微操作机器人显微视觉系统的研究

本文深入研究了基于生物工程领域显微视觉系统的设计方法．给出了微操作物体平面坐标及微机器人手端位姿的求取方法；提出了基于载物台平动测量微操作物体的高度及微机器人做三维空间已知运动标定出微机器人手端在摄像机坐标系的坐标，进而确定微机器人手端与微操作物体之间位置关系的单目视觉方案．采用两步法对显微视觉系统进行了标定．实验证明该系统运行可靠，达到显微操作的要求．     

Design,fabrication, and testing of a 3-DOF HARM micromanipulator on (1 1 1) silicon substrate

In this study, a novel HARM (high aspect ratio micromachining) micromanipulator fabricated on (1 1 1) silicon wafer is reported. The micromanipulator consists of a positioning stage, a robot arm, supporting platforms, conducting wires, and bonding pads. These components are monolithically integrated on a chip through the presented processes. The three-degrees-of-freedom (3-DOF) positioning of the micromanipulator is realized by using the integration of two linear comb actuators and a vertical comb actuator. The robot arm is used to manipulate samples with dimension in the order of several microns to several hundred microns, for instance, optical fibers and biological samples. The robot arm could be a gripper, a needle, a probe, or even a pipette. Since the micromanipulator is made of single crystal silicon, it has superior mechanical properties. A micro gripper has also been successfully designed and fabricated.     

Gradually tapered light pipes for illumination of LED projectors

Abstract— LEDs are totally different from classical light sources: they have a different shape, radiation pattern, driving requirements, etc. Therefore, the illumination engine, which determines the brightness and uniformity of the system, has to be redesigned for LED‐based projectors. A compact illumination system based on gradually tapered light pipes (GTLP) will be presented. The GTLP collects, reshapes, and uniformizes the light flux from the LED to illuminate the light‐valve uniformly. The design and the simulations have been completed. The result is a uniformly illuminated rectangular beam at the end of the pipe with an efficiency of 81.1%. Afterwards, the light pipe was fabricated, and the experimentally measured efficiency is 76.9%, which demonstrates a successful manufacturing process. Finally, two recycling techniques to enhance the brightness have been applied and these enhancements were experimentally observed.     

Design, Fabrication, and Visual Servo Control of an XY Parallel Micromanipulator With Piezo-Actuation

This paper presents a complete design and development procedure of a new XY micromanipulator for two-dimensional (2-D) micromanipulation applications. The manipulator possesses both a nearly decoupled motion and a simple structure, which is featured with parallel-kinematic architecture, flexure hinge-based joints, and piezoelectric actuation. Based on pseudo-rigid-body (PRB) simplification approach, the mathematical models predicting kinematics, statics, and dynamics of the XY stage have been obtained, which are verified by the finite-element analysis (FEA) and then integrated into dimension optimization via the particle swarm optimization (PSO) method. Moreover, a prototype of the micromanipulator is fabricated and calibrated using a microscope vision system, and visual servo control employing a modified PD controller is implemented for the accuracy improvement. The experiments discover that a workspace size of 260 mum times 260 mum with a 2-D positioning accuracy and repeatability around 0.73 and 1.02 mum, respectively, can be achieved by the micromanipulator.     

High-throughput microcapillary pump with efficient integrated low aspect ratio micropillars

Prediction and reduction of pressure drop and resistance flow in micropillar arrays are important for the design of microfluidic circuits used in different lab-on-a-chip and biomedical applications. In this work, a diamond microchannel-integrated micropillar pump (dMIMP) with a resistance flow 35.5 % lower than a circular-based micropillar pump (cMIMP) has been developed via the optimization of the fluid dynamic behavior of different pillar shapes in a low aspect ratio (H/D ranged from 0.06 to 0.2) integrated pillar microchannel. The effect of different geometrical parameters (such as pillar shape and its distribution) has been considered to minimize the microchannel resistance flow. Six-micrometer-depth polidimetilsiloxane (PDMS) channels have been fabricated using a modified soft lithography process, which prevents the PDMS deformation under high-pressure operation. Flow through the fabricated samples has been numerically solved and experimentally measured, with an agreement higher than 90 %. The results have been used to validate the derived analytical formulation to determine the flow resistance in this type of channels, a fast approach to obtain the resistance flow in the design stage of microdevices. The analysis of the results indicates that, although porosity can be a determinant parameter to predict the resistance flow of MIMP, other geometrical parameters such as side distance between pillars and pillar shape play a major role in this scenario. Finally, a high-throughput optimized diamond MIMP pump has been designed, tested and validated as a capillary pump, showing that it can provide a flow rate 73 % higher than a circular MIMP pump.     

Realisation and characterisation of mass-based diamond micro-transducers working in dynamic mode

We report on novel MEMS micro-transducers made of diamond and targeted for bio-sensing applications. To overcome the non-straightforward micromachining of diamond, we developed a bottom up process for the fabrication of synthetic diamond micro-structures involving the patterned growth of diamond using the CVD (chemical vapour deposition) technique, inside micro-machined silicon moulds. Here typical resonant MEMS structures including cantilevers fabricated using this method were characterized by measuring their first mode resonance (frequency and Q-factor) by Doppler laser interferometry. The experimental data matched the simulation data. Data from bare diamond cantilevers and from diamond cantilevers with actuation gold track on the surface were compared and showed a significant decrease in the resonant frequency in the presence of gold tracks. Nevertheless, comparisons with equivalent silicon structures demonstrated the superior performances of diamond cantilevers: the resonance frequencies were twice higher and the Q-factors 2.5 times higher for the diamond transducers. Diamond cantilevers sensitivity were measured using PMMA deposition and values as high as 227.4 Hz ng⁻¹ were found. It was shown that diamond mass sensitivity values are typically two times higher than identical silicon devices. Finally, the limit of detection (LOD) of diamond cantilevers was found experimentally to be as low as 0.86 pg using our set up. This is suitable for many bio-sensing applications.     

Micromachining of diamond film for MEMS applications

We realized two diamond microdevices: a movable diamond microgripper and a diamond probe for an atomic force microscope (AFM), consisting of a V-shaped diamond cantilever and a pyramidal diamond tip, using a microfabrication technique employing semiconductive chemical-vapor-deposited diamond thin film. The microgripper was fabricated by patterning the diamond thin film onto a sacrificial SiO ₂ layer by selective deposition and releasing the movable parts by sacrificial layer etching. The diamond AFM probe was fabricated by combining selective deposition for patterning a diamond cantilever with a mold technique on an Si substrate for producing a pyramidal diamond tip. The cantilever was then released by removing the substrate. We report the initial results obtained in AFM measurements taken using the fabricated diamond probe. These results indicate that this diamond probe is capable of measuring AFM images. In addition, we have developed the anodic bonding of diamond thin film to glass using Al or Ti film as an intermediate layer for assembly. This bonding technique will allow diamond microstructures to be used in many novel applications for microelectromechanical systems     

Fabrication of X-rays mask with carbon membrane for diffraction gratings

We have produced diffraction gratings for obtaining high resolution X-ray phase imaging, such as X-ray Talbot interferometer. These diffraction gratings were required to have a fine, high accuracy, high aspect ratio structure. Therefore, we decided to use the X-rays lithography technique that used synchrotron radiation of the directivity for a manufacture process. The accuracy of the completed structure depends largely on the accuracy of the X-ray mask. In our group, a resin material is conventionally used for the membrane of large X-ray masks. However, X-ray masks comprising a resin membrane have the disadvantage that, after several cycles of X-ray exposure, they crease and sag due to X-ray-derived heat. As a substitute for the conventional resin membrane, we experimentally fabricated a new X-ray mask using a carbon wafer membrane. The newly fabricated X-ray mask was subjected to X-ray exposure experiment. We succeeded in making the structure body which was almost shape. And the experimental results verified that the new mask did not deteriorate even when used repeatedly, demonstrating that it was highly durable.     

A feature based shape optimization technique for the configuration and parametric design of flat plates

A new feature based shape optimization technique is presented that is capable of modifying the topology (configuration) and shape to reduce the area of 2-D components based on the stress distribution in the component. Shape optimization attempts to maximize material usage to achieve a uniform stress distribution near the allowable limit of the material. Features can be added to the component, or can be modified, in order to optimize the material usage. By using features as a basis for shape modification, the problem of component connectivity can be handled in a consistent, intelligent manner, and the problem of smoothness is eliminated. A program was written to implement the optimization technique and was applied to two example problems, including one from the literature that used a different modification technique. The other example illustrates shape modification capabilities with more complicated geometry. Results from both examples are compared to results obtained using other topological modification techniques.     

基于关节转角估计器的绳驱动手术微器械位置全闭环控制

手术机器人微器械末端空间狭小,无法安装角度检测传感器,不能进行位置全闭环控制．针对这个问题,提出了一种基于关节转角估计器的闭环控制方法．首先设计了4自由度微器械驱动方案,搭建了手术机器人微器械单关节原理样机实验系统,并基于绳驱动系统的动力学分析设计了关节转角估计器．利用动力学参数辨识的方法给出了关节转角估计器的参数,并通过实验数据分析给出了转角估计器的简化和修正模型．实验结果说明关节转角估计器的输出精度可以达到0.38°．最后以转角估计器的输出值作为反馈信号对微器械关节转角进行了闭环控制实验．结果表明,当系统自由运动时微器械关节转角的最大跟随误差为0.734°;当微器械末端加载1.5N的外力时,关节转角估计器的精度是0.59°,最大跟随误差是1.112°．这些说明本文提出的关节转角闭环控制方法具有比较高的控制精度．     

Predictions of the minimum relative depth of die cavity and the minimum amount of preforming in the radial extrusion of tubular components

In this study, both the minimum relative depth of die cavity and the minimum amount required in preforming are determined to produce a defect-free product of tubular component in the preforming technique of radial extrusion. This scheme is based on the least amount of material dissipation in radial extrusion of tubular component. A finite element based code is utilized to investigate the effects of various amount of relative deformation and different relative depths of die cavity on the material flow characteristics resulting in the movements of the defects locations. An algorithm is thus developed for the determination of minimum relative depth of die cavity and the minimum amount required in preforming, and the abductive network is also applied to synthesize the data sets obtained from the numerical simulations through the algorithm proposed in this study. Consequently, a prediction model is established for organizing the minimum relative depth of die cavity and the related minimum amount of preforming of the tubular component that the locations of induced defects are just coincided with the inner surface of the tube at the end stroke of deformation.     

Combined shape and reinforcement layout optimization of shell structures

This paper presents a combined shape and reinforcement layout optimization method of shell structures. The approach described in this work is applied to optimize simultaneously the geometry of the shell mid-plane as well as the layout of surface stiffeners on the shell. This formulation involves a variable ground structure, since the shape of the shell surface is modified in the course of the process. Here we shall consider a global structural design criterion, namely the compliance of the structure, following basically the classical problem of distributing a limited amount of material in the most favourable way.The solution to the problem is based on a finite element discretization of the design domain. The material within each of the elements is modelled by a second-rank layered Mindlin plate microstructure. By a simple modification, this type of microstructure can be used to find the optimum distribution of stiffeners on shell structures. The effective stiffness properties are computed analytically through a smear-out procedure. The proposed method has been implemented into a general optimization software called Odessy and satisfactorily applied to the solution of some numerical examples, which are illustrated at the end of the paper.     

Fabrication and micromechanical characterization of polycrystalline diamond microcantilevers

The exceptional chemical, mechanical and thermal properties of diamond make this material the ideal choice for resonant MEMS. Micro-cantilevers designed for biochemical applications have been fabricated using CVD diamond. In this work, the mechanical properties of these cantilevers were investigated by two different techniques: bending test using a Contact Surface Profilometer and resonant test, using a Laser Doppler Vibrometer. The Young’s Modulus of diamond thin film was estimated by these two tests. For the resonance test, the estimated values are comprised between 930 and 1300 GPa while bending test gives values between 950 and 1030 GPa. The load–displacement characteristics and the fracture point (or ultimate stress) have also been investigated.     

Flexible Dome and Bump Shape Piezoelectric Tactile Sensors Using PVDF-TrFE Copolymer

In this paper, a new mold-transfer method to pattern piezoelectric polymer has been developed and applied to fabricate innovative dome and bump shape polyvinylidene-fluoride-trifluoroethylene (PVDF-TrFE) films. The dome and bump shape PVDF-TrFE films have been successfully fabricated and characterized as a sensing component for flexible tactile sensors. The tactile sensors developed using these polymer microstructures show a high sensitivity which can measure as small as 40 mN force for bump shape sensors and 25 mN for dome shape sensors. The newly developed fabrication method provides a flexible way to pattern the piezoelectric polymer with different shapes and dimensions, including bump and dome shape piezoelectric polymer microstructures. In addition, a selective dc poling method for the PVDF-TrFE film has been developed for fabricating precisely located piezoelectric sensors with minimum crosstalk. The bump and dome shape PVDF-TrFE films developed in this paper can have numerous applications for microcatheters or other minimally invasive biomedical devices.     

SMA驱动的微型平面关节机器人的研究

近年来，利用形状记忆合金（ＳＭＡ）的形状记忆效应原理制作的驱动器已在机器人领域中得到应用，ＳＭＡ驱动器以其重量轻、结构紧凑、易控制等优点，大大推动了微型机器人的发展．本课题使用所研制的推挽式直线位移型和旋转关节型ＳＭＡ驱动器代替传统的伺服驱动系统，研制了一台三自由度（两个旋转自由度和一个直线自由度）且带末端夹持器的微型平面关节机器人．本文将介绍该机器人的结构设计，控制系统及其软件设计．     

Shape memory microactuators

 Since shape memory alloys have been recognized to be a smart material, actuator elements based on the shape memory effect have been increasingly used in various fields of application. This paper reports on the design and fabrication of several silicon microactuators driven by shape memory elements, namely mechanical microgrippers, microvalves and artificial muscle actuators. The actuators were designed as compliant mechanisms and fabricated by silicon micromachining. For the processing of the shape memory elements a new laser assisted technology was applied. The shape memory elements were connected to the silicon mechanisms either by positive joining or by adhesive bonding.     

Effects of microstructure of films on CVD diamond X-ray detectors

Although the unique properties of chemical vapor deposition (CVD) diamond films have made it a candidate material for radiation detectors, the polycrystalline nature of the films has severely limited the development of CVD diamond detectors. In this work, three CVD diamond films with different microstructure were grown by using a hot-filament chemical vapor deposition (HFCVD) technique and were fabricated as CVD diamond detectors. The electric contact is good ohmic for bias voltage up to 150 V. 5.9 keV ⁵⁵Fe X-ray was used to measure the photocurrent and the pulse height distribution (PHD). For the detector based on the best quality film, the dark-current of 16.0 nA and the net photocurrent of 15.9 nA are obtained at an electric field of 50 kV cm⁻¹. The PHD peak is well separated from the noise pedestal, indicating a high counting efficiency and a low detection limit.     

Ultimate strength analysis of structural components using the continuum damage mechanics approach

In this study, an analytical model is developed to include the effect of material fracture on the overall behavior of a structure. The continuum damage mechanics approach is used to describe the continuous deterioration of the material stiffness that leads to total failure. The damage evolution is assumed to be anisotropic and the effect of the triaxiality of stress on the fracture criterion is included in the analysis. The above modifications were applied to an existing finite element program which is capable of including both geometric and material nonlinearities in the analysis. The program was used to analyze a welded tubular connection (T-joint). This joint was chosen because fracture was shown experimentally to control its ultimate behavior. Solid finite elements were used to model the chord and the branch in the intersection region, wedge elements were used for the weld profile, and the rest of the geometry was modeled using shell elements. The joint was subjected to an increasing amount of displacement at the far end of the branch. The loading was continued until total failure. During this process, the evolution of the damage and its propagation were monitored. Divergence of the solution was obtained at a failure load of 42.4 kips compared to 44.0 kips obtained experimentally. In addition, the failure mode of the joint predicted by the analysis was identical to that observed experimentally.     

Fabrication of diamond micro tools for ultra precision machining

State of the art diamond tools for metal-cutting manufacturing are handcrafted by polishing and grinding of natural diamonds. Tools fabricated by these means are serially made unique copies with a limited variety of shapes. Furthermore, manual fabrication leads to deviation from ideal geometry. We present a novel technique for parallel fabrication of diamond micro tools with high contour accuracy by using lithographic methods followed by a modified ASE-process.