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1.
This paper briefly overviews progress on the development of MEMS-based micropumps and their applications in drug delivery and other biomedical applications such as micrototal analysis systems (μTAS) or lab-on-a-chip and point of care testing systems (POCT). The focus of the review is to present key features of micropumps such as actuation methods, working principles, construction, fabrication methods, performance parameters and their medical applications. Micropumps have been categorized as mechanical or non-mechanical based on the method by which actuation energy is obtained to drive fluid flow. The survey attempts to provide a comprehensive reference for researchers working on design and development of MEMS-based micropumps and a source for those outside the field who wish to select the best available micropump for a specific drug delivery or biomedical application. Micropumps for transdermal insulin delivery, artificial sphincter prosthesis, antithrombogenic micropumps for blood transportation, micropump for injection of glucose for diabetes patients and administration of neurotransmitters to neurons and micropumps for chemical and biological sensing have been reported. Various performance parameters such as flow rate, pressure generated and size of the micropump have been compared to facilitate selection of appropriate micropump for a particular application. Electrowetting, electrochemical and ion conductive polymer film (ICPF) actuator micropumps appear to be the most promising ones which provide adequate flow rates at very low applied voltage. Electroosmotic micropumps consume high voltages but exhibit high pressures and are intended for applications where compactness in terms of small size is required along with high-pressure generation. Bimetallic and electrostatic micropumps are smaller in size but exhibit high self-pumping frequency and further research on their design could improve their performance. Micropumps based on piezoelectric actuation require relatively high-applied voltage but exhibit high flow rates and have grown to be the dominant type of micropumps in drug delivery systems and other biomedical applications. Although a lot of progress has been made in micropump research and performance of micropumps has been continuously increasing, there is still a need to incorporate various categories of micropumps in practical drug delivery and biomedical devices and this will continue to provide a substantial stimulus for micropump research and development in future.  相似文献   

2.
A novel electrolysis-bubble-actuated micropump based on the roughness gradient design in the microchannel is reported in this paper. This micropump is implemented by taking advantage of both the electrolysis actuation and the surface tension effect. The surface tension effect is controlled via the periodic generation of electrolytic bubbles and the roughness gradient design of microchannel surface, which results in the specified variation of liquid contact angle along the microchannel. Our proposed micropump could resolve the disadvantages that exist in the early reported micropumps, such as the complicated time-sequence power control, the need of long nozzle-diffuser structure, and the choking/sticking phenomena of electrolytic bubbles in a microchannel. Due to the features of large actuation force, low-power consumption, and room temperature operation, our micropump is suitable for the development of low-power consumption and compact micropumps for various applications. Experimental results show that the liquid displacement and the pumping rate could be easily and accurately controlled by adjusting the amplitude and frequency of the applied voltage. With the applied voltage of 15 V at 4.5 Hz, a maximum pumping rate of 114 nl/min is achieved for one of our micropump designs with a microchannel of 100 x 20 mum. In this paper, we report the theoretical analysis, design, micromachining process, operating principles, characterization, and experimental demonstration of these micropumps.  相似文献   

3.

The precise control over the drug delivery involved in several vital applications including healthcare is required for achieving a therapeutic effect. For such precise control/manipulation of the drugs, micropumps are used. These micropumps are basically of two types viz. check valve-based and valveless micropumps. The valveless micropumps are preferable due to the congestion-free operation of diffuser/nozzle valves. In this paper, design optimization of a valveless piezo-electric actuation based micropump is carried out using COMSOL Multiphysics 5.0 by coupling two Multiphysics interface modules namely fluid–structure interaction and piezoelectric physics modules. Using simulation studies, the influence of pump design parameters including diffuser angle, diffuser length, neck width, chamber depth, chamber diameter and diaphragm thickness on net flow rate is studied. An optimal set of design parameters for the proposed micropump is identified. Further, the influence of actuation frequency on the flow rate is analysed. It is found that the proposed micropump is capable to deliver a net flow rate of 20 µl/min and a maximum back pressure attainable is 200 Pa.

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4.
This paper presents a micropump fabricated from low cost materials with specific goal of cost reduction. The micropump does not require any valve flap and comprises one plastic pump polyether–ether–ketone (PEEK) body, one metal diaphragm, and three piezoelectric ceramics to form piezoelectrically actuated diaphragm valves. The valve actuation simplifies micropump structural designs and assembly processes to make the pump attractive for low cost bio-medical drug delivery applications. A detailed optimization design of geometric parameters of the piezoelectrically actuated diaphragm is undertaken by use of 3D finite element method (FEM) to maximize piezoelectric actuation capability and ensure actuation reliability. An optimized geometric dimensional design: the ratio of thicknesses between the piezoelectric ceramics and the metal diaphragm, and the lateral dimension of the piezoelectric ceramic, is obtained through simulations. Based on the optimized design, a good agreement has been reached between simulated and measured strokes of the micropumps. The tested results show that the micropump has a high pump flow rate for air, up to 39 ml/min, and for water, up to 1.8 ml/min, and is capable of ensuring diaphragm’s maximum stress and strain is within material strength for reliable work.  相似文献   

5.
This work presents a novel thermo-pneumatic peristaltic micropump with low temperature elevation on working fluid. The proposed device, which consists of two separate zones for air-heating and fluid-squeezing, is realized by using micromachining techniques. Also, the device can be operated by using a small and simple actuation circuitry with low applied voltages. Under similar operational conditions, the proposed micropump shows similar fluid-pumping performance when compared with the conventional design of thermo-pneumatic micropumps. However, for the proposed design, the temperature elevation on the fluid-pumping area is as small as about 2.0 K, which is less than 8% of that generated by the conventional design. Furthermore, by applying higher voltages, larger flow rate can be achieved with relatively small increase in temperature elevation. Due to low temperature elevation on working fluid, the proposed device is suitable for the applications such as DNA chips or protein chips. In addition, because of its small size and simple actuation scheme, potentially the proposed device can be integrated into the devices for point-of-care applications.  相似文献   

6.
Micropumps with various types of actuations have been used in lab-on-a-chip devices. In order to control the delivery of drug particles both in space and time and avoid clogging, other types of actuation mechanisms may be needed. In this study, a valveless micropump with novel actuation is proposed to transport particles for biomedical and environmental applications. The transport of drug particles through the designed valveless micropump is carried out through computational fluid dynamics combined with discrete particle transport methods. After convergence studies, the effects of actuation frequency, particle size and the resident times on the particle transport are investigated. Interestingly, both the actuation frequency and particle size have a strong effect in terms of resident times and the spatial distribution of the transported particles through the designed micropump. Based on the results obtained, the relationship between actuation frequency, fluid flow, and particle transport through the designed micropump is presented. The computational analysis presented demonstrates that it is possible to optimize the proposed valveless micropump design for specific delivery of drug particles for separation and sorting applications.  相似文献   

7.
Toward the development of micropumps that operate under low external air pressures, a new polydimethylsiloxane (PDMS), pneumatic micropump using amplified deformation of resilient PDMS membranes through oil hydraulics was presented in this study. The new micropump employed oil-hydraulic chambers with pre-filled mineral oil to amplify the deformation of flexible PDMS membranes; it therefore delivered a higher pumping rate and withstood a greater back pressure while requiring a significantly lower external air pressure for actuation. The optimized pumping rate and back pressure of the oil-hydraulic micropump compared favorably to previous pneumatic micropumps. Characterization of the micropump revealed that the oil hydraulics amplified the deformation of PDMS membranes by approximately threefold and improved the pumping rate and the back pressure by 77 and 21 %, respectively. With high pumping performances and the capability to be driven with only a low air pressure, this new micropump may therefore become a key component in future microfluidic devices and lab-on-a-chip systems.  相似文献   

8.
In microfluidic devices, many fluids have non-Newtonian behaviors, especially biofluids. The viscosity of these fluids mostly depends on the shear rate. Sometimes the non-Newtonian fluids should be transferred by micropumps in lab-on-chip devices. Previous researchers investigated the flow rate in simple electroosmotic flow micropumps which have a simple channel geometry. In the present study, the effects of non-Newtonian properties of fluid in a low voltage cascade electroosmotic micropump are numerically investigated using the power law model. The micropump is modeled in two dimensional with one symmetric step and has a more complex geometry than previous studies. The numerical results show that, the non-Newtonian behavior of fluid affects flow rate in the micropump. The flow rate decreases if the fluid is dilatant. Also, it increases if the fluid is pseudoplastic. Moreover, the pressure which is needed to stop the electroosmotic flow rate in the micropump is calculated. Results show that, the back pressure has a slight change as the fluid has non-Newtonian behavior.  相似文献   

9.
This study reports on a new pneumatic micropump integrated with a normally closed valve that is capable of generating a high pumping rate and a high back pressure. The micropump consists of a sample flow microchannel, three underlying pneumatic air chambers, resilient polydimethylsiloxane (PDMS) membrane structures and a normally closed valve. The normally closed valve of the micropump is a PDMS-based floating block structure located inside the sample flow microchannel, which is activated by hydraulic pressure created by the peristaltic motion of the PDMS membranes. The valve is used to effectively increase pumping rates and back pressures since it is utilized to prevent backflow. Experimental results indicate that a pumping rate as high as 900 μL/min at a driving frequency of 90 Hz and at an applied pressure of 20 psi (1.378 × 10Nt/m2) can be obtained. The back pressure on the micropump can be as high as 85 cm-H2O (8,610.5 Nt/m2) at the same operation conditions. The micropump is fabricated by soft lithography processes and can be easily integrated with other microfluidic devices. To demonstrate its capability to prevent cross contamination during chemical analysis applications, two micropumps and a V-shape channel are integrated to perform a titration of two chemical solutions, specifically sodium hydroxide (NaOH) and benzoic acid (C6H5COOH). Experimental data show that mixing with a pH value ranging from 2.8 to 12.3 can be successfully titrated. The development of this micropump can be a promising approach for further biomedical and chemical analysis applications.  相似文献   

10.
A PMMA valveless micropump using electromagnetic actuation   总被引:4,自引:0,他引:4  
We have fabricated and characterized a polymethylmethacrylate (PMMA) valveless micropump. The pump consists of two diffuser elements and a polydimethylsiloxane (PDMS) membrane with an integrated composite magnet made of NdFeB magnetic powder. A large-stroke membrane deflection (~200 m) is obtained using external actuation by an electromagnet. We present a detailed analysis of the magnetic actuation force and the flow rate of the micropump. Water is pumped at flow rates of up to 400 µl/min and backpressures of up to 12 mbar. We study the frequency-dependent flow rate and determine a resonance frequency of 12 and 200 Hz for pumping of water and air, respectively. Our experiments show that the models for valveless micropumps of A. Olsson et al. (J Micromech Microeng 9:34, 1999) and L.S. Pan et al. (J Micromech Microeng 13:390, 2003) correctly predict the resonance frequency, although additional modeling of losses is necessary.  相似文献   

11.
Precisely controlling the flow of fluids on a microscopic scale has been a technological challenge in the field of microfluidics. Active microfluidics, where a defined manipulation of the working fluid is necessary, requires active components such as micropumps or microvalves. We report on an optimized design of an integratable, wireless micropump made from the magnetic shape memory (MSM) alloy Ni–Mn–Ga. An external magnetic field generates a shape change in the MSM material, which drives the fluid in a similar fashion as a peristaltic pump. Thus, the pump does not need electrical contacts and avoids the mechanical parts found in traditional pumping technologies, decreasing the complexity of the micropump. With a discrete pumping resolution of 50–150 nL per pumping cycle, which is further scalable, and a pumping pressure well exceeding 2 bar, the MSM micropump is capable of accurately delivering the fluids needed for microfluidic devices. The MSM micropump is self-priming, pumping both liquid and gas, and demonstrates repeatable performance across a range of pumping frequencies. Furthermore, it operates simultaneously as both a valve and reversible micropump, offering superior possibilities compared to existing technologies within the flow rate range of 0–2000 µL/min. Due to its simplicity, this technology can be scaled down easily, which lends itself for future integration into lab-on-a-chips and microreactors for life science and chemistry applications.  相似文献   

12.
In this paper, we introduce a novel valve-less rectification micropump based on bifurcation geometry. Three micropumps based on three different bifurcation configurations were designed, fabricated and experimentally investigated. These designs demonstrate the potentials of developing bidirectional micropumps and multifunction microfluidic devices (combined functions of micro pumping and mixing). Polydimethylsiloxane (PDMS) was employed to fabricate the micropumps. Circular piezoelectric transducers (PZT) were used as flow actuators. Detailed fabrication procedures are illustrated. The micropumps were tested against two ranges of actuator frequencies. The first test was conducted in a frequency range between 0 and 100 Hz with small increments of 5 Hz, while the second test was conducted in a frequency range between 0 and 300 Hz with increments of 50 Hz. Ethanol was used as the working fluid in all experiments. A new dimensionless parameter was introduced to evaluate the efficiency of valve-less rectification micropumps and determine the optimum operational frequency. The flow rate and maximum back pressure were measured. Results of experiments confirmed and demonstrated the feasibility of valve-less rectification micropumps based on bifurcation geometry at a low frequency range. Additionally, results showed the potentials of multifunctional, bidirectional, and self-priming micropumps.  相似文献   

13.
Utilizing a solvent-assisted bonding process, two diffuser-type polymethylmethacrylate (PMMA) peristaltic micropumps are fabricated with a linear array of circular microchambers with a depth and diameter of 15 m and 7 mm, respectively, actuated using either square or circular PZT actuators. Experimental trials are performed to characterize the performance of the two micropumps under driving frequencies ranging from 80 to 150 Vpp and actuation frequencies in the range of 10 Hz to 1 kHz. The results reveal that the micropump with square PZT actuators generates a maximum pumping rate and back pressure of 217 l/min and 9.2 kPa, respectively, while the micropump with circular actuators generates a maximum flow rate of 131 l/min and a back pressure of 2.7 kPa. ANSYS finite element simulations demonstrate two events. First, given an equivalent surface area, the circular actuators undergo a greater displacement than the square actuators under given actuation conditions. In other words, the circular actuator design is more efficient to represent a higher ratio of the displacement to the actuation area (d/A). However, the circular actuators with the surface area of 38.47 mm2 are smaller than the square actuators (49 mm2). In addition, it is inferred that the relatively poorer performance of the circular actuators is due in part to thermal damage of the PZT patches during their removal from the bulk PZT chip using a laser cutting device in the pump fabrication process. Secondly, when the shape of the effective working area for the actuation is rectangular which is usual in a MEMS design, the rectangular actuator with length of 7 mm has significantly higher displacement (0.71 m) than that of the circular actuator with diameter of 7 mm (0.396 m). Consequently, a rectangular actuator design presents a more practical solution for higher performance of micro-actuators.  相似文献   

14.
Thin-film shape-memory alloy actuated micropumps   总被引:12,自引:0,他引:12  
Micropumps capable of precise handling of low-fluid volumes have the potential to revolutionize applications in fields such as drug delivery, fuel injection, and micrototal chemical analysis systems (μTAS). Traditional microactuators used in micropumps suffer from low strokes and, as a result, are unsuitable for achieving large fluid displacement. They also suffer low-actuation work densities, which translate to low forces. We investigate the use of the shape-memory effect (SMA) in sputter-deposited thin-film shape-memory alloy (SMA) titanium nickel (TiNi) as an actuator for microelectromechanical systems (MEMS)-based microfluidic devices, as it is capable of both high force and high strains. The resistivity of the SMA thin film is suitable for Joule heating, which allows direct electrical control of the actuator. Two micropump designs were fabricated-one with a novel complementary actuator and the other with a polyimide-biased actuator-which provided thermal isolation between the heated microactuator and the fluid being pumped. A maximum water flow rate of 50 μl/min was achieved  相似文献   

15.
为了减少生化传感器中样品的消耗,基于行波原理,本文设计了一种新型的压电式微流泵.首先,理论证明了行波的产生机理,并用流体仿真软件Fluent进行了验证;其次,设计并制作了锯齿沟道和直沟道两种结构的微流泵,在压电双晶片阵列的驱动下,测量了这两种微流泵在不同频率和电压下的特性.结果表明锯齿形沟道结构的压电式行波微流泵性能更...  相似文献   

16.
A model simulation of dynamic behavior of thermopneumatic micropump is presented. The model uses conservation of energy, mass, and momentum to predict the behavior of existing thermopneumatic micropumps. Applied to existing micropumps, simulation predicts trends similar to those reported experimentally. Dynamic simulation of effect of design parameters on performance of micropump is, then, carried out through the article. Results suggest that increasing operating frequencies results in higher volume flow rates until a critical frequency is reached. At higher frequencies volume flow rates decrease. Critical frequencies are dependent on damping. The higher the damping coefficient the lower the critical frequency becomes. For high frequency operation the performance of the micropump is dominated by both damping and heat capacity of micropump components. For low frequency operation the performance is dominated by heat losses from walls of air-chamber. The model provides general guidelines for building and operating the micropump.  相似文献   

17.
In this paper, a PZT micropump excited by amplified squarewave signals with various frequencies was used to study the transient flow behaviors in an obstacle-type valveless micropump. A micro-particle-image-velocimetry (micro-PIV) with an external trigger was developed to obtain flow fields at the outlet and around the obstacle with various phases in a cycle. In comparison with previous studies on the pump performance, such as pump pressure and volume flow rate, more detailed information about the pump was obtained. The velocity profiles and periodic sectional mean velocities exhibited the unsteady flow nature. The total net flow generation efficiency per cycle was obtained experimentally by integrating the phase-dependent velocities. The flow recirculation around the obstacle was observed and quantified to investigate the influence on the pump performance. The duration, circulation, and the size of the recirculation regions indicated that this flow behavior could enhance the flow-directing capability. These results are very useful for the design and improvement of obstacle-type valveless micropumps.  相似文献   

18.
No-moving-part (NMP) valves are microconduits able to partially rectify an oscillating fluid moving through them. The modeling of such valves is not at all trivial. Even greater difficulties arise when the behavior of the whole micropump equipped with those NMP valves is investigated, because of the complex fluid-dynamic phenomena interacting with deformable structures. This paper proposes a generalization of the efficiency modeling, nowadays used for single valves, to whole micropump equipped with them. Such modeling has been applied to design a novel, high efficiency NMP valve to be used in a piezoelectric micropump. The main feature of the new valve is the presence of some properly shaped vortex area along its fluid-dynamic pattern, allowing to improve micropump performance. For comparison purposes, the same modeling has been applied to a standard nozzle-diffuser NMP valve to be used with the same piezoelectric actuator. The experimental comparison of micropump performance (maximum flow rate and pressure head) shows that the proposed modeling technique is able to discriminate between better and worse performer. The effects of unsteady dynamic effects have been evaluated a posteriori, confirming their important weight on the actual performance of the micropumps equipped with NMP valves.  相似文献   

19.
This work presents a driving system for a peristaltic micropump that is based on piezoelectric actuation. The effects of the actuation sequence on pump performance are also considered. A valveless peristaltic micropump based on piezoelectric actuation is designed and fabricated using microelectromechanical system technology. The pump has three parts––silicon, Pyrex glass and commercially available bulk PZT (lead zirconate titanate) chips. The peristaltic micropump actuated by PZT chips comprises three chambers that are in series. The driving system consists of an ATmega 8535 microprocessor, a high voltage power supply, three differential amplifiers, a phase controller, an A/D converter, a 555 oscillator and an LCD module. It is supplied via a 110 Vrms 60-Hz AC line and is programmable. The system can produce step-function signals with voltages of up to 100 Vpp and frequencies ranging from 10 Hz to 1 kHz, as the inputs for the pump. Fluid pumping with air is successfully demonstrated. Additionally, 3-, 4- and 6-phase actuation sequences for the pump are designed and used to study the effects on pump performance, as revealed by the flow rate and the displacement of a pump diaphragm. The experimental results show that the flow rate and the displacement of the diaphragm actuated by the 4-phase sequence exceed those actuated by the 3- and 6-phase sequences. A flow rate of 17.6 μl min−1 and a displacement of 2.91 μm (peak-to-peak) in 4-phase peristaltic motion are achieved at 100 Hz and 100 Vpp. The results demonstrate that the pump actuated in the 4-phase sequence is the most efficient. Consequently, the actuation sequences can affect the pump performance.  相似文献   

20.
We report on a high-efficiency and self-priming active-valve micropump consisting of a microfluidic chamber structure in glass that is assembled with a polydimethylsiloxane (PDMS) elastic sheet. The latter comprises two valving membranes and a central pumping chamber actuation membrane, having each an integrated permanent magnet that is magnetically actuated by arc-shaped NdFeB permanent magnets mounted on the rotation axis of a DC minimotor. The choice of this actuation principle allows very low-voltage (0.7 V) and low power (a few 10 mW) operation of the micropump. For the realisation, we use affordable powder blasting glass micropatterning and PDMS molding technologies. A flow rate of 2.4 mL/min and up to 70 mbar backpressure are obtained at the micropump resonance frequency of around 12 Hz, values that are much higher than reported so far for such type of micropump.  相似文献   

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