SiO2层上沉积的纳米多晶硅薄膜及其特性

采用低压化学气相沉积(LPCVD)系统以高纯SiH4为气源,在p型10.16 cm<100>晶向单晶硅衬底SiO2层上制备纳米多晶硅薄膜,薄膜沉积温度为620℃,沉积薄膜厚度分别为30 nm、63 nm和98 nm.对不同薄膜厚度的纳米多晶硅薄膜分别在700℃、800℃和900℃下进行高温真空退火.通过X射线衍射(XRD)、Raman光谱、扫描电子显微镜(SEM)和原子力显微镜(AFM)对SiO2层上沉积的纳米多晶硅薄膜进行特性测试和表征,随着薄膜厚度的增加,沉积态薄膜结晶显著增强,择优取向为<111>晶向.通过HP4145B型半导体参数分析仪对沉积态掺硼纳米多晶硅薄膜电阻I-V特性测试发现,随着薄膜厚度的增加,薄膜电阻率减小,载流子迁移率增大.     

定向碳纳米管阵列在石英玻璃基底上的模板化生长研究

分别以带有刻痕的石英玻璃和溅射过Au膜的石英玻璃为生长基底,通过催化裂解二茂铁和二甲苯混合物的方法,在基底上制备出了模板化的定向碳纳米管(CNT)阵列,扫描电镜(SEM)和透射电镜(TEM)观察表明:在这两种基底上生长的定向碳纳米管阵列的模板化程度都很高,其中的碳纳米管多为直径在20～50nm的多壁管(MWNT),且具有很好的定向性。本文还分析、对比了基底材料对定向碳纳米管生长的影响,初步探讨了定向碳纳米管模板化生长的形成机制。     

Catalytic nanomotors: fabrication,mechanism, and applications

Catalytic nanomotors are nano-to-micrometer-sized actuators that carry an on-board catalyst and convert local chemical fuel in solution into mechanical work. The location of this catalyst as well as the geometry of the structure dictate the swimming behaviors exhibited. The nanomotors can occur naturally in organic molecules, combine natural and artificial parts to form hybrid nanomotors or be purely artificial. Fabrication techniques consist of template directed electroplating, lithography, physical vapor deposition, and other advanced growth methods. Various physical and chemical propulsion mechanisms have been proposed to explain the motion behaviors including diffusiophoresis, bubble propulsion, interfacial tension gradients, and self-electropho-resis. The control and manipulation based upon external fields, catalytic alloys, and motion control through thermal modulation are discussed as well. Catalytic nanomotors represent an exciting technological challenge with the end goal being practical functional nanomachines that can perform a variety of tasks at the nanoscale.     

Si(111) 衬底上3C-SiC的超低压低温外延生长

研究了发展一种Si衬底上低温外延生长3C－SiC的方法。采用LPCVD生长系统，以SiH4和C2H4为气源，在超低压（30Pa) ,低温（900℃）的条件下，在Si(111衬底上外延生长出高质量的3C－SiC薄膜材料。采用俄歇能谱（AES），X射线衍射（XRD）和原子力显微镜（AFM）等分析手段研究了SiC薄膜的外延层组分，晶体结构及其表面形貌。AES结果表明薄膜中的Si/C的原子比例符合SiC的理想化学计量比，XRD结果显示了3C－SiC外延薄膜的良好晶体结构，AFM揭示了3C－SiC薄膜的良好的表面形貌。     

磷对CVD法制备碳纳米管纯度及形貌的影响

研究了磷元素对CVD法制备碳纳米管的影响．实验发现,适量地添加磷元素可以起到改善纳米铁颗粒催化作用的效果,提高碳纳米管的纯度．TEM检测发现,磷元素的添加对碳纳米管的形貌有很大的影响,含磷纳米铁颗粒可以催生出链节状碳纳米管、铁纳米线填充的碳纳米管和竹节状碳纳米管,并提高了管壁石墨晶化程度．     

Tuning Array Morphology for High‐Strength Carbon‐Nanotube Fibers

Vertically aligned carbon‐nanotube arrays are synthesized by chemical vapor deposition. Carbon‐nanotube fibers are directly spun from the obtained nanotube arrays and then tested mechanically. A strong correlation between the array morphologies and the mechanical properties of the fibers is observed: well‐aligned arrays yield fibers with much higher performance, while wavy and entangled arrays give poor fiber properties. More importantly, such array morphologies could be controlled by introducing hydrogen or oxygen during the nanotube synthesis. By simply switching the growth condition from 150 ppm oxygen addition to 2% hydrogen addition, the nanotube array changes from the wavy morphology to the well‐aligned morphology, and correspondingly the tensile strength of the resultant fibers could be increased by 4.5 times, from 0.29 GPa for the fibers spun from the oxygen‐assistance‐grown nanotube arrays to 1.3 GPa for the fibers spun from the hydrogen‐assistance‐grown nanotube arrays. The detailed effects of hydrogen and oxygen on the nanotube growth, especially on the growth rate and the array spinnability, are extensively studied. The formation mechanism of the different morphologies of the nanotube arrays and the failure mechanism of the nanotube fibers are also discussed in detail.     

碳源流量对碳纳米管厚膜形貌和结构的影响

采用低压化学气相沉?积(LPCVD)在镍片上制备了厚度在400～1000μm范围的碳纳米管(CNTs)薄膜, 研究了碳源(乙炔)流量对碳纳米管薄膜形貌 和结构的影响. 随乙炔流量的增加, 碳纳米管薄膜厚度和产量增大. 电子显微镜和拉曼光谱研究结果表?明, 在乙炔流量为10sccm下制备的碳纳 米管直径分布范围最小(10～100nm), 石墨化程度最高, 缺陷密度最小, 晶形最完整. 随着乙炔流量的增大(30～90sccm), 碳纳米管的直径分布 范围增大(10～300nm), 石墨化程度降低, 缺陷密度增大, 非晶化程度增加. 因此, 通过碳源流量可以控制碳纳米管薄膜的形貌和结构.     

气相生长纳米碳纤维的形态控制

报道了在浮动催化系统中,催化剂、促进剂以及苯/氢气比例等因素对气相生长纳米碳纤维形态的决定性作用和不同结构形态纳米碳纤维的选择生长.利用控制催化剂前体和促进剂的含量以及苯与氢气的比例等因素,制备了平直碳纳米管、弯曲碳纳米管、碳珠/纳米碳纤维、纳米碳纤维等不同结构的气相生长纳米碳纤维.实验结果表明,在浮动催化系统中,调节催化剂和促进剂的含量以及苯与氢气的摩尔比等关键性因素可以实现对气相生长纳米碳纤维形态结构的控制.     

金属基底上定向碳纳米管阵列的生长及其场发射性质

在金属基底上,以铁为催化剂,硅做过镀层,乙烯为源气体,通过普通的化学气相沉积方法生长出垂直基底排列的碳纳米管(CNT)阵列.扫描电子显微镜和透射电镜观察表明,生长的CNT具有阵列形貌和多缺陷的结构.对CNT阵列的场发射性质进行了测量,在10 μA/cm2时不锈钢和镍基底上的开启电场分别为1.25 V/μm 和1.57 V/μm.     

改变基底合成不同形貌碳纳米管宏观结构

采用化学气相沉积法,选用不同基底和表面涂层合成了碳纳米管垂直阵列薄膜、管束和条带三种碳纳米管宏观结构,并用扫描电镜（SEM）和透射电镜（TEM）进行了表征。结果表明：在石英涂层上合成的定向碳纳米管薄膜厚度达毫米级;在表面有Al2O3涂层的不锈钢基底上可合成碳纳米管垂直阵列薄膜和不同尺寸宏观管束结构;在表面有SiO2涂层...     

以乙二胺为促进剂在碳纤维表面生长定向碳纳米管阵列

采用注射化学气相沉积(Chemical vapor deposition,CVD),以乙二胺(Ethylenediamine,EDA)为促进剂,在未涂覆无机陶瓷涂层的碳纤维表面直接生长了定向碳纳米管(Carbon nanotubers,CNTs)阵列。研究表明:碳纤维表面的定向CNTs沿纤维轴向呈对称分布,生长密度约为5×109 tubes/cm2,长度可达18μm。定向CNTs具有多壁、竹节状结构,平均直径约为37nm。EDA对CNTs的生长形貌影响显著,是CNTs在碳纤维表面定向生长的关键。     

Ultrahigh‐Areal‐Capacitance Flexible Supercapacitor Electrodes Enabled by Conformal P3MT on Horizontally Aligned Carbon‐Nanotube Arrays

Nanocarbon electronic conductors combined with pseudocapacitive materials, such as conducting polymers, display outstanding electrochemical properties and mechanical flexibility. These characteristics enable the fabrication of flexible electrodes for energy‐storage devices; that is, supercapacitors that are wearable or can be formed into shapes that are easily integrated into vehicle parts. To date, most nanocarbon materials such as nanofibers are randomly dispersed as a network in a flexible matrix. This morphology inhibits ion transport, particularly under the high current density necessary for devices requiring high power density. Novel flexible densified horizontally aligned carbon nanotube arrays (HACNTs) with controlled nanomorphology for improved ion transport are introduced and combined with conformally coated poly(3‐methylthiophene) (P3MT) conducting polymer to impart pseudocapacitance. The resulting P3MT/HACNT nanocomposite electrodes exhibit high areal capacitance of 3.1 F cm^?2 at 5 mA cm^?2, with areal capacitance remaining at 1.8 F cm^?2 even at a current density of 200 mA cm^?2. The asymmetric supercapacitor cell also delivers more than 1–2 orders of magnitude improvement in both areal energy and power density over state‐of‐the‐art cells. Furthermore, little change in cell performance is observed under high strain, demonstrating the mechanical and electrochemical stability of the electrodes.