Micro-injection molding using a polymer coated mold

We applied an insulating polymer layer to the surface of mold cavity to injection-mold large plastic parts with a microsized thickness. Polyimide (PI) was coated on the mold wall using spray coating method. A thin light guide plate (LGP) was designed and fabricated via micro-injection molding. The polymeric coating layer could enhance the fluidity of polymer melt in the cavity during filling stage by minimizing the formation of the skin layer during injection molding. The surface roughness and pattern transfer rate of the LGPs were analyzed experimentally. In addition, numerical simulation was carried out to understand the insulation effect of the layer in the injection molding.

     

Theoretical and experimental characterization of wettability of various nanolens arrayed polymer surfaces replicated with nanodimpled aluminum mold insert

Various types of polymer surfaces with a nanolens array, which has an entrant shape with a low aspect ratio, were fabricated and the wettability of the fabricated surfaces was evaluated in both theoretical and experimental ways. The nanolens array was replicated on three different polymer surfaces of polydimethylsiloxane (PDMS), cyclic olefin copolymer (COC), and polymethylmethacrylate (PMMA) by means of replica molding and hot embossing with a nanodimpled aluminum mold that was manufactured by a chemical oxidation process. From the theoretical and experimental evaluations of the wettability it was found that the measured contact angles were very similar with the theoretically estimated ones and also the hydrophilicity and hydrophobicity of the hydrophilic PMMA and hydrophobic PDMS, respectively, surfaces were reinforced by the nanolens array within the Wenzel wetting state.     

Fabrication of a polymeric tapered HARMs array utilizing a low-cost nickel electroplated mold insert

A simple low-cost technique has been developed to fabricate a mold insert for replicating polymeric tapered high aspect ratio microstructures. A backside exposure technique is used to first obtain a tapered sidewall structure as an electroplating mold in SU-8 photoresist on a glass wafer. Nickel electroplating is utilized to form the mold insert. The lowest average surface roughness of the nickel mold insert on the side that interfaces with the glass wafer during electroplating is measured to be 7.02 nm. A novel technique involving use of titanium putty is introduced here to reduce cost and effort required to fabricate the mold insert. Replication of tapered microstructures in polymeric materials utilizing the fabricated mold insert is demonstrated here in polydimethylsiloxane by a direct molding process and in polymethyl methacrylate by hot embossing. The fabrication details for the mold insert are described. Advantages and disadvantages of the use of titanium putty for achieving superior metal surface finish are given.     

Fabrication of high-aspect-ratio polymer nanochannels using a novel Si nanoimprint mold and solvent-assisted sealing

We present a low cost nanofabrication method to fabricate high-aspect-ratio (HAR) polymer nanochannels using a novel silicon nanoimprint mold fabrication technique and a solvent-assisted sealing method. These nanofluidic channels are being developed for single biomolecule detection. The silicon nanoimprint mold fabrication process is based on the combination of anisotropic etching of silicon by potassium hydroxide (KOH) solution and the local oxidation of silicon (LOCOS) process. The resulting high-aspect-ratio silicon mold has smooth sidewalls owing to the anisotropic KOH etching process along the silicon crystalline geometry as well as the LOCOS process. The nanostructures in the nanoimprint molds that form the nanochannels can be easily controlled by the initial micropattern sizes defined using conventional UV lithography and the oxidation time, making this technique a practical solution for low cost and high-throughput HAR silicon nanoimprint mold fabrication. Nanoimprint molds having aspect ratios of more than 1:5.5 (width: 200 nm, height: 1.1 μm, length: 1 cm) were successfully fabricated. Nanoimprinting technique was used to create poly(methyl methacrylate) (PMMA) nanotrenches out of this nanoimprint mold. A novel solvent-assisted sealing technique was developed in order to seal the HAR PMMA nanotrenches. This technique enables the generation of nanochannels with various nanoscale dimensions without the need for complicated and expensive nanolithography tools.     

基于串行通信的压电陶瓷驱动器的设计

基于计算机和单片机的串行通信的压电陶瓷驱动器的设计,采用Visual Basic6.0中的MSComm通信控件,实现计算机和单片机之间的串行通信。详细阐述了程序的设计流程,给出了部分程序代码。     

压电阻抗技术用于结构健康诊断的一种方法

基于压电阻抗技术用于结构健康诊断的基本原理,以用螺栓连接固定的铝板为例,应用压电阻抗技术对结构中螺栓松动的损伤进行检测实验。鉴于以往此类实验中所采用的阻抗分析仪价格十分昂贵,提出了一种更实用的实验方法。实验结果表明:采用这种方法同样可以通过测量压电片阻抗的变化来诊断出螺栓松动的结构损伤。     

压电陶瓷传感器稳定性的仿真分析

针对传感器测量高温体振动信号的稳定性问题,提出了将温度与结构特性相结合的仿真方法,讨论了温度场对压电陶瓷传感器稳定性产生的影响。根据压电陶瓷的正逆压电效应,采用ANSYS软件进行有限元仿真,得出了传感器稳定工作的频率范围和固有频率随温度变化的规律,并获得了固有频率和机电能量转换特性相对稳定的温度范围,由此为理论和试验分析提供了依据。分析实例体现了所采用的数值仿真方法在压电陶瓷传感器稳定性分析中的有效性和实用性。     

新型压电微泵的结构设计与理论分析

微泵在微流控化学分析芯片中有很大的应用前景,日益成为人们研究的热点。从结构设计、理论分析和工艺加工3个方面研究了微阀与微泵,设计出用压电驱动和聚二甲基硅氧烷(PDMS)作为泵膜的集成微阀与微泵,其特点是原理新颖、结构简单、易于加工、操作方便。结构主要是由PDMS泵膜、硅片和压电驱动器组成,其中,PDMS既是泵膜和缓冲单元,也是主动阀片。在直流电压的驱动下,其工作状态是微阀,阻止流体的单向流通,在方波信号的驱动下,其工作状态是微泵,实现流体的吸入与泵出。给出各种几何参数、工作原理和工艺流程。     

Fabrication of suspended electrokinetic microchannels from directly written sacrificial polymer fibers

Freely suspended microchannels with diameters ranging from 4 to 100?μm were fabricated by utilizing directly written PMMA fibers as sacrificial structures. These precisely oriented fibers served as scaffolds around which thin cylinders of glass were deposited (via sputtering), followed by a conformal coating of Parylene to augment the mechanical integrity of the structures. After coating, the PMMA fibers were dissolved to yield suspended, hollow conduits that were hydrophilic and robust. The freely suspended channels were loaded with a buffer solution containing charged particles, which were subsequently electrokinetically manipulated and velocities quantified using microparticle image velocimetry (μPIV). Mobilities within 1.3?% of those observed in conventional, planar microchannels were recorded.     

Tonpilz型压电陶瓷超声传感器的设计

超声传感器是一种电声转换器件,其敏感元件压电陶瓷控制传感器的主要性能。设计了一种谐振频率为140 kHz的Tonpilz型压电陶瓷超声传感器,从压电方程入手,建立了不同的理论模型,对等效网络法和有限元法2种不同的设计方法进行了比较。相应的试验表明:有限元法的分析结果直观明了、建模快捷、分析准确,其误差可控制在5%以内。设计研制的Tonpilz型传感器工艺简单、造价低廉、性能稳定。     

Adaptive hybrid control for linear piezoelectric ceramic motor drive using diagonal recurrent CMAC network

This work presents an adaptive hybrid control system using a diagonal recurrent cerebellar-model-articulation-computer (DRCMAC) network to control a linear piezoelectric ceramic motor (LPCM) driven by a two-inductance two-capacitance (LLCC) resonant inverter. Since the dynamic characteristics and motor parameters of the LPCM are highly nonlinear and time varying, an adaptive hybrid control system is therefore designed based on a hypothetical dynamic model to achieve high-precision position control. The architecture of DRCMAC network is a modified model of a cerebellar-model-articulation-computer (CMAC) network to attain a small number of receptive-fields. The novel idea of this study is that it employs the concept of diagonal recurrent neural network (DRNN) in order to capture the system dynamics and convert the static CMAC into a dynamic one. This adaptive hybrid control system is composed of two parts. One is a DRCMAC network controller that is used to mimic a conventional computed torque control law due to unknown system dynamics, and the other is a compensated controller with bound estimation algorithm that is utilized to recover the residual approximation error for guaranteeing the stable characteristic. The effectiveness of the proposed driving circuit and control system is verified with hardware experiments under the occurrence of uncertainties. In addition, the advantages of the proposed control scheme are indicated in comparison with a traditional integral-proportional (IP) position control system.     

Fabrication of a freestanding micro mechanical structure using electroplated thick metal with a HAR SU-8 mold

In this thesis, fabrication technology of a freestanding micro mechanical structure using electroplated thick metal with a high-aspect-ratio SU-8 mold was studied. A cost-effective fabrication process using electroplating with the SU-8 mold was developed without expensive equipment and materials such as deep reactive-ion etching (DRIE) or a silicon-on-insulator (SOI) wafer. The process factors and methods for the removal of SU-8 were studied as a key technique of the thick metal micro mechanical structure. A novel method that removes cross-linked SU-8 completely without leaving remnants of the resist or altering the electroplated microstructure was utilized. The experimental data pertaining to the relationship between the geometric features and the parameters of the removal process are summarized. Based on the established SU-8 removal process, an electroplated nickel comb structure with high-aspect-ratio SU-8 mold was fabricated in a cost-effective manner. In addition, a freestanding micro mechanical structure without a sacrificial layer was successfully realized. The in-plane free movements of the released freestanding structure are demonstrated by electromagnetic actuation. This research implies that various types of MEMS devices can be developed at a low-cost with design flexibility.     

Antireflective polymer films via roll to roll UV nanoimprint lithography using an AAO mold

Microsystem Technologies - Anti-reflection based on the mimicking of moth eye subwavelength structures (SWSs) has several advantages over conventionally used multilayer thin film antireflective...     

Fabrication of metallic heat exchangers using sacrificial polymermandrils

This paper demonstrates the use of poly(dimethylsiloxane) (PDMS), polyurethane (PU), epoxy, and poly(methyl methacrylate) (PMMA) as mandrils to fabricate metallic heat exchangers having 300-700 μm internal channels. The mandrils were prepared using two soft lithographic techniques-replica molding and microembossing. To fabricate the heat exchangers, the polymeric mandrils were coated with a thin layer of metal by thermal evaporation or sputtering; this layer acted as the cathode for electrodeposition of a shell of nickel or copper that was 100 μm thick. The polymers were removed by burning them out at 400°C in air, or by dissolving them with a tetrahydrofuran solution of tetrabutylammonium fluoride. Studies of heat dissipation showed that the nickel heat exchangers with features that range in size from 150-750 μm have thermal resistances ranging from 0.07 to 0.12°^-2 C W^-1 cm at flow rates of water of ~20 L h^-1 and pressures of 8.6-83×10³ N m^-2     

微位移系统中压电陶瓷驱动器迟滞建模

针对超精密微位移系统中压电陶瓷驱动器的迟滞非线性问题,提出了一种基于遗传反向传播(BP)神经网络的压电陶瓷迟滞非线性建模方法.通过电涡流位移传感器获取压电陶瓷驱动器不同电压值下所对应的位移值;利用六次多项式拟合获得迟滞的数学模型,从而建立基于遗传BP神经网络的迟滞,模型.实验结果显示:该迟滞模型在神经网络测试下的最大误差为0.082 1 μm,平均绝对误差为0.0158 μm.表明,所建的迟滞模型能够较精确地反映出压电陶瓷驱动器的迟滞特性,同时为微位移控制系统设计提供了一定的理论基础.     

Adhesion of Ni-structures on Al2O3 ceramic substrates used for the sacrificial layer technique

 This study presents an investigation of the adhesion properties of a chromium-gold-titanium layer system, which is used in the LIGA process to create moveable microstructures. The main purpose has been the improvement of the process parameters to increase yield reliability. Three mechanisms affecting the adhesion have been identified. As a consequence of humidity adsorbed H₂O reacts with Al₂O₃ to AlO(OH) (aluminum meta hydrates), which does not bond to the sputtered chromium layer. Thus the hydrate must be removed by cleaning the surface with Ar⁺-ions. Tight layers without pores could be realized by optimization pressure and temperature during sputtering of chromium and gold. Thus, diffusion of chromium or penetration of etchants into the gold layer as well as impact or diffusion of titanium into the gold layer could be prevented. In addition, a copper layer was introduced as a further intermediate layer by electroforming to improve the formation of stable nickel alloys at the interface between the sputtered gold and the electroplated nickel. These measures resulted in an improvement of the adhesion, so that full functional acceleration sensors were produced with a high yield.     

比例模糊控制在压电陶瓷执行器中的应用

针对压电陶瓷的逆压电效应,提出了一种以压电陶瓷驱动精密流量阀为执行器,采用压电陶瓷驱动流量阀阀芯,控制其开口大小,从而达到精确控制流过阀的液体流量的目的.在减压出口处安装了金属橡胶材料,以达到消除流体通过节流口后压力剧烈变化所产生的纹波现象,并就其驱动电压一输出位移一输出流量之间的数学关系建立模型.由于压电陶瓷的非线性、迟滞、蠕变等特性影响控制精度且控制复杂,提出了一种比例模糊控制方法,取得了较通常采用的控制方法更为理想的效果.     

压电陶瓷片表面缺陷视觉检测系统的研制

压电陶瓷片在生产加工过程中表面会出现空洞、斑点和划伤缺陷,使其压电性、介电性等性能劣化,影响产品质量。目前对压电陶瓷片表面缺陷检测还停留在人工目测的阶段,精度达不到要求,易出现漏检的现象,效率低下。结合压电陶瓷片本身及其待测缺陷的特征,提出一种基于视觉检测技术实现压电陶瓷片表面缺陷检测的方法。将压电陶瓷片放置在二维移动平台上,配合线阵相机进行多张图像采集,获取完整的压电陶瓷片信息,通过所设计的图像处理算法进行缺陷提取与质量判断,最终完成产品样机的研制。     

压电陶瓷驱动电路RC网络补偿技术研究

压电陶瓷(PZT)驱动电路由于负载为容性,会使环路增益上产生附加极点,从而影响电路的稳定性,严重时会导致芯片和陶瓷损坏。构建了驱动电路的数学模型,在此基础上,对基于运放PA88的驱动电路进行了仿真分析,对提高驱动电路稳定性的方法进行研究。研究结果表明,采用外接RC网络补偿可有效提高电路稳定性,解决了PZT驱动电路不能长期稳定工作的问题,并给出了PZT驱动电路元器件的最优参数。