A study in flip-chip UBM/bump reliability with effects of SnPb solder composition

This paper aims to investigate the electromigration phenomenon of under-bump-metallization (UBM) and solder bumps of a flip-chip package under high temperature operation life test (HTOL). UBM is a thin film Al/Ni(V)/Cu metal stack of 1.5 μm; while bump material consists of Sn/37Pb, Sn/90Pb, and Sn/95Pb solder. Current densities of 2500 and 5000 A/cm² and ambient temperatures of 150–160 °C are applied to study their impact on electromigration. It is observed that bump temperature has more significant influence than current density does to bump failures. Owing to its higher melting point characteristics and less content of Sn phase, Sn/95Pb solder bumps are observed to have 13-fold improvement in Mean-Time-To-Failure (MTTF) than that of eutectic Sn/37Pb. Individual bump resistance history is calculated to evaluate UBM/bump degradation. The measured resistance increase is from bumps with electrical current flowing upward into UBM/bump interface (cathode), while bumps having opposite current polarity cause only minor resistance change. The identified failure sites and modes from aforementioned high resistance bumps reveal structural damages at the region of UBM and UBM/bump interface in forms of solder cracking or delamination. Effects of current polarity and crowding are key factors to observed electromigration behavior of flip-chip packages.     

Failure Morphology After Drop Impact Test of Ball Grid Array (BGA) Package With Lead-Free Sn–3.8Ag–0.7Cu and Eutectic SnPb Solders

High strain-rate drop impact tests were performed on ball grid array (BGA) packages with solder compositions of (in wt%) Sn-3.8Ag-0.7Cu (SnAgCu) and eutectic Sn-37Pb (SnPb). Solder balls were joined to the metallizations of plated Ni on the device side and plated Cu on the board side. The BGA packages were tested at 1500 g within 0.5 ms, resulting in an imposed bending strain of 0.2-0.3%. Both SnAgCu and SnPb joints failed at the interface at the device side but the detailed failure morphology differed significantly. The crack location for the eutectic SnPb was primarily through the solder and seldom extended through an entire bump. The SnPb joints also exhibited bulk solder deformation. The SnAgCu joints showed extremely brittle behavior with an interfacial failure at the (Ni,Cu)₃Sn₄ intermetallics/Ni under bump metallization (UBM) interface. The strain rate sensitivity of bulk solder defines the drop test performance and the eutectic SnPb solder showed better drop impact performance due to a less strain rate sensitivity     

Effect of polyimide baking on bump resistance in flip-chip solder joints

The effect of polyimide (PI) thermal process on the bump resistance of flip-chip solder joint is investigated for 28 nm technology device with aggressive extreme low-k (ELK) dielectric film scheme and lead-free solder. Kelvin structure is designed in the bump array to measure the resistance of single solder bump. An additional low-temperature pre-baking before standard PI curing increases the bump resistance from 9.3 mΩ to 225 mΩ. The bump resistance increment is well explained by a PI outgassing model established based on the results of Gas Chromatography–Mass Spectrophotometer (GC–MS) analysis. The PI outgassing substances re-deposit on the Al bump pad, increasing the resistance of interface between under-bump metallurgy (UBM) and underneath Al pad. The resistance of interface is twenty-times higher than pure solder bump, which dominates the measured value of bump resistance. Low-temperature plasma etching prior to UBM deposition is proposed to retard the PI outgassing, and it effectively reduces the bump resistance from 225 mΩ to 10.8 mΩ.     

Effects of Cu contents in Pb-free solder alloys on interfacial reactions and bump reliability of Pb-free solder bumps on electroless Ni-P under-bump metallurgy

Using the screen-printed solder-bumping technique on the electroless plated Ni-P under-bump metallurgy (UBM) is potentially a good method because of cost effectiveness. As SnAgCu Pb-free solders become popular, demands for understanding of interfacial reactions between electroless Ni-P UBMs and Cu-containing Pb-free solder bumps are increasing. It was found that typical Ni-Sn reactions between the electroless Ni-P UBM and Sn-based solders were substantially changed by adding small amounts of Cu in Sn-based Pb-free solder alloys. In Cu-containing solder bumps, the (Cu,Ni)₆Sn₅ phase formed during initial reflow, followed by (Ni,Cu)₃Sn₄ phase formation during further reflow and aging. The Sn3.5Ag solder bumps showed a much faster electroless Ni-P UBM consumption rate than Cu-containing solder bumps: Sn4.0Ag0.5Cu and Sn0.7Cu. The initial formation of the (Cu,Ni)₆Sn₅ phase in SnAgCu and SnCu solders significantly reduced the consumption of the Ni-P UBM. The more Cu-containing solder showed slower consumption rate of the Ni-P UBM than the less Cu-containing solder below 300°C heat treatments. The growth rate of the (Cu,Ni)₆Sn₅ intermetallic compound (IMC) should be determined by substitution of Ni atoms into the Cu sublattice in the solid (Cu,Ni)₆Sn₅ IMC. The Cu contents in solder alloys only affected the total amount of the (Cu,Ni)₆Sn₅ IMC. More Cu-containing solders were recommended to reduce consumption of the Ni-based UBM. In addition, bump shear strength and failure analysis were performed using bump shear test.     

Preparation and Temperature Cycling Reliability of Electroless Ni(P) Under Bump Metallization

The reliability of electroless Ni(P) under-bump metallization (UBM) was evaluated via temperature cycling and solder bump shear strength tests. Commercial diodes and dummy dies fabricated in-house were used as substrates for the electroless Ni(P) UBM deposition. Solder bumps were formed after reflowing eutectic 63Sn37Pb solder foils over the Ni(P) UBM. The solder bump shear strength was measured before and after different temperature cycling. The results from this study showed that the UBM thickness and dimension had important effects on the solder bump shear strength and reliability. Both the larger UBM dimension and larger UBM thickness tended to induce higher stress in the UBM, which resulted in the lower solder bump shear strength and lower temperature cycling reliability. A better UBM structure solution for high current electronic packaging application is indicated in this paper     

Interfacial reactions and compound formation of Sn-Ag-Cu solders by mechanical alloying on electroless Ni-P/Cu under bump metallization

Electroless Ni-P under bump metallization (UBM) has been widely used in electronic interconnections due to the good diffusion barrier between Cu and solder. In this study, the mechanical alloying (MA) process was applied to produce the SnAgCu lead-free solder pastes. Solder joints after annealing at 240°C for 15 min were employed to investigate the evolution of interfacial reaction between electroless Ni-P/Cu UBM and SnAgCu solder with various Cu concentrations ranging from 0.2 to 1.0 wt.%. After detailed quantitative analysis with an electron probe microanalyzer, the effect of Cu content on the formation of intermetallic compounds (IMCs) at SnAgCu solder/electroless Ni-P interface was evaluated. When the Cu concentration in the solder was 0.2 wt.%, only one (Ni, Cu)₃Sn₄ layer was observed at the solder/electroless Ni-P interface. As the Cu content increased to 0.5 wt.%, (Cu, Ni)₆Sn₅ formed along with (Ni, Cu)₃Sn₄. However, only one (Cu, Ni)₆Sn₅ layer was revealed, if the Cu content was up to 1 wt.%. With the aid of microstructure evolution, quantitative analysis, and elemental distribution by x-ray color mapping, the presence of the Ni-Sn-P phase and P-rich layer was evidenced.     

Optimal phosphorous content selection for the soldering reaction of Ni-P under bump metallization with Sn-Ag-Cu solder

Nickel plating has been used as the under bump metallization (UBM) in the microelectronics industry. The electroplated Ni-P UBM with different phosphorous contents (7 wt.%, 10 wt.%, and 13 wt.%) was used to evaluate the interfacial reaction between Ni-P UBM and Sn-3Ag-0.5Cu solder paste during multiple reflow. (Cu,Ni)₆Sn₅ intermetallic compounds (IMC) formed in the SnAgCu solder/Ni-P UBM interface after the first reflow. For three times reflow, (Ni,Cu)₃Sn₄ IMC formed, while (Cu,Ni)₆Sn₅ IMC spalled into the solder matrix. With further increasing cycles of reflow, the Ni-Sn-P layer formed between (Ni,Cu)₃Sn₄ IMC and Ni-P UBM for Ni-10wt.%P and Ni-13wt.%P UBM. However, almost no Ni-Sn-P layer was revealed for the Ni-7wt.%P UBM even after ten cycles of reflow. In consideration of the wettability of Ni-P UBM, the interfacial reaction of SnAgCu/Ni-P, and dissolution of Ni-P UBM, the optimal phosphorous selection in Ni-P UBM was proposed and also discussed.     

Failure mechanism of lead-free solder joints in flip chip packages

The failure mechanisms of SnAgCu solder on Al/Ni(V)/Cu thin-film, underbump metallurgy (UBM) were investigated after multiple reflows and high-temperature storage using a ball shear test, fracture-surface analysis, and cross-sectional microstructure examination. The results were also compared with those of eutectic SnPb solder. The Al/Ni (V)/Cu thin-film UBM was found to be robust enough to resist multiple reflows and thermal aging at conditions used for normal production purposes in both SnAgCu and eutectic SnPb systems. It was found that, in the SnAgCu system, the failure mode changed with the number of reflows, relating to the consumption of the thin-film UBM because of the severe interfacial reaction between the solder and the UBM layer. After high-temperature storage, the solder joints failed inside the solder ball in a ductile manner in both SnAgCu and SnPb systems. Very fine Ag₃Sn particles were formed during multiple reflows in the SnAgCu system. They were found to be able to strengthen the bulk solder. The dispersion-strengthening effect of Ag₃Sn was lost after a short period of thermal aging, caused by the rapid coarsening of these fine particles.     

MEMS压力传感器上柔性化凸点制备方法

介绍了一种适用于MEMS压力传感器的低成本、柔性化凸点下金属层(Under Bump Metal,UBM)和凸点(Bump)的制备工艺。其中凸点下金属层分为Ni-P/Cu两层,使用化学镀的方法沉积在Al焊盘表面;凸点通过焊膏印刷回流预制于陶瓷基片上,再通过转移工艺移植到焊盘上。为了检验此套工艺制出的凸点结构是否具有足够的强度,对凸点进行了剪切破坏试验。结果表明,凸点与凸点下金属层、凸点下金属层与Al焊盘均结合牢固,破坏主要发生在焊料凸点内最薄弱的金属间化合物层(Intermetallic Compound,IMC)。     

Plasma reflow bumping of Sn-3.5 Ag solder for flux-free flip chip package application

A new flux-free reflow process using Ar+10%H/sub 2/ plasma was investigated for application to solder bump flip chip packaging. The 100-/spl mu/m diameter Sn-3.5wt%Ag solder balls were bonded to 250-/spl mu/m pitch Cu/Ni under bump metallurgy (UBM) pattern by laser solder ball bonding method. Then, the Sn-Ag solder balls were reflowed in Ar+H/sub 2/ plasma. Without flux, the wetting between solder and UBM occurred in Ar+H/sub 2/ plasma. During plasma reflow, the solder bump reshaped and the crater on the top of bump disappeared. The bump shear strength increased as the Ni/sub 3/Sn/sub 4/ intermetallic compounds formed in the initial reflow stage but began to decrease as coarse (Cu,Ni)/sub 6/Sn/sub 5/ grew at the solder/UBM interface. As the plasma reflow time increased, the fracture mode changed from ductile fracture within the solder to brittle fracture at the solder/UBM interface. The off-centered bumps self-aligned to patterned UBM pad during plasma reflow. The micro-solder ball defects occurred at high power prolonged plasma reflow.     

Manufacturing of Cu/electroless nickel/Sn-Pb flip chip solder bumps

A process for manufacturing Cu/electroless Ni/Sn-Pb solder bump is discussed in this paper. An attempt to replace zincation with a Cu film as an active layer for the electroless Ni (EN) deposition on Al electrode on Si wafer is presented. Cu/electroless Ni is applied as under bump metallurgy (UBM) for solder bump. The Cu film required repeated etches with nitric acid along with activation to achieve a satisfactory EN deposit. Fluxes incorporating rosin and succinic acid were investigated for wetting kinetics and reflow effectiveness of the electroplated solder bump. The solder plating current density and the reflow condition for achieving solder bumps with uniform bump height were described. The Cu/EN/Sn-Pb solder system was found to be successfully produced on Al terminal in this study that avoids using zincating process     

Investigation of electromigration reliability of redistribution lines in wafer-level chip-scale packages

Wafer-level chip-scale packages (WLCSPs) have become subject to the same drive for miniaturization as all electronic packages. The I/O count is increasing and ball pitch is shrinking at the expense of trace pitch and in turn, current densities are increasing. This leads to current crowding and Joule heating in the vicinity of solder joints and under bump metallurgy (UBM) structures where resistance values change significantly. These phenomena are responsible for structural damage of redistribution line (RDL)/UBM and UBM/solder interconnects due to ionic diffusion or electromigration. In this work, sputtered Al and electroplated Cu RDLs were examined and quantified by three-dimensional electrothermal coupling analysis. Results provide a guideline for estimating maximum allowable currents and electromigration lifetime.     

Fracture morphology and mechanism of IMC in Low-Ag SAC Solder/UBM (Ni(P)-Au) for WLCSP

In this study, the brittle fracture of intermetallic compound (IMC) between low-Ag SnAgCu (SAC) solder and under bump metallization (UBM) under high-speed pull condition is studied for wafer-level chip-scale packages (WLCSP). The fracture morphology and fracture mechanism of IMC are analyzed by SEM, EDX and deeply etching techniques. Also, the forming mechanism of IMC and the relation with joint strength are investigated. The effects of high-temperature (HTS) aging on the fracture performance of IMC are examined. Results shows that compared with keeping time, storage temperature is a much more important influencing factor on the formation of IMC and soldering joints strength. Cu content in the solder is another key influencing factor as well.     

Experimental characterization and mechanical behavior analysis of intermetallic compounds of Sn–3.5Ag lead-free solder bump with Ti/Cu/Ni UBM on copper chip

Due to today’s trend towards ‘green’ products, the environmentally conscious manufacturers are moving toward lead-free schemes for electronic devices and components. Nowadays the bumping process has become a branch of the infrastructure of flip chip bonding technology. However, the formation of excessively brittle intermetallic compound (IMC) between under bump metallurgy (UBM)/solder bump interface influences the strength of solder bumps within flip chips, and may create a package reliability issue. Based on the above reason, this study investigated the mechanical behavior of lead-free solder bumps affected by the solder/UBM IMC formation in the duration of isothermal aging. To attain the objective, the test vehicles of Sn–Ag (lead-free) and Sn–Pb solder bump systems designed in different solder volumes as well as UBM diameters were used to experimentally characterize their mechanical behavior. It is worth to mention that, to study the IMC growth mechanism and the mechanical behavior of a electroplated solder bump on a Ti/Cu/Ni UBM layer fabricated on a copper chip, the test vehicles are composed of, from bottom to top, a copper metal pad on silicon substrate, a Ti/Cu/Ni UBM layer and electroplated solder bumps. By way of metallurgical microscope and scanning-electron-microscope (SEM) observation, the interfacial microstructure of test vehicles was measured and analyzed. In addition, a bump shear test was utilized to determine the strength of solder bumps. Different shear displacement rates were selected to study the time-dependent failure mechanism of the solder bumps. The results indicated that after isothermal aging treatment at 150 °C for over 1000 h, the Sn–Ag solder revealed a better maintenance of bump strength than that of the Sn–Pb solder, and the Sn–Pb solder showed a higher IMC growth rate than that of Sn–Ag solder. In addition, it was concluded that the test vehicles of copper chip with the selected Ti/Cu/Ni UBMs showed good bump strength in both the Sn–Ag and Sn–Pb systems as the IMC grows. Furthermore, the study of shear displacement rate effect on the solder bump strength indicates that the analysis of bump strength versus thermal aging time should be identified as a qualitative analysis for solder bump strength determination rather than a quantitative one. In terms of the solder bump volume and the UBM size effects, neither the Sn–Ag nor the Sn–Pb solders showed any significant effect on the IMC growth rate.     

Comparison of electroplated eutectic Bi/Sn and Pb/Sn solder bumpson various UBM systems

The effect of a reflow process and under bump metallurgy (UBM) systems on the growth of intermetallic compounds (IMC) of the 57Bi/43Sn and 37Pb/63Sn solder bump/UBM interfaces was investigated. The selected UBM systems were sputtered Al/Ti/Cu, sputtered Al/NiV/Cu, Al/electroless Ni/immersion Au, and Al/Ti/electroless Cu. An alloy electroplating method was used for the solder bumping process. The microstructure and composition of intermetallic compound (IMC) phases and their morphologies were examined using scanning electron microscopy and X-ray diffraction. The Cu₆Sn₅ η'-phase IMC appeared on all Cu containing UBM cases with Pb/Sn and Bi/Sn solders and the Cu ₃Sn ϵ-phase was detected only with Pb/Sn solder bumps. The Ni₃Sn₄ IMC was found to be the main IMC phase between Ni and solder. The Ni₃Sn secondary IMC was also detected on the electroless Ni UBM with PbSn solder after ten times reflow. Through the bump shear test, Al/NiV/Cu, Al/elNi/Au, and Al/Ti/elCu UBMs showed good stability with Bi/Sn and Pb/Sn solder in terms of metallurgical aspects     

Isothermal aging effects on the microstructure and solder bump shear strength of eutectic Sn37Pb and Sn3.5Ag solders

The reliability of the eutectic Sn37Pb (63%Sn37%Pb) and Sn3.5Ag (96.5%Sn3.5%Ag) solder bumps with an under bump metallization (UBM) consisting of an electroless Ni(P) plus a thin layer of Au was evaluated following isothermal aging at 150 °C. All the solder bumps remained intact after 1500 h aging at 150 °C. Solder bump microstructure evolution and interface structure change during isothermal aging were observed and correlated with the solder bump shear strength and failure modes. Cohesive solder failure was the only failure mode for the eutectic Sn37Pb solder bump, while partial cohesive solder failure and partial Ni(P) UBM/Al metallization interfacial delamination was the main failure mode for eutectic Sn3.5Ag solder bump.     

The microstructure characterization of ultrasmall eutectic Bi-Sn solder bumps on Au/Cu/Ti and Au/Ni/Ti under-bump metallization

The microstructure of the ultrasmall eutectic Bi-Sn solder bumps on Au/Cu/Ti and Au/Ni/Ti under-bump metallizations (UBMs) was investigated as a function of cooling rate. The ultrasmall eutectic Bi-Sn solder bump, about 50 μm in diameter, was fabricated by using the lift-off method and reflowed at various cooling rates using the rapid thermal annealing system. The microstructure of the solder bump was observed using a backscattered electron (BSE) image and the intermetallic compound was identified using energy dispersive spectroscopy (EDS) and an x-ray diffractometer (XRD). The Bi facet was found at the surface of the ultrasmall Bi-Sn solder bumps on the Au/Cu/Ti UBM in almost all specimens, and the interior microstructure of the bumps was changed with the solidification rate. The faceted and polygonal intermetallic compound was found in the case of the Bi-Sn solder bump on the Au (0.1 μm)/Ni/Ti UBM, and it was confirmed to be the (Au_1−x−yBi_xNi_y)Sn₂ phase by XRD. The intermetallic compounds grown form the Au (0.1 μm)/Ni/Ti UBM interface, and they interrupted the growth of Bi and Sn phases throughout the solder bump. The ultrasmall eutectic Bi-Sn solder bumps on the Au (0.025 μm)/Ni/Ti UBM showed similar microstructures to those on the Au/Cu/Ti UBM.     

A reliability comparison of electroplated and stencil printed flip-chip solder bumps based on UBM related intermetallic compound growth properties

The effects of under bump metallurgy (UBM) microstructures on the intermetallic compound (IMC) growth of electroplated and stencil printed eutectic Sn-Pb solder bumps were investigated. The process parameters and their effects on UBM surface morphology and UBM shear strength were studied. For the electroplating process, the plating current density was the dominant factor to control the Cu UBM microstructure. For the stencil printing process, the zincation process has the most significant effect on the Ni UBM surface roughness and Ni grain sizes. In both processes, the good adhesion of UBM to aluminum can be obtained under suitable UBM processing conditions. Samples with different UBM microstructures were prepared using the two processes. The resulting samples were thermal aged at 85/spl deg/C, 120/spl deg/C, and 150/spl deg/C. It was observed that the Cu UBM surface roughness had larger effect on the IMC growth and solder ball shear strength than the Ni UBM surface roughness. The thickness of Cu/sub 3/Sn and Cu/sub 6/Sn/sub 5/ IMC depended strongly on the UBM microstructure. However, for Ni/Au UBM, no significant dependence was observed. More likely, the thickness of Au-Ni-Sn IMC near the IMC/solder interface was controlled by the amount of gold and the gold diffusion rate in the solder. Shear tests were performed after thermal aging tests and thermal/humidity tests. Different failure modes of different sample groups were analyzed. Electroless Ni UBM has been developed because it is a mask-less, low-cost process compared to electroplated Cu UBM. This study demonstrated that the process control was much easier for Ni UBM due to its lower reactivity with Sn material. These properties made Ni UBM a promising candidate for the lead-free solder applications.     

Stability of Flip-Chip Interconnects Assembled with Al/Ni(V)/Cu-UBM and Eutectic Pb-Sn Solder During Exposure to High-Temperature Storage

The thermal stability of flip-chip solder joints made with trilayer Al/Ni(V)/Cu underbump metalization (UBM) and eutectic Pb-Sn solder connected to substrates with either electroless Ni(P)-immersion gold (ENIG) or Pb-Sn solder on Cu pad (Cu-SOP) surface finish was determined. The ENIG devices degraded more than 50 times faster than the Cu-SOP devices. Microstructural characterization of these joints using scanning and transmission electron microscopy and ion beam microscopy showed that electrical degradation of the ENIG devices was a direct result of the conversion of the as-deposited Ni(V) barrier UBM layer into a porous fine-grained V₃Sn-intermetallic compound (IMC). This conversion was driven by the Au layer in the ENIG surface finish. No such conversion was observed for the devices assembled on Cu-SOP surface finish substrates. A resistance degradation model is proposed. The model captures changes from a combination of phenomena including increased (1) intrinsic resistivity, (2) porosity, and (3) electron scattering at grain boundaries and surfaces. Finally, the results from this study were compared with results found in a number of published electromigration studies. This comparison indicates that degradation during current stressing in the Pb-Sn bump/ENIG system is in part due to current-crowding-induced Joule heating and the thermal gradients that result from localized Joule heating.     

铝/镍/铜UBM厚度对SnAgCu焊点的力学性能及形貌影响

研究了倒装芯片中UBM制备和焊球回流工艺流程。通过改变阻挡层Ni和浸润层Cu的厚度,结合推拉力测试实验,探究了SnAgCu焊点剪切强度的变化规律。研究结果表明,UBM中阻挡层Ni对SnAgCu焊点的力学性能影响最大,而浸润层Cu厚度的增加也能提高SnAgCu焊点的力学性能。进一步对推拉力实验后的焊点形貌进行了SEM观察和EDS分析,得到了焊盘剥离、脆性断裂、焊球剥离、韧性断裂四种不同的焊点失效形式,代表着不同的回流质量,而回流质量主要由UBM的成分和厚度决定。研究结果为倒装焊工艺的优化提供了理论指导。