扇出型晶圆级封装中圆片翘曲研究

在扇出型晶圆级封装工艺中,由于芯片材料与塑封料之间的热膨胀系数差异,晶圆塑封过程中必然会形成一定的翘曲.如何准确预测晶圆的翘曲并对翘曲进行控制是扇出型晶圆级封装技术面临的挑战之一.在讨论圆片翘曲问题时引入双层圆形板弯曲理论与复合材料等效方法,提出一套扇出型晶圆级封装圆片翘曲理论模型,并通过有限元仿真与试验测试验证了该翘...     

浅议EMC在LED封装中的应用

环氧模塑料（EMC）作为一种常见的封装材料,具有可规模化生产和高可靠性等特点,被广泛应用于微电子封装领域。随着LED半导体照明技术的迅速发展,EMC作为一种新型支架塑封材料被引入到LED封装行业,成为第三代LED封装支架。与传统的PPA材料相比,EMC具有低膨胀系数、高热导率、更好的耐热性等优势。由于EMC支架是一种高度集成化的支架,具备更好的封装性能和可靠性,可进一步提升LED器件的可靠性并降低LED器件的成本。文章主要介绍EMC支架的主要特点、优势及其制作工艺,同时也总结了EMC在LED封装应用过程中还存在的一些问题。     

IC环氧塑封料性能及其发展趋势

材料是微电子工业和技术发展的粮食，随着IC封装技术的发展，对材料特性的要求也愈来愈严格，也顺势带动封装材料发展。环氧塑封料(Epoxy Molding Compound，简称EMC)是IC后道封装三大主材料(塑封料、金丝、引线框架)之一，用环氧塑封料封装超大规模集成电路(VLSI)在国内外已成为主流，目前95％以上的微电子器件都是塑封器件。本文将简要介绍EMC配方组成、反应机理、性能之间关系及其发展趋势。     

FBGA封装翘曲的黏弹性仿真与验证

窄节距焊球阵列(FBGA)封装在现代电子产品中应用广泛,翘曲是这种条带形式封装结构的一个重要性能指标.封装翘曲主要是在模塑工艺中产生的,一方面是降温过程中材料间热膨胀系数不匹配,另一方面是环氧模塑料(EMC)在模塑过程中的化学收缩造成的.另外,模塑材料后固化(PMC)过程中的应力松弛效应也是影响翘曲的重要因素.运用有限元分析(FEA)方法,研究了热失配、EMC化学收缩及其黏弹性特性三个因素对FBGA翘曲的影响.仿真结果表明,EMC化学收缩可以有效补偿热失配引起的翘曲;同时,EMC应力松弛效应也能明显改善翘曲.FBGA产品在模塑和后固化工艺后的翘曲测量值与有限元预测结果具有较好的一致性.     

环氧模塑封装材料的蠕变损伤研究

文章对环氧模塑封装材料（EMC）的蠕变损伤进行了实验研究,对断口进行了扫描电镜观察,获取了EMC材料蠕变失效的微观机理。应用修正的Lermaitre蠕变损伤模型来描述损伤参数及预测蠕变损伤寿命。实验结果表明：EMC材料的蠕变具有明显的蠕变演化的三个阶段;颗粒与基质间的界面脱层和微空洞相互间的级联扩张是引发试样蠕变断裂失效的根本原因;由蠕变损伤模型预测的蠕变寿命在应力水平较低的情况下与实验吻合较好。     

半导体封装用环氧模塑料面临绿色考验

半导体封装用环氧模塑料（EMC／Epoxy Molding Compound,通常又叫环氧塑封料）,20世纪60年代中期起源于美国（Hysol）,后发扬光大于日本,现在中国是快速崛起的世界EMC制造大国。环氧塑封料不仅可靠性高,而且生产工艺简单、适合大规模生产,同时成本较低,目前已占整个微电子封装材料97％以上市场。我国大陆EMC产能己超过7万吨,2008年将超过8万吨。随着环氧塑封行业的快速发展,对环氧塑封材料提出了更高的要求,除了提高性能、控制成本等要求外,主要集中在环境保护方面。     

塑封IC翘曲问题

为分析封装材料及模塑过程参数对塑封IC翘曲的影响,本文先介绍塑料四边引线扁平封装(PQFP)使用的环氧模塑化合物(EMC)的热特性。并对不同模塑样品的聚合程度(DOC)、热膨胀系数(CTE)、玻璃转变温度Tg、剪切模量G等,运用各种热分析技术进行测量。结合不同封装过程参数,运用三维有限元分析法进行封装翘曲预测。最后对塑料四边引线扁平封装(PQFP)IC翘曲的测量值与预测值进行比较。     

QFN器件在湿热环境中的界面裂纹分析

因吸潮而引起的界面破裂是塑封电子器件失效的一个重要原因。通过吸潮实验、无铅回流焊环境实验和湿热老化实验研究了QFN塑封器件内部界面裂纹情况。结果表明,未吸潮的器件经历无铅回流焊后很少产生裂纹,吸潮器件在吸潮期间未产生裂纹,但经历无铅回流焊后器件产生裂纹的几率达100%;裂纹在芯片、芯片粘结材料(DA)和塑封材料(EMC)的交界处的破坏程度最大;产生的裂纹的位置和扩展方向与结合材料的特性、结合界面的强度紧密相关。     

新型在线处理快速固化芯片粘结剂

一、前言对于塑封应用聚合物芯片粘结来说，目前已大部分取代了以前使用昂贵的预制金片烧结。结果，每年聚合物芯片粘结市场已超过6000万美元。通常，一种芯片粘结材料可用于不同的器件形式和封装类型。但是，根据当前芯片朝更大、封装更簿和在线处理方向发展的趋势，这种方式已不再适合了。于是，塑料包封器件芯片粘结市场按照对材料不同要求分成两块：低成本小芯片快速固化材料和大芯片＼薄型封装低应力／抗“爆米花”popcorn材料。烘箱固化掺银环氧树脂和聚酸亚胺粘结芯片方法成为工业化标准已多年，但其典型的粘结固化时间是在175℃下烘…     

湿热环境下吸潮对QFN器件可靠性的影响研究

由吸潮引起的微电子塑封器件失效已经越来越多地引起人们的关注.选用QFN器件作为研究对象,首先进行QFN器件在高温高湿环境下吸潮17 h、50 h、96 h试验;然后利用有限元软件分析和模拟潮湿在QFN器件中的扩散行为,并建立湿气预处理阶段应力计算模型;最后,通过试验与仿真相结合,分析潮湿对封装可靠性的影响.研究表明:微电子塑封器件的潮湿扩散速度与位置有着重要的关系;在高温高湿环境下,微电子器件吸潮产生的湿热应力在模塑封装材料(EMC)、硅芯片(DIE)和芯下材料(DA)的交界处最大;QFN器件在高温高湿环境下吸潮产生的裂纹主要出现在硅芯片与DA材料交界面的边界.     

Numerical investigation and experimental validation of residual stresses building up in microelectronics packaging

This paper comprises the numerical approach and the experimental validation technique developed to obtain the residual stresses building up during encapsulation process of integrated circuits. Residual stresses can be divided into cure and cooling induced parts. The curing originated stress had been mostly neglected in the literature and a special attention had always been given to detection of the thermal induced stress. In this study, both of the residual stresses, evolving during packaging, were investigated independently. The material behavior of the epoxy molding compound, EMC, was determined by the series of characterization experiments. The volumetric behavior of the EMC was investigated using PVT analysis, in which the total cure shrinkage of an initially uncured sample and the coefficient of thermal expansion of the same sample after full conversion were determined. The cure kinetics was studied using differential scanning calorimetry, DSC. The dynamic mechanical behavior was examined by dynamic mechanical analysis, DMA, at a fixed frequency. Besides, the time dependent behavior of the EMC was also determined by implementing the time–temperature superposition, TTS, test set-up in DMA. The shift factor was modeled using the combination of the WLF equation and the polynomial of second degree. The constitutive equations were developed based on the applied boundary conditions and the epoxy compound's mechanical behavior in the respective stage. A two dimensional numerical model was constructed using a commercially available finite element software package. For the experimental verification of the numerically obtained residual stresses a flexible board with the stress measuring chip was encapsulated. The real-time stress data were measured during the encapsulation. Using this technique, the in-plane stresses and the temperature changes during the die encapsulation were measured successfully. Furthermore, the measured stress data was compared with the predicted numerical results of the cure and the thermal stages, independently.     

EMC材料特性对SCSP器件应力及层裂的影响

利用动态机械分析仪测定环氧模塑封(EMC)材料的粘弹特性数据,使用有限元软件MSCMarc分别模拟了EMC材料粘弹性、随温度变化的弹性以及恒弹性三种情况下,SCSP器件在–55～+125℃的等效应力分布及界面层裂。结果表明:125℃和–55℃时最大等效应力分别出现在恒弹性模型、粘弹性模型顶层芯片的悬置区域;将EMC材料视为恒弹性性质时等效应力比粘弹性时大了15.10MPa;–55℃时EMC材料粘弹性模型中裂纹尖端的J积分值比恒弹性模型增长了45%左右,容易引起分层裂纹扩展。     

基于BP神经网络的模塑封材料疲劳寿命预测

根据模塑封材料(EMC)疲劳实验,针对BP神经网络[反向传播神经网络(BPNN)]拟合误差与预测误差关系不稳定的应用问题,结合主成分分析法,"主动"改善网络结构,建立了基于BP神经网络的EMC材料疲劳寿命预测模型,进行了分析,并与一般的BP神经网络模型作了比较。结果表明,该方法得到的BP神经网络经过训练后能稳定表征EMC材料的各种参数与疲劳寿命间的内在关系。当网络拓扑结构为2-4-1时,预测结果稳定,预测误差平方和(SSE)为0.5623～0.0271,拟合误差(MSE)为0.0906～0.0278,具有实用性。     

Prediction of the epoxy moulding compound aging effect on package reliability

Most semi-conductor devices are encapsulated by epoxy moulding compound (EMC) material. Even after curing at the prescribed temperature and time in accordance with the supplier’s curing specifications often the product is not yet 100% fully cured. As a consequence, the curing process of a product continues much longer, leading to curing effects of the EMC during the lifetime of the package. In this paper, the effect of EMC curing during lifetime on package reliability is investigated. The visco-elastic mechanical properties of two commercial EMC materials are measured as a function of aging time. The resulting data is used to construct material models that are used in FE calculations. Aging effects on critical semi-conductor failure modes die cracking, compound cracking, wedge break, and delamination are addressed. Die and compound crack risks are predicted by common stress analysis. The risk of wedge break occurrence is investigated by detailed 3D modeling of the actual wires in the package using a global-local approach. Conclusions on delamination risks are made based on a parameter sensitivity analysis using a 3D cohesive zones approach to predict transient delamination. The package reliability study shows that the effect of EMC aging affects relevant failure modes in different ways.     

Numerical modeling of warpage induced in QFN array molding process

Warpage is a critical issue for QFN array molding process. In this paper, a cure-dependent viscoelastic constitutive model is established to model the cure-induced warpage in array molding process. For the relaxation modulus functions of the packaging polymer, the equilibrium moduli are modeled with a model based on scaling analysis and the relaxation behavior of the transient part is described by the cure-dependent relaxation amplitude and reduced relaxation times which are based on the time-conversion superposition principle. The cure-dependent parameters are characterized by using an integrated approach of dynamical mechanical analysis (DMA) and differential scanning calorimetry (DSC) measurements. Finite element modeling is carried out for three configurations of a carrier package map mould and the warpage induced during the curing process and cooling down is predicted. The results show that warpage induced during the curing process has significant contribution on the total warpage of the map.     

环氧模塑封材料的热–机械疲劳失效分析

封装材料的热疲劳失效是封装器件失效的主要原因之一.对在微电子封装中应用很广的环氧模塑封装材料进行了常温和高温下的拉伸、疲劳实验.基于以疲劳模量作为损伤因子的疲劳寿命预测模型,相应的材料参数通过实验获得.并通过实验得出了该环氧模塑封装材料考虑温度影响的疲劳寿命预测模型,利用该模型可以对微电子封装用高聚物的疲劳寿命进行预测.     

环氧模塑封材料的热-机械疲劳失效分析

封装材料的热疲劳失效是封装器件失效的主要原因之一。对在微电子封装中应用很广的环氧模塑封装材料进行了常温和高温下的拉伸、疲劳实验。基于以疲劳模量作为损伤因子的疲劳寿命预测模型,相应的材料参数通过实验获得。并通过实验得出了该环氧模塑封装材料考虑温度影响的疲劳寿命预测模型,利用该模型可以对微电子封装用高聚物的疲劳寿命进行预测。     

Numerical analysis of the warpage problem in TSOP

The reliability and the solderability of thin small outline package (TSOP) are significantly affected by the warpage that is generated after epoxy molding compound (EMC) molding process. This warpage problem mainly results from the mismatch of material properties such as Young's modulus, Poisson's ratio and coefficient of thermal expansion (CTE) and the geometric structure of each component for TSOP. The optimization of both material properties and geometric structures using the numerical analysis is necessary to reduce the warpage of TSOP. However, there are still some limitations for the numerical analysis to obtain proper results consistent with the practical warpage values. In this paper, the numerical analysis is performed under the assumption of elastic behavior for EMC. Furthermore, to solve the limitations, the material properties at the molding temperature and the degree of reaction rate at the end of the molding process of EMC are considered together for the analysis. This numerical analysis gives the higher warpage values than the measured ones, and is applicable to the practical design of the reliable electronic package.     

环氧模塑料在半导体封装中的应用

环氧模塑料是一种重要的微电子封装材料,是决定最终封装性能的主要材料之一,具有低成本和高生产效率等优点,目前已经成为半导体封装不可或缺的重要材料。本文简单介绍了环氧模塑料在半导体封装中的重要作用和地位;分析了环氧模塑料性能对半导体封装的影响,并对不同半导体封装对环氧模塑料的不同要求进行了分析;最后展望半导体封装和环氧模塑料的未来发展趋势,以及汉高华威公司在新产品开发中的方向。