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1.
Itzik Shturman 《Thin solid films》2009,517(8):2767-2774
The effects of LaNiO3 (LNO) and Pt electrodes on the properties of Pb(Zrx,Ti1 − x)O3 (PZT) films were compared. Both LNO and PZT were prepared by chemical solution deposition (CSD) methods. Specifically, the microstructure of LNO and its influence on the PZT properties were studied as a function of PbO excess. Conditions to minimize the Pyrochlore phase and porosity were found. Remnant polarization, coercive field and fatigue limit were improved in the PZT/LNO films relative to the PZT/Pt films. Additionally, the PZT crystallization temperature over LNO was 500 °C, about ~ 50 °C lower than over Pt. The crystallization temperature reported here is amongst the lowest values for CSD-based PZT films.  相似文献   

2.
Pb(ZrxTi1 − x)O3 (x = 0.35, 0.40, 0.60, 0.65) thin films were prepared by sol-gel spin on technique. From the X-ray diffraction analysis, PZT films with Zr-rich compositions (x = 0.60 and 0.65) had (111) preferential orientation and the preferential orientation changed to (100) for Ti-rich compositions (x = 0.35 and 0.40). The dielectric measurements on the above compositions at room temperature showed that the dielectric constant values were higher in Zr-rich compositions compared to Ti-rich compositions. The ferroelectric behavior measured in terms of the remnant polarization (Pr) and coercive field (Ec) up to an applied field of 260 kV/cm depicted that the Zr-rich PZT films with (111) preferential orientation had higher Pr and lower Ec values compared to the Ti-rich PZT films with (100) preferential orientation can be understood from the domain switching mechanism.  相似文献   

3.
Large area Ba1 − xSrxTiO3 (BST) thin films with x = 0.4 or x = 0.5 were deposited on 75 mm diameter Si wafers in a pulsed laser deposition (PLD) chamber enabling full-wafer device fabrication using standard lithography. The deposition conditions were re-optimized for large PLD chambers to obtain uniform film thickness, grain size, crystal structure, orientation, and dielectric properties of BST films. X-ray diffraction and microstructural analyses on the BST films grown on Pt/Au/Ti electrodes deposited on SiO2/Si wafers revealed films with (110) preferred orientation with a grain size < 100 nm. An area map of the thickness and crystal orientation of a BST film deposited on SiO2/Si wafer also showed (110) preferred orientation with a film thickness variation < 6%. Large area BST films were found to have a high dielectric tunability of 76% at an electric field of 400 kV/cm and dielectric loss tangent below 0.03 at microwave frequencies up to 20 GHz and a commutation quality factor of ~ 4200.  相似文献   

4.
Even though the PZT ceramic system has been thoroughly studied and modified with different additives, no numerous reports have been published focusing on the PZT double ‘soft’ modification with La3+ and Nb5+ (PLZTN). In this paper, we explore the structural, morphological, dielectric, ferroelectric and piezoelectric properties of the PLZTN system for different doping levels (xLa3+ = xNb5+ = 0.4, 0.6, 0.8, 1.0 and 1.4 at.%) synthesized by conventional powders reaction. The temperature dependence of the piezoelectric response of poled ceramic disks is also analyzed and, according to its overall features, an optimum modification is proposed in order to develop PZT-based sensors for several applications.  相似文献   

5.
Bismuth perovskites have been attracting attention as a family of piezoelectric ceramics in place of the widely used Pb (Zr, Ti)O3 (PZT) system. The advantages of bismuth perovskites over PZT are environmentally more-friendly materials, a higher mechanical strength and Curie temperature. Most recently BiMgZrO3-PbTiO3 has been reported to be high temperature morphotropic phase boundary (MPB) piezoelectric with appreciably good ferroelectric and piezoelectric properties.Bismuth containing crystalline solutions [(BiMgZrO3)1−y-(BiFeO3)y]x-(PbTiO3)1−x, (BMZ-BF-PT) have been synthesized by high temperature solid-state reaction technique. The crystalline symmetry varied with the composition, indicating good solid-state solubility of BMZ and BF with PT. X-ray diffraction (XRD) reveals that BMZ-BF-PT has a single-phase perovskite structure. The Morphotropic Phase Boundary (MPB) of BMZ-PT system lies in the region x = 0.55 to x = 0.6 which is supported by the transformation from tetragonal to rhombohedral phase. The SEM photographs reveal the uniform distribution of grains in the matrix. Variation of dielectric parameters with frequency (at room temperature) exhibit typical dielectric behavior for all compositions.  相似文献   

6.
Q.G. Chi 《Thin solid films》2009,517(17):4826-4829
Lanthanum-and calcium-modified PbTiO3 (PLCT) ferroelectric thin films were successfully prepared on Pt(111)/Ti/SiO2/Si substrates by pulsed laser deposition. Influence of TiOx seed layer on texture and electric properties of PLCT films was investigated. It is found the PLCT films without seed layer exhibited highly (100)-textured, while using about 9 nm TiOx as seed layer lead to highly (301)-textured. The PLCT film with TiOx seed layer possess higher remnant polarization (Pr = 26 µC/cm2), better pyroelectric coefficient and figure of merit at room temperature (p = 370 µC/m2k, Fd = 190 × 10− 5 Pa− 1/2) than that of film without seed layer. The mechanism of the enhanced electric properties was also discussed.  相似文献   

7.
As the introduction of piezoelectric materials into micro electromechanical systems increases, there is a correlating requirement for understanding the mechanical properties of these films. We have investigated the mechanical properties of unpoled PZT [Pb(Zr,Ti)O3] and PMNT [Pb(Mg1/3Nb2/3)1−xTixO3] thin films deposited by sputtering. In this study, nano-indentation, a technique which allows determination of the transverse mechanical properties, is used. It is the easiest method for assessing the biaxial elastic modulus and the hardness of thin films. It was confirmed that neither cracks, nor pile-ups, were observed for indentation depths below 20% of the film's thickness.The continuous stiffness method was used and allowed us to demonstrate that the indentation modulus decreases continuously with increasing grain diameter. This can be explained by the orientation changes of the crystallites with increasing grain diameter. The indentation modulus measured under load, or at almost null load (that is when the ferroelectric domains are or are not oriented by the stress) are coherent with those determined by the same method with a hard bulk ceramic. These results tend to show that the compliance Cij of the hard bulk ceramic can possibly be used with sputtered thin films. The hardness is almost independent of the grain diameter (Hb ≅ 7.5 ± 0.9 GPa) and higher than that for the bulk PZT ceramics considered in this study. PMNT and PZT films have appreciably the same mechanical characteristics. No influence of the film thickness was found on the values of both of these parameters.  相似文献   

8.
Nanostructured (Pb1 − xSrx)TiO3 (PST) (x = 0.1, 0.2 and 0.3) thin films have been prepared by chemical solution deposition process using spin coating technique. The solution as such was deposited on Pt/Ti/SiO2/Si substrates and annealed at 650 °C/3h. Nanograins dependent dielectric properties of PST films show dielectric constant up to the higher frequency region, low losses, large tunability and phase transition at small temperature. The impedance data has been fitted by Cole-Cole model to study the effect of grain boundaries on the dielectric properties. The current-voltage characteristics have been measured to study leakage current in PST films and described by Poole-Frenkel emission model. It is suggested that the key carrier transport process in PST films is emission of electrons from a trap state near the metal-film interface into a continuum of states associated with each conductive dislocation. The activation energy value for carrier transport in PST films is obtained from temperature-dependent current-voltage characteristics.  相似文献   

9.
Lead-free piezoelectric ceramics, (Bi1/2Na1/2)1 − x(Bi1/2K1/2)xTiO3-0.03(Na0.5K0.5)NbO3 (x = 0.10-0.40) were synthesized by conventional solid-state sintering. A morphotropic phase boundary (MPB) between rhombohedral and tetragonal phases was confirmed. Two dielectric anomalies can be observed, showing diffused phase transition behavior. There is no shift of the dielectric maximum temperature with frequency due to the contribution of space charge at high temperatures, similar to pure (Bi1/2Na1/2)TiO3. The materials near MPB show a strong compositional dependence with the optimal properties of a d33 of 167 pC/N, a kp of 35.5%, a Pr of 27.6 μC/cm2 and a Ec of 27.9 kV/cm, suitable for future application.  相似文献   

10.
Ba0.7Sr0.3(Ti1  xZrx)O3 (x = 0, 0.1, 0.2) (BSZT) thin films have been prepared on copper foils using sol-gel method. The films were annealed in an atmosphere with low oxygen pressure so that the substrate oxidation was avoided and the formation of the perovskite phase was allowed. The X-ray diffraction results show a stable polycrystalline perovskite phase, with the diffraction peaks of the BSZT films shifting toward the smaller 2θ with increasing Zr content. Scanning electron microscopy images show that the grain size of the BSZT thin films decreases with increasing Zr content. High resolution transmission electron microscopy shows the clear lattice and domain structure in the film. The dielectric peaks of the BSZT thin films broaden with increasing Zr content. Leakage current density of Ba0.7Sr0.3(Ti1  xZrx)O3 (x = 0.1) thin film is the lowest over the whole applied voltage.  相似文献   

11.
A bismuth and lead oxide based perovskite ternary solid solution xBi(Zn1/2Ti1/2)O3 − yPbZrO3 − zPbTiO3 (xBZT − yPZ − zPT) was investigated as an attempt to develop a high TC ferroelectric material for piezoelectric sensor and actuator applications. A morphotropic phase boundary (MPB) between rhombohedral and tetragonal phases was determined through an XRD study on a pseudobinary line 0.1BZT − 0.9[xPT − (1 − x)PZ] for composition 0.1Bi(Zn1/2Ti1/2)O3 − 0.5PbZrO3 − 0.4PbTiO3. Enhanced piezoelectric and ferroelectric activities were observed for MPB composition with dielectric constant εr′ ~ 23,000 at Curie temperature (TC) ≈ 320 °C, remanent polarization (Pr) = 35 μC/cm2, piezoelectric coefficient (d33) = 300 pC/N, unipolar strain = 0.15%, and electromechanical coupling coefficient (kP) = 0.45.  相似文献   

12.
Absract Dielectric and electromechanical losses play a critical role in the performance of the transducer in high power conditions. In this study, we report a systematic study on the effect of Mn-doping on the losses in the Pb(Zr x Ti1−x )O3–Pb(Zn1/3Nb2/3)O3 (PZT–PZN) system. Two types of sintering conditions were employed to synthesize ceramics with varying grain sizes. The Zr/Ti ratio in the PZT system was fixed at 52/48 corresponding to morphotropic phase boundary (MPB) and Mn concentration was varied from 0 to 0.9 wt%. The results show that the composition 0.9PZT–0.1PZN + 0.5 wt% Mn provides optimized magnitude for the dielectric, piezoelectric, and loss properties.  相似文献   

13.
Ceramics in a PZT-PCN system with the formula (1 − x)Pb(Zr1/2Ti1/2)O3-(x)Pb(Co1/3Nb2/3)O3, where x = 0.0, 0.1, 0.2, 0.3, 0.4, 0.5, and 1.0, were prepared using a solid-state mixed-oxide technique with columbite−CoNb2O6 and wolframite−ZrTiO4 precursors. The crystal structure of the specimens studied with X-ray diffraction (XRD) analysis showed a coexistence between tetragonal and pseudo cubic phases at composition x = 0.2. The SEM micrograph showed that the average grain size significantly decreased with increasing PCN content. A maximum dielectric constant was observed at composition x = 0.2, while the transition temperature strongly decreased with increasing PCN content. All ceramics also showed diffused phase transition behaviors with a minimum diffusivity at x = 0.2. The morphotropic phase boundary (MPB) lay at the 0.8PZT-0.2PCN composition.  相似文献   

14.
Thin films of Bi3.15Nd0.85Ti3O12 (BNT) and Bi3.15Nd0.85Ti3 − xZrxO12 (BNTZx, x = 0.1 and 0.2) were fabricated on Pt/TiO2/SiO2/Si(100) substrates by a chemical solution deposition (CSD) technique at 700 °C. Structures, surface morphologies, leakage current characteristics and Curie temperature of the films were studied as a function of Zr ion content by X-ray diffraction, atomic force microscopy, ferroelectric test system and thermal analysis, respectively. Experimental results indicate that Zr ion substitution in the BNT film markedly decreases the leakage current of the film, while almost not changing the Curie temperature of the film, which is at about 420-460 °C. The decrease of the leakage current in BNTZx films is that the conduction by the electron hopping between Ti4+ and Ti3+ ions is depressed because Zr4+ ions can block the path between two adjacent Ti ions and enlarge hopping distance.  相似文献   

15.
ZnO-(1 − x)TiO2-xSnO2 (x = 0.04-0.2) ceramics were prepared by conventional mixed-oxide method combined with a chemical processing. Fine particle powders were prepared by chemical processing to activate the formation of compound and to improve the sinterability. One wt.% of V2O5 and B2O3 with the mole ratios of 3:1 were used to lower the sintering temperature of ceramics. The effect of Sn content on phase structure and dielectric properties were investigated. The results show that the substituting Sn for Ti accelerates the hexagonal phase transition to cubic phase, and an inverse spinel structure Zn2(Ti1−xSnx)O4 solid solution forms. The best dielectric properties obtained at x = 0.12. The ZnO-0.88TiO2-0.12SnO2 ceramics sintered at 900 °C exhibit a good dielectric property: ?r = 29 and tan δ = 9.86 × 10−5. Due to their good dielectric properties, low firing characteristics, ZnO-(1 − x)TiO2-xSnO2 (x = 0.04-0.2) can serve as the promising microwave dielectric capacitor.  相似文献   

16.
Perfect (111)-oriented Pb(ZrxTi1?x)O3 (PZT) thin films were grown on cobalt ferrite buffered Pt(111)/Ti/SiO2/Si substrate by pulsed laser deposition method using various targets with different Zr/Ti ratios ranging from 30/70 to 70/30. The results of X-ray diffraction analyses indicated that the composition of morphotropic phase boundary in the present PZT films is same as the bulk PZT (Zr/Ti = 52/48). The effect of Zr/Ti ratio of the PZT films was investigated by the ferroelectric domain structure and the piezoelectric characteristics of the films by piezoresponse force microscopy, as well as polarization measurement. The results revealed that the present tetragonal PZT film has a higher ferroelectric domain switching than rhombohedral one and the film with composition of Zr/Ti = 52/48 showed relatively high value of squareness of P–E loop and Ec as well as high piezoresponse.  相似文献   

17.
T. Yu  K.W. Kwok  H.L.W. Chan 《Materials Letters》2007,61(10):2117-2120
(1 − x)Bi0.5Na0.5TiO3-xBi0.5K0.5TiO3 [BNT-BKT-100x] thin films have been successfully deposited on Pt/Ti/SiO2/Si substrates by a sol-gel process together with rapid thermal annealing. A morphotropic phase boundary (MPB) between Bi0.5Na0.5TiO3 and Bi0.5K0.5TiO3 was determined around x ∼ 0.15. Near the MPB, the film exhibits the largest grain size, the highest ε value (360) and the largest Pr value (13.8 μC/cm2). The BNT-BKT thin film system is expected to be a new and promising candidate for lead-free piezoelectric applications.  相似文献   

18.
Xiaofei Han  Zhude Xu 《Thin solid films》2009,517(19):5653-989
Cd1 − xZnxO nanocrystalline thin films with rock-salt structure were obtained through thermal decomposition of Cd1 − xZnxO2 (x = 0, 0.37, 0.57, 1) thin films which were electrodeposited from aqueous solution at room temperature. X-ray diffraction results showed that the Zn ions were incorporated into rock salt-structure of CdO and the crystal lattice parameters decreased with the increase of Zn contents. The bandgaps of the Cd1 − xZnxO thin films were obtained from optical transmission and were 2.40, 2.51, 2.63 and 3.25 eV, respectively.  相似文献   

19.
10 mol% Pb(Fe1/2Nb1/2)O3 (PFN) modified Pb(Mg1/3Nb2/3)O3-PbZr0.52Ti0.48O3 (PMN-PZT) relaxor ferroelectric ceramics with compositions of (0.9 − x)PMN-0.1PFN-xPZT (x = 0.1, 0.2, 0.3, 0.4, 0.5, 0.6, 0.7, 0.8 and 0.9) were prepared. X-ray diffraction investigations indicated that as-prepared ceramics were of pure perovskite phase and the sample with composition of x = 0.8 was close to morphotropic phase boundary (MPB) between rhombohedral and tetragonal phase. Dielectric properties of the as-prepared ceramics were measured, and the Curie temperature (Tc) increased sharply with increasing PZT content and could be higher than 300 °C around morphotropic phase boundary (MPB) area. At 1 kHz, the sample with composition of x = 0.1 had the largest room temperature dielectric constant ?r = 3519 and maximum dielectric constant ?m = 20,475 at Tm, while the sample with composition of x = 0.3 possessed the maximum dielectric relaxor factor of γ = 1.94. The largest d33 = 318 pC/N could be obtained from as-prepared ceramics at x = 0.9. The maximum remnant polarization (Pr = 28.3 μC/cm2) was obtained from as-prepared ceramics at x = 0.4.  相似文献   

20.
Qingdong Chen 《Thin solid films》2010,518(20):5683-5686
Within the framework of modified Landau-Devonshire thermodynamic theory, the equilibrium polarization states and physical properties of single-domain Pb(Zr1-xTix)O3 (PZT) thin films epitaxially grown on dissimilar cubic substrates are investigated. The “misfit strain-temperature” phase diagrams are obtained for several different compositions (x = 0.75, 0.65 and 0.55) of PZT films. The presence of stability range of the monoclinic phase is the characteristic feature of these phase diagrams, which separates the stability ranges of the tetragonal phase and the orthorhombic phase. Further analysis shows that the monoclinic phase widens with the increase of Zr content, and meanwhile the center shifts from positive values of the misfit strain towards zero.  相似文献   

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