高灵敏复合光波导传感器及其研究进展

高灵敏复合光波导是在K 交换玻璃光波导上面涂(溅射法或旋转涂膜法)两端带斜坡的高折射率薄膜而研制出的一种元件.该元件表面灵敏度比K 交换玻璃光波导或分光光度法的灵敏度高出了2～3个数量级.利用复合光波导研制的氨气传感器和免疫传感器的灵敏度达到了世界领先水平.光波导传感器具有体积小,响应快,灵敏度高等特点.该文较全面介绍了利用高折射率薄膜设计和研制高灵敏复合光波导及其在化学生物传感器中的应用,并对未来光波导传感器的研究作了展望.     

高性能SOI基纳米硅薄膜微压阻式压力传感器的研究

针对高端领域对高性能微小量程压力传感器的迫切需求，设计并实现了一种应用于电子血压计的高性能SOI基纳米硅薄膜微压阻式压力传感器，并提出了相应的检测电路。根据小挠度弯曲理论设计了传感器方形敏感薄膜结构，确定了纳米硅薄膜压敏电阻的阻值大小和尺寸。采用ANSYS有限元分析（FEA）对所设计的传感器结构进行仿真，根据仿真结果确定了压敏电阻在膜片上的最佳放置位置。基于标准MEMS制造技术，在SOI基纳米硅薄膜上设计并实现了该压力传感器。实测结果表明，室温下，在0～40 kPa微压测量范围内所设计的传感器检测灵敏度可达0.45 mV/（kPa·V），非线性度达到0.108%F.S。在-40℃～125℃的工作温度范围内，温度稳定性好，零点温度漂移系数与灵敏度温度漂移系数分别为0.004 7%F.S与0.089%F.S。所设计的压力传感器及其检测电路，在现代医疗、工业控制等领域具有较大的应用潜力。     

一种用于恶劣环境下的贴片式MEMS压力传感器

为了降低振动、气流冲击以及外界杂质对压力传感器检测性能及可靠性的影响,满足压力探针与MEMS压力传感器一体化集成设计的要求,设计了一种单电阻贴片式MEMS压力传感器。通过在压敏薄膜下方制作压敏电阻的方式,并通过硅-玻璃阳极键合工艺实现对压敏电阻的真空封装,以隔离传感器使用环境中杂质颗粒对检测性能的影响;另外,在压敏薄膜上方设计两个大尺寸焊盘,通过锡焊（或钎焊）技术实现传感器芯片与外部电路的可靠连接,使传感器在在强振动和冲击载荷环境下仍能正常工作。通过与高精度压力传感对比标定,结果表明：在25～125 ℃温度范围内,该传感器的灵敏度高于106 mV·mA-1·MPa-1,非线性度优于03%。     

基于LabVIEW搭建光纤SPR虚拟仿真设计平台

光纤表面等离子体共振(Surface plasmon resonance,SPR)传感器是一种将光纤纤芯作为激发SPR效应基体的新型传感器.本篇论文基于LabVIEW搭建虚拟仿真设计平台,依照材料参数与组件结构做理论计算,可即时改变尺寸及材料参数,了解SPR组件参数对感测效果的影响,找到最佳参数.以PMMA塑料光纤虚拟仿真结果显示,镀银薄膜40nm于光纤研磨表面上,能够制造出一个较佳的光纤SPR传感器;最后,以不同折射率的待测物进行仿真计算,得到共振波长与折射率关系.     

LiNbO3光波导紫外表面等离子共振传感器模拟计算

高折射率的LiNbO3光波导,构成四层高折射率波导表面等离子共振传感器.采用传输矩阵方法得基模TM模色散表达式,研究了光波导有效折射与样品折射率之间的关系、光波导传输常数和波长的关系,由表面等离子体波共振耦合条件,得到不同样品折射率的表面等离子共振波长.利用菲涅耳的反射率公式,计算了四层结构波导传感器的透射谱,得到表面...     

基于MEMS实现SOI压力传感器工艺研究

应用压组效应原理制作硅氧化物绝缘体（SOI）压力传感器,具有耐高温、抗辐射、稳定性好等优点,本文说明了SOI在微电子机械系统（MEMS）技术上的实现优势,并对压力传感器SOI结构的实现工艺进行了探索性试验,完成了SOI压力传感器的设计和封装,在强调了压力传感器的测试方法的同时,对所设计的样品进行了测试。     

基于ZnO薄膜光学温变特性的光纤布拉格光栅传感器

ZnO薄膜具备吸收光谱的温变特性,可有效促进光纤布拉格光栅传感器的工作性能。因此设计了基于ZnO薄膜光学温变特性的光纤布拉格光栅传感器,选用高纯度的ZnO靶材在多功能多元镀膜系统,通过Haruo Takashashi构建计算模型,设计具有光学温变特性的光纤布拉格光栅传感器。其中温度传感头通过将制备好的ZnO薄膜镀于蓝宝石三棱镜斜边面上,结合蓝宝石三棱镜、凸透镜以及光纤面,加强光源利用率,实现光纤布拉格光栅传感器的设计。实验结果表明,所设计的光纤布拉格光栅传感器的波长漂移量会随着ZnO薄膜热膨胀系数不断提高而增加,ZnO薄膜等效折射率大的波长漂移量要比等效折射率小的低,对比多种传感器性能后,发现所设计的传感器温测范围广、响应时间短、测量精准度高。     

引压方式动态压力传感器研制

介绍了一种通过引压方式探测动态压力信号的传感器。由于受到被测介质温度高和被测环境空间尺寸小限制,传感器需要通过引压管传递动态工作压力。为了保证引压管在传递动态压力过程中不影响传感器的频响特性,设计了一种阻抗匹配结构,减小了引压结构对传感器动态响应特性的影响,保证了动压传感器的频响特性,该传感器的检测单元包括一个引压管、一个敏感元件、一个电路组件、一个阻抗匹配管。测试结果表明：动压传感器具有（31.5～8000 Hz）频响范围。     

电容式微加工超声传感器结构参数对性能的影响分析

介绍了电容式微加工超声传感器(cMUT)的工作原理,通过理论计算和有限元仿真分析,讨论了cMUT中薄膜厚度、薄膜半径、薄膜残余应力和空腔厚度的变化对传感器的塌陷电压和谐振频率的影响,为传感器的设计和制作提供了依据.     

硅微机械加工光波导压力传感器的设计

随着波导材料的研究和进展 ,采用新的波导材料设计出了一种波导式压力传感器 ,就光波导压力传感器的原理和特性作了一个简要阐述 ,对它的工艺流程作了详细的描述     

Searching for optimal sensitivity of single-mode D-type optical fiber sensor in the phase measurement

To improve the sensitivity of a single-mode D-type optical fiber sensor, we selected a D-type optical fiber sensor with 4 mm long and 4 μm core thickness made of a single-mode fiber, a Au-coating on the sensor with a thickness range of 15–32 nm, a light wavelength of 632.8 nm, and an incident angle of 86.5–89.5° for different refractive index (1.33–1.40) sensing. These simulations are based on the surface plasmon resonance (SPR) theory using the phase method which shows that the sensitivity is proportional to the refractive index, Au film thickness and lower incident angle on the sensing interface. The sensitivity is higher than 4000 (degree/RIU), and the resolution is better than 2.5 × 10⁻⁶(RIU) as the minimum phase variation is 0.01°. This device is used to detect the refractive index or gas or liquid concentration in real-time. The proposed sensor is small, simple, inexpensive, and provides an in vivo test.     

Performance of integrated optical microcavities for refractive index and fluorescence sensing

The performance of a novel sensor based on an integrated optical (IO) disk microcavity (MC) is theoretically studied. The MC is a resonant waveguide structure in which multiple interference of a guided mode occurs. At resonance, the MC is extremely sensitive to refractive index changes and it sustains locally enhanced optical field. Therefore, the MC is naturally suitable as an extremely responsive sensor for measuring minute changes in refractive index and/or fluorescence of an analyte. Combination of multiple interference and extremely small sampling volume (few femtoliters) provides unique sensitivity of the MC device. A factor of 9 increase in fluorescence sensitivity versus waveguide sensor is anticipated. Provided shot-noise limited detection, the refractive index resolution down to 10⁻⁹ is feasible with the MC sensor, which exceeds that of the straight waveguide interferometer by the order of magnitude. MC-sensors can be combined into arrays providing high throughput detection of both labeled and non-fluorescent biological species.     

Refractive-index measurements using an integrated Mach-Zehnder interferometer

In this paper a refractometer system with an integrated optical sensor is presented. The sensitive element is a single or multichannel Mach-Zehnder interferometer (MZI) fabricated on silicon using waveguides made from SiO₂ and SiON. The refractometer allows for real-time monitoring of refractive indices of gases and liquids in an index range between 1 and 1.49 using the silicon MZI as a low-cost disposable part.     

Measurement of wireless pressure sensors fabricated in high temperature co-fired ceramic MEMS technology

High temperature co-fired ceramics (HTCCs) have wide applications with stable mechanical properties, but they have not yet been used to fabricate sensors. By introducing the wireless telemetric sensor system and ceramic structure embedding a pressure-deformable cavity, the designed sensors made from HTCC materials (zirconia and 96% alumina) are fabricated, and their capacities for the pressure measurement are tested using a wireless interrogation method. Using the fabricated sensor, a study is conducted to measure the atmospheric pressure in a sealed vessel. The experimental sensitivity of the device is 2 Hz/Pa of zirconia and 1.08 Hz/Pa of alumina below 0.5 MPa with a readout distance of 2.5 cm. The described sensor technology can be applied for monitoring of atmospheric pressure to evaluate important component parameters in harsh environments.     

粒子计数器的一种新型光学传感器设计

针对已有光学粒子计数器传感器易受颗粒形状、折射率及光敏区位置的影响,设计了一种新型的光学粒子计数器的传感器.首先,利用旋转对称椭腔镜接受系统,扩大光接受的空间角,减小颗粒形状及折射率的影响,基于T矩阵理论,对不同折射率、不同形状及不同取向的非球形颗粒的接受光能量与粒度的关系的计算显示,本接受系统接受的光能量与粒径的关系单调性优良,可减小颗粒形状及折射率对测量的影响,提高仪器的精度及灵敏度.其次,利用非球面透镜与柱面透镜组合光学器件提高半导体激光束的光强均匀性,减小颗粒在光敏区位置不同带来的影响,Zemax光学设计软件的模拟计算显示,采用该光学组合器件后,光敏区光强的均匀性得到显著提升,光敏区位置造成的不利影响基本得到消除.然后,介绍了采用上述设计的传感器整体结构.最后,进行了实验验证,结果表明本传感器具有更佳的性能.此外,本传感器也具有简洁、便携、价廉的优点,应用价值较高.     

SPR传感芯片的理论与实验研究

针对光纤SPR(表面等离子体共振)传感器制作工艺复杂的问题,提出了一种光纤先固定后部分镀膜的SPR传感芯片的制作方法.依据电磁场和射线理论,分析并讨论了此种波长调制部分镀膜SPR传感芯片的工作原理,采用MEMS制作工艺对探测光纤进行封装固定以后,再对光纤进行部分镀膜,其结构简单,工艺性好,易于实现批量化.最后,搭建了一套基、于波长检测的光纤SPR测试系统对其进行测试.实验结果表明:在折射率范围为1.33～1.36时,共振波长同折射率具有良好的线性关系,光谱仪分辨率为0.1 m时,其分辨率可达到3×10-5折射率单位.     

偏振控制光强调制型SPRi传感器的高灵敏检测研究

在偏振控制光强调制型SPRi传感器中,使用真实液体消光的方法实验调节困难,测量灵敏度低,线性度差.为此,提出无需真实液体消光,并将消光折射率左移的方法.首先,对在测量起点(即纯水)消光的传统方法进行光学参数的最优值仿真及其加工和调节误差仿真,结果表明,误差会引起SPRi曲线最低点在折射率轴上的左右偏移,从而影响传感器性能.接着,将消光折射率左移至1.325处,并仿真其光学参数的最优值.实验表明,与前者相比,1.325消光方法中存在的误差不会使测量曲线出现非单调的情况,此时的测量灵敏度高,线性度好,折射率分辨率达到1.85×10-6 RIU,对应NaCl溶液的检出限为35 mg/L.上述方法提高了误差存在时SPRi传感器的适用性,可以实现微量水溶液样品的高灵敏及高通量检测.     

光强调制型光纤湿度传感器评述

综述了湿度传感器的发展概况;重点分析和介绍了吸收型、折光率变化型及光散射型三类光强调制型光纤湿度传感器的感湿机理与研究成果;展望并讨论了光强调制型光纤湿度传感器的发展趋势和应用前景。     

Optical fiber pH sensor based on lossy-mode resonances by means of thin polymeric coatings

This work describes the fabrication of an optical fiber sensor with spectral response to pH based on the deposition of a thin polymeric coating on an optical fiber core. If the thin polymeric coating has a high refractive index real part and a non-null imaginary part, this permits a coupling of light to the modes guided in the polymeric coating originating optical resonances. These resonances are named by some authors as lossy-mode resonances (LMR) or guided-mode resonances. Moreover, the location of the resonances in the optical spectrum varies as a function of the coating thickness and refractive index. Hence, the utilization of the well-known poly(allylamine hydrochloride) (PAH) and poly(acrylic acid) (PAA) pH sensitive polymeric coating that presents a variation of the thickness with the pH of the solution (known as swelling/deswelling behaviour) permits the fabrication of optical fiber pH sensors based on wavelength detection. The fabrication of ready-to-use devices requires considering several aspects such as the adequate polymeric coating thickness or the selection of the resonance to be monitored. As a result, LMR-based optical fiber pH sensors with accuracy of ±0.001 pH units and an average sensitivity of 0.027 pH units/nm within the range between pH 3 and pH 6 have been obtained after an adequate design.