Plasma und Dünne Schichten

Plasma and thin films for lighting application Thin films play an important role in the lighting industry. Well known products are reflectors with simple aluminium coating or with dichroic coatings for cold light mirrors. Especially for energy saving applications special halogen bulbs are coated with a transparent hot mirror that increases the overall efficiency up to 50 % while keeping the positive properties of halogen lighting like color, color rendering index, start up performance and others unchanged. Special thin film applications realize color filters, IR filters, UV filters or color conversion filters. All these processes are vacuum processes that work with plasma assistance. The most prominent technologies for cost effective production are the PICVD processes (former development of SCHOTT AG in cooperation with Auer Lighting) and the Microdyn® technology from DSI, Santa Rosa.     

Herstellung funktionaler organischer Dünnschichten durch Vakuumverdampfung

Depositing of functional organic thin films by vacuum evaporation Material evaporation under high or ultra‐high vacuum conditions has been a well known method of thin film coating since nearly a hundred years. Since discovery of semiconducting organics in the 1970s and 1980s, this technology has been increasingly applied to deposit organic molecular compounds. At the moment especially materials for organic LEDs (OLEDs) and for thin‐film solar cells are in the focus of interest. While organics evaporation makes use of advantages of high‐vacuum coating (purity, compatible processing, masking etc.) there are also dedicated demands on process control coming up. The article describes basic requirements, capabilities of present temperature‐controlled evaporation sources, material‐related features, as well as typical applications.     

一种新型的幅宽1500 mm的卷绕式真空镀膜机

幅宽1500mm卷绕式真空镀膜机，是为了满足1500mm幅宽的聚脂薄膜（PET）、定向聚丙烯薄膜（OPP）、聚丙烯流涎薄膜（CPP）、聚乙烯薄膜（PVC）的真空镀铝而设计的。和通常的卷绕式真空镀膜机相比，具有真空度高，抽真空的时间短，卷取性能好，镀膜幅度宽，镀膜速度快。跑偏量小，镀膜层牢固、均匀等优点。是一种理想的卷绕式真空镀膜机。     

金属涂层SPR的单端面LPFG折射率传感器(英文)

提出了一种新型的单端面反射的镀有金属膜的长周期光纤光栅传感器.这种基于表面等离子体谐振的具有三层结构的传感器分为两个部分,光栅部分用连续CO2激光脉冲制作,金属膜是由真空镀膜制成.在光栅上镀上各种不同厚度的薄金属膜来激发表面等离子体波,用这种光纤光栅传感器来测量液体的折射率,并研究它的反射谐振谱的特性.在标准气压下,镀有80 nm银膜的光栅从水(ns=1.33)到酒精(ns=1.36)中光栅谐振波长改变了1.14nm,其敏感度达到折射率变化～5×10-4谐振波长改变20 pm.研究发现不同厚度的不同金属膜显示了不同的敏感度.通过比较光栅在空气,水,酒精,甘油,以及在它们的混合物溶液中的谐振波长,得到这种反射式的长周期光纤光栅传感器的敏感特性.为制作一种高性能的用来测量折射率的光纤光栅传感器提供了一个有益的参考.     

Effects of annealing on the optical, structural, and chemical properties of TiO2 and MgF2 thin films prepared by plasma ion-assisted deposition

Effects of thermal annealing at 400 degrees C on the optical, structural, and chemical properties of TiO2 single-layer, MgF2 single-layer, and TiO2/MgF2 narrow-bandpass filters deposited by conventional electron-beam evaporation (CE) and plasma ion-assisted deposition (PIAD) were investigated. In the case of TiO2 films, the results show that the annealing of both CE and PIAD TiO2 films increases the refractive index slightly and the extinction coefficient and surface roughness greatly. Annealing decreases the thickness of CE TiO2 films drastically, whereas it does not vary that of PIAD TiO2 films. For PIAD MgF2 films, annealing increases the refractive index and decreases the extinction coefficient drastically. An x-ray photoelectron spectroscopy analysis suggests that an increase in the refractive index and a decrease in the extinction coefficient for PIAD MgF2 films after annealing may be related to the enhanced concentration of MgO in the annealed PIAD MgF2 films and the changes in the chemical bonding states of Mg 2p, F 1s, and O is. It is found that (TiO2/MgF2) multilayer filters, consisting of PIAD TiO2 and CE MgF2 films, are as deposited without microcracks and are also thermally stable after annealing.     

Investigation of MgF2 optical thin films with ultralow refractive indices prepared from autoclaved sols

We have successfully developed a process to form high quality MgF(2) thin films with ultralow refractive indices from autoclaved sols prepared from magnesium acetate and hydrofluoric acid. And we have confirmed that our porous MgF(2) coatings have not only high transmittance in the UV region but also high uniformity of film thickness. They can be uniformly formed on phiv 300 mm substrates as a single coating and as a hybrid coating with sublayers formed by physical vapor deposition. They are expected to be applied to various optics that need high transmittance in the UV region.     

Plasmavorbehandlung und Beschichtung von Kunststoffolien. Teil 2: Experimentelle Ergebnisse der Plasmavorbehandlung von Kunststoffolien

Plasma Pretreatement and Coating of Polymer Films. Part 2: Experimental Results of the Plasma Pretreatment of Polymer Films The food packaging industry demands cheap polymer films possessing a high barrier against permeation of gases, moisture and flavor. Candidates for the most successful materials fulfilling these requirements are vacuum web coated b iaxial o riented p olypropylene (BOPP) films containing a thin inorganic barrier layer. For a good adhesion of the barrier layer on the BOPP films, the polymer film must be pretreated. The industry uses the Corona atmosphere plasma. This work is separated in three parts. The first part describes the experimental setup and the properties of vacuum web coated layers on polymer films [1]. The next part contains the results of the systematic modification of po } ymer surface by atmosphere and low pressure plasmas. The influence of the surface properties on the final functionality of the coated films is given. In the last part, the discussion of the results of the first and second part reveals systematic relations between the production parameters of the high barrier films and their final functionality. These results firstly reveal the adhesion mechanism of the inorganic barrier layers of the polymer films and the necessary surface properties of the polymer films, in order to get cheap high barrier films by vacuum web coating.     

One‐Step Solution Phase Growth of Transition Metal Dichalcogenide Thin Films Directly on Solid Substrates

Ultrathin transition metal dichalcogenides (TMDs) have exotic electronic properties. With success in easy synthesis of high quality TMD thin films, the potential applications will become more viable in electronics, optics, energy storage, and catalysis. Synthesis of TMD thin films has been mostly performed in vacuum or by thermolysis. So far, there is no solution phase synthesis to produce large‐area thin films directly on target substrates. Here, this paper reports a one‐step quick synthesis (within 45–90 s) of TMD thin films (MoS₂, WS₂, MoSe₂, WSe₂, etc.) on solid substrates by using microwave irradiation on a precursor‐containing electrolyte solution. The numbers of the quintuple layers of the TMD thin films are precisely controllable by varying the precursor's concentration in the electrolyte solution. A photodetector made of MoS₂ thin film comprising of small size grains shows near‐IR absorption, supported by the first principle calculation, exhibits a high photoresponsivity (>300 mA W^?1) and a fast response (124 µs). This study paves a robust way for the synthesis of various TMD thin films in solution phases.     

WDM用微镜片分光膜的镀制

主要介绍了光纤波分复用（WDM）中用的分光膜的批量镀制工艺。在大量实验基础上，对比不同膜系及膜料的选择，重点介绍了工艺流程中的镀制、监控、检测等主要环节。制备的微镜片性能稳定，已经完全达到用户的需求。     

Plasmavorbehandlung und Beschichtung von Kunststoffolien. Teil 1: Beschichtung von unbehandelten Kunststoffolien

Plasma Pretreatment and Coating of Polymer Films. Part 1: Coating of Non-treated Polymer Films The food packaging industry demands cheap polymer films possessing a high barrier against permeation of gases, moisture and flavor. Candidates for the most successful materials fulfilling these requirements are vacuum web coated biaxial oriented polypropylene (BOPP) films containing a thin inorganic barrier layer. For a good adhesion of the barrier layer on the BOPP films, the polymer film must be pretreated. The industry uses the Corona atmosphere plasma. This work is separated in three parts. The first part describes the experimental setup and the properties of vacuum web coated layers on polymer films. The next part contains the results of the systematic modification of polymer surfaces by atmosphere and low pressure plasmas. The influence of the surface properties on the final functionality of the coated films is given. In the last part, the discussion of the results of the first and second part reveals systematic relations between the production parameters of the high barrier films and their final functionality. These results firstly reveal the adhesion mechanism of the inorganic barrier layers of the polymer films and the necessary surface properties of the polymer films, in order to get cheap high barrier films by vacuum web coating.     

Investigation of the substrate effect for Zr doped ZnO thin film deposition by thermionic vacuum arc technique

ZnO is a fundamental wide band gap semiconductor. Especially, doped elements change the optical properties of the ZnO thin film, drastically. Doped ZnO semiconductor is a promising materials for the transparent conductive oxide layer. Especially, Zr doped ZnO is a potential material for the high performance TCO. In this paper, ZnO semiconductors were doped with Zr element and microstructural, surface and optical properties of the Zr doped ZnO thin films were investigated. Zr doped ZnO thin films were deposited thermionic vacuum arc (TVA) technique. TVA is a rapid and high vacuum deposition method. A glass, polyethylene terephthalate and Si wafer (111) were used as a substrate material. Zr doped ZnO thin films deposited by TVA technique and their substrate effect investigated. As a results, deposited thin films has a high transparency. The crystal orientation of the films are in polycrystal formation. Especially, substrate crystal orientation strongly change the crystal formation of the films. Substrate crystal structure can change the optical band gap, microstructural properties and deposited layer formation. According to the atomic force microscopy and field emission scanning electron microscopy measurements, all deposited layer shows homogeneous, compact and low roughness. The band values of the deposited thin film were approximately found as to be 3.1–3.4 eV. According to the results, Zr elements created more optical defect and shifted to the band gap value towards to blue region.     

Beschichten transparenter Kunststoffe mit Kratzschutz und AR in einer kombinierten InLine‐Anlage

For the last decades, both the ophthalmic and the precision optics industries have been relying on vacuum evaporation on the production floor. This particular thin film process is not very suitable for mass production. A major problem in mass production of high quality consumer products is the lack of automatic operation in single chamber evaporation coaters. This article describes a new coating process for lenses which uses both PECVD and sputtering technologies. A new InLine machine equipped with these technologies is presented. This machine meets all requirements with respect to process stability and automation for the respective industry. With its modular design concept, this coating machine can be totally integrated into an InLine factory floor. It can also easily be scaled up or down for a wide range of applications. Given the excellent quality that has been achieved for hardcoat and antireflective coating of plastic eyeglass lenses, similar results can be expected in other thin film applications for a wide range of temperature sensitive substrates in precision optics.     

Plasmavorbehandlung und Beschichtung von Kunststoffolien. Teil 3: Auswertung der experimentellen Ergebnisse und Diskussion

Plasma Pretreatment and Coating of Polymer Films. Part 3: Analysis of the Experimental Results and Discussion The food packaging industry demands cheap polymer films possessing a high barrier against permeation of gases, moisture and flavour. Candidates for the most successful materials fulfilling these requirements are vacuum web coated biaxial oriented polypropylene (BOPP) films containing a thin inorganic barrier layer. For a good adhesion of the barrier layer on the BOPP films, the polymer film must be pretreated. The industry uses the Corona atmosphere plasma. This work is separated in three parts. The first part describes the experimental setup and the properties of vacuum web coated layers on polymer films[1] The next part contains the results of the systematic modification of polymer surface by atmosphere and low pressure plasmas[2]. The influence of the surface properties on the final functionality of the coated films is given. In the last part, the discussion of the results of the first and second part reveals systematic relations between the production parameters of the high barrier films and their final functionality. These results firstly reveal the adhesion mechanism of the inorganic barrier layers of the polymer films and the necessary surface properties of the polymer films, in order to get cheap high barrier films by vacuum web coating.     

国外高真空卷绕镀膜设备发展现状

从设备总体、卷绕系统、真空系统、蒸发源系统和电气控制系统等方面综合介绍国外主要的高真空卷绕镀膜设备制造公司LS、GVE、GVT和ULVAC的包装装饰用设备发展现状。     

Ionengestützte Beschichtungsprozesse in situ kontrollieren. Ion assisted deposition processes: in situ control

Ion assisted deposition processes for optical precision components exhibit a high potential, in particular in the near and mid infrared spectral region. The presented results demonstrate the important criterion of a minimized water adsorption in the thin film structures by measurements of the optical losses in the wavelength range around 3 μm as well as by the determination of the spectral stability of the optics. Furthermore, the employment of an in situ monitor, which allows wide‐band transmission measurements directly at the product, provides an extensive database for the process analysis and development. Thus, additional information about the growth behavior, the vacuum‐to‐air‐shift, and about layer inhomogeneities is available. The combination of the in situ monitor with the coating plant control results in an automated process system, which allows a precise determination of the layer thickness and represents a basis for the rapid prototyping of complex layer systems. In contrast to standard monitor strategies, test coatings and calibration factors are not necessary. With the presented combination of the stable ion assisted deposition process and the in situ monitor, the production of demanding NIR/ MIR multilayer systems with high reproducibility could be automated.     

空间光学薄膜技术

随着空间技术的快速发展,光学薄膜技术在我国空间技术中的应用越来越显著,应用领域也越来越广泛。本文概述了目前光学薄膜技术在我国空间技术领域的应用情况以及未来可能的应用领域。鉴于空间环境的特殊性,光学薄膜技术在空间的应用具有特殊的要求,总结了空间环境对于光学薄膜的特殊要求。最后,介绍了表面工程技术重点实验室近年来研究的各类空间用光学薄膜,包括红外滤光片、闪电探测用超窄带滤光片以及线性渐变滤光片等的研究情况及研究结果。     

Direct optical monitoring on the rotating substrate holder

Single wavelength optical monitoring is frequently applied in large box coaters. In state of the art optical coating systems a testglass changer with stationary test glasses is used for thickness monitoring while the substrates are located on a rotating substrate holder. The accuracy of this so called indirect monitoring technique is mainly limited by variations of the tooling factor. Direct monitoring on a substrate which is located on the rotating substrate holder avoids these errors and takes advantage of automatic thickness error compensation effects. The paper reports substantial progress which has been achieved for coating systems with large area substrate holders (up to Ø 1500 mm). Intermittent monitoring on a substrate or a witness was applied. This technique enables rapid prototyping with tight specifications and high yields in large area batch coaters. Application results of challenging optical multilayer systems are demonstrating clearly the potential of this powerful monitoring technique. The monitoring capability was investigated for a lot of different layer systems such as dielectric mirrors, anti‐reflection coatings, sophisticated edge filters, polarizer coatings, beam splitters multiple cavity band‐pass filters and notch filter coatings. Strong coincidence of theory with experiment was achieved with plasma ion assisted deposition (PIAD) and magnetron sputtering. Reproducibility experiments have clearly shown the benefits of this monitoring technique.     

Effect of post annealing on structural and optical properties of ZnO thin films deposited by vacuum coating technique

We report the effect of annealing temperature on structural, electrical and optical properties of polycrystalline zinc oxide thin films grown on p-type silicon (100) and glass substrates by vacuum coating technique. The XRD and AFM measurements confirmed that the thin films grown by this technique have good crystalline hexagonal wurtzite structures and homogenous surfaces. The study also reveals that the rms value of thin film roughness increases from 6 to 16 nm, the optical band gap increases from 3.05 to 3.26 eV and resistivity from 0.3 to 5 Ωcm when the post-deposition annealing temperature is changed from 400 to 600 °C. It is observed that ZnO thin film annealed at 600 °C after deposition provide a smooth and flat texture suited for optoelectronic applications.     

Vakuumbeschichtung – Heutiger Stand und zukünftige Trends

Thin films have changed the world. Many products of our modern life, like powerful PC's, the Compact Disc, or energy-saving architectural glazings would not exist without vacuum coating technology. During the past 20 years PVD and PECVD processes for deposition of thin films have spread into a huge variety of different applications. Besides microelectronics, the major fields for the near future are flat panel displays, data storage, optics/glass and surface protection. The article outlines today's market situation and tries to characterize present status and future trends in vacuum coating technology on the basis of some selected examples.     

Comparative study of physical properties of vapor chopped and nonchopped Al2O3 thin films

Aluminium oxide being environmentally stable and having high transmittance is an interesting material for optoelectronics devices. Aluminium oxide thin films have been successfully deposited by hot water oxidation of vacuum evaporated aluminium thin films. The surface morphology, surface roughness, optical transmission, band gap, refractive index and intrinsic stress of Al₂O₃ thin films were studied. The cost effective vapor chopping technique was used. It was observed that, optical transmittance of vapor chopped Al₂O₃ thin film showed higher transmittance than the nonchopped film. The optical band gap of vapor chopped thin film was higher than the nonchopped Al₂O₃, whereas surface roughness and refractive index were lower due to vapor chopping.