Developing a novel tri-switch tactile probing structure and its measurement characteristics on micro-CMM

This paper describes a novel tri-switch tactile structure assembling process and its measurement characteristics on micro-CMM. After assembling micro-ruby ball-ended stylus tips on micro-EDM, the spherical stylus was glued onto the CMM’s probing head manually. A novel tri-switch contacting structure was proposed to trigger the electro signal while the stylus tip makes contact with a micro-object. The experimental results show that the uncertainty could be as small as 0.08 μm at same the point detected repeatedly in the vertical direction. The depth of micro-hole and the profile of spherical lens are also selectable by use of this tri-switch tactile structure. This novel low-cost tri-switch triggering system may have promising future use on micro-CMM probing heads to measure micro-products’ geometric profiles.     

Ball Tips of Micro/Nano Probing Systems: A Review

To satisfy the measuring demands for the micro components of the industry, micro/nano probing systems with various ball tips have been developed. However, most of them cannot be used to measure the real micro geometrical features high precisely because the parameters of the ball tips are not appropriate. The ball tips with a diameter of less than 100 μm, a sphericity and eccentricity of far less than 1 μm are required urgently. A review on the state-of-the-art of ball tips of micro/nano probing systems is presented. The material characteristics and geometric parameters of now available ball tips are introduced separately. The existing fabrication methods for the ball tips are demonstrated and summarized. The ball tips' future trends,which are smaller diameter, better sphericity and smaller eccentricity, are proposed in view of the practical requirements of high-precision measurement for micro geometrical features. Some challenges have to be faced in future, such as the promotion and high-precision measurement for the small ball tip's sphericity and eccentricity.Fusion method without the gravity effect when the molten ball tip solidifying is a more suitable way to fabricate a small diameter ball tip together with a shaft.     

Step height measurement of microscale thermoplastic polymer specimens using contact stylus profilometry

Quantitative characterisation of the dimensions of micro-scale polymer specimens imposes higher demands on stylus profilometry. Due to the weak and time-dependent mechanical properties of polymers, one of the main error sources within tactile dimensional measurement for polymeric structures comes from the surface deformation of specimens under stylus scanning with a certain probing force. In this paper, a practical elastic–viscoplastic model is proposed for modelling the (steady-state) polymer deformations during tactile surface scanning. To experimentally determine the viscous material properties of polymers necessary for the proposed analytical model, a stylus-profiling based methodology has been developed. The feasibility of the proposed methodology and a measurement error compensation model has been experimentally verified. Preliminary experimental investigation on measurement of polymeric step height specimens with currently available stylus profilometers demonstrates that the specimen deformation induced tactile measurement deviation can be evidently reduced.     

Review of size effects in micro electrical discharge machining

Electrical discharge machining (EDM) is one of the most promising non-traditional micro-scale machining methods. Because several operating parameters that are insignificant in macro EDM cannot be neglected during micro EDM process, models derived from the macro EDM process may be inappropriate at the micro scale. This paper contains a comprehensive review of size effects in traditional micro-machining and characteristics specific to micro EDM compared to macro EDM techniques. The very concept of size effects in micro EDM is thoroughly defined and three categories of effects are presented: material microstructure, processing parameter and thermal conduction size effects. Future potential research directions on the subject are also summarized. We assert that careful research and precise attention must be given to size effects in micro EDM. Size effect information especially benefits the machining speed and machining precision of micro EDM.     

Measuring external profiles of porous objects using CMM

Coordinate measuring machine (CMM) has been extensively used in surface measurement and inspection. CMM produces more accurate and reliable results compared with non-contact measurement devices, since CMM measures target surfaces in a tactile way and is not affected by surface reflection quality. However, when there is porosity on the outside surfaces, CMM measurement will have errors because part of the probing stylus will come into the porosity spaces. This paper presents a method of using CMM to measure external profiles of objects with external porosity spaces. The center of a CMM probing stylus will be compensated to avoid porosity spaces and located above external surface areas along surface normal directions. Such a probing strategy can be implemented in both computer-aided design (CAD)-guided mode and non-CAD-guided mode. When the CAD model is available, the probing styli are guided to approach the surface along its normal directions successively to identify and avoid porosity spaces. When the CAD model is unavailable, surface normal directions will be estimated first and then adjusted. The presented method is able to avoid porosity spaces in CMM measurement regardless of the availability of CAD models.     

Study of the EDM performance to produce a stable process and surface modification

In this work, the effect of pulse current and pulse duration in die-sinking electrical discharge machining (EDM) on the machining characteristics of Ti-6Al-4V alloy is studied. The EDM characteristics, including the electrode wear ratio (EWR), the material removal rate (MRR), and the surface roughness (SR), are used to measure the effect of machining. An increase in the intensity of the pulse current from 2.5 to 5 A produces a slow increase in EWR, MRR, and SR. An increase in the intensity of the pulse current from 5 to 7 A produces a rapid increase in EWR, MRR, and SR. Control charts are basic and powerful tools for controlling statistical processes and are widely used to monitor manufacturing processes and ensure good EDM quality. EWR, MRR, and SR are normal distributions, and the regression curves for the data are straight lines. All of the data points vary randomly around the centerline, which follows the Shewhart criteria and shows that the EDM process and product performance are under control and stable over time. After EDM, the surface exhibits an irregular fused structure, with pinholes, micro voids, globule debris, and many damaged surfaces. Oxygen plasma etching and surface modification after EDM reduce these surface defects, so finer and flatter surfaces can be achieved. Moreover, fatigue life can be enhanced.     

Study of the Batch Production of Micro Parts Using the EDM Process

The micro machining of copper plates by the electrical discharge machining (EDM) process is described. Tungsten carbide was selected as the material for the electrode. Experiments were carried out on a conventional CNC-EDM machine to investigate machining of micro holes, and micro slots. The results show that micro holes, and micro slots can be successfully processed on a conventional CNC-EDM machine. To improve the productivity of micro parts using the EDM process, a batch production method of micro EDM using multi-electrodes has been studied. A new technique for preparing multi-electrodes has been developed. Results also show that the batch production of micro parts using EDM is feasible and that the batch production of micro parts using EDM process with multi-electrodes is very effective.     

Effect of hybrid electrochemical smoothing–roller burnishing process parameters on roundness error and micro-hardness

In this paper, a novel finishing process, which integrates the merits of electrochemical smoothing (ECS) and roller burnishing (RB) for minimizing the roundness error and increasing surface micro-hardness of cylindrical parts, is proposed. Through simple equipment attachments, electrochemical smoothing–roller burnishing (ECS–RB) can follow the turning process on the same machine. To explore the optimum combinations of the ECS–RB process parameters in an efficient and quantitative manner, the experiments were designed on the basis of the response surface methodology technique. The effect of ECS–RB parameters, namely, burnishing force, applied voltage, inter-electrode gap, and workpiece rotational speed on the roundness error and surface micro-hardness was studied. From the multi-objective optimization, the optimal combination of parameter settings are burnishing force of 350 N, applied voltage of 8.2 V, inter-electrode gap of 2.75 mm, and rotational speed of 970 rpm for achieving the required lower roundness error and higher surface micro-hardness. Surface micro-hardness considerably increases about 31.5% compared to the initial surface micro-hardness, and about 2.32 μm roundness error can be achieved using the optimum combination of process parameters. Therefore, the combination of ECS and RB is a feasible process by which it potentially reduces roundness error and surface micro-hardness of axis-symmetric parts improving their reliability and wear resistance.     

On-machine profile measurement of a micro cutting edge by using a contact-type compact probe unit

A new contact-type on-machine measurement system is designed and developed for the evaluation of a micro cutting edge profile. The measurement system is composed of a compact probe unit having a sharp stylus mounted on a flexible beam, an inner displacement sensor for the detection of the stylus displacement, and a two-axis precision positioning system. For the evaluation of tool faces having a steep slope, a new probing procedure with the enhancement of the inner displacement sensor integrated into the probe unit is newly proposed. After the design and development of the probe unit, the feasibilities of the developed measurement system and the proposed probing procedure are demonstrated through some basic experiments. Regarding the out-of-straightness and angular error motion of the two-axis positioning system employed in the developed measurement system, a pair of length gauges is newly employed to reduce the influences of error motions of the stage system. The topographic profile of the micro cutting edge obtained by the measurement system with the modified probe unit is then compared with those obtained by a commercial stylus profiler and a laser confocal microscope. The feasibility and effectiveness of the developed on-machine tool edge profile measurement system are also demonstrated through uncertainty analysis based on the GUM with the Monte-Carlo method.     

微硅加速度计中静电键合封接技术的应用

在微硅加速度计的研制中,静电键合具有传统胶接技术所无法比拟的优点,是目前该加速度计研制中广泛应用的粘接技术。叙述了静电键合技术的机理和它在微硅加速度计装配中的具体工艺流程,指明了技术的关键之处,并分析了该技术的优缺点,提出了进一步改进的方案。     

Experimental research on electrical discharge machining characteristics of engineering ceramics with different electrical resistivities

Electrical discharge machining (EDM) is the extensively used nonconventional material removal process for machining engineering ceramics provided they are electrically conductive. However, the electrical resistivity of the popular engineering ceramics is higher, and there has been no research on the relationship between the EDM parameters and the electrical resistivity of the engineering ceramics that can be machined effectively by EDM. This paper investigates the effects of the electrical resistivity and the EDM parameters on the EDM performance of ZnO/Al₂O₃ ceramic in terms of the machining efficiency and the quality. The experimental results showed that the electrical resistivity and the EDM parameters such as pulse on-time, pulse off-time, and peak current had the great influence on the machining efficiency and the quality during electrical discharge machining of ZnO/Al₂O₃ ceramic. Moreover, the electrical resistivity of the ZnO/Al₂O₃ ceramic, which could be effectively machined by EDM, increased with increasing the pulse on-time and peak current and with decreasing the pulse off-time, respectively. Furthermore, the ZnO/Al₂O₃ ceramic with the electrical resistivity up to 3,410 Ω cm could be effectively machined by EDM with the appropriate machining condition.     

EXPERIMENTAL INVESTIGATIONS INTO THE INFLUENCE OF MAJOR OPERATING PARAMETERS DURING MICRO-ELECTRO DISCHARGE DRILLING OF CEMENTED CARBIDE

Present study investigates the influence of major operating parameters on the performance of micro-EDM drilling of cemented carbide (WC-10wt%Co) and identifies the ideal values for improved performance. The operating parameters studied were electrode polarity, gap voltage, resistance, peak current, pulse duration, pulse interval, duty ratio, electrode rotational speed and EDM speed. The performance of micro-EDM drilling process was evaluated by machining time, material removal rate (MRR), relative electrode wear ratio (RWR), spark gap, surface finish and dimensional accuracy of micro-holes. It has been found that there are two major conflicting issues in the micro-EDM of carbide. If the primary objective is to obtain better surface finish, it can be obtained by the sacrifice of high machining time, low MRR and high RWR. However, for faster micro-EDM, the surface roughness is higher and electrode wear is again much higher. It is concluded that negative electrode polarity, gap voltage of 120 V, resistance of 33 Ω, peak current of 8 A, pulse duration of 21 μs, pulse interval of 30 μs, duty cycle of 0.47, electrode rotational speed of 700 rpm and EDM speed of 10 μm/s can be considered as ideal parameters to provide improved performances during the micro-EDM of WC-Co.     

Surface quality improvement of EDMed Ti–6Al–4V alloy using plasma etching and TiN coating

This paper seeks to improve the surface quality of electrical discharge machining (EDM) Ti–6Al–4V using plasma etching treatment and TiN coating. The EDM parameter setting is optimized firstly based on grey-Taguchi method. Four EDM parameters, including current (A), voltage (V), pulse duration (μs), and duty factor (%), are selected for multiple performance of lower electrode wear rate (EWR), higher material removal rate (MRR), and better surface roughness (SR). An orthogonal array, signal-to-noise (S/N) ratios, and analysis of variance (ANOVA) are used to analyze the effects of these EDM parameters. Normality tests show that all the distributions fit normality assumption with p?=?0.276, 0.688, and 0.663, respectively. The EDM process is stable over time monitored by Shewhart control charts. It is observed that there is an EDM damaged layer on the surface consisting of debris, microcracks, molten drops, and solidified metals by scanning electron microscopy. The plasma etching and TiN coating are employed to improve surface quality of the EDMed Ti–6Al–4V alloys. The results demonstrate that using the oxygen plasma etching treatment, the damaged phenomena are decreased, and the mean SR value is reduced from Ra?=?2.91 to Ra?=?2.50 μm. In addition, when the plasma-treated alloy is coated with Ti buffer/TiN coating by physical vapor deposition, the surface morphology exhibits less defects and a better surface finish. The mean SR values are further reduced from Ra?=?2.50 μm to Ra?=?1.48 μm (for 740 nm TiN film) and Ra?=?0.61 μm (for 1450 nm TiN film), respectively.     

RESEARCH OF MICRO ELECTRO DISCHARGE MACHINING EQUIPMENT AND PROCESS TECHNIQUES

Micro electro discharge machining (micro EDM) is a feasible way to manufacture micro structures and has potential application in advanced industrial fields. For the realization of micro EDM, it is necessary to pay careful attention to its equipment design and the development of process techniques. The present status of research and development of micro EDM equipment and process techniques is overviewed. A micro electro discharge machine incorporated with an inchworm type of micro feed mechanism is introduced, and a micro electro discharge machine for drilling micro holes suitable to industrial use is also introduced. Some of the machining experiments carried out on the micro EDM prototypes are shown and the feasibility of the micro EDM technology to practical use is discussed.     

Characteristic investigation of pipe cutting technology based on electro-discharge machining

Pipe cutting technology plays an important role in the process of offshore platforms decommissioning, as many devices such as tubing, drill pipe, and casing need to be decommissioned. In this study, a novel cutting pipe technology based on electro-discharge machining (EDM) is proposed, and a cutting pipe mechanism is developed to cut the pipes for decommissioning offshore platforms. The machining principles and characteristics of the technique are described. The effects of machining parameters, including tool polarity, dielectric fluid, electrode material and width, pulse on-time, pulse off-time, peak voltage, and electrode rotation speed to machining performance, are investigated. The material removal rate (MRR) of the machined casing and tool electrode wear ratio (EWR) is obtained based on the calculation of the percentage of mass loss per machining time. The experimental results show that a better cutting performance can be obtained with negative tool polarity at the conditions of dielectric fluid of emulsion, pulse on-time of 500 μs, pulse off-time of 200 μs, peak voltage of 70 V, copper electrode width of 28 mm, and electrode rotation speed of 250 rpm is a better choice. Additionally, the cutting slots surface has been investigated by the means of SEM. The cutting slots machined by the rotary EDM are clean and smooth.     

微细电火花加工中电极材料的蚀除机理研究

在微细电火花加工过程中 ,由于放电时间极短 ,使得其阴阳两极的电极材料蚀除过程产生较大的差异。本文应用传热学和电场的基本理论 ,分别对微细电火花加工阴阳两极的材料蚀除机理进行了理论研究 ,得出了在窄脉宽微细电火花加工中 ,尽量缩短脉宽可提高阳极材料的去除效率 ,同时又不会明显增加阴极材料损耗的结论。为微细电火花加工脉冲电源设计及加工工艺的改进提供了理论依据     

Microscale Friction Behaviour of Single Crystal Si (111) When Rubbed with Diamond Spherical and Conical Styli

An experimental study is described of the friction behaviour of samples of single crystal Si (111) when they were rubbed with diamond spherical (radius of 0.18 mm) and conical styli of included angles of 120° and 136°. Several techniques were used including (1) a reciprocating friction machine, (2) Raman spectroscopy and (3) environmental scanning electron microscopy. Friction force was measured for a constant relative speed of 0.22 mm s^?1 between the rubbing stylus and the substrate. The normal load on the stylus was varied in the range 100–500 mN. In the case of the spherical stylus, the coefficient of friction was in the range 0.03–0.08, whereas for the conical styli, it was up to ten times higher, but it varied with the number of friction cycles. Raman spectroscopy revealed that in all cases, structural phase transitions of the silicon had occurred in the friction tracks and both amorphous silicon and Si-III phases were found. Environmental scanning electron microscope showed no debris in the friction tracks produced by the spherical stylus, whereas a considerable amount of debris was found within the friction tracks produced by the conical styli. This debris has been shown to be responsible for the gradual decrease in the coefficient of friction with increasing number of friction cycles. Calculations of the frictional heating between the spherical stylus and the Si (111) substrate have shown that only a negligible interfacial temperature rise would occur. It has been suggested that, in the absence of ploughing, the coefficient of friction between the spherical stylus and the Si (111) substrate is controlled by the adhesion between the two surfaces, whereas the very initial coefficient of friction between the conical styli and the Si (111) substrate is controlled by the ploughing process.     

Investigating and removing the re-sticky debris on tungsten carbide in electrical discharge machining

Electrical discharge machining (EDM) is an excellent method to machine tungsten carbide with high hardness and high toughness. However, debris from this material produced by EDM re-sticking on the workpiece surface remarkably affects working efficiency and dimension precision. Therefore, this study investigated the re-sticky phenomenon of tungsten carbide and how to reduce the debris re-sticking on the workpiece surface. In general, the polarity in EDM depended on the different electrical parameters of the machine input and the different materials of the tool electrode. The first item of investigation observed the re-sticky position of the debris to study the effect of different polarities during the EDM process. Next, the tool electrode was set at different conditions without rotation and with a 200 rpm rotational speed to evaluate the rotating effect in EDM. Finally, different lift distances of the electrode and different shapes of electrode with rotation were utilized to investigate the improvement for reducing debris re-sticking on the machining surface. The results showed that only negative polarity in EDM could cause the re-sticky phenomenon on tungsten carbide. On the other hand, debris would notably re-stick on any machining position when the tool electrode was not rotated in EDM. Besides, debris significantly stuck on the center of the working area with rotation of the electrode. Additionally, a larger lift distance of the tool electrode could reduce debris re-sticking on the working surface, but this process would decrease material removal rate in EDM. In the end, a special shaped design of the tool electrode resulted in the re-sticky debris completely vanishing, when the electrode width was 0.6 times the diameter of this cylindrical electrode.     

An experimental investigation of cylindrical wire electrical discharge turning process

The cylindrical wire electrical discharge turning (CWEDT) process was developed to generate precise cylindrical forms on hard, difficult to machine materials. A precise, flexible, and corrosion-resistant submerged rotary spindle was designed and added to a conventional five-axis CNC wire electrical discharge machine (EDM) to enable the generation of free-form cylindrical geometries. The hardness and strength of the work material are no longer the dominating factors that affect the tool wear and hinder the machining process. In this study, the effect of machining parameters on surface roughness (R _a) and roundness in cylindrical CWEDT of a AISI D3 tool steel is investigated. The selection of this material was made taking into account its wide range of applications in tools, dies, and molds and in industries such as punching, tapping, reaming, and so on in cylindrical forms. Surface roughness and roundness are chosen as two of the machining performances to verify the process. In addition, power, pulse off-time, voltage, and spindle rotational speed are adopted for evaluation by full factorial design of experiments. In this case, a 2²?×?3² mixed full factorial design has been selected considering the number of factors used in the present study. The main effects of factors and interactions were considered in this paper, and regression equations were derived using response surface methodology. Finally, the surfaces of the CWEDT parts were examined using scanning electron microscopy (SEM) to identify the macro-ridges and craters on the surface. Cross sections of the EDM parts were examined using the SEM and microhardness tests to quantify the sub-surface recast layers and heat-affected zones under specific process parameters.     

Form Error Characterisation by an Optical Profiler

Form errors are deviations of the machined surface from the geometrical surface excluding position errors, waviness and roughness. From a functional point of view, as for surface roughness, form error characterisation is also important. In the present work, an optical profiler is used to measure and numerically characterise form errors such as roundness and cylindricity of cylindrical surfaces. A double orientation method using mean value analysis has been applied to separate the workpiece error from the spindle error during roundness measurement. Software is developed for data generation, fitting the reference data for assessing form errors in terms of statistical and functional parameters including new parameters. An optical profiler measures all the surface irregularities and hence can be used to study both micro and macro errors of the profile measured. A study of both roughness and roundness parameters along the circumferential direction is made for the unfiltered signal using different filter cut-off values. It is known that filtering greatly affects the value of the form error parameters measured. The form measurements obtained by the optical profiler are compared with the stylus profiler and the results are presented.