Pt-Pd-Ag厚膜导体的粗Al丝键合

采用破坏性拉力试验和焊点接触电阻测量两种方法测试Ｐｔ－Ｐｄ－Ａｇ三元合金导体的粗Ａｌ丝超声键合的性能。分别在１２４℃，１０００ｈ和３００℃，１０ｈ条件下进行热老练和温度循环等环境试验，然后测量焊点的键合强度。在室温和１２５℃高温条件下，观察了Ａｌ／Ｐｔ－Ｐｄ－Ａｇ超声键合系统抗电流冲击的能力。试验结果表明：Ｐｔ－Ｐｄ－Ａｇ厚膜导体适于粗Ａｌ丝超声键合，键合强度能满足要求。     

厚膜导体的金属迁移研究

金属迁移能导致混合微电路发生灾难性失效。本文介绍一种简单易行的测试方法－水滴试验法，来测量厚膜电路的实际金属迁移率。用引方法测量时，发现Ｐｄ－Ａｇ导体的迁移率最大，Ｐｔ－Ａｕ导体的金属迁移率最小。     

Pt—Pd—Ag厚膜导体的粗Al丝键合

本文采用破坏性拉力试验和焊点接触电阻测量两种方法，对Ｐｔ－Ｐｄ－Ａｇ三元合金导体的粗Ａｌ丝超声键合性能予以评估，并分别在１２５℃，１０００小时，３００℃，１０小时热老练，温度循环等环境试验后，实际测量了焊占的键合强度。另外，在室温和１２５℃高温两种条件下，考察了Ａｌ／Ｐｔ－Ｐｄ－Ａｇ超声键合系统抗电流冲击的能力。     

Pd／In／Pd等组分材料对n型GaAs欧姆接触的比较研究

Ｐｄ／Ｉｎ／Ｐｄ等组分材料对ｎ型ＧａＡｓ欧姆接触的比较研究《ＳｏｌｉｄＳｔａｔｅＥｌｅｃｔｒｏｎｉｃｓ》１９９５年第一期报导了Ｈ．Ｇ．Ｆｕ等对ｎ型ＧａＡｓ欧姆接触各种组分材料的比较研究，这些组分是Ｐｄ／Ｉｎ／Ｐｄ，Ｐｄ－Ｉｎ／Ｐｄ和Ｐｄ－Ｉｎ。其沉积...     

Pd－Ag－Si合金膜中的亚稳相

利用透射电子显微镜（ＴＥＭ）对Ｐｄ－Ａｇ－Ｓｉ合金膜的亚稳相进行了研究。结果表明，真空蒸发的Ｐｄ－Ａｇ－Ｓｉ合金膜由粒度均匀的纳米晶粒组成，具有ｆｃｃ结构。经不同温度退火后，在薄膜的局部区域析出了未知结构的亚稳相。利用电子衍射图确定了这些亚稳相的结构。     

Pd—Ag—Si合金膜中的亚稳相

利用透射电子显微镜（ＴＥＭ）对Ｐｄ－Ａｇ－Ｓｉ合金膜的亚稳相进行了研究，结果表明，真空蒸发的Ｐｄ－Ａｇ－Ｓｉ合金膜由粒度的均匀的纳米晶粒组成，具有ｆｃｃ结构，经不同温度退火后，在薄膜的局部区域析出了未知结构的亚稳相。利用电子衍射图确定了这些亚稳相的结构。     

聚乙烯醇缩甲醛膜上淀积Au,Pd和Ag薄膜的显微结构研究

在聚乙烯醇缩甲醛上分别蒸镀不同厚度的Ａｎ，Ｐｄ和Ａｇ薄膜，用透射电镜研究其成膜过程显微结构的变化和特征。结果表明，虽然三种金属膜形成过程（形成临界核之后）都存在成岛、岛长大与联并、网络结构及连续膜形成等阶段，但它们的小岛密度不同，Ｐｄ较高，Ａｕ居中，Ａｇ较小。它们在基底膜表面台阶处有小岛的装饰效应。三种金属膜在厚度小于０．３～０．４ｎｍ时为无定形结构，随着膜厚增加，转变为多晶结构。由多品金膜标定仪器常数Ｌλ值，从实验结果计算得到Ｐｄ和Ａｇ的晶格常数与标准值基本一致。用扫描隧道显微镜观察这三种金属膜的表面形貌，结果表明，当它们厚度相近时，其晶粒大小不同，Ｐｄ较小，Ａｇ较大，ＡＵ居中。     

计算机键盘开关用复合弱电触点材料的研制

本文简述了键盘开关用Ａｕ／Ａｇ／ＱＳｎ８－０．３复合弱电触点材料的研制工艺，产品经装机试验，寿命超过１２００万次，接触电阻小于１０ｍΩ，完全可以替代德国进口产品，满足了键盘开关用复合弱电触点材料国产化的要求。     

Al0.85Ga0.15As/GaAs太阳能电池器件工艺优化研究

报道了优化的ｐ－ｎ型Ａｌ０．８５Ｇａ０．１５Ａｓ／ＧａＡｓ太阳能电池器件工艺。分别采用真空蒸发Ｃｒ／Ａｕ和ＡｕＧｅＮｉ／Ａｕ制作下面栅线和背面电极,并分别在４５０℃和３５０℃下快速合金化形成欧姆接触。采用ＮＨ４ＯＨ：Ｈ２Ｏ２：Ｈ３ＰＯ４：Ｈ２Ｏ体系的选择性腐蚀液去除高掺杂的ＧａＡｓ接触层。采用真空蒸发技术制备ＺｎＳ／ＭｇＦ２双层复合减反射层。测试结果表明,采用优化工艺制备的器件的光电转换效率得到了     

低介电常数陶瓷复合基板材料

复合陶瓷材料具有较低的介电常数，可与Ｃｕ、Ａｇ导体共烧得到多层基板。这种基板适合于ＬＳＩ高速、高集成度的要求。本文介绍了复合陶瓷基板材料的特征及降低介电常数的措施。     

Formation of a Metastable Phase at the Interface Between Sn and Ag–Pd Substrates During Liquid-State Reaction

Ag–Pd alloys are widely used as thick-film conductors and are potential alternatives to the expensive Au bump. In this work, because Sn is the primary element in solders, we investigated Sn/Ag–Pd interfacial reactions at 250°C as a means of assessing the reliability and evaluating reflow reactions at joints between solder and Ag–Pd conductor contacts, and in the Ag bump combined with the solder cap. The experimental results showed that Sn/Ag–Pd interfacial reactions at 250°C are different from those of Sn/Ag and Sn/Pd. A metastable Sn–Ag–Pd ternary phase is formed when the amount of Pd added is 20–40 at.%. Because, in commercial applications, at least 20 wt.% Pd (~20 at.% Pd) is used in Ag–Pd alloys to eliminate the silver-migration phenomenon, assessment of the reliability of Ag bumps and the soldered joints of Ag–Pd thick film hybrid circuits must be based on Sn/Ag–Pd interfacial reactions, not those of Sn/Pd and Sn/Ag.     

Highly Asymmetric,Interfaced Dimers Made of Au Nanoparticles and Bimetallic Nanoshells: Synthesis and Photo‐Enhanced Catalysis

Synthesis of a class of exotic interfaced dimers with high asymmetries in terms of composition, morphology, structure (solid versus hollow), and dimension of the individual nanoscale components in the dimers is successfully accomplished. Typical examples include the interfaced dimers made of solid Au nanoparticles and hollow bimetallic nanoshells with different compositions, such as Au/Ag, Pt/Ag, and Pd/Ag. The success of the synthesis relies on the combination of asymmetric overgrowth of Ag nanodomains on the partially passivated Au nanoparticles and a following galvanic replacement reaction between the Ag nanodomains and appropriate noble metal precursors. The entire synthesis is processed on the unique superparamagnetic colloidal substrates that offer many advantages, such as time‐efficiency, scalability, and high yield. The Au nanoparticle and the bimetallic nanoshell in each interfaced dimer are in direct contact, resulting in the possible strong coupling between them as well as novel properties that cannot be observed in either the nanoparticle or the nanoshell. For example, dimers made of Au nanoparticles and Pd/Ag nanoshells exhibit enhanced catalytic performance toward Suzuki coupling reactions under illumination of visible light because the strong surface plasmon resonances in the Au nanoparticles can influence the catalytic activity of the Pd/Ag nanoshells through coupling between the nanoparticles and the nanoshells.     

Optical hydrogen sensor based on etched fiber Bragg grating sputtered with Pd/Ag composite film

A novel fiber optical fiber hydrogen sensor based on etched fiber Bragg grating coated with Pd/Ag composite film is proposed in this paper. Pd/Ag composite films were deposited on the side-face of etched fiber Bragg grating (FBG) as sensing elements by magnetron sputtering process. The atomic ratio of the two metals in Pd/Ag composite film is controlled at Pd:Ag = 76:24. Compared to standard FBG coated with same hydrogen sensitive film, etched FBG can significantly increase the sensor’s sensitivity. When hydrogen concentrations are 4% in volume percentage, the wavelength shifts of FBG-125 μm, FBG-38 μm and FBG-20.6 μm are 8, 23 and 40 pm respectively. The experimental results show the sensor’s hydrogen response is reversible, and the hydrogen sensor has great potential in hydrogen’s measurement.     

焊料与金属材料对陶瓷/金属封接强度的影响

对焊料与金属材料对陶瓷/金属封接强度的影响进行了初步分析与探讨。发现:用AuCu、AuNi焊料焊接陶瓷/可伐时,因为封接件的断裂模式为大量Mo-Ni分层,所以平均封接强度只有80MPa;用AgCu、PdAgCu焊料焊接陶瓷/可伐时,封接件的断裂模式为Mo-Mo分层或Mo-Ni分层,平均封接强度在100MPa左右;用Ag、Cu焊料焊接陶瓷/可伐时,封接件的断裂模式为粘瓷或瓷断,平均封接强度达150MPa。用AgCu、PdAgCu、AuCu焊料焊接陶瓷/无氧铜时,因为封接件的断裂模式为粘瓷或瓷断,所以平均封接强度在150MPa左右,比用同种焊料焊接陶瓷/可伐时最高提高了80%。     

Experimental study on optical fiber bundle hydrogen sensor based on palladium-silver optical thin film

In this paper, a 20 nm palladium-silver (Pd/Ag) ultrathin optical film is used for hydrogen gas sensing. The mole ratio of the two metals is controlled at Pd:Ag=3:1. In the direct current (DC) sputtering machine, the optical thin film is evaporated on the optical glass. Compared with pure palladium, the Pd/Ag alloy can increase the life and the stability of the sensing film. Optimum sputtering parameters for Pd/Ag alloy are presented in this paper, and the effects of different experimental conditions for hydrogen sensor are investigated, including the temperature effect, humidity effect and cross sensitivity of hydrogen sensor for different gases. The experiment results indicate that the hydrogen sensor based on Pd/Ag optical thin film exhibits good sensing characteristics. The existing of CO and water in hydrogen increases the response time and decreases the response amplitude of optical fiber bundle hydrogen sensor. The experiment results show that the increasing temperature can eliminate the effect and shorten hydrogen sensor response time effectively.     

Study of free air ball formation in Ag–8Au–3Pd alloy wire bonding

An innovative Ag–8Au–3Pd alloy wire has been developed as an alternative to the traditional gold wire bonding. This paper focused on the free air ball (FAB) formation of 0.7 mil Ag–8Au–3Pd alloy wire, which was vital for the yield of the subsequent bonding process. During electric flame-off (EFO) process, the wire tail was melted by a high voltage spark, and then the FAB was shaped by the effects of surface tension and gravity. The EFO current was the key factor to influence the Ag–8Au–3Pd alloy FAB size and morphology due to the energy input via arc discharging. The defects including off-center and ripple appeared on the Ag–8Au–3Pd alloy FABs were discussed by cooling and solidification. It is suggested that low EFO current will effectively avoid FAB defects. The contaminants on the Ag–8Au–3Pd alloy FAB surface were analyzed by Auger electron spectroscopy (AES). Under the protection of the shielding gas, oxidation and sulfuration have been effectively prevented.     

Experimental research of optical fiber hydrogen gas sensing system based on palladium-silver alloy

A novel optical fiber hydrogen sensing system based on palladium (Pd) and sliver (Ag) is proposed. By direct current (DC) magnetron process, Pd/Ag alloy ultra-thin films were deposited on the substrate to eliminate the hydrogen embrittlement of sensor based on pure Pd. Several samples with different thin film thicknesses were fabricated at different substrate temperatures and tested in the optical fiber hydrogen sensor setup. We do a series of experiments for obtaining optimum sputtering parameters, such as optimum sputtering temperature and thickness of Pd/Ag alloy film. The humidity effect and reliability experiment for the optical fiber hydrogen gas sensor are reported in detail. The testing results demonstrate the Pd/Ag alloy is a promising material for optical fiber hydrogen gas sensor.     

Highly enhanced photoelectric catalysis of WO3 nanoblocks loaded with Ag nanoparticles

WO3/Ag composite film photoanodes were synthesized by hydrothermal combined electrodeposition method. Characterization of samples was conducted by scanning electron microscope (SEM) and X-ray diffraction (XRD), which showed that WO3/Ag composite films had been synthesized. Diffuse reflectance spectra show WO3/Ag composite film has more strong absorption than WO3 film under simulated visible light irradiation. Electrochemical impedance spectroscopy shows WO3/Ag composite film photoanode enhances charge transfer efficiency compared with WO3 film. WO3/Ag composite film photoanodes show higher photocurrent and photoelectric catalytic activity than WO3 film, and the WO3/Ag composite film obtained by depositing Ag nanoparticles at 50 s (WO3/Ag-50) shows the highest photocurrent and photoelectric photoelectric catalytic activity. Meanwhile, the photoelectric catalytic activity of the composite film is higher than their direct photocatalytic and electric catalytic activity. The higher photocurrent and photoelectric catalytic activity of the WO3/Ag composite film photoanodes are attributed to the surface plasmon resonance effect of Ag nanoparticles and Schottky junction effect at the WO3/Ag interface.     

Optical fiber hydrogen sensor based on light reflection and a palladium-sliver thin film

Thin alloy films of palladium(Pd) and silver(Ag) are deposited onto glass substrates via the direct current(DC) magnetron technique.The hydrogen sensor probe consists of optical fiber bundle and Pd/Ag optical thin film.when the sensor is exposed to hydrogen,the refractive index of Pd/Ag optical thin layer will diminish and cause attenuation changes of the reflective light.It is observed that the thickness of Pd/Ag alloy layer can affect the hydrogen sensor signal.Under different substrate temperatures,several Pd/Ag samples are coated with different thicknesses of Pd/Ag alloy,and the results of a hydrogen sensor based on reflective light from the Pd/Ag alloy thin film are discussed.     

An optical fiber hydrogen sensor with Pd/Ag film

A20 nanometer palladium-silver （Pd/Ag） ultra-thin film was used for hydrogen gas sensing. The atomic ratio of Pd： Ag was 3：1, the thin film was evaporated on the optical glass, the Pd/Ag alloy could increase the life and provide the stability of the sensing film. The artificial neutral network was used for processing the data collected from the optical fiber bundle hydrogen sensor, which could enhance the measuring accuracy, at the same time, the intrinsic and extrinsic influences were eliminated mainly. Experimental results and numerical simulation show the training method available, a linear precision of 0. 1% for the optical hydrogen sensor is achieved.