台式超精密车床关键部件结构设计

随着系统小型化已不断的成为一种趋势,微小精密零部件在很多领域都显示出越来越广阔的应用前景.目前,多数微小精密零部件都是由大型超精密机床加工的,由于大型超精密机床成本高,并难以控制其外界环境,使得其加工成本很高,因此,研制了台式超精密车床.本文介绍了该车床关键部件的设计,包括空气主轴、进给机构、快速伺服刀架等.该机床精度达亚微米级,不仅促进了微小型产品的制造与研究,而且加速了制造业的发展.     

自抗扰控制在快刀伺服系统控制中的应用

为了提高微结构自由曲面光学元件超精密加工中快刀伺服系统的跟踪精度和抗干扰性,引入自抗扰控制器。通过对快刀伺服刀架进行建模分析,得到惯性环节和二阶振荡环节串联的等效模型。根据低阶自抗扰控制器控制高阶系统的理论,设计出二阶三维扩张状态观测器,可对来自各种干扰源未知扰动的观测结果做出实时估计和补偿。设计出自抗扰控制器,并给出了参数整定的规则。数字仿真实验表明:自抗扰控制器具有良好的控制品质,应用在快刀伺服系统中可以提高控制系统的跟踪性能和抗干扰性。     

A fast tool servo design for precision turning of shafts on conventional CNC lathes

A technique for precision turning of shafts on conventional CNC turning centers is presented. The shaft is semi-turned on a conventional CNC lathe. The precision finish turning operation is delivered by a piezoelectric based fast tool servo which is mounted on the same CNC lathe's turret. The precision tool tip motion is delivered by a proposed sliding mode controller which is robust to changes in the cutting process and hysteresis in the piezo actuator. Sliding mode controller is also quick to compensate the cutting force disturbances, and keeps the tool tip at the desired location within the displacement measurement sensor resolution (±0.1 μm). The fast tool servo system is packaged in a PC, and its effectiveness is demonstrated on a bearing location turning.     

Measurement of slide error of an ultra-precision diamond turning machine by using a rotating cylinder workpiece

Two measurement methods of using a rotating cylinder workpiece, which are referred to as the one-probe method and the two-probe method, respectively, are proposed for measurement of the horizontal error motion (X-directional error motion) of the Z-slide of an ultra-precision diamond turning machine. In the one-probe method, a displacement probe mounted on the opposite position of the turned (self-cut) cylinder workpiece with respect to the cutting tool is moved by the Z-slide to scan the workpiece being rotated by the spindle with its axis of rotation along the Z-axis. The Z-slide error can be obtained by an averaged output of the probe over one rotation without the influence of the spindle error and the surface form error of the cylinder. In the two-probe method, in addition to the displacement probe used in the one-probe method, another displacement probe is mounted at the position of the cutting tool. The rotating cylinder is scanned along the Z-direction by the two displacement probes simultaneously and the Z-slide error can be accurately measured by using the averaged output of the two probes over one rotation. Both the methods can measure not only the out-of-straightness component of the slide error but also the out-of-parallelism of the Z-slide axis with respect to the spindle axis. Experiments are carried out to verify the feasibility of the proposed methods.     

Micro cutting in the micro lathe turning system

As an application of cutting for the manufacture of micro mechanical parts and as a trial of the development of a miniature machining system matching the micro size of the work piece, a micro lathe turning system has been developed. A work material 0.3 mm in diameter is clamped and cut to a minimum of 10 μm in diameter with a rotation speed up to 15,000 rpm. The whole size of the equipment is about 200 mm which can be set under an optical microscope. A micro diamond single point tool has been applied to the cutting of various shapes, and the usefulness of such a micro cutting tool for the various forms has been confirmed. Cutting force has been investigated using a three directional force sensor and the possibility of the reduction of resistant force to improve working accuracy and to apply to micro parts has been examined.     

Waviness compensation of precision machining by piezo-electric micro cutting device

Recently, precision machining technology has been developed continuously in order to achieve high productivity and assured quality of precision parts in several industrial fields such as; lasers, optics, quartz vibrators, semiconductors, aircraft and artificial satellites etc. Waviness may occur on the surface of machined parts due to the table motion error and the dynamic cutting mechanism between the tool and the workpiece and may impair the form accuracy of the precision machined parts. In this research, a micro cutting device with piezo-electric actuator has been developed in order to control depth of cut precisely and compensate the waviness on the surface of the workpiece. Experiments have been carried out on a precision lathe. The characteristics of the surface profile and the cause of the waviness profile have been analyzed and waviness profiles of some cases have been compared with those of experiments.     

快刀伺服装置动力学建模与仿真分析

以研究快刀伺服加工振动特性、使设计的快刀伺服装置具有良好动态性能为目的,基于子结构法运用拉格朗日理论建立快刀伺服装置的理论动力学模型。采用Maple软件与ADAMS仿真软件对理论动力学模型进行数值计算和仿真模拟,验证所建立模型的准确性,为快刀伺服装置设计与动态特性分析奠定基础。对刀具与工件系统进行动力学建模分析,分析其动态特性。完成了快刀伺服控制系统结构设计与实验平台的搭建。     

三自由度串联式快速刀具伺服刀架的研究

快速刀具伺服金刚石车削被认为是针对光学自由曲加工方法中非常有发展潜力的超精密加工技术。针对目前三自由度快速刀具伺服刀架在X、Y、Z3个方向上存在运动耦合、导致在刀具路径规划困难以及影响刀具使用寿命的问题,提出一种新型三自由度串联式快速刀具伺服刀架,通过将X、Y、Z3个方向的运动串联,避免了X、Y、Z 3个方向运动解耦困难;通过分析三自由度快速刀具伺服刀架应具备的要求,确定柔性铰链截面形状、材料以及尺寸;运用ANSYS对该三自由度串联式快速刀具伺服刀架进行有限元分析,得到X、Y、Z3个方向柔性铰链最大应力均远小于材料的许用应力,前6阶振型共振频率远高于伺服刀架的工作频率。结果表明,该刀架满足实际车削过程中的内应力和共振频率要求。     

压电驱动的快刀伺服器的迟滞逆模型辨析与自抗扰复合逆控制

为了提高具有表面微结构零件的超精密加工中快刀伺服器的轨迹预测和跟踪精度与抗干扰性,设计一种新型复合控制:在前馈控制器中用Preisach逆模型补偿系统中压电陶瓷驱动器引起的非线性特性;针对前馈控制器未能补偿的非建模扰动、模型参数的不确定性以及其他外界未知扰动,设计了自抗扰控制作反馈控制器。推导了Preisach逆模型;用RBF神经网络实现了Preisach逆模型对压电陶瓷驱动器的线性化补偿;通过对快刀伺服器的建模分析,得到惯性环节和二阶振荡环节串联的等效模型,设计三阶四维扩张状态观测器,可对未知扰动的观测结果作出实时估计和补偿。根据快刀伺服器和超精密车削的特点,取消跟踪微分器,增加速度输入和加速度输入,设计了改进的自抗扰控制器。上述两种控制器组合成复合控制器。实验表明,该复合控制方法可以提高预测和跟踪精度与抗干扰性。     

Tracking control and active disturbance rejection with application to noncircular machining

Control systems are usually required to track reference signals while operating under the influence of disturbances. A fast tool servo system for noncircular machining application works under such conditions, resulting in large control efforts. This paper presents a linear active disturbance rejection controller design for a voice coil motor-driven fast tool servo system for noncircular machining application. The controller is designed through an extended state observer to estimate and compensate the variant dynamics of the system, nonlinearly variable cutting load, and other uncertainties. Then, a simple proportional derivative controller produces the control law. To improve the tracking performance of the fast tool servo, the tracking error from the trial-cutting workpiece is added to the reference input and used as feed-forward error compensation. In such a combined control arrangement, the active disturbance rejection controller provides active disturbance rejection ability for the controller, and the feed-forward error compensation controller improves the tracking precision. Both the tracking control and disturbance rejection performances are thus enhanced. In real-time control and implementation, the effects of finite word length, position feedback resolution, and short sampling period are analyzed and addressed. Machining experiments are conducted, and the results illustrate the control system synthesis procedures and a substantial improvement over the tracking error generated by the linear active disturbance rejection controller alone.     

同心不等径非圆截面数控车削系统研究

为了提高同心不等径非圆截面零件加工的质量和效率,对实现该类零件加工的方法进行了研究,提出了一种快速高精度加工同心不等径非圆截面的数控车削方法。设计了数控车削系统的结构,快速刀具进给伺服机构(FTS)采用基于自抗扰控制的直线电机系统。数控系统采用PMAC(Pro-grammable multi-axis controller)多轴运动控制器的时基控制法,实现刀具驱动进给和工件旋转的协调控制,完成该型零件的自动车削。结果表明该型零件的加工精度和加工效率得到了提高。     

A Piezo Tool Actuator for Precision Turning of Hardened Shafts

A piezo actuator based fast tool servo is presented for precision turning of cylindrical shafts. The monolithic actuator housing transmits motion to the tool assembly using solid flexures. The actuator has a stroke of 36 μm, 3200 Hz natural frequency, and 370 N/μm stiffness. Two sets of additional piezo actuators are placed in the transverse direction to clamp the tool for increased stiffness during hard turning operations. A sliding mode controller rejects cutting forces and compensates the piezo stack nonlinearities. The tool position is controlled to within 10 nm during finish hard turning on a conventional CNC lathe.     

数控车削对刀高度误差对加工精度的影响

数控车削中,刀尖很难与零件的轴线处于同一高度,从而产生对刀误差。对刀误差对零件的尺寸精度和形状精度会产生影响。分析表明：零件直径方向的尺寸差值的绝对值随着对刀高度误差的增大而增大;差值的大小随着零件直径的增大而增大;且零件的斜线段和圆弧部分会产生形状误差。本文提出了提高零件加工精度的具体措施。     

Spindle rotary position estimation for fast tool servo trajectory generation

In diamond turning of non-rotationally symmetric surfaces, fast tool servo (FTS) trajectory is generated in real time based on the spindle rotation angle. Essentially, a digital rotary encoder updates its output (samples the spindle angle) at fixed rotary angle interval. In time domain, the encoder sampling frequency is different from that of the FTS control computer. Without proper spindle position estimation, this asynchronous nature between the encoder spatial sampling and the computer temporal sampling can cause significant amount of aliasing noise in the generated trajectory. In this paper, we first analyze this aliasing phenomenon using discrete-time signal processing theories. Based on this analysis, a spindle rotary position estimator is designed to improve both accuracy and resolution of the spindle angle feedback. Its effectiveness and the associated trajectory generation are experimentally verified in diamond turning of sinusoidal surfaces with ultra-FTS.     

车削激励下主轴高精度轴心轨迹在线测试研究

数控机床主轴是机床上的一个重要部件,它是刀具或工件的相对位置基准和运动基准。主轴轴心的动态运动特性直接影响着被加工零件的加工精度及表面粗糙度,同时主轴的轴心轨迹作为机床主轴运行的重要图形征兆,能够形象、直观地反映机床设备综合性的误差状况。针对主轴轴心轨迹在线测试问题,搭建了适用于工业现场环境的在线测试系统。通过对友嘉FTC-20型数控车床进行测试,研究了主轴在空载、车削两种状态下轴心轨迹的变化,并对实验结果进行了分析。实验表明:该系统能够准确地分离主轴的圆度误差和主轴轴心轨迹,为后续进行机床主轴的故障评估及建立故障自动识别系统提供基础。     

SC125大型CNC数控车床控制系统的改造

针对罗马尼亚SC125型数控立车主轴定位分度系统问题，提出了用西门子CNC控制交流伺服进给系统进行改造的方案，并进行了有关硬件和软件设计，完成了主轴分度定位控制的高性能数控机床的改造，使该立车具有七种工作模式，实现车削与铣削为一体的两种控制方式。通过误差补偿达到了较高定位精度。完成了电气驱动系统的改造。     

Noncircular cutting on a lathe using tool position and differential motor current

In this paper, noncircular cutting on a lathe (NCL) using the signals of tool position and differential motor current is developed. First, a neural-network is used to learn a weighted combination of tool position and differential motor current of a voice coil servomotor system (VCSS). The differential motor current is achieved from the difference between motor current under real cutting and that under air cutting. Then a nonlinear inverse control based on the learned model is designed to obtain an acceptable cutting error. Although the nonlinear inverse control is accomplished from the consideration of tool position under real cutting, its performance cannot be ensured as the NCL is subjected to the uncertainties (e.g. noise, different cutting conditions, aging of system components). Under these circumstances, a fuzzy sliding-mode control is then synthesized with the previous nonlinear inverse control to reduce the cutting error. The experimental results of NCL using the proposed control including profile error of finished workpiece and surface roughness of finished workpiece, are better than those without the consideration of motor current.     

High frequency bandwidth measurements of micro cutting forces

The miniaturization of machine components is perceived by many as a core requirement for the future technological development of a broad spectrum of products. One of the challenges in micro engineering is the development of economical micro systems that are flexible, functional and made of appropriate engineering materials. The mechanical removal of materials using miniature tools, known as a micro machining process, has unique advantages in creating 3D components using a variety of engineering materials, when compared with photolithographic processes. Since the diameter of miniature tools is very small, excessive forces and vibrations will significantly affect the overall part and tool quality. In order to improve the part and tool quality, accurate measurement of micro cutting forces is imperative. In this paper, we focus on the development of an ultra precision micro milling system and the measurement of micro cutting forces using a three-axis miniature force sensor and accelerometers. Since the inherent dynamics of the workpiece and overall machine tool affects the frequency bandwidth, we employ the Kalman filter approach to fuse the sensor signals and compensate for unwanted dynamics, in order to increase the bandwidth of the force measurement system. Based on accurate cutting force measurement, we can come up with the optimal process parameters to maintain desired tolerances and also monitor the process to prevent failures.     

A ballscrew drive mechanism with piezo-electric nut for preload and motion control

This work reports the development of a ballscrew drive mechanism equipped with a piezo-electric nut for active ballscrew preload and fine motion control. This mechanism is intended for a motion stage of long-stroke, high-speed and ultra-precision applications. Motion of the piezo-electric nut ballscrew drive system consists of a high-speed coarse positioning and an ultra-fine positioning. Coarse positioning is done by a conventional servo motor and ballscrew where the piezo-electric nut exerts a light ballscrew preload in order to reduce the friction torque and wear at high speed motion. After the coarse positioning, a fine position adjustment is actuated by three piezo-electric actuators to get very precise positioning. Test results show that the positioning error can be fine-adjusted to the nanometer level. The low speed stability of the ballscrew drive mechanism has also been improved using the piezo-electric actuators by applying a dither signal to the ballscrew preload. The dither action can smooth and reduce the ballscrew friction force and consequently reduce the stick–slip phenomenon at low speed motion.     

交叉耦合控制的平移并联机器人位置控制研究

为了改善平移并联机器人对期望位置跟踪的准确性,提出基于交叉耦合控制的集成电液伺服驱动平移并联机器人位置控制。通过对三自由度集成电液伺服驱动平移并联机器人结构和控制方法进行分析,以机器人的末端执行器为基础,定义位置及角度坐标系,在此坐标系上计算并联机器人的逆向和正向运动学解;通过液压轴的伸长长度,求取液压轴的速度和加速度,进而得出集成电液伺服驱动器的动力学模型。以集成电液伺服驱动器的位置误差为基础,求取三自由度下集成电液伺服驱动器的同步误差,利用该同步误差,构造交叉耦合误差模型,进而求取广义误差模型,建立交叉耦合控制器,以实现对机器人的位置进行控制。实验结果显示:与粒子群方法相比,所提方法对正弦及不规则期望位置的跟踪准确度较高,跟踪准确度分别提高了40%和42.15%。可见,所提方法能够对集成电液伺服驱动的平移并联机器人进行准确的位置控制。