabricated using the CMOS-compatible MEMS processes. A bridge-type micro-heater based on the Si substrate was fabricated via surface micro-machining. The NO2 sensing properties of a screen-printed tin oxide thick film device were measured The micro gas sensors showed substantial sensitivity down to 0.5 ppm NO2 at a low power consumption (34.2 mW).     

CO gas sensors operating at room temperature

Carbon monoxide (CO) gas sensors operating at room temperature were fabricated using rutile tin oxide and hexachloro-platinic acid to get a high dispersion rate of platinum in the tin oxide. The sensor material was analyzed by EDS, TG/DTA, SEM and FTIR. The number of chemisorbed atom per unit area and sensor sensitivity were related by space charge model. Gas sensing characteristics were investigated as a function of Pt content, heat-treatment temperature and operating temperature. The humidity dependence of the fabricated sensors is also discussed.     

Indium oxide thin film based ammonia gas and ethanol vapour sensor

A sensor for ammonia gas and ethanol vapour has been fabricated using indium oxide thin film as sensing layer and indium tin oxide thin film encapsulated in poly(methyl methacrylate) (PMMA) as a miniature heater. For the fabrication of miniature heater indium tin oxide thin film was grown on special high temperature corning glass substrate by flash evaporation method. Gold was deposited on the film using thermal evaporation technique under high vacuum. The film was then annealed at 700 K for an hour. The thermocouple attached on sensing surface measures the appropriate operating temperature. The thin film gas sensor for ammonia was operated at different concentrations in the temperature range 323–493 K. At 473 K the sensitivity of the sensor was found to be saturate. The detrimental effect of humidity on ammonia sensing is removed by intermittent periodic heating of the sensor at the two temperatures 323K and 448 K, respectively. The indium oxide ethanol vapour sensor operated at fixed concentration of 400 ppm in the temperature range 293–393 K. Above 373 K, the sensor conductance was found to be saturate. With various thicknesses from 150–300 nm of indium oxide sensor there was no variation in the sensitivity measurements of ethanol vapour. The block diagram of circuits for detecting the ammonia gas and ethanol vapour has been included in this paper.     

Fabrication of a room-temperature NO2 gas sensor based on WO3 films and WO3/MWCNT nanocomposite films by combining polyol process with metal organic decomposition method

Polyol process was combined with metal organic decomposition (MOD) method to fabricate a room-temperature NO₂ gas sensor based on a tungsten oxide (WO₃) film and another a nanocomposite film of WO₃/multi-walled carbon nanotubes (WO₃/MWCNTs). X-ray diffractometry (XRD), scanning electron microscopy (SEM) and atomic force microscopy (AFM) were used to analyze the structure and morphology of the fabricated films. Comparative gas sensing results indicated that the sensor that was based on the WO₃/MWCNT nanocomposite film exhibited a much higher sensitivity than that based on a WO₃ film in detecting NO₂ gas at room temperature. Microstructural observations revealed that MWCNTs were embedded in the WO₃ matrix. Therefore, a model of potential barriers to electronic conduction in the composite material was used to suggest that the high sensitivity is associated with the stretching of the two depletion layers at the surface of the WO₃ film and at the interface of the WO₃ film and the MWCNTs when detected gases are adsorbed at room temperature. The sensor that is based on a nanocomposite film of WO₃/MWCNT exhibited a strong response in detecting very low concentrations of NO₂ gas at room temperature and is practical because of the ease of its fabrication.     

Characterization of tin dioxide film for chemical vapors sensor

Recently, oxide semiconductor material used as transducer has been the central topic of many studies for gas sensor. In this paper we investigated the characteristic of a thick film of tin dioxide (SnO₂) film for chemical vapor sensor. It has been prepared by screen-printing technology and deposited on alumina substrate provided with two gold electrodes. The morphology, the molecular composition and the electrical properties of this material have been characterized respectively by Atomic Force Spectroscopy (AFM), Fourier Transformed Infrared Spectroscopy (FTIR) and Impedance Spectroscopy (IS). The electrical properties showed a resistive behaviour of this material less than 300 °C which is the operating temperature of the sensor. The developed sensor can identify the nature of the detected gas, oxidizing or reducing.     

Synthesis and NO2-sensing properties of one-dimensional tungsten oxide nanowire bundles

Tungsten oxide nanowires were synthesized by solvothermal method with tungsten hexachloride (WCl6) as precursor. X-ray diffraction, field emission scanning electron microscope and transmission electron microscope characterizations indicated that the as-synthesized nanowires are single phase monoclinic W18O49. With WCl6 concentration increasing, the bundled nanowire became shorter and thicker. The gas-sensing properties of W18O49 nanowire towards NO2 gas were evaluated and the results showed that the optimal gas sensitivity is achieved at 150 degrees C and the thinner nanowire exhibits the higher sensitivity. The results indicate that tungsten oxide nanowire is a promising gas-sensing material for high performance and low power cost NO2 gas sensor.     

Ethanol and LPG sensing characteristics of SnO<Subscript>2</Subscript> activated Cr<Subscript>2</Subscript>O<Subscript>3</Subscript> thick film sensor

The sensing response of pure and SnO₂ activated Cr₂O₃ to ethanol vapours and liquefied petroleum gas (LPG) has been investigated. Fine particles of commercial chromium oxide powder were selected and deposited as thick film to act as a gas sensor. The sensor surface has been activated by tin dioxide, on surface oxidation of tin chloride. The concentration of tin chloride solution, used as activator, was varied from 0 to 5% and its effect on gas response, selectivity and operating temperature has been studied. It was found that response to ethanol vapours significantly improved, whereas response to LPG remained unaffected. Moreover, operating temperature remains unchanged both for LPG and ethanol vapours.     

SWCNT气体传感器的NO2气敏特性

为了提高NO2气体检测的灵敏度和速度,以单壁碳纳米管（SWCNT）为装配介质,采用介电电泳方法获得单壁碳纳米管场效应晶体管（SWCNT—FET）作为气体传感器检测装置,通过原子力显微镜（AFM）和扫描电子显微镜（SEM）表征,结果显示,利用介电电泳方法能够成功地把SWCNTs装配到芯片的源漏两极间;通入NO2气体前后电特性变化情况的测试结果表明,选择接入电场频率为2MHz,峰峰值电压10V,介电电泳持续时间10s时,制备出SWCNT—FET成功率高,通入NO2气体后的电导率增加三个数量级。利用紫外光持续照射10min,SWCNT上的气体分子解附,使气体传感器可重复利用。     

A thin-film tin-oxide carbon monoxide sensor for exhaust gas analysis

A sputtered thin-film tin oxide:platinum sensor operating at 125 °C was successfully used to detect carbon monoxide gas from a car exhaust. Detection in the range 0.2 to 8% was demonstrated. Although ohmic contacts to the sensor were achieved, preliminary life tests showed that corrosion occurs in humid atmospheres. An alternative contact material is suggested. Further work on the change in response with thickness is required and this should include porosity studies.     

Selective detection of hydrogen sulfide using copper oxide-doped tin oxide based thick film sensor array

In this work, copper oxide-doped (1, 3 and 5 wt%) tin oxide powders have been synthesised by sol–gel method and thick film sensor array has been developed by screen printing technique for the detection of H₂S gas. Powder X-ray diffraction pattern shows that the tin oxide (SnO₂) doped with 3 wt% copper oxide (CuO) has smaller crystallite size in comparison to 0, 1 and 5 wt% CuO-doped SnO₂. Furthermore, field emission scanning electron microscopy manifests the formation of porous film consisting of loosely interconnected small crystallites. The effect of various amounts of CuO dopant has been studied on the sensing properties of sensor array with respect to hydrogen sulfide (H₂S) gas. It is found that the SnO₂ doped with 3 wt% CuO is extremely sensitive (82%) to H₂S gas at 150 °C, while it is almost insensitive to many other gases, i.e., hydrogen (H₂), carbon monoxide (CO), sulphur dioxide (SO₂) and liquefied petroleum gas (LPG). Moreover, at low concentration of gas, it shows fast recovery as compared to response time. Such high performance of 3 wt% CuO-doped SnO₂ thick film sensor is probably due to the diminishing of the p–n junction and the smallest crystallite size (11 nm) along with porous structure.     

High-performance ammonia gas sensor based on bimetallic oxide Zn2SnO4 decorated with reduced graphene oxide

The coupling effect and synergistic effect between the two metal elements of the bimetallic oxide make it has unique electrical characteristics and gas-sensitive properties, but it has the limitation of low conductivity. In this paper, the bimetallic oxide Zn₂SnO₄ was decorated with reduced graphene oxide (rGO) to increase its electrical conductivity and promote charge transfer during gas adsorption, which enhances the response and shortens the response time of the bimetallic oxide gas sensor. The high-performance ammonia sensor based on Zn₂SnO₄/rGO nanocomposite material was prepared by environmentally friendly hydrothermal method and spin coating technology. The structure and properties of composite materials were analyzed by X-ray diffraction (XRD), field emission scanning electron microscopy (SEM), transmission electron microscopy (TEM) and X-ray photoelectron spectroscopy (XPS). The ammonia sensing performance of Zn₂SnO₄/rGO nanocomposite sensor was tested at room temperature, including the dynamic response, response/recovery time, selectivity, repeatability, long-term stability. It showed a good sensing response to ammonia (22.94 for 100 ppm), and a fast response/recovery time (20 s/27 s). Finally, the response mechanism of Zn₂SnO₄/rGO nanocomposite sensor is explained. The enhanced ammonia sensing properties of Zn₂SnO₄/rGO nanocomposite sensor were ascribed to the synergistic effect and p–n heterojunction between Zn₂SnO₄ and rGO.

     

Simultaneous electrochemical detection of nitric oxide and carbon monoxide generated from mouse kidney organ tissues

A planar-type amperometric dual microsensor for simultaneous detection of nitric oxide and carbon monoxide is presented. The sensor consists of a dual platinum microdisk-based working electrode (WE) and a Ag/AgCl counter/reference electrode covered with an expanded poly(tetrafluoroethylene) (Tetra-tex) gas-permeable membrane. The dual WE possesses two different platinized platinum disks (WE1 and WE2, 250 and 25 microm in diameter, respectively). The larger WE1 is further modified with electrochemical deposition of tin. Use of two sensing disks different in their size as well as in their surface modification produces apparently different sensitivity ratios of NO to CO at WE1 and at WE2 (approximately 2 and approximately 10, respectively) that are induced by favorable CO oxidation on the surface of tin versus platinum. Anodic currents independently measured at WE1 and at WE2 are successfully converted to the concentrations of NO and CO in the co-presence of these gases using the differentiated sensitivities at each electrode. The sensor is evaluated in terms of its analytical performance: respectable linear dynamic range (sub nM to microM); low detection limit (approximately 1 nM for NO and <5 nM for CO); selectivity (over nitrite up to approximately 1 mM); and sensitivity (sufficient for analyzing physiological levels of NO and CO). Using the NO/CO dual microsensor, real-time, simultaneous, direct, and quantitative measurements of NO and CO generated from living biological tissue (mouse, c57, kidney) surfaces, for the first time, are reported.     

A hybrid gas-sensing material based on porous carbon fibers and a TiO2 photocatalyst

The electrode material for a gas sensor was prepared from electrospun carbon fibers. The electrode material was chemically activated to enlarge the gas adsorption sites, and carbon nanotubes (CNTs) were embedded into the polyacrylonitrile-based carbon fibers to enhance their electrical conductivity. TiO₂ was used as an additive to promote NO gas degradation and to improve their response in NO gas sensing. The chemical activation process increased the specific surface area and pore volume of the carbon fibers to values in excess of 2000 m²/g and 1.0 ml/g, respectively. To investigate the photocatalytic effects of the TiO₂ additive, NO gas sensing was conducted in the presence and absence of ultraviolet irradiation. The subsequent results indicate that the response of the sensor was improved due to the TiO₂-photocatalyzed decomposition of NO gas and the subsequent adsorption of HNO₂, NO₂, and HNO₃. The electrical resistance of the sensor was significantly reduced during NO gas sensing due to the electron hopping effect, and highly efficient gas adsorption was observed. In conclusion, a sensitive gas sensor electrode was realized by fabricating a porous material to increase the efficiency of gas adsorption, adding CNTs to improve its electrical conductivity and adding TiO₂ photocatalysts to promote NO decomposition.     

Room temperature CO and H2 sensing with carbon nanoparticles

We report on a shell-shaped carbon nanoparticle (SCNP)-based gas sensor that reversibly detects reducing gas molecules such as CO and H(2) at room temperature both in air and inert atmosphere. Crystalline SCNPs were synthesized by laser-assisted reactions in pure acetylene gas flow, chemically treated to obtain well-dispersed SCNPs and then patterned on a substrate by the ion-induced focusing method. Our chemically functionalized SCNP-based gas sensor works for low concentrations of CO and H(2) at room temperature even without Pd or Pt catalysts commonly used for splitting H(2) molecules into reactive H atoms, while metal oxide gas sensors and bare carbon-nanotube-based gas sensors for sensing CO and H(2) molecules can operate only at elevated temperatures. A pristine SCNP-based gas sensor was also examined to prove the role of functional groups formed on the surface of functionalized SCNPs. A pristine SCNP gas sensor showed no response to reducing gases at room temperature but a significant response at elevated temperature, indicating a different sensing mechanism from a chemically functionalized SCNP sensor.     

Detection of Moisture and Methanol Gas Using a Single Electrospun Tin Oxide Nanofiber

This letter reports the fabrication of a gas sensor based on a single tin oxide nanofiber made from dimethyldineodecanoate tin using electrospinning and metallorganics decomposition techniques. The fabricated sensor has been used to detect moisture and methanol gas. It showed high sensitivity to both gases and the response times of the complete testing system are in the range of 108-150 s for moisture, and 10-38 s for methanol gas, respectively.     

Synthesis and sensitivity properties of Pd-doped tin oxide nanoparticles dispersed in mesoporous silica

Pd-doped tin oxide nanoparticles dispersed in mesoporous silica were prepared by a thermal-decomposing method and characterized by isothermal nitrogen adsorption measurement, X-ray diffraction (XRD) and transmission electron microscopy (TEM). Tin oxide nanoparticles grow up slowly owing to confinement of the pores of the mesoporous silica. Due to the unique microstructure of the mesoporous silica, the obtained nanocomposite consists of a three-dimensional web of interconnected crystallites of tin oxide and exhibits electronic conductivity when enough tin oxide is assembled in the silica pores. The obtained nanocomposite has also a large specific surface area, and the tin oxide nanoparticles have a free surface in contact with the ambient air. Therefore, the samples exhibit a high sensitivity to CO gas, and have potential application.     

The influence of precursor powders and processing parameters on the properties of SnO2-based gas sensors

Semiconducting tin oxide precursor powders were synthesized via three different chemical processing routes. The influence of powder processing conditions on the physical properties, e.g., particle size, surface area and phase composition of both uncalcined and calcined materials, was investigated. These powders were used to fabricate gas sensors using thick-film screen-printing technology. The effect of precursor powders, sintering conditions, sensor temperature and Pd catalyst on the carbon monoxide, methane, propane and ethanol gas sensing characteristics of the sensors were investigated. Sensors were also fabricated using tin oxide powders obtained from a commercial source and their gas sensing properties were also investigated. The data indicates that the powder processing methodology, sensor fabrication conditions and Pd catalyst can profoundly influence the physical characteristics as well as the gas sensing properties of the sensors.     

Effect of tin addition on mesoporous silica thin film and its application for surface photovoltage NO2 gas sensor

Self-ordered and structure-controlled transparent films of tin-modified mesoporous silica (Sn/Si ratio of 0.5-3%) were first prepared using a molecule surfactant template method employing spin coating. A surface photovoltage (SPV) NO(2) gas sensor was then fabricated using these self-ordered tin-modified mesoporous silica thin films based on a metal-insulator-semiconductor structure. Highly sensitive tin-modified mesoporous silica was obtained that could detect NO(2) gas concentrations of as low as 300 ppb at room temperature. The detection mechanism for NO(2) is believed to involve both the surface area, which contributes to the change in dielectric constant, and the amount of tin incorporated, which contributes to the change in charge. It was found that, in this SPV sensor, the optimal Sn/Si ratio of 0.5% delivered record-high sensing performance.     

Synthesis of vanadium-doped tin oxide nanocrystallites for CO gas sensing

Vanadium-doped tin oxide nanoparticles have been synthesized by a hydrolysis and co-precipitation method from vanadium(III) acetylacetonate and tin tetrachloride. Addition of vanadium species into the tin oxide matrix resulted in a decrease in the grain size, as indicated by X-ray diffraction (XRD) and electron microscopy. X-ray photoelectron spectroscopy (XPS) revealed an interaction between tin and vanadium atoms in the mixed oxide structure and the presence of oxygen vacancies and vanadium cations with multiple oxidation states in the surface region. The binary solid solution exhibited a higher sensitivity to CO gas than pure tin oxide, after both were evaluated in a semiconductor gas sensor. Results demonstrate the feasibility of vanadium dopant for use to enhance sensor response.     

Flexible Transparent Films Based on Nanocomposite Networks of Polyaniline and Carbon Nanotubes for High‐Performance Gas Sensing

A flexible, transparent, chemical gas sensor is assembled from a transparent conducting film of carbon nanotube (CNT) networks that are coated with hierarchically nanostructured polyaniline (PANI) nanorods. The nanocomposite film is synthesized by in‐situ, chemical oxidative polymerization of aniline in a functional multiwalled CNT (FMWCNT) suspension and is simultaneously deposited onto a flexible polyethylene terephthalate (PET) substrate. An as‐prepared flexible transparent chemical gas sensor exhibits excellent transparency of 85.0% at 550 nm using the PANI/FMWCNT nanocomposite film prepared over a reaction time of 8 h. The sensor also shows good flexibility, without any obvious decrease in performance after 500 bending/extending cycles, demonstrating high‐performance, portable gas sensing at room temperature. This superior performance could be attributed to the improved electron transport and collection due to the CNTs, resulting in reliable and efficient sensing, as well as the high surface‐to‐volume ratio of the hierarchically nanostructured composites. The excellent transparency, improved sensing performance, and superior flexibility of the device, may enable the integration of this simple, low‐cost, gas sensor into handheld flexible transparent electronic circuitry and optoelectronic devices.