Diffractive shaping of excimer laser beams

Abstract

We address the problem of shaping the intensity distribution of a highly directional partially coherent field, such as an excimer laser beam, by means of diffractive optics. Our theoretical analysis is based on modelling the multi-transverse-mode laser beam as a Gaussian Schell-model beam. It is shown numerically that a periodic element, which is unsuitable for the shaping of a coherent laser beam, works well with an excimer laser beam because of its partial spatial coherence. The conversion of an approximately Gaussian excimer laser beam into a flat-top beam in the Fourier plane of a lens is demonstrated with a diffractive beam shaper fabricated as a multilevel profile in SiOl by electron-beam lithography and proportional reactive-ion etching.     

Functional integrated optical elements for beam shaping with coherence scrambling property, realized by interference lithography

Many applications, such as semiconductor lithography and material processing, require the shaping of laser beams to provide a homogenous field illumination. We present the conception, implementation, and experimental verification of a combined single-element homogenizer. Additionally, for excimer laser applications, the concept is associated with a coherence scrambling capability. We used the technique of holographic interference lithography to integrate the multifunctional properties in a diffractive optical element. The wavelength difference between the recording process (457.9 nm) and the application (193 nm) results in a change of the imaging properties and requires a geometrical adaptation of the optical setup. The coherence scrambling effect of the setup is based on an off-axis design, including the beam shaping diffractive structure.     

Integrated diffractive andrefractive elements for spectrum shaping

Diffractive elements can be designed for spectrum shaping in the Fourier or Fresnel plane by iterative methods. It is necessary to use a Fourier lens and the wavelength for which the diffractive elements were designed to get the required spectrum shaping at the Fourier plane. Using a different wavelength will cause chromatic aberration. We deal with the combination of refractive and diffractive elements and two or more different diffractive elements on the same element to get appropriate beam shaping of light sources with a multiple spectral output. Simulations are preformed that transform the profile of a He-Ne laser with a Nd:YAG laser source, and shape the trapezoidal beam profile of an excimer laser into a Gaussian beam is also considered.     

Laser-machining experiment with an excimer laser and a kinoform

We have used a kinoform to increase the beam-power utilization in an excimer-laser-machining experiment. The kinoform creates the pattern to be machined. Thus less power is wasted on the blocking parts of a shadow mask. To achieve as smooth an intensity profile as possible, the kinoform was also used together with a microlens-array beam homogenizer. We discuss the intensity distributions of the patterns created by the kinoform with and without the beam homogenizer as well as the design of the kinoform and the homogenizer, with emphasis on the relation to the coherence properties of the laser beam.     

Development of line-shaped optical system for green laser annealing used in the manufacture of low-temperature poly-Si thin-film transistors

We have developed a new optical system that transforms the circle profile beam generated with near-Gaussian intensity distribution by a pulse green laser (YAG2omega laser; second harmonics of a Q-switched Nd:YAG laser) into a line-profile beam. For homogenization in the longitudinal direction, we employed a waveguide plate-type homogenizer. We successfully reduced interference fringes. In the width direction, the laser beam was focused up to the limited M2 value. This transformed beam has a uniform distribution to within 5% in the longitudinal direction, and it is approximately 100 mm long and 40 microm wide.     

Diffractive light attenuators with variable transmission

Abstract

A new application of diffractive optical elements (DOEs) for continuous or multistage adjustment of optical radiation intensity is described. The diffractive attenuators are linear or circular gratings (amplitude or phase) with constant period and diffraction efficiency that varies across the grating. The zero order of diffraction is used as the output and transmitted through the grating without angular deviation. The diffractive attenuators, in distinction to conventional analogues, allow one to change the intensity of the light beam according to predetermined function and have no limitations for power of the regulated light beam. These elements can be used in optical systems as a beam splitter with adjusted splitting coefficient. The experimental results on a circular diffractive attenuator fabricated by direct laser writing on a chromium film are presented. The range of transmission variation was 20 times within a 340° angle of attenuator turn. The possibility to use a phase diffractive attenuator as a light radiation modulator for a powerful technological laser is discussed.     

Rapid fabrication of diffractive optical elements by use of image-based excimer laser ablation

We describe a method of fabricating multilevel diffractive optics by excimer laser ablation. A portion of a chrome mask containing many patterns is illuminated by 193-nm laser light and imaged by an objective lens onto a poly(imide) substrate. Ablation of an entire single pattern is achieved in a single laser pulse. Multiple pulses are used to vary the ablation depth, and multiple patterns are used to create a variety of multilevel optics. We have successfully fabricated arrays of eight-level diffractive microlenses with varying focal lengths and decenters. The optics performed with diffraction-limited focusing and near-theoretical diffraction efficiency (92%).     

Diffractive phase elements for beam shaping: a new design method

A design method based on the Yang-Gu algorithm [Appl. Opt. 33, 209 (1994)] is proposed for computing the phase distributions of an optical system composed of diffractive phase elements that achieve beam shaping with a high transfer efficiency in energy. Simulation computations are detailed for rotationally symmetric beam shaping in which a laser beam with a radially symmetric Gaussian intensity distribution is converted into a uniform beam with a circular region of support. To present a comparison of the efficiency and the performance of the designed diffractive phase elements by use of the geometrical transformation technique, the Gerchberg-Saxton algorithm and the Yang-Gu algorithm for beam shaping, we carry out in detail simulation calculations for a specific one-dimensional beam-shaping example.     

Spatial beam shaping of ultrashort laser pulses: theory and experiment

We studied the spatial intensity profile of an ultrashort laser pulse passing through a laser beam shaping system, which uses diffractive optical elements to reshape a Gaussian beam profile into a flat-topped distribution. Both dispersion and nonlinear self-phase modulation are included in the theoretical model. Our calculation shows that this system works well for ultrashort pulses (approximately 100 fs) when the pulse peak intensity is less than 5 x 10(11) W/cm2. Experimental results are presented for 136 fs pulses at 800 nm wavelength from a Ti:sapphire laser with a 6 nJ pulse energy. We also studied the effects of lateral misalignment, beam-size deviation, and defocusing on the energy fluence profile.     

Regenerative ring-laser design by use of an intracavity diffractive mode-selecting element

We report what we believe to be the first application of diffractive phase elements for transverse mode selection in laser ring resonators. We show that this resonator type offers several advantages over Fabry-Pérot resonators with diffractive mirrors. The design for a regenerative ring resonator that produces an eighth-order super-Gaussian intensity profile beam is presented. Numerical simulations, including modeling of the gain saturation and experimental tests, have been carried out to demonstrate the performance of this approach for cw and pulsed operations.     

Beam homogenizer for hollow-fiber delivery system of excimer laser light

A beam homogenizer for a hollow-fiber-based, UV laser delivery system is proposed. A rectangular glass waveguide with an inner aluminum coating that has a 1-mm square cross section is attached at the output end of the circular-core hollow fiber with a 1-mm inner diameter. The rectangular waveguide generates a number of higher-order modes and results in a uniform top-hat profile. The configuration of the waveguide is designed by a ray-tracing technique so that both the low transmission loss and the high uniformity in the output beam are obtained. The fabricated waveguide shows a low loss of 0.4 dB, and the intensity variation coefficient is 7%. The output beam from the rectangular waveguide is expanded by a lens to the size larger than 10-mm square. It is also shown that the profile does not change with the bending condition.     

Characterization of excimer lasers for application to lenslet array homogenizers

We investigate the best method of characterizing high-divergence lasers, such as excimer lasers, to suppress fine-scale intensity nonuniformity that is due to coherence effects of lenslet homogenizers. We show by a detailed analysis of the lenslet homogenizer that, for highest accuracy, a direct measurement of the value of the autocorrelation function should be made at the separation p of the lenslet elements, identified as the critical spatial period. We show that the commonly used characterization of lasers by the 1/e(2) width of the angular divergence is not the most accurate test and may overstate or understate the effectiveness of a given laser.     

Ultrashort laser pulse beam shaping

We calculated the temporal and spatial characteristics of an ultrashort laser pulse propagating through a diffractive beam-shaping system that converts a Gaussian beam into a beam with a uniform irradiance profile that was originally designed for continuous waves [Proc. SPIE 2863, 237(1996)]. The pulse front is found to be considerably curved for a 10-fs pulse, resulting in a temporal broadening of the pulse that increases with increasing radius. The spatial intensity distribution deviates significantly from a top-hat profile, whereas the fluence shows a homogeneous radial distribution.     

High-efficiency diffractive micromachined chopper for infrared wavelength and its application to a pyroelectric infrared sensor

We have developed a diffractive micromachined chopper (DMC) for an IR wavelength of ~10 mum. This device operates mechanically by movable reflection grating beams. It modulates the diffraction efficiency by controlling the displacement of grating beams by an electrostatic force. For a CO(2) laser beam, a high modulation efficiency of 84% with an -0.8-dB small insertion loss was obtained by detecting 0th-order diffracted light. A novel pyroelectric IR microsensor with a DMC and a diffractive multilevel Si microlens was proposed and it demonstrated the detection of human existence.     

Optimization of the output beam homogeneity of short-pulse KrF amplifiers

The output beam of short-pulse excimer amplifiers exhibits an inhomogeneous spatial intensity distribution caused by diffraction effects at laser windows and mirrors. Theoretical and experimental studies show that the amplification parameters of a KrF amplifier can be optimized with respect to the output beam homogeneity by proper choice of the energy density in the amplifier. The homogenized intensity distribution is obtained at the plane of the output window of the amplifier and can be transferred by optical imaging onto a target plane. It is shown that the amplification parameters for the best output homogeneity are close to the ones previously found for optimal energy extraction efficiency.     

Design concept for diffractive elements shaping partially coherent laser beams.

A new two-step design algorithm for the calculation of a diffractive phase element (DPE) for use with partially coherent laser beams is presented. The optical reconstruction of the DPE is modeled by the convolution of a coherent diffraction pattern and the far-field intensity distribution of a partially coherent laser beam. Numerical deconvolution is applied to derive a suitable amplitude pattern as signal input to a standard iterative Fourier transform algorithm (IFTA). Theory and numerical results are presented. Compared with a single-step IFTA design, this new approach yields nearly equal diffraction efficiencies and a relative improvement of 15% in signal reconstruction error.     

Modeling gain-medium diffraction in super-Gaussian coupled unstable laser cavities

The diffractive effects of a single laser rod in an unstable super-Gaussian coupled cavity are modeled for a range of cavity configurations, with an intracavity, zero-thickness aperture. After fundamental mode propagation through a maximally flat output coupler, beam quality (M2) and far-field power loss values are related. Beam quality is most sensitive to cavity magnification and aperture Fresnel number, both correlated to the aperture-equivalent Fresnel number. In contrast, variation of M2 with aperture position is sufficiently conservative to predict the intensity profile of a solid-state laser with a typical gain length, in good agreement with experimental data.     

Beam-shaping element with reduced sensitivity to input variations

We designed and fabricated a diffractive element for high-power laser beam shaping whose output is less sensitive to variations of input intensity and phase distributions. The choice of the initial solution is used as a degree of freedom to conduct the iterations to converge to a suboptimal solution that has the required property. We determined the initial phase by an aperture subdivision and stationary phase method, which is less sensitive to input variations. Experimental results are shown.     

Superresolution laser beam shaping

The superresolution technique is well known for its ability to compress the central diffractive spot that is smaller than the Airy diffractive spot. In this paper, we extend the superresolution technique for different laser beam shaping. A complete set of superresolution diffractive elements is developed for the flat-top beam shaping, the single-circle beam shaping, and the novel circular Dammann grating. Five phase plates, corresponding to each of its applications, have been made by use of micro-optics technology. Experiments that are presented are in good agreement with the theoretical results. The superresolution technique presented in this paper should be highly interesting for the wide applications of laser beam shaping.     

Effects of the spatial frequency composition of the target pattern and the number of quantization levels in diffractive beam shaper design

A mathematical model is derived, and numerical simulation is analyzed for laser beam shaping by using multilevel phase-only diffractive optical elements (DOEs). We used the simulated annealing algorithm to design the beam shapers. The result has an essential effect on the diffractive pattern quality caused by the spatial frequency composition of target patterns for the same incident gaussian beam size and target pattern area. The root mean square error between the diffractive and target patterns is smaller for the target patterns with lower spatial frequencies. Moreover, the effect of spatial frequency composition can be relaxed for the cases of larger incident gaussian beam size. In addition, finer quality control of a diffraction pattern can be obtained by increasing the number of quantization levels at the DOEs.