金丝键合工艺技术研究

金丝键合是芯片组装的关键工序。分析了金丝键合的工艺控制要点：键合时间和键合功率,通过工艺实验总结出了键合时间和键合功率对键合强度的影响规律：（1）在小超声功率条件下,键合强度对键合时间敏感,键合强度随时间增加迅速增大;在大超声功率条件下,键合强度对键合时间的敏感性下降。（2）超声功率过小不能形成足够的键合强度,超声功率过大使得键合成功后的键合强度被破坏,即过高的超声功率将不利于键合强度的提高。     

欠键合/过键合与功率设置及温度关系的研究

在热超声引线键合过程中,低功率设置和低温下容易导致欠键合,高功率设置和高温下则容易出现过键合。通过实验采集了不同超声功率设置、不同温度下大量键合过程中换能杆末端轴向的速度信号、换能杆两端驱动电压和电流信号,并测量其键合强度,计算得到不同温度下换能杆的振幅。分析了超声功率和键合温度对振幅的影响规律,解释了功率设置和键合温度导致欠键合和过键合的可能原因,建立了功率设置和温度对换能杆振幅影响的模型。这些实验数据和结果有助于进一步研究键合过程中参数间的相互影响规律。     

超声楔键合过程界面接合部演化规律研究

超声引线楔键合是集成电路芯片内部电路与外部电路实现功率与信号联通的重要互连工艺.键合参数对键合点连接质量有重要影响.运用化学腐蚀方法,全面考察键合点外观及接合部特征与键合参数之间的关系.实验结果表明:随着超声功率的增加,接头接合部形貌由椭圆形变为圆形,有效连接部位由键合点周边向中心扩展以致达到整个界面.从变形能的角度解释了接头界面形成特点的本质.     

引线键合在温度循环下的键合强度衰减研究

研究了18、25、30μm三种金丝和25、32、45μm三种硅铝丝键合引线在不同温度循环次数下的键合强度衰减规律,并研究了拉断模式的比例。结果表明,所有试验样品,无论是否经历温度循环,均达到了GJB548B-2005方法2011.1中的最小键合强度要求,均未出现焊点拉脱的现象。随着温度循环次数的增加,金丝键合强度先略微增大,后缓慢减小并趋于平缓。硅铝丝键合强度先较快减小,后缓慢减小,并趋于平缓。相比于金丝,硅铝丝在0～50次的温度循环下键合强度衰减较快。通过曲线拟合,获得不同丝径下的键合强度衰减变化方程。     

温度因素对热超声键合强度的影响实验研究

主要研究了热超声键合过程中环境温度对键合强度的影响规律.分析了键合强度与键合温度之间的关系.实验研究发现,最佳键合"窗口"出现在200～240℃,此时键合强度可达20g左右.对推荐使用的大于5.4g的键合强度标准,本实验条件下可键合"窗口"为120～360℃.这些实验现象和分析结果为后期的键合参数匹配规律和系统动态特性研究打下基础.     

硅直接键合工艺对晶片平整度的要求

本文用弹性力学近似,给出了键合工艺对硅片表面平整度的定量要求以及沾污粒子与孔洞大小之间的关系,并用X射线双晶衍射技术和红外透射图象对键合硅片进行了实验研究。     

用于MEMS器件的单面溅金硅共晶键合技术

分析了金硅共晶键合的基本原理,讨论了键合实验的基本工艺,给出了键合的测试结果.这种键合方法键合温度低,键合工艺简单,与器件制造工艺兼容,对工艺环境要求不高,可以得到满意的键合强度,而且成本低,特别适合于已经做过结构的器件键合封接工艺.     

基于镍钯金PCB的数字传声器键合工艺匹配研究

介绍了数字传声器的关键结构,并基于其既有焊接又有键合工艺的特点,为提高PCB连接可靠性,特别是这种IC封装用PCB与芯片连接的可靠性,引入了镍钯金PCB,实现了其高可靠性的连接;并根据键合工艺的的要求,优化选择了键合温度、键合机台压力、功率和键合时间等工艺参数,进行了一系列引线键合实验,取得了键合点的相关实验数据,并对...     

硅直接键合工艺对晶片平整度的要求

本文用弹性力学近似，给出了键合工艺对硅片表面平整度的定量要求以及沾污粒子与孔洞大小洞的关系，并用Ｘ射线双晶衍射技术和红外透射图象对键合硅片进行了实验研究。     

PEO-LiClO_4与铝阳极键合界面结构及力学性能

利用自制的阳极键合炉实现了PEO-LiClO4与铝的阳极键合,并且采用扫描电子显微镜(SEM)对键合界面进行了观察。结果表明,键合后铝/高分子固体电解质界面处生成了一层厚度约5μm的过渡层,分析认为该过渡层是两者得以焊合的关键。由实验得到的电流-时间的变化过程可以看出,键合区域中的导电离子是由瞬时高密度迁移转向低密度稳态迁移的。利用非线性有限元分析软件MSC.Marc研究了阳极键合件从90℃冷却到室温的残余应力和变形,并且建立了接头应力分析模型,探讨了界面应力场的分布规律,为提高键合质量提供了理论依据。对比翘曲变形前后的形状可知,试件从高温冷却后,上表面中心会向下收缩,边缘的翘曲下降,最大的翘曲发生在试件对角棱线处。模拟分析显示过渡层上等效应力是最大的,因此该层成为阳极键合接头中的薄弱部位。因此,对残余应力和变形进行分析并在此基础上提出缓解的措施是提高阳极键合性能的一个有效途径。     

Statistical Characterization of Open Failures in the Fine-Pitch COG Interconnection

Chip-on-glass (COG) interconnection using anisotropic conductive film (ACF) is susceptible to open failures. Open failures can be induced by the absence of conductive particles or an insufficient contact. Experimental results as well as statistical approaches were used to understand the conditions for open failures in COG bonding. The binomial distribution was used to predict the probability of the open failure due to the deficiency of conductive particles. The probability of an open failure decreased with increasing bump area and decreasing particle size. The bump height variation was also an important factor that affected the probability of the open failure together with the bump-to-electrode gap and the particle size. The variation in bump height should be minimized to avoid open failures in fine-pitch applications where a smaller particle size is required.     

各向异性导电胶粘接可靠性研究进展

介绍各向异性导电胶导电机理和粘接工艺,以及影响它的粘接可靠性因素和最佳参数的研究,如粘接温度、固化时间、粘接压力、粒子含量等。对各向异性导电胶粘接可靠性中的开路、短路、接触电阻与粘接压力和温度循环的关系进行了讨论,并介绍了各向异性导电胶可靠性的理论计算模型。     

ACF各向异性导电胶的工艺评价方法

ACF作为一种实装材料,可以方便地实现精细电极的导通连接。其原理是通过加热、加压、树脂受热固化、ACF中的导电粒子连接上下电极,从而实现电极固定和电极导通。实际上受ACF成份的影响,每种ACF的特性都不一样,而在生产应用中,温度、压力、时间、位置、辅助材料等因素又会对连接的效果产生影响。为了确保ACF适用于厂内的工艺,把ACF的应用风险降低。评价一种ACF的过程,通常分为单体评价、工艺评价和产品评价。文中将以屏侧ACF为例,讨论ACF工艺评价的方法。     

Experimental Analysis of Mechanical and Electrical Characteristics of Metal-Coated Conductive Spheres for Anisotropic Conductive Adhesives (ACAs) Interconnection

An accurate characterization for the deformation behavior of conductive particles is important: 1) to understand the anisotropic conductive adhesive (ACA) interconnection and 2) to optimize the ACA bonding parameter. This paper introduces an experimental technique, which has been developed to allow continuous monitoring of deformation characteristics of a single conductive particle. The load-deformation curve of a single conductive particle is measured, which provides the quantitative estimation of the mechanical and electrical characteristics of metal-coated polymer spheres used in ACAs. Based on the load-deformation result of a single conductive particle and the number of trapped particles on a bump, equivalent spring models are used to predict the deformation degree of conductive particles after flip chip assembly. For two kinds of conductive particles with different polymer cores, the mechanical and electrical characteristics of ACA interconnection were studied. Such results are used to further achieve a more sophisticated approach of the ACA bonding process and contact reliability.     

Behavior of Anisotropic Conductive Film Joints Bonded with Various Forces under Temperature Fluctuation

The effects of bonding force and temperature fluctuations on the failure behaviors of anisotropic conductive film (ACF) interconnections were analyzed. Thermal shock testing was conducted to realize the temperature fluctuation environment. Two primary modes of failure were detected after thermal shock testing: formation of a non-conductive gap between conductive particles and the Au bump or Ni/Au-plated Cu pads, and delamination of the adhesive matrix from the plated Cu pads on flexible substrates. The failure mode was affected mainly by the variation in the bonding force. The main failure mode of the thermally shocked ACF joints was the non-conductive gap for the joints with low bonding forces and adhesive matrix delamination for the joints with high bonding forces. The difference in failure modes is critically discussed.     

Study of the Formation of Bubbles in Rigid Substrate-Flexible Substrate Bonding Using Anisotropic Conductive Films and the Bubble Effects on Anisotropic Conductive Film Joint Reliability

The formation of process-related bubbles that become entrapped inside the anisotropic conductive film (ACF) layer during bonding processes remains an issue. The formation of these bubbles is strongly influenced by the process variables, such as bonding pressure and bonding temperature. Therefore, bonding process variables of bonding temperature, bonding pressure, and type of flexible substrate (FS) were changed in order to investigate the effects of the changes as they concern the formation of bubbles. According to the results, the tendency toward bubble formation was closely related to these three factors. The bubble area increased as the bonding temperature increased. Moreover, the shape and tendency of bubbles coincided with temperature distribution in␣the ACF layer. Two different types of FS, each with different surface roughnesses and energies, were used. The bubbles formed only on the FS with the larger roughness and lower surface energy. According to the results from a surface energy measurement of FS types using goniometry, a FS with a higher surface energy is favorable for a bubble-free assembly, as the higher surface energy provides better wettability. In addition, in order to investigate the effect of bubbles on the reliability of ACF joints, the pressure cooker test (PCT) was performed, and all samples with bubbles electrically failed after 72 h of a PCT, as the process-related bubbles provided a moisture penetration path and entrapment site for moisture. However, all type 1 test vehicles (TVs) survived even after 120 h of a PCT. Therefore, Ar and O₂ plasma treatments were performed on the FS with the lower surface energy in order to improve the surface energies and wettability. Following this, the bubbles were successfully removed at rigid substrate (RS)–FS bonding joints using ACFs.     

The contact resistance and reliability of anisotropicallyconductive film (ACF)

The effect of bonding pressure on the electrical and mechanical properties of anisotropic conductive film (ACF) joint using nickel particles and metal-coated polymer ball-filled ACFs was investigated. The contact resistance decreases as the bonding pressure increases. Contact resistance of ACF is determined by the contact area change between particles and contact substrates. Electrical conduction through the pressure engaged contact area between conductive particles and conductor substrates is the main conduction mechanism in ACF interconnection. In addition, environmental effects on contact resistance and adhesion strength such as thermal aging, high temperature/humidity aging and temperature cycling were also investigated. Interestingly, the contact resistances of the excessively bonded samples deteriorated more than those of optimally bonded ones. Increasing contact resistance and decreasing adhesion strength after harsh environmental tests were mainly due to the loss of contact by thermal stress effect and moisture absorption, and also partially due to the formation of metal oxide on the conductive particles     

各向异性导电胶粘结工艺技术研究

分析了影响各向异性导电胶粘结可靠性的各因素,通过正交实验优化工艺参数,并在150℃高温贮存以及-65℃～150℃温度循环后对导电胶的剪切强度和接触电阻进行了可靠性实验。结果表明:影响ACA可靠性的主要因素导电粒子体积比例为15%,粘结温度200℃,时间10s,粘结压力为39.2N时,导电胶的剪切强度为286.2N,凸点的接触电阻为35mΩ。在可靠性试验后,导电胶的剪切强度满足GJB548B-2005的要求,接触电阻变化率小于5%。     

解决COG邦定工艺中的IC翘曲问题

今天,各种电子设备在生活中日益普及,人们对于电子设备的要求已经不仅仅停留在功能上。轻薄化是电子设备发展的一个重要方向,随之而来的就是对液晶面板轻薄化的要求,而轻薄化会带来IC翘曲的问题。文章通过对IC翘曲的研究,得出了降低COG邦定中的主压温度并增高基座温度可以解决IC翘曲的结论。文中的结论对生产中COG邦定工艺的改善有很大作用,并且已经在企业生产中得以应用。