硅片化学机械抛光中表面形貌问题的研究

利用扫描电镜和WYKO MHT-Ⅲ型光干涉表面形貌仪研究了抛光过程中不同阶段硅片的表面形貌、抛光液研磨颗粒粒径对抛光表面质量的影响以及抛光过程中的桔皮现象。结果表明,抛光中主要是低频、大波长的表面起伏被逐渐消除,而小尺度上的粗糙度并未得到显著改善;当颗粒直径在10-25nm的范围时,粒径和粗糙度不存在单调关系;桔皮的产生主要是抛光液中碱浓度过高所致。     

On Variation of Surface Topography and Robust Product Performance

The customer's demands for higher quality,faster delivery times and reduction of cost,give evidence for the need to develop new technologies or enhance existing technologies combined with research activities. The automotive industry's capability to develop newproducts in a shorter time is constantly improved. Tool and die creation is a major part of the product creation for many industrial products and in particular for the automotive industry. The higher product requirements on reduced weight,better safety,and lower emissions have meant that a larger number of automotive body parts must be made in advanced high strength steels. Improved functionality of surface textures and engineered tailor made component surfaces is one enabling technology for industry to increase compete ability by improved component function and reduced friction losses. However,material properties' variation,un-evenly spread wear,unknown manufacturing process variations,the "human factor",faulty metrology procedures… All factors interact to increase the problems of utilizing surface texturing on the micro metre level as a competitive tool for industry. Large variation of the micro topography created by industrial machining processes tends to reduce the impact of the usage of improved engineered surfaces on critical components. A proposal of a strategy for metrology using "intelligent"sampling techniques comprising of regionalization of the functional area and designed sampling patterns is presented. To efficiently make use of efficient sampling,an example of a recently developed optical scattering light in-line metrology of high precision surfaces is discussed as a tool to enable efficient control of machine tools in general. Future steps discussed include developing of control loops for implementation in CNC controllers to efficiently make use of the "smart"surface texture characterisation data from the developed in-line surface texture sensors.     

表面相互作用下表面形貌表征研究

研究了相互作用表面微观形貌三维功能参数表征问题,分析了相应的表征参数.这些表征表面功能特性的参数包括:实体接触面积比、开放空体面积比、封闭空体面积比.针对实际测量的表面,结合MATLAB数字图像处理详细给出了各参数的计算方法,并对不同结构的表面形貌进行了表征.结果表明:3种表面表征参数不仅能很好地鉴别粗糙度相近、结构不同的表面形貌,而且能够表征表面的功能特征.实体接触面积比可用于表示表面的支承性能,实体接触面积比大表明支承性能好;开放与封闭空体面积比同时给出表面承载能力和润滑性能信息.     

表面形貌复合测量位移传感器的研究

一种用于表面形貌测量的复合测量位移传感器，它将接触式触针传感器和非接触式光学传感器巧妙融合在一起，使得一个表面形貌测量位移传感器同时具备接触和非接触两种测量手段。其特点是利用了一个触针－反射镜测杆机构，将激光聚焦光束直接在被测工件表面扫描转换为对测杆上固接的反射镜扫描。其垂直测量范围1mm，垂直测量分辨率5nm。该传感器工作稳定可靠，使用灵活，可广泛用于研究机构和工业现场等进行表面形貌测量。     

表面形貌测量数据处理算法研究

提出一种基于图形处理器(GPU)的快速傅里叶变换算法和并行处理算法,给出了傅里叶变换分析法的GPU并行实现流程,通过对各像素点进行并行处理,使得处理速度大大加快。GPU和计算机的处理精度和运算速度计算结果表明:GPU能在不降低处理精度的前提下,保证其效率得到很大提升。     

A Composite Probe for Surface Topography Measurement

A composite surface measurement probe, developed for the characterisation of engineering surfaces, is presented. The probe is of a hybrid type and is capable of contact and non-contact measurement, making it suitable for a wide range of applications. It integrates a focus-detection optical system with a stylus-mirror system. Calibration results show that the probe can measure dimensions larger than ±500 μm with good linearity for both contact and non-contact measurement. The vertical measurement resolution of the probe is 5 nm.     

机械加工表面形貌分形特征的计算方法

提出应用小波变换计算表面形貌分形特征参数，基于Weierstrass-Mandelbrot函数（W-M函数）和Majumdar-Bhushan函数（M－B函数）这2种常用于表征和模拟机械加工表面轮廓曲线的标准分形函数，验证了小波变换计算分形维数具有很高的精度。与其它计算表面形貌分形维数的方法进行了比较，结果表明小波变换方法的稳定性和准确性好。应用小波变换计算了不锈钢和铜2种材料的机械加工表面的分形维数。     

Surface Structure Studies Of Electron Beam Annealed Ion Implanted Silicon

A method of annealing ion implanted silicon with a scanned electron beam is described. Annealing can be achieved without visible damage to silicon or silicon oxide in resistor structures. At excessively high powers, uncontrolled melting can be seen. The structure of the implanted surface layer is shown with SED to change from amorphous to single crystal after annealing.     

A Comparative Study on the Three-Dimensional Surface Topography for the Polished Surface of Femoral Head

Several surface topographic techniques have been widely used in many manufacturing engineering fields for studying the surface characteristics for the practical application of manufacturing surfaces. In this paper, a polished surface of a femoral head is considered for the compatative study, where the stylusbased technique, the autofocused optical measurement technique, the interferometric technique, and scanning probe microscopy are applied. After the operational principles are introduced, some practical comparative measurements are reported for the polished surface. Some useful comparisons and conclusions are drawn from the comparative study. General guidelines for the 3D surface topography are also given for practical application.     

一种新型滚动轴承表面形貌测量仪

介绍了一种新型的滚动轴承表面形貌测量仪,它采用一种全新的能越过陡峭表面的二维位移传感器和垂直扫描三维工作台组成一个闭环控制系统,将传统的触针移动扫描方式改变为工作台移动扫描方式。在测量工件时,二维位移传感器的测量杠杆总是不断地回到平衡位置,因此即使增大量程,由杠杆转动所引起的测量非线性误差也非常小。该仪器不仅可进行二维轮廓测量,还可进行三维形貌测量,具有大量程、高精度、小测量力和更多测量参数等特点。     

夹心式复合加工表面形貌特征

对夹心式电化学机械复合光整加工设备进行了改进，通过工艺试验广泛地搜集了大量试验数据，确定了较合理的工艺参数。依据试验数据，多角度地研究了电化学机械复合光整加工的表面形貌特点，并从理论上深入讨论了电化学机械复合光整加工表面形貌对工件工作性能的影响，最后得出的结论为：电化学机械复合光整加工对工件原始表面的低频成分有较大程度的降低，而对高频成分影响较小，有明显的阳极整平作用，被加工工件表面的尖峰状凸起被去除，工件表面呈现出微观“高原型”，表面轮廓不平度高度特性参数大幅度降低，工件表面轮廓分布集中，且呈负偏态，轮廓偏斜度为负值，轮廓支承长度率曲线陡峭，工件的表面质量得到综合改善，这对提高零件的抗接触变形能力、改善摩擦、磨损性能、降低工件的磨合时间、提高工件的精度保持性、延长工件的寿命均有利。     

磨削加工表面形貌的分形研究

通过对磨削加工表面的测试与分形研究，得到不同磨削加工表面粗糙度的分形维数Ｄ与Ｒｑ、Ｒｑ、Ｓｍ之间的关系式，为磨削表面形貌的计算机分形模拟建立了基础。     

面向功能的表面形貌Motif表征研究

简述了现代工业对表面功能特性的新要求,表面形貌具有保证产品品质和功能的双重性,面向功能的表面形貌表征是实现表面设计与评定的基础;介绍了表面形貌的二维Motif表征及其评定参数;分析了不同的Motif评定参数对各种表面功能的对应表征关系;概述了三维Motif方法的定义和评定参数;提出了对表面形貌进行评定需要注意的问题。     

On Material Removal Regimes for the Shaping of Glass Edges: Force Analysis,Surface Topography and Damage Mechanisms

Glass shaping, which corresponds to the removal of the edges of a specimen, is the last finishing operation in glass manufacturing. This process has several functions on the final shaped glass including removing sharp edges, improving mechanical resistance, decreasing surface damage and giving it an aesthetical aspect. This article addresses the effects of working parameters, including grinding forces and consumed power, on surface edge finishing and damage mechanism induced during glass grinding. Microscopic observations and multi-scale analysis have also been conducted to investigate the surface edge characteristics. Experimental results show three damage regimes. The first (regime I) is a partial ductile regime with cutting action accompanied by chip formation. The second (regime II) is a crushing (or fragmentation) regime. The last (regime III) is also a partial ductile regime but by ploughing action with displaced material. The shaped surface obtained in the regime II has a better roughness than that obtained in regime I and III. However, regimes I and III include streaks and form defects which are not present in regime II. Similar to metallic materials, the evolution of force components show a linear relationship between normal and tangential forces. This implicates a constant average contact pressure and friction coefficient (μ) between the flat grains and the workpiece.     

机械密封端面形貌的三维重建及其表征

为了准确方便地描述机械密封端面的三维形貌及泄漏通道,基于密封环端面断层扫描二维图像,研究开发了机械密封端面形貌三维重建程序;提出了机械密封端面形貌的表征参数,并建立了基于体素的密封端面计盒维数和孔隙率算法。研究结果表明：基于断层图像的密封端面三维重建形貌能有效地反映密封端面的三维计盒维数和孔隙率等参数;层与层之间的面孔隙率具有一定的变化规律,在体孔隙率不变的情况下,改变各断层面孔隙率的分布,可以控制动静环密封端面间泄漏通道的形成及泄漏通道的大小;当采样层数较少时,采样层数对计算结果影响较大,在采样层数达到一定数值后,采样层数对计算精度的影响越来越小。     

三维表面粗糙度的均方根斜率评定

基于分形几何理论,通过分析随机表面的轮廓谱矩和表面谱矩的特性,提出了三维粗糙表面的均方根斜率评定方法,并用平磨样块试验证实了该法的正确性。     

自由曲面数控加工表面形貌仿真

建立了整体式螺旋刃球头立铣刀和可转位式球头立铣刀的几何刃线模型。基于自由曲面方程,由矩阵运算得出刃线运动包络面,对球头铣刀加工的表面形貌进行了建模和仿真。结果表明:加工平面时,刀轴摆角的选择对表面形貌影响较大;而加工自由曲面时,刀轴摆角的变化对表面形貌影响不大。     

磨粒三维表面形貌的研究分析

磨粒三维表面形貌分析是针对磨粒二维分析技术的不足而提出的磨粒分析方法。分析了目前磨粒三维表面形貌获取技术特点和实用性,探讨了近年来磨粒表面形貌三维表征描述中采用的几种方法——灰度共生矩阵、分形维数法、方向测度法,并通过分析表明,方向测度法是一个比较好的磨粒表面形貌三维特征分析方法。