Tunable acoustic resonator on a photoinduced grating in lithium niobate

It is experimentally demonstrated that photoinduced gratings in lithium niobate single crystals can be used as tunable high-frequency resonators for the surface and bulk acoustic waves. The resonance frequency can be tuned within broad limits by rewriting gratings with interfering laser beams.     

L形声学谐振器声学特性研究

针对L形声学谐振器进行了理论分析和实验研究。在经过适当修正后,可以将其简化为1/4波管处理,考虑L形谐振器几何特点及管口辐射阻抗的修正,给出了求声腔共振频率的近似公式,通过实验验证了理论公式的有效性。只要合理选择声学谐振器的类型和尺寸,即可达到十分理想的效果。该理论与实验结果符合得很好。要综合考虑系统的吸声系数和带宽的影响,这种声学谐振器的个数存在优化的选择。同时考察了声学谐振器个数对系统吸声系数峰值及品质因数的影响。     

Tunable ultracompact electro-optical photonic crystal ring resonator

A tunable ultracompact electro-optical photonic crystal ring resonator with high transmission is reported. The photonic crystal ring resonator is obtained by removing a ring shape of cylinders from a square lattice of dielectric cylinders in air. The transmission spectra of this ring resonator have been investigated by using the finite-difference time-domain technique. The general characteristics of the ring elements to achieve resonant tunneling are determined. By modulating the conductibility of the inner cylinders in the ring resonator, the electrical tunability of the resonant modes is observed in the transmission spectrum. The research results should open opportunities for this ring resonator as ultracompact filters, optical add-drop multiplexers, electro-optical N × N switches, and modulators.     

Mercuric ion sensing by a film bulk acoustic resonator

This paper describes a film bulk acoustic resonator (FBAR) mass sensor for detecting Hg2+ ion in water with excellent sensitivity and selectivity. When a thin Au film was deposited on the surface of an FBAR, the resonant frequency shifted to a lower value when the film was exposed to Hg2+ in aqueous solution. The FBAR sensor detected as low as 10(-9) M Hg2+ (0.2 ppb Hg2+) in water. Other ions such as K+, Ca2+, Mg2+, Zn2+, and Ni2+ had little or no effect on the resonant frequency of the FBAR. Coating of the FBAR Au surface with a self-assembled monolayer (SAM) of 4-mercaptobenzoic acid decreased the Hg2+ response.     

Tunable microring resonator based on dielectric-loaded surface plasmon polariton waveguides

Integrated optical ring resonators are essential elemental components for integrated optical circuits. An ultrasmall thermo-optical microring resonator with two bus waveguide-configuration based on surface plasmon polariton waveguide is theoretically analyzed. The thermo-optical coefficient, the temperature-dependent amplitude attenuation coefficient and the temperature distribution properties of the waveguide are investigated numerically by finite element method. The critical resonant conditions of the microring resonator are discussed by considering the propagation losses in the plasmonic ring cavity. The transmission characteristics and the tunability of the ring resonator with different structural parameters are investigated. The results show that the proposed ring resonator with a low driving power and high efficient tunability has potential to develop nano-scope wavelength tunable channel drop filters, low power optical switches, attenuators, and other high compact integrated optical devices.     

Bulk acoustic resonator based on piezoelectric ZnO belts

In this paper, a bulk acoustic resonator based on ZnO belts is demonstrated. This device shows a great deal of promise in applications as an electronic filter and as a mass sensor. The fabricated device was characterized using vector network analysis, and both the first and third harmonics of resonance were observed at approximately 247 and 754 MHz, respectively. A one-dimensional Krimholt-Leedom-Matthaei model was utilized to predict the resonant frequency of the device and confirm the observed behavior.     

Determination of the Boltzmann constant using a quasi-spherical acoustic resonator

The paper reports a new experiment to determine the value of the Boltzmann constant, k(B)=1.3806477(17)×10(-23) J K(-1), with a relative standard uncertainty of 1.2 parts in 10(6). k(B) was deduced from measurements of the velocity of sound in argon, inside a closed quasi-spherical cavity at a temperature of the triple point of water. The shape of the cavity was achieved using an extremely accurate diamond turning process. The traceability of temperature measurements was ensured at the highest level of accuracy. The volume of the resonator was calculated from measurements of the resonance frequencies of microwave modes. The molar mass of the gas was determined by chemical and isotopic composition measurements with a mass spectrometer. Within combined uncertainties, our new value of k(B) is consistent with the 2006 Committee on Data for Science and Technology (CODATA) value: (k(B)(new)/k(B_CODATA)-1)=-1.96×10(-6), where the relative uncertainties are u(r)(k(B)(new))=1.2×10(-6) and u(r)(k(B_CODATA))=1.7×10(-6). The new relative uncertainty approaches the target value of 1×10(-6) set by the Consultative Committee on Thermometry as a precondition for redefining the unit of the thermodynamic temperature, the kelvin.     

Coupled resonator filter with single-layer acoustic coupler

We discuss the operation of novel coupled-resonator filters with single-layer acoustic couplers. Our analysis employs the physical Mason model for acoustic resonators. Their simpler fabrication process is counterbalanced by the high acoustic attenuation of suitable coupler materials. At high levels of attenuation, both the phase and the acoustic impedance must be treated as complex quantities to accurately predict the filter insertion loss. We demonstrate that the typically poor near-band rejection of coupled resonator filters can be improved at the die level by connecting a small capacitance between the input and output of the filter to produce a pair of tunable transmission minima. We make use of these theoretical findings to fabricate coupled resonators filters operating at 2.45 GHz.     

Micromachined acoustic wave resonator isolated from substrate

This paper describes high Q, free-standing, narrow beam supported film bulk acoustic-wave resonators (FBARs) fabricated with silicon micromachining. The resonators are composed of metal/ZnO/metal/Si(x)Ny (or metal/ZnO/metal) composite layers, which are suspended by narrow Si(x)Ny/metal (or metal) beams to minimize energy leakage to the substrate. A layer of 0.5-microm thick parylene deposited and patterned over the Si(x)Ny/metal (or metal) beams is proven to enhance the sturdiness of the free-standing structure greatly. The highest Q (quality) factors we have obtained with this new structure are 1,587 and 769 at 2.7 and 5.1 GHz, respectively. This paper also describes the effect of removing the silicon-nitride support layer (to form air-backed FBARs that do not use any supporting layer below or above piezoelectric the ZnO layer sandwiched by two metal layers). The electromechanical coupling constant (Kt2) is improved from 3.2% to 6.8% when a 0.9-microm thick silicon-nitride support layer is removed.     

AlN薄膜体声波谐振器研究

采用一维Mason模型,研究了体声波谐振器的频率特性,探讨了压电薄膜AlN和上电极膜厚对谐振频率的影响,压电参数d33及压电薄膜与电极的厚度比率对机电耦合系数的影响,同时研究了谐振区域的面积和声能在衬底中的损耗对品质因数的影响.测量的体声波谐振器频率特性曲线与模拟结果吻合的较好.     

Mode selection for a piezoelectric layer in a bulk-acoustic-wave composite acoustic resonator

An analysis is made of the mode selection for a thin piezoelectric layer in a bulk-acoustic-wave composite layered acoustic resonator by transformation of the impedance using a set of quarter-wave layers. Depending on the number of layers, the impedance of the substrate on which the piezoelectric layer is deposited may be abruptly increased or sharply reduced. This serves to simulate a “fixed” or “free” surface. As a result, a mechanically strong resonator structure is produced, operating at the natural frequencies of a thin piezoelectric layer. A numerical simulation is made of multilayer structures formed by alternating quarter-wave layers of LiNbO₃ and LiTaO₃. It is shown that if these layers are of micron thickness and there is a sufficiently large number of them, the acoustic properties of the substrate do not influence the frequency characteristics and Q factor of the thin piezoelectric vibrating layer in the microwave range. Pis’ma Zh. Tekh. Fiz. 23, 35–41 (October 12, 1997)     

Q-factor of acoustic modes of a solid-state resonator at low temperatures

The acoustic characteristics of a cylindrical sample made of an aluminum alloy (model of gravity detector) in the course of cooling to temperatures on the order of the boiling point of liquid helium are studied. A specialized cryostat with working chamber having a large volume is presented. The technique and results of measurements of the Q-factor of the longitudinal modes of a model weighing 8 kg are described. The results are extrapolated to a cryogenic variant of the OGRAN large-scale (2.3 tons) gravity detector.     

Measurement of evanescent wave properties of a bulk acoustic wave resonator

Acoustic wave fields in a thin-film bulk acoustic wave resonator are studied using a heterodyne laser interferometer. The measurement area is extended outside the active electrode region of the resonator, so that wave fields in both the active and surrounding regions can be characterized. At frequencies at which the region surrounding the resonator does not support laterally propagating acoustic waves, the analysis of the measurement data shows exponentially decaying amplitude fields outside the active resonator area, as suggested by theory. The magnitude of the imaginary wave vectors is determined by fitting an exponential function to the measured amplitude data, and thereby the experimentally determined dispersion diagram is extended into the region of imaginary wave numbers.     

一种带薄膜结构的Helmholtz腔声学超材料

为有效控制低频宽带噪声,设计了一种带薄膜结构的Helmholtz腔声学超材料。利用COMSOL软件对其透射特性进行详细分析,结果表明:不带膜的原本的Helmholtz腔结构其透射系数虽在低频范围内可以得到峰值,但其结构尺寸较大,且频带很窄,而文中设计的声学超材料结构的透射系数在低频范围可得到多个峰值,在相同结构尺寸下,与原本的Helmholtz腔结构相比,其固有频率向低频范围内偏移,因而提高了结构的低频隔声效果,拓宽了结构的隔声频率带宽。在此基础上进一步研究了声学超材料结构几何参数对透射系数的影响,优化了声学超材料的结构几何参数。     

Selective excitation of eigenmodes in a multilayer thin film resonator on bulk acoustic waves

We consider a method of control over the operating frequency of a resonator on bulk acoustic waves, which is based on the selective excitation of eigenmodes. The frequency switching is achieved by using several layers of a ferroelectric in the paraelectric state and applying a control voltage of appropriate magnitude and polarity to each layer. The principle of selectivity is formulated and the criterion function is defined, which ensure the most effective excitation of a selected eigenmode with the possible suppression of parasitic modes. An example of using this function for a resonator switched between four eigenmodes is presented.     

Ultra-miniature coupled resonator filter with single-layer acoustic coupler

Coupled resonator filters designed using a singlelayer coupler require coupling materials with an acoustic impedance less than 5.0 MRayl. Carbon-doped oxide, with an acoustic impedance of 4.8 MRayl and an acoustic attenuation of 200 to 600 dB/cm at 1 GHz, can be used as a single-layer coupler to produce a competitive 2-stage coupled resonator filter for cellular handset applications in the gigahertz frequency range. The electrical response of our filter is superior to that of coupled resonator filters using a traditional acoustic mirror as the coupling element. We present an ultra-miniature 0.58 mm x 0.38 mm coupled resonator filter operating at a frequency of 2.15 GHz.     

Internally excited acoustic resonator for photoacoustic trace detection

The quantum-cascade laser can be used as an infrared source for a small portable photoacoustic trace gas detector. The device that we describe uses a quantum-cascade laser without collimating optics mounted inside an acoustic resonator. The laser is positioned in the center of a longitudinal resonator at a pressure antinode and emits radiation along the length of the resonator exciting an axially symmetric longitudinal acoustic mode of an open-ended cylindrical resonator. Experiments are reported with an 8-microm, quasi-cw-modulated, room-temperature laser used to detect N2O.     

声表面波谐振器型振荡器的研制

本文介绍了金属条射栅双端对声表面波谐振器型的原理和结构特点，给出了一种采用声表面波谐振器稳频的低噪声，高稳定性的振荡器电路设计方案。对影响振荡器频率稳定度的因素进行了分析讨论，并探讨改善声表面波振荡器频率稳定性的方法。该声表面波谐振器的中心频率为１２０ＭＨｚ，无载Ｑｖ，大于２０，０００，插入损耗小于６．０ｄＢ，经测试，秒级频率稳定度为１０＾－１０数量级，在自由室温下的日平均波动为１０＾－６／ｄ数量     

双层穿孔板共振器的非线性声学特性研究

1引言穿孔板共振器由前面的穿孔面板和后面的空腔构成。在普通吸声材料不能胜任的高温高压等恶劣条件下,比如对飞机引擎、火箭发动机中的吸声处理,穿孔板共振器具有不可替代的作用。飞机引擎都将产生非常高的声压级,在高声压级下穿孔板共振器将产生非线性效应,即其声阻抗随声压级的变化而变化。     

A periodic structure mimics a metamaterial

We show that properties attributed to planar metamaterials that support resonances due to an appropriately shaped unit cell can also be identified in a medium that exhibits a resonance evoked by its period only. By choosing a subwavelength period, the effective material parameters of such a medium can be retrieved from the complex reflected and transmitted amplitude. The parameters exhibit Lorentzian line shapes in the spectral vicinity of the resonances associated with the period. If this material is stacked to form a three-dimensional medium, a stop gap is observed in transmission in the frequency range where the real part of one effective material parameter becomes negative. The resonance at the origin of the response is related to the excitation of a higher-order Bloch mode. Because their negligible excitation is a prerequisite for deriving effective material parameters, the analyzed structure mimics only the response of a metamaterial but cannot be regarded as a metamaterial.