Fabrication method of two-level polymeric microstructure with the help of deep X-ray lithography

Two- or multi-level microstructures are getting more important in several applications such as multi-component micro optical elements and various microfluidic systems. In the present study, a simple and efficient method is newly proposed for a fabrication of the two-level polymeric microstructures. Making a mother two-level microstructure consists of two processes: (1) the hot embossing process for a fabrication of microstructures on a PMMA substrate, and (2) the deep X-ray lithography using the hot embossed substrate for a high aspect ratio microstructure fabrication, resulting in a high aspect ratio microstructure containing smaller microstructures on its surface. Making use of so fabricated two-level microstructures as a mother structure, one could achieve a mass replication of the same microstructures via injection molding process with a metallic mold insert obtained by a nickel electroforming onto the mother microstructure. In order to demonstrate the proposed method, a polymeric high aspect ratio microstructure having smaller square microstructures on its top surface was fabricated. The fabricated two-level microstructure shows fine vertical sidewalls, which is a characteristic feature of the deep X-ray lithography. In addition, a metallic mold insert for a mass replication was fabricated by a nickel electroforming process.     

Study of Hot Embossing Using Nickel and Ni–PTFE LIGA Mold Inserts

Hot embossing is one of the main process techniques for polymer microfabrication, which helps X-ray lithography, electroplating, and molding (LIGA) to achieve low-cost mass production. Most problems in polymer micromolding are caused by demolding, especially for hot embossing of high-aspect-ratio microstructures. The demolding forces are related to the sidewall roughness of the mold insert, the interfacial adhesion, and the thermal shrinkage stress between the mold insert and the polymer. The incorporation of polytetrafluoroethylene (PTFE) particles into a nickel matrix can have the properties such as antiadhesiveness, low friction, good wear, etc. To minimize the demolding forces and to obtain high-quality polymer replicas, a Ni-PTFE composite microelectroforming has been developed, and the hot embossing process using Ni and Ni-PTFE LIGA mold inserts has been well studied in this paper. The morphologies, sidewall roughness, and friction coefficient have been explored in the fabricated Ni-PTFE LIGA mold insert. Finally, the comparison of embossed microstructures with various aspect ratios and the comparison of the embossing lifetimes of mold inserts have been carried out between Ni and Ni-PTFE mold inserts, which show a better performance of the Ni-PTFE mold and its potential applications.     

Micro injection molding for mass production using LIGA mold inserts

Micro molding is one of key technologies for mass production of polymer micro parts and structures with high aspect ratios. The authors developed a commercially available micro injection molding technology for high aspect ratio microstructures (HARMs) with LIGA-made mold inserts and pressurized CO₂ gasses. The test inserts made of nickel with the smallest surface details of 5 μm with structural height of 15 μm were fabricated by using LIGA technology. High surface quality in terms of low surface roughness of the mold inserts allowed using for injection molding. Compared to standard inserts no draft, which is required to provide a proper demolding, was formed in the inserts. To meet higher economic efficiency and cost reduction, a fully electrical injection molding machine of higher accuracy has been applied with dissolving CO₂ gasses into molten resin. The gasses acts as plasticizer and improves the flowability of the resin. Simultaneously, pressurizing the cavity with the gasses allows high replication to be obtained. Micro injection molding, using polycarbonate as polymer resins, with the aspect ratio of two was achieved in the area of 28 × 55 mm² at the cycle time of 40 s with CO₂ gasses, in contrast to the case of the aspect ratio of 0.1 without the gasses.     

High aspect ratio multi-level mold inserts fabricated by mechanical micro machining and deep etch X-ray lithography

 Complex microstructures can be fabricated in large quantities by thermoplastic molding processes. The shape of the microstructures is determined mainly by the mold insert. Until now, multi-level mold inserts have been fabricated either by deep etch X-ray lithography and electroforming, Harmening et al. (1992), or by milling of a brass substrate, Schaller et al. (1995). In both cases there are limitations on structuring either by the fabrication effort or by the sizes of the smallest available milling heads. To avoid these limitations on structuring, a new process for manufacturing multi-level mold inserts has been developed at Forschungszentrum Karlsruhe. Milling, drilling, deep etch X-ray lithography and electroforming have been combined to manufacture a mold insert which is characterized by high aspect ratios with small lateral dimensions and various level heights. Samples with two levels and an aspect ratio of 15 have been manufactured. Much higher aspect ratios seem to be achievable. This paper covers the fabrication process, first tests, and experimental results of manufacturing a multi-level mold insert for molding three-dimensional components of a microvalve system. Received: 30 October 1995 / Accepted: 17 January 1996     

High aspect ratio multi-level mold inserts fabricated by mechanical micro machining and deep etch X-ray lithography

Complex microstructures can be fabricated in large quantities by thermoplastic molding processes. The shape of the microstructures is determined mainly by the mold insert. Until now, multi-level mold inserts have been fabricated either by deep etch X-ray lithography and electroforming, Harmening et al. (1992), or by milling of a brass substrate, Schaller et al. (1995). In both cases there are limitations on structuring either by the fabrication effort or by the sizes of the smallest available milling heads. To avoid these limitations on structuring, a new process for manufacturing multi-level mold inserts has been developed at Forschungszentrum Karlsruhe. Milling, drilling, deep etch X-ray lithography and electroforming have been combined to manufacture a mold insert which is characterized by high aspect ratios with small lateral dimensions and various level heights. Samples with two levels and an aspect ratio of 15 have been manufactured. Much higher aspect ratios seem to be achievable. This paper covers the fabrication process, first tests, and experimental results of manufacturing a multi-level mold insert for molding three-dimensional components of a microvalve system. The development of this technology has been supported by the European Community as part of the Esprit project IMICS.     

Hot embossing of micro and sub-micro structured inserts for polymer replication

Today replication of microstructured parts is state of the art in laboratory and commercial use. Beside the process of injection molding hot embossing enables the accurate replication of polymer structures in a broad variety of thermoplastic polymers even in the nanometer range. Characteristic for the most replication processes dealing with thermoplastic polymers is the use of microstructured mold inserts based on metals. In this paper we describe an alternative to the established mold inserts––the use of so called interstage mold inserts. These interstage mold inserts are replicated in high performance polymers and technical thermoplastics and can be fabricated many times by a previous replication step from a master even in the sub-micro range. Aspects like suitable material combinations, demolding behaviour, long time stability, production rate, and the quality of structures will be discussed. Because of the high flexibility the process of hot embossing is used for the fabrication of the microstructured interstage mold inserts and their replications.     

Development of separated micromold system for an efficient replication of high aspect ratio microstructures

In the present study, a separated micromold system (SMS) is newly proposed and developed for an efficient replication of high aspect ratio microstructures. The present SMS basically consists of micromold modules, each having a split structure of the complete microstructure to be replicated. So fabricated micromold modules are assembled for a replication of the microstructures and subsequently separated in a demolding stage. In this manner, serious problems commonly encountered in a conventional fabrication process for high aspect ratio structures can be effectively overcome. For a precise fabrication of the micromold modules, a deep X-ray lithography and nickel electroforming processes were carried out, resulting in nickel SMS including various half circular microstructures. By utilizing the obtained SMS modules, high aspect ratio micro-scale cilium structure and its array were successfully replicated by a hot embossing process.     

Rapid replication of polymeric and metallic high aspect ratio microstructures using PDMS and LIGA technology

This paper present a method of rapid replication of polymeric high aspect ratio microstructures (HARMs) and a method of rapid reproduction of metallic micromold inserts for HARMs using polydimethylsiloxane (PDMS) casting and standard LIGA processes. A high aspect ratio (HAR) metallic micromold insert, featuring a variety of test microstructures made of electroplated nickel with 15:1 height-to-width ratio for 300 μm microstructures, was fabricated by the standard LIGA process using deep X-ray lithography (DXRL). A 10:1 mixture of pre-polymer PDMS and a curing agent were cast onto the HAR metallic micromold insert, cured and peeled off to create reverse images of the HAR metallic micromold insert in PDMS. In addition to the replication of polymeric HARMs, replicated PDMS HARMS were coated with a metallic sacrificial layer and electroplated in nickel to reproduce another metallic micromold insert. This method can be used to rapidly and massively reproduce HAR metallic micromold inserts in low cost mass production manner without further using DXRL.     

Rapid fabrication of microcomponents – UV-laser assisted prototyping, laser micro-machining of mold inserts and replication via photomolding

 The rapid fabrication of microcomponents made from polymers or composites will be presented. The whole fabrication process is divided into three main steps: first, direct patterning of polymers with excimer laser radiation enables the fabrication of first prototypes. Second, laser assisted micromachining using Nd:YAG or KrF-Excimer laser radiation allows a rapid manufacturing of microstructured mold inserts made of steel or polymer. Third, the application of UV-light-induced reaction injection molding (UV-RIM, photomolding) process using reactive monomer/polymer resins gives the access to the replication of the previously fabricated mold insert. For mold insert fabrication, the development of different process strategies is in progress in order to meet the best fit for three dimensional shapes (e.g., steep walls or slowly inclined walls). The development of mold inserts made of polymers is performed via UV laser ablation. This is a new promising method for the rapid manufacturing of microcomponents. Received: 10 August 2001/Accepted: 24 September 2001 We are grateful to our colleagues A. Sporrer and P. Severloh for her technical assistance in SEM/EDX. We also thank M. Blumhofer for his support in laser profilometry and H. Besser and W. Hoffmann for helpful discussions. This paper was presented at the Fourth International Workshop on High Aspect Ratio Microstructure Technology HARMST 2001 in June 2001.     

High-temperature instrumented microscale compression molding of Pb

Compression molding of Pb plates with LiGA (Lithographie, Galvanoformung, Abformung) fabricated Ni microscale mold inserts was carried out in the temperature range of 100–300 °C. In-situ measurements of compressive molding force, demolding friction force and insert displacement were carried out with a custom-built, high-vacuum, high-temperature, instrumented molding machine. Microscale features generated on Pb plates and insert condition after repeated molding runs were examined. The in-situ force monitoring capability enabled compressive stresses needed for molding and frictional stresses generated by demolding to be measured as a function of temperature. Our results demonstrate that, in cases where no significant metal/insert chemical interactions exist, present LiGA fabricated Ni inserts possess adequate mechanical properties for repeated micromolding of low melting temperature metals.We gratefully acknowledge partial project support from NSF through grant DMI-0124441, Louisiana Board of Regents through contracts LEQSF(2001–04)-RD-A-07 and LEQSF(2000–03)-RD-B-03. Ni inserts used in this work were purchased from Mezzo Systems Inc.     

Microscale compression molding of Al with surface engineered LiGA inserts

High temperature compression molding of Al plates with high-aspect-ratio microscale mold inserts was carried out. The bulk of the mold insert consists of electrodeposited Ni, fabricated with the LiGA (Lithographie, Galvanoformung, Abformung) technique. Both as-fabricated Ni inserts and Ni inserts conformally coated with a Ti-containing hydrocarbon (Ti-C:H) coating were used for Al micromolding at temperatures 450 °C. In-situ measurements of compression molding force, demolding force, and insert displacement were carried out. Insert conditions and microscale features generated on Al plates by molding were examined. Our results show that as-fabricated Ni inserts are not suitable for Al micromolding, and that Ni inserts conformally coated with a Ti-C:H coating allow repeated Al micromolding with 100% transfer of microscale features from the insert to the molded Al plate. Our results demonstrate, to our knowledge for the first time, successful replication of high-aspect-ratio Al microscale structures by high temperature compression micromolding.DMC and WJM gratefully acknowledge partial project support from NSF through grant DMI-0124441 and the Louisiana Board of Regents through contracts LEQSF(2001–04)-RD-A-07. Ni inserts used in this work were fabricated by Mezzo Systems Inc. using facilities at Lsu CAMD.     

Fabrication of a polymeric tapered HARMs array utilizing a low-cost nickel electroplated mold insert

A simple low-cost technique has been developed to fabricate a mold insert for replicating polymeric tapered high aspect ratio microstructures. A backside exposure technique is used to first obtain a tapered sidewall structure as an electroplating mold in SU-8 photoresist on a glass wafer. Nickel electroplating is utilized to form the mold insert. The lowest average surface roughness of the nickel mold insert on the side that interfaces with the glass wafer during electroplating is measured to be 7.02 nm. A novel technique involving use of titanium putty is introduced here to reduce cost and effort required to fabricate the mold insert. Replication of tapered microstructures in polymeric materials utilizing the fabricated mold insert is demonstrated here in polydimethylsiloxane by a direct molding process and in polymethyl methacrylate by hot embossing. The fabrication details for the mold insert are described. Advantages and disadvantages of the use of titanium putty for achieving superior metal surface finish are given.     

Method for polymer hot embossing process development

Molding technologies associated with fabricating macro scale polymer components such as injection molding and hot embossing have been adapted with considerable success for fabrication of polymer microparts. While the basic principles of the process remain the same, the precision with which the processing parameters need to be controlled especially in the case of molding high aspect ratio (HAR) polymer microparts into polymer sheets is much greater than in the case of macro scale parts. It is seen that the bulk effects of the mold insert fixture and molding machine have a dominant influence on the molding parameters and that differences in material parameters such as the glass transition temperature (T _g) of polymer sheets are critical for the success and typically differ from sheet to sheet. This makes it very challenging to establish standard processing parameters for hot embossing of sheet polymers. In the course of this paper, a methodology for developing a hot embossing process for HAR microstructures based on known material properties and considering the cumulative behavior of mold, material, and machine will be presented. Using this method force–temperature–deflection curves were measured with the intent of fine tuning the hot embossing process. Tests were carried out for different materials using a dummy mold insert yielding information that could be directly transferred to the actual mold insert with minimum development time and no risk of damage to the actual microstructures.     

Replication of large scale micro pillar array with different diameters by micro injection molding

The capillary force is always used as the driving force of microfluidic chips. In this study, the capillary force of blood smart diagnostic microfluidic chip which fabricated by micro-injection molding (μ-IM) is offered by the structure of micro pillar array. And the detection effect of blood smart diagnostic microfluidic chips is affected by the replication and height distribution of large scale micro pillar array. So the effect of process parameters on the micro-structure and the height distribution of micro pillar is studied. The mold design is also an important factor affecting micro parts properties. In this study, a steel mold insert with almost 15,500 micro blind cavities was fabricated by milling, electrical discharge machine and Femtosecond Laser process. Polymethyl methacrylate -Polystyrene copolymer (SMMA NAS 30) was used as the molding material. The single factor trail and orthogonal experiment approach were adopted to investigate the effect of several process parameters and the significant effect factors affecting the replication of micro pillar. And the height distribution of micro pillar array was investigated by scanning electron microscope (SEM) and universal tool-measuring microscope to measure the replication quality. The results reveal that the replication of micro pillar is sensitive to the flow direction of the polymer melt. The height of micro pillar increases with the increase of mold temperature and injection speed. Moreover, the height distribution of micro pillar along and against flow direction was tightly related to the thermomechanical history of material during the molding process.

     

Micro molding for double-sided micro structuring of SU-8 resist

Advances in micro and nano fabrication technologies for MEMS require high-level measurement techniques with regard to sampling and sensitivity. For this purpose at the Institute of Microtechnology (IMT) highly sensitive piezoresistive 3D force sensors based on SU-8 polymer have been developed. In this paper we present an improved micro fabrication process for a double-sided micro structured design. The sensors are produced by multilayer processing techniques such as UV lithography and coating methods. The double-sided micro structured design demands a photoresist application method which simultaneously features a top side structuring and a casting from a mold. We use a new micro molding process to meet the demands. The micro fabrication technology is described, focusing on the development of the molding structure for shaping of the bottom side and a capable release process for the detachment of the molded structures. The fabrication process of the SU-8 mold layer is optimized to fabricate molding structures with heights from a few μm up to 350 μm. Therefore different SU-8 formulations, namely with classification numbers 5, 25, 50, and 100, have been used. The fundamental limitations for the mold design result from the lithography process, which defines the smallest lateral resolution, and from the characteristics of a molding process, e.g. the impossibility to realize an undercut. To allow for reliable release, the molding structures have to be coated with a sacrificial layer. Silicon nitride is deposited onto the substrate with accompanying monitoring of the deposition temperature during the PECVD process.     

Analysis of the demolding forces during hot embossing

Hot embossing is one of the main processing techniques for polymer microfabrication, which helps the LIGA (UV-LIGA) technology to achieve low cost mass production. When hot embossing of high aspect ratio microstructures, the deformation of microstructures usually occurs due to the demolding forces between the sidewall of mold inserts and the thermoplastic (PMMA). The study of the demolding process plays a key role in commercial manufacturing of polymer replicas. In this paper, the demolding behavior was analyzed by Finite element method using ABAQUS/Standard. Simulation identified the friction force caused by interface adhesion and thermal stress due to shrinkage between the mold and the polymer as the main sources of the demolding forces. Simulation also showed that the friction force made a greater contribution to the deformation than thermal stress, which is explained in the accompanying theoretical analysis. To minimize the friction force the optimized experiment was performed using PTFE (Teflon) as anti-adhesive films and using Ni-PTFE compound material mold inserts. Both lowered the surface adhesion energy and friction coefficient. Typical defects like pull-up and damaged edges can be reduced.     

Fabrication of high-aspect-ratio microscale Ta mold inserts with micro electrical discharge machining

We report fabrication of microscale Ta mold inserts by micro-electrical-discharge-machining (μEDM). Morphology, chemistry, and structure of the near-surface region of as-μEDMed Ta blanks have been characterized by scanning electron microscopy, X-ray photoelectron spectroscopy, and transmission electron microscopy. A TaC surface layer forms on as-μEDMed Ta surfaces. This altered surface layer was removed by electro-chemical-polishing. Further modification of Ta insert surfaces was accomplished by deposition of a conformal Ti-containing hydrogenated carbon coating. We demonstrate successful replication of high-aspect-ratio microscale structures in Al and Cu by compression molding with such surface-engineered Ta mold inserts.     

Numerical analyses of peel demolding for UV embossing of high aspect ratio micro-patterning

Ultraviolet (UV) embossing, involving molding against micro-structured molds, is a quick and efficient method to mass produce high aspect ratio micro-features. A crucial challenge to the repeatability and large-scale application of this technique is successful demolding, which escalates in difficulty with increasing aspect ratio, due to increased polymer-mold mechanical interlocking. Some of the key factors affecting UV embossing include the crosslinked polymer shrinkage and material properties, interfacial strength between polymer to mold and the demolding method. This paper presents a new method to simulate the demolding of UV cured polymer from a nickel mold. Hyperelastic material model and rate-independent cohesive zone modeling were employed in the numerical simulation; linear elastic polymer response, although relatively easy to apply, was not adequate. Progressive shrinkage was implemented, leading to delamination of the polymer-mold interface. The subsequent peeling of the cured polymer from the mold was modeled with increasing prescribed displacement. The optimal shrinkage degree was found to increase from 0.92 to 1.9% with increasing mold aspect ratio (aspect ratio is defined as height to width ratio) from 5 to 10.     

Fabrication of barrier ribs of PDP via powder injection molding

In this paper, an attempt was made to explore a possibility of powder micro injection molding process in manufacturing ceramic microstructures such as barrier ribs of plasma display panel. The barrier ribs are glass matrix composites with ceramic powder (alumina and/or titania) filler. In this molding process, a thermosetting paste was molded into polydimethlsilosane soft molds prepared by replication of thick film resist (SU-8) molds. The SU-8 mold was patterned with UV-lithography. The effects of powder content in the paste on paste viscosity and sintering characteristics of molded samples were examined. In addition, effect of molding speed on pore trapping in the microstructure was studied. These results indicated that the powder micro injection molding process at ambient temperature has merits of low-pressure injection molding process with superior mold release characteristics.     

Feedstock development for micro powder injection molding

Powder injection molding of microstructured parts with high aspect ratios requires feedstocks, which have a high mechanical stability for demolding. The binders of the feedstocks have to allow pressure free and complete debinding and sintering without deformation in the submillimeter range. For complete molding of especially small and complex detailed microstructures, powders with a small particle size have to be used. Additionally the microstructured mold inserts themselves must have an appropriate design, which allows complete filling of the cavity and an easy removal of the molded microstructures. By the development of new binder compositions, adapted micro mold inserts and optimized processing parameters it was possible to manufacture specimens for micromechanical investigations without substrate plates. Thus many machining and finishing worksteps, which have great influence on the mechanical properties of the microstructures, can be omitted. Received: 10 August 2001/Accepted: 24 September 2001