Fabrication of CuInSe2 films and solar cells by the sequential evaporation of In2Se3 and Cu2Se binary compounds

Cu₂Se/In_xSe(x≈1) double layers were prepared by sequentially evaporating In₂Se₃ and Cu₂Se binary compounds at room temperature on glass or Mo-coated glass substrates and CuInSe₂ films were formed by annealing them in a Se atmosphere at 550°C in the same vacuum chamber. The In_xSe thickness was fixed at 1 μm and the Cu₂Se thickness was varied from 0.2 to 0.5 μm. The CuInSe₂ films were single phase and the compositions were Cu-rich when the Cu₂Se thickness was above 0.35 μm. And then, a thin CuIn₃Se₅ layer was formed on the top of the CuInSe₂ film by co-evaporating In₂Se₃ and Se at 550°C. When the thickness of CuIn₃Se₅ layer was about 150 nm, the CuInSe₂ cell showed the active area efficiency of 5.4% with V_oc=286 mV, J_sc=36 mA/cm² and FF=0.52. As the CuIn₃Se₅ thickness increased further, the efficiency decreased.     

Sub-micrometer thick CuInSe2 films for solar cells using sequential elemental evaporation

CuInSe₂ thin films were prepared using sequential vacuum evaporation of In, Se and Cu at moderately low substrate temperatures, avoiding any treatment using toxic H₂Se gas. The samples were annealed at 400 °C at a pressure of 10⁻⁵ mbar to form CuInSe₂. Structural, optical, electrical, compositional and morphological characterizations were carried out on these films. We could obtain highly stoichiometric film, using this simple method, without opting for co-evaporation or high substrate temperature for deposition.     

Effect of Cl ion implantation on electrical properties of CuInSe2 thin films

The effects of Cl ion implantation on the properties of CuInSe₂ epitaxial thin films have been investigated. Using five kinds of accelerating energies, the doped layer with a constant profile of Cl concentration along the depth direction was fabricated. From the results of reflection of high-energy electron diffraction, the damages due to implantation were removed by annealing at 400°C in N₂. The conductivity type in all implanted films was n-type, and the carrier concentration was increased with increasing Cl concentration in the thin films. Consequently, it is considered that Cl acts as a donor in CuInSe₂.     

Preparation of Cu(In,Ga)(S,Se)2 thin films by sequential evaporation and annealing in sulfur atmosphere

Cu(In,Ga)(S,Se)₂ thin films with high Ga/III ratio (around 0.8) were prepared by sequential evaporation from CuGaSe₂, CuInSe₂, In₂Se₃ and Ga₂Se₃ compounds and then annealing in H₂S gas atmosphere. The annealing temperature was varied from 400 to 500 °C. These samples were characterized by means of XRF, EPMA, XRD and SEM. The S/(S+Se) mole ratio in the thin films increased with increase in the annealing temperature, keeping the Cu, In and Ga contents nearly constant. The open circuit voltage increased and the short circuit current density decreased with increase in the annealing temperature. The best solar cell using Cu(In,Ga)(S,Se)₂ thin film with Ga/(In+Ga)=0.79 and S/(S+Se)=0.11 annealed at 400 °C demonstrated V_oc=535 mV, I_sc=13.3 mA/cm², FF=0.61 and efficiency=4.34% without AR-coating.     

CuInSe2 thin film preparation through a new selenisation process using chemical bath deposited selenium

Copper indium selenide thin films were prepared through a novel and an eco-friendly selenisation process. In this method, selenium film required for selenisation was prepared using chemical bath deposition technique, at room temperature. Thus, totally avoided usage of highly toxic H₂Se or selenium vapour. Here, the process involved annealing the Stacked layer, Se/In/Cu in which Cu and In were deposited using vacuum evaporation technique. Investigations on the solid-state reaction between the layers were done by analysing structural and optical properties of films formed at different annealing temperatures. Optimum annealing condition for the formation of copper indium selenide thin film was found to be 673 K for 1 h in high vacuum. Compositional dependence of the growth process was also studied using various Cu/In ratios. Optical band gap was decreased with increase in Cu/In ratio. Carrier concentration and hence conductivity were found to be increased with increase in Cu/In ratio. The films obtained were p-type and highly Cu-rich films were degenerate.     

Electrodeposition of CuInSe2 from ethylene glycol at 150 °C

Polycrystalline chalcopyrite thin films were potentiostatically electrodeposited from ethylene glycol solution onto SnO₂-coated glass substrates at 150 °C. The thickness of the layers was estimated using talysurf at 1.0 μm after deposition for 60 min. X-ray diffraction (XRD), X-ray fluorescence (XRF), scanning electron microscopy (SEM) and energy dispersive X-ray (EDX) analyses were used to identify and characterise compounds formed at different potentials. It was found that Cu_1.75Se formation was dominant at −0.80 V vs Se and indium assimilation increased at more negative voltages forming a mixture of compounds including numerous Cu-Se binary phases and copper indium diselenide (CuInSe₂) at the cathode. As-deposited materials showed poor crystallinity and therefore films were annealed in Ar/5%H₂ in the presence of Se to improve the material quality for all investigations. Although the films were deposited at 150 °C, no noticeable improvement of the CuInSe₂ was observed, suggesting growth from aqueous media at room temperature to be preferable.     

Photoluminescence properties of sodium incorporation in CuInSe2 and CuIn3Se5 thin films

CuInSe₂ and CuIn₃Se₅ thin films have been deposited using sodium compounds such as Na₂Se and Na₂S onto Corning 7059 glass substrates by the two-stage co-evaporation method. Enhanced grain growth and preferred (1 1 2) grain orientation as well as a decrease in resistivity with respect to undoped films were observed with sodium incorporation. A clear correlation between the photoluminescence spectra and the resistivity of the films was found by comparing the properties of films with and without Na incorporation. These observations suggest that compensation is reduced due to the suppression of donor-type defects by the presence of Na.     

Na incorporation in Mo and CuInSe2 from production processes

Results of characterization of thin films of Mo deposited by DC magnetron sputtering on soda-lime glass (Mo/SLG) and CuInSe₂ (CIS) on Mo/SLG are presented. The primary objective of the work was to clarify the factors determining the concentration of Na in commercial-grade CIS. Mo films were deposited by three laboratories manufacturing CIS thin film solar cells. Analysis was by secondary ion mass spectrometry, scanning electron microscopy and X-ray diffraction. Changes in Mo deposition parameters in general affected the Na level but there was no obvious link to any single Mo deposition parameter. Oxygen content directly affected the Na level. The Na behavior was not obviously connected to film preferred orientation. Selenization of the Mo layers was also examined. Elemental Se vapor was found to produce significantly less selenization than H₂Se. The amount of selenization was also strongly dependent upon Mo deposition conditions, although a specific source of the change in reaction rate was not found. Na distributions in the CIS deposited on the Mo were not limited by the diffusivity of the Na. The Na concentration in the CIS was increased by annealing the Mo films both with and without intentionally added Na. The Na level in the CIS appears to be set more by the CIS deposition process than by the Na concentration in the Mo so long as the Mo contains sufficient Na to saturate the available sites in the CIS.     

Band-gap engineering in CuIn(Se,S)2 absorbers for solar cells

Thin films based on CuInSe₂ have become very successful as absorber layers for solar cells. It is only in the recent past that gallium (Ga) and sulfur (S) were incorporated into CuInSe₂ in order to increase the energy band gap of the film to an optimum value with the ultimate aim of producing more efficient devices. This paper focuses on the incorporation of S into partly selenized CuInSe₂ films in order to produce CuIn(Se,S)₂ films with varying S/Se+S ratios, resulting in different band-gap energies. This was achieved by varying the conditions when selenizing Cu/In alloys in H₂Se/Ar, and then exposing these various partly selenized films to H₂S/Ar under identical conditions.     

Effect of bath temperature and annealing on the formation of CuInSe2

CuInSe₂ films of 2 μm thickness were electrodeposited potentiostatically, from aqueous solution containing thiocyanate as a complexing agent, on Mo substrates. For all the experiments, the potential of the potentiostatic deposition of the materials was chosen to be −1 V, whereas the bath temperature of electrolyte was varied from 20 to 80 °C. It was found that the electrodeposited CuInSe₂ was characterized by an amorphous layer and densely-packed nanometric grains with a good homogeneity. After vacuum annealing at 200 °C, glancing angle X-ray diffraction revealed the presence of the CuInSe₂ phase whereas annealing under selenium atmosphere lead to the growth of molybdenum selenide compound MoSe₂, in addition to a better crystallization of the copper indium diselenide compound. Scanning electron microscopic revealed that despite an increase in the grains dimensions, there was no significant change in the films surface morphology when the bath temperature was varied from 20 to 80 °C. At the same time, the composition of the electrodeposited Cu-In-Se layers becomes richer in copper. This increase in copper concentration is mainly compensated by a deficit in selenium atoms.     

Characterization of co-sputtered Cu-In alloy precursors for CuInSe2 thin films fabrication by close-spaced selenization

Sputtering technique for Cu–In precursor films fabrication using different Cu and In layer sequences have been widely investigated for CuInSe₂ production. But the CuInSe₂ films fabricated from these precursors using H₂Se or Se vapour selenization mostly exhibited poor microstructural properties. The co-sputtering technique for producing Cu–In alloy films and selenization within a close-spaced graphite box resulting in quality CuInSe₂ films was developed. All films were analysed using SEM, EDX, XRD and four-point probe measurements. Alloy films with a broad range of compositions were fabricated and XRD showed mainly In, CuIn₂ and Cu₁₁In₉ phases which were found to vary in intensities as the composition changes. Different morphological properties were displayed as the alloy composition changes. The selenized CuInSe₂ films exhibited different microstructural properties. Very In-rich films yielded the ODC compound with small crystal sizes whilst slightly In-rich or Cu-rich alloys yielded single phase CuInSe₂ films with dense crystals and sizes of about 5 μm. Film resistivities varied from 10⁻²–10⁸ Ω cm. The films had compositions with Cu/In of 0.40–2.3 and Se/(Cu+In) of 0.74–1.35. All CuInSe₂ films with the exception of very Cu-rich ones contained high amount of Se (>50%).     

Structural and optical properties of CuInTe2 films prepared by thermal vacuum evaporation from a single source

The CuInTe₂ thin films were prepared by thermal vacuum evaporation from a single source. The effects of heat treatment on both structural an optical properties of CuInTe₂ films were studied. X-ray diffraction studies reveal that the films prepared by the present method showed formation of single phase CuInTe₂ at heating treatment temperature higher than 300°C. The calculated lattice constants for CuInTe₂ films annealed at 300°C were found to be and . The value of the grain size obtained in these films was of the order of 50 nm. The value of optical energy gap (0.97 eV) and the dispersive refractive index n(λ) for CuInTe₂ film annealed at 300°C were evaluated by optical absorption measurement.     

Effect of selenization pressure on CuInSe2 thin films selenized using co-sputtered Cu-In precursors

CuInSe₂ thin films were formed from the selenization of co-sputtered Cu–In alloy layers. These layers consisted of only two phases, CuIn₂ and Cu₁₁In₉, over broad Cu–In composition ratio. The concentration of Cu₁₁In₉ phase increased by varying the composition from In-rich to Cu-rich. The composition of co-sputtered Cu–In alloy layers was linearly dependent on the sputtering power of Cu and In targets. The metallic layers were selenized either at a low pressure of 10 mTorr or at 1 atm Ar. A small number of Cu–Se and In–Se compounds were observed during the early stage of selenization and single-phase CuInSe₂ was more easily formed in vacuum than at 1 atm Ar. Therefore, CuInSe₂ films selenized in vacuum showed smoother surface and denser microstructure than those selenized at 1 atm. The results showed that CuInSe₂ films selenized in vacuum had good properties suitable for a solar cell.     

Growth and characterization of stepwise flash evaporated CuInTe2 thin films

CuInTe₂ films grown by stepwise flash evaporation onto glass and silicon substrates held at 573 K were studied using X-ray diffraction (XRD), transmission electron microscopy (TEM), Rutherford backscattering spectrometry (RBS) and Raman spectroscopy. XRD and TEM studies showed the formation of single-phase polycrystalline CuInTe₂. Results of the RBS measurements showed the films to be near-stoichiometric and negligible diffusion of elements across the CuInTe₂/Si interface. Various lattice vibrational modes identified by Raman measurements were found to match well with those reported for single-crystal CuInTe₂, confirming the crystalline quality of the CuInTe₂ thin films.     

Initial results of CdS/CuInTe2 heterojunction formed by flash evaporation

The CuInTe₂ thin films is one of the most attractive semiconductors for solar cells applications, since its direct band gap energy (Eg≈1 eV) is suitable as an absorber in photovoltaic conversion. In this letter the CuInTe₂ thin films are prepared by flash evaporation technique. X-ray diffraction measurements on the as-deposited CuInTe₂ film showed that these films consist mainly of the chalcopyrite phase. The junction formation in the n-CdS/p-CuInTe₂ cell has been investigated using current–voltage (I–V) and capacitance-voltage (C–V) measurements.     

Structure, morphology and photoelectrochemical activity of CuInSe2 thin films as determined by the characteristics of evaporated metallic precursors

CuInSe₂ thin films have been obtained by the sequential evaporation of Cu and In layers, and subsequent reaction at 400°C with elemental selenium vapor. The individual metallic film thickness and the substrate temperature during evaporation have been varied in order to promote intermixing and alloy formation before the selenization. The structure, morphology and photoelectrochemical activity of the CuInSe₂ films have been determined by the characteristics of the evaporated metallic precursors. An improvement in the CuInSe₂ quantum efficiency, related mainly to the increased homogeneity and smoothing of the sample surface, can be gained by using as precursors multiple stacked Cu–In bilayers evaporated onto unheated substrates.     

X-ray fluorescence investigation of the Ga distribution in Cu(In,Ga)Se2 thin films

The efficiencies of Cu(In,Ga)Se₂/CdS/ZnO solar cell devices in which the absorbers are produced by classical two-step processes are significantly lower that those in which co-evaporated absorbers are used. A significant problem related to two-step growth processes is the reported segregation of Ga towards the Mo back contact, resulting in separate CuInSe₂ and CuGaSe₂ phases. Furthermore, it is often reported that material losses (especially In and Ga) occur during high-temperature selenization of metallic precursors. In this study, X-ray fluorescence (XRF) analysis was used to study the diffusion behaviour of the chalcopyrite elements in single-stage and two-stage processed Cu(In,Ga)Se₂ thin films. This relatively simple characterization technique proved to be very reliable in determining the degree of selenium incorporation, possible material losses and the in-depth compositional uniformity of samples at different stages of processing. This information is especially important in the case of two-stage growth processes, involving high-temperature selenization steps of metallic precursors. Device quality Cu(In,Ga)Se₂ thin films were prepared by a relatively simple and reproducible two-step growth process in which all the metals were evaporated from one single crucible in a selenium-containing environment. The precursors were finally treated in an H₂Se/Ar atmosphere to produce fully reacted films. XRF measurement indicated no loss of In or Ga during this final selenization step, but a significant degree of element diffusion which depended on the reaction temperature. It was also possible to produce Cu(In,Ga)Se₂ thin films with an appreciable amount of Ga in the near-surface region without separated CuInSe₂ and CuGaSe₂ phases.     

Effects of annealing on CuInSe2 films grown by molecular beam epitaxy

CuInSe₂ (CIS) thin films with a range of Cu/In ratios were grown by molecular beam epitaxy on GaAs (0 0 1) at substrate temperatures of T_s = 450–500°C and the effects of annealing under various atmospheres have been investigated. Photoluminescence spectra obtained from an ex-situ vacuum annealed CIS film at a temperature of T_A = 350°C showed a red-shift and a broadening of an emission peak (peak c) which originally appeared at 0.970 eV before annealing and the red-shifted peak c was found to consist of two overlapping peaks. The excitation power dependence of these overlapping peaks indicated the radiative recombination processes associated with the emissions to be a conduction band to acceptor transition (peak at 0.970 eV) and a transition due to donor-acceptor pairs (peak at 0.959 eV), indicating the formation of a shallow donor-type defect during the vacuum annealing process. The origin of this defect has tentatively been attributed to Se vacancies. On the other hand, the molar fraction of oxygen increased with increasing annealing temperature in dry-air. An epitaxially grown In₂O₃ phase was found both in Cu-rich and In-rich films annealed at T_A 350°C, which was not observed in the films annealed in Ar atmosphere. Thermodynamic calculations based on the Cu---In---Se---O---N system showed In₂O₃ to be the most stable phase in good agreement with the experimental results.     

Improved CIGS thin-film solar cells by surface sulfurization using In2S3 and sulfur vapor

Surface sulfurization of Cu(In,Ga)Se₂ (CIGS) thin films was carried out using two alternative techniques that do not utilize toxic H₂S gas; a sequential evaporation of In₂S₃ after CIGS deposition and the annealing of CIGS thin films in sulfur vapor. A Cu(In,Ga) (S,Se)₂ thin layer was grown on the surface of the CIGS thin film after sulfurization using In₂S₃, whereas this layer was not observed for CIGS thin films after sulfurization using sulfur vapor, although a trace quantity of S was confirmed by AES analysis. In spite of the difference in the surface modification techniques, the cell performance and process yield of the ZnO:Al/CdS/CIGS/Mo/glass thin-film solar cells were remarkably improved by using both surface sulfurization techniques.     

The influence of the vacuum annealing process on electrodeposited CuInSe2 films

CuInSe₂ films were electrodeposited on mechanical polished Mo substrates. The applied potential was adjusted to get a stoichiometric composition. The as-deposited films were annealed in a high vacuum system for a short time. The films have been characterized by X-ray diffraction, scanning electron microscopy, energy dispersive X-ray analysis, Auger electron spectroscopy. The results indicate that the crystallization of the films was greatly improved by the short time vacuum annealing process without significant change in composition. The capacitance–voltage measurement shows characteristic p-type behaviors. This annealing process after electrodeposition was proved to be a useful method to prepare the polycrystalline CuInSe₂ films for solar cell application.