Comparison between ST-cut quartz 25 degrees and -60 degrees NSPUDT propagation directions

This paper discusses directivity and other propagation properties of natural single phase unidirectional transducer (NSPUDT) propagation directions on ST-cut quartz. The work focuses on the comparison of surface acoustic wave (SAW) directivity and propagation properties between the ST-cut quartz -60°, Euler angles: (0°, 132.75°, -60°), and the ST-cut quartz 25°, Euler angles: (0°, 132.75°, 25°), NSPUDT propagation directions, including predicted and measured directivity responses for both propagation directions. The well-known SAW 25° propagation direction is used for low loss, high performance SAW filter designs for consumer products and communications applications. The ST-cut quartz -60° propagation direction has been predicted to have a reflection coefficient 2.5 times larger than ST-cut quartz 25°. In addition the ST-cut quartz -60° satisfied the NSPUDT 90° reflection coefficient phase condition much more closely, resulting in an improved directivity response. For the delay line structures used in the experiments, the measured directivity is 10.1 dB for the -60° propagation direction. For the same structures, the measured directivity along the 25° propagation direction is about 5.0 dB. The experimental results given in this paper verify that indeed ST-cut quartz -60° has a higher directivity than ST-cut quartz 25°, confirming the theoretical predictions. In addition, this work compares other propagation properties for both directions, namely, phase velocities, electromechanical couplings, temperature coefficients of delay, power flow angles, and metallic strip reflection coefficient amplitudes and phases     

Optimal cuts of langasite, La3Ga5SiO14 for SAW devices

The results of a theoretical and experimental investigation of the SAW propagation characteristics in an optimal region of langasite defined by the Euler angles φ from -15° to +10°, &thetas; from 120° to 165°, and ψ from 20° to 45° are presented. Based on temperature coefficients of the elastic constants derived from experimental data, some optimal orientations of langasite characterized by high electromechanical coupling factor (k²), zero power flow angle (PFA) and low or zero temperature coefficient of frequency (TCF) were found. The SAW velocity in the region of interest is highly anisotropic; this results in a significant amount of diffraction, which must be taken into account in the search for orientations useful for SAW devices. An orientation having simultaneously zero PFA, zero TCF, negligible diffraction, and relatively high piezoelectric coupling has been found and verified experimentally. The experimental results are in excellent agreement with the calculated SAW characteristics. The frequency response of a SAW device fabricated on the optimal cut of langasite is presented and demonstrates that high performance SAW filters can be realized on this optimal cut of langasite     

Surface and pseudo surface acoustic waves in langatate: predictions and measurements

Langatate (LGT, La/sub 3/Ga/sub 5.5/Ta/sub 0.5/O/sub 14/) is a recent addition to materials of the trigonal crystal class 32. In this paper SAW contour plots of the phase velocity (v/sub p/), the electromechanical coupling coefficient (K/sup 2/), the temperature coefficient of delay (TCD), and the power flow angle (PFA), are given showing the orientations in space in which high coupling is obtained, with the corresponding TCD, PFA, and vp characteristics for these orientations. This work reports experimental results on the SAW temperature fractional frequency variation (/spl Delta/f/fo) and the TCD for several LGT orientations on the plane with Euler angles: (0/spl deg/, 132/spl deg/, /spl psi/). The temperature behavior has been measured directly on SAW wafers from 10 to 200/spl deg/C, and the results are compared with numerical predictions using our recently measured temperature coefficients for LGT material constants. This research also has uncovered temperature compensated orientations, which we have experimentally verified with parabolic behavior, turnover temperatures in the 130 to 160/spl deg/C range, and /spl Delta/f/fo within 1000 ppm variation from 10 to 260/spl deg/C, appropriate for higher temperature device applications. Regarding the pseudo surface acoustic waves (PSAWs), results of calculations are presented for both the PSAW and the high velocity PSAW (HVPSAW) for some selected, rotated cuts. This study shows that propagation losses for the PSAWs of about 0.01 dB/wavelength, and phase velocities approximately 20% higher than that of the SAW, exist along specific orientations for the PSAW, thus showing the potential for somewhat higher frequency SAW device applications on this material, if required.     

BAW temperature sensitivity and coupling in langanite

One of the new materials belonging to the trigonal class 32, to which quartz belongs, is langanite (LGN, La3Ga5.5Nb0.5O14). High-quality LGN single crystals are now available, and, although similar in composition and structure to langasite (LGS, La3Ga5SiO14), LGN has smaller thermal expansion coefficients and comparable piezoelectric constants to LGS. These are desirable material properties for both SAW and BAW applications that require low frequency dependence on temperature. This paper examines in detail the LGN characteristics: phase velocity, temperature coefficient of frequency (TCF), electromechanical coupling coefficient, and power flow angle for both singly and doubly rotated plate cuts. Contour plots of these characteristics are constructed, revealing orientation regions where zero TCF and high coupling exist and suggesting potentially interesting cuts for practical BAW device design. Temperature compensated cut regions with coupling coefficients as high as 0.16 are predicted, which is twice the value for AT-cut quartz, along with a temperature compensated cut with cubic behavior around room temperature for one of the sets of material constants used. With such desirable properties, LGN is a promising candidate material for BAW applications requiring low temperature sensitivity with superior bandwidth characteristics due to its values of coupling coefficient larger than quartz. Several other orientations with low TCF and high coupling are also identified.     

Design considerations on surface acoustic wave resonators with significant internal reflection in interdigital transducers

This paper discusses, both qualitatively and quantitatively, the operation and the design principle of current surface acoustic wave (SAW) resonators in which the internal reflection within interdigital transducers (IDTs) is not negligible and lower capacitance ratio is necessary. For the purpose, the p-matrix expression is used with the help of the coupling-of-modes theory. The internal reflection causes: deformation of the IDT passband shape, frequency dependence of the effective SAW velocity within IDTs, and suppression of higher-order resonances. It is shown that these features can be effectively used to enhance performances of both one-port SAW resonators and two-port double-mode SAW (DMS) filters. In addition, under proper designs accounting for the internal reflection, most of all structural discontinuities can be removed, and is most preferable for the reduced scattering loss at the discontinuity. Design criteria also are presented for DMS filters of wide bandwidth, and it is demonstrated how device performances are improved by proper design accounting for the criteria.     

Investigation on recent quartz-like materials for SAW applications

Recent progress in growing and characterizing quartz-like materials of the trigonal system class 32 has been reported by several groups. The promising perspective for bulk acoustic wave frequency control applications indicates the potentiality of employing these materials for SAW applications as well. This paper reports results of investigations focused on SAW orientations of langasite (LGS), gallium phosphate (GaPO(4)), and langanite (LGN), both singly and doubly rotated cuts. Among the characteristics explored, major attention is paid to the temperature coefficient of delay (TCD), the electromechanical coupling coefficient (K(2)), and the power flow angle (PFA). Contour graphs are plotted based on our calculated results and show the regions in space in which low TCD and high K(2 ) can be obtained; they also exhibit the associated PFA and phase velocity characteristics. The influence of different sets of material constants is addressed. The spatial investigation performed shows that there are promising orientation regions in these materials at which zero or reduced TCD (<10 ppm/ degrees C) and PFA are obtained. Additional attractive characteristics for SAW applications have been observed: values of K(2) a few times higher than the K(2) of quartz ST-X, thus finding applications in larger bandwidth devices; variation of the TCD with respect to temperature, which is comparable to the variation found for quartz ST-X and less than that for zero TCD Li (2)B(4)O(7) cuts like 45 degrees X-Z and (0 degrees 78 degrees 90 degrees ); and phase velocity values circa 13 to 26% smaller than the phase velocity of quartz ST-X thus allowing a reduction in size for intermediate frequency device applications.     

Application of synchronous two-port resonators for measurement of SAW parameters in piezoelectric crystals

The synchronous two-port resonator can be used for the determination of SAW parameters, including velocity, electromechanical coupling coefficient, and reflection coefficient of one strip. These parameters can be determined from a comparison between the measured and calculated transfer functions of the resonator. Using this technique, the SAW free surface velocity of the 45 degrees XZ-cut of lithium tetraborate (Li(2)B(4)O(7)) crystal was found to be equal to 3436 m/s. The other measured parameters agree well with the values found in the literature.     

Simulation of characteristics of a SiO2/c-axis-oriented LiNbO3/diamond surface acoustic wave

High-frequency surface acoustic wave (SAW) devices based on diamond that have been realized to date utilize c-axis-oriented ZnO as the piezoelectric thin film. This material, with SiO2 overlay, shows excellent characteristics of a high phase velocity of over 10,000 m/s and a zero temperature coefficient, and it has been successfully applied to high-frequency SAW filters and resonators. To expand on materials used on diamond, the theoretical calculation has been carried out for LiNbO3/diamond, and a high electromechanical coupling coefficient up to 9.0% is expected. In this work, the characteristics of SiO2/LiNbO3/diamond were studied by computer simulation, emphasizing a zero temperature coefficient with a high coupling coefficient. Calculations are carried out for the phase velocity, the electromechanical coupling coefficient, and the temperature coefficient of the Rayleigh wave and its higher mode Sezawa wave. As a result, SiO2/IDT/LiNbO3/diamond is found to offer a zero temperature coefficient with a very high coupling coefficient up to 10.1% in conjunction with a high phase velocity of 12,100 m/s.     

Fabrication of modified lead titanate piezoceramics with zero temperature coefficient and its application on SAW devices

The Samarium-modified, lead titanate ceramics with a composition of (Pb0.67Ca0.15Sr0.06Sm0.08) (Ti0.98Mn0.02)O3 were prepared by conventional mixed-oxide method. By properly varying the sintering and poling conditions, the samples with zero temperature coefficient of resonant frequency were fabricated. The piezoelectric and dielectric properties were measured; it showed that the samples with zero temperature coefficient still keep high-thickness, electromechanical coupling coefficient, kt (>0.55), and small planar electromechanical coupling coefficient, kp. Surface acoustic wave (SAW) filters were fabricated; and the properties, including phase velocity and electromechanical coupling coefficient, were measured. Microstructural and compositional analyses have been carried out using scanning electron microscopy and x-ray diffraction.     

High temperature stable GHz-range low-loss wide band transducersand filter using SiO2/LiNbO3, LiTaO3

GHz-range low-loss transducers and filters are required for communication systems, especially mobile telephone communication systems. Many types of low insertion-loss transducers and filters utilizing the high electromechanical coupling coefficient (K²) materials such as LiNbO₃ and LiTaO₃ have been developed. Unfortunately, these materials have large temperature coefficients of the frequency (TCF). In this paper, SAW substrates with high coupling coefficients and low propagation attenuations and small temperature coefficient of frequency in the GHz-range are theoretically and experimentally investigated. The experimental results show very low propagation loss of 0.02 dB/λ ₀ and larger K² than those of the substrates of LiNbO₃ and LiTaO₃ at the TCF of below -5 ppm/°C at 1~2 GHz-range. The low-loss filter results using internal reflection types of IDT show the insertion loss of about 2.9 dB at 1 GHz and 4.9 dB at 2 GHz under the TCF's of 0 and +20 ppm/°C. These materials are applicable for devices at GHz-range because SiO₂ thickness is very thin such as below 1 μm and the center frequency shift of the filter versus SiO₂ thickness is very small     

The effects of ZnO films on surface acoustic wave properties of modified lead titanate ceramic substrates

Poly-crystal zinc oxide (ZnO) films with c-axis (002) orientation have been successfully grown on the strontium (Sr) modified lead titanate ceramic substrates with different Sr dopants by r.f. magnetron sputtering technique. Highly oriented ZnO films with c-axis normal to the substrates can be obtained under a total pressure of 10 mTorr containing 50% argon and 50% oxygen and r.f. power of 70 W for 3 hours. Crystalline structures of the films were investigated by X-ray diffraction (XRD), scanning electron microscopy (SEM) and atomic force microscopy (AFM). The phase velocity, electromechanical coupling coefficient and temperature coefficient of frequency of surface acoustic wave (SAW) devices with ZnO/IDT/PT (IDT, inter-digital transducer; PT, PbTiO3 ceramics) structure were investigated. The devices with ZnO/IDT/PT structure shows that the ZnO film effectively raise the electromechanical coupling coefficient (kappa2) from 3.8% to 9.9% of the device with the concentrations of Sr dopants of 0.15. It also improves the temperature coefficient of frequency of SAW devices.     

Theoretical investigation of surface acoustic wave in the new, three-layered structure: ZnO/AlN/diamond

The new layered structure, ZnO/AlN/diamond, for surface acoustic wave (SAW) devices is investigated for gigahertz-band applications. This structure combines the advantages of both piezoelectric materials, with a high electromechanical coupling coefficient (K2) of ZnO and high acoustic velocity of AlN. Theoretical results show that Rayleigh mode SAWs with large phase velocities up to 12,200 m/s and large K2 from 1 to 3% were generated with this new structure.     

Simulation of characteristics of a LiNbO3/diamond surface acoustic wave

High-frequency surface acoustic wave (SAW) devices based on diamond that have been produced to date utilize the SiO2/ZnO/diamond structure, which shows excellent characteristics of a phase velocity of over 10,000 m/s with a zero temperature coefficient; this structure has been successfully applied to high-frequency narrowband filters and resonators. To expand material systems to wideband applications, c-axis-oriented LiNbO3 on diamond was studied and a coupling coefficient up to 9.0% was estimated to be obtained. In this paper, the characteristics of LiNbO3/diamond with the assumption that the LiNbO3 film is a single crystal have been studied by theoretical calculations to find higher coupling coefficient conditions. Calculations are made for the phase velocity, the coupling coefficient, and the temperature coefficient of the Rayleigh wave and its higher mode Sezawa waves. As a result, LiNbO3/diamond is found to offer a very high electromechanical coupling coefficient of up to 16% in conjunction with a high phase velocity of 12,600 m/s and a small temperature coefficient of 25 ppm/deg. This characteristic is suitable for wide bandwidth applications in high-frequency SAW devices.     

Resonator filters using shear horizontal-type leaky surface acoustic wave consisting of heavy-metal electrode and quartz substrate

The authors have succeeded in exciting a new type of leaky surface acoustic wave (LSAW) having only a shear horizontal (SH) component that has a large electromechanical coupling factor, a large reflection coefficient, and excellent temperature stability, by combining interdigital transducers (IDTs) and reflectors made of heavy-metal films such as gold (Au), tantalum (Ta), and tungsten (W) on the ST-cut 90/spl deg/ X propagation (direction perpendicular to the X-axis) quartz substrate. This LSAW does not have a propagation decay. The square of the electromechanical coupling factor is 2.1-2.7 times larger than, the reflection coefficient is 30 times larger than, and the temperature characteristic is the same as those of a Rayleigh wave on an ST-cut X propagation quartz substrate. The authors applied this SH LSAW to resonators and resonator filters. As a result, we succeeded in developing the low loss and very small-sized resonators and resonator filters (1/5-1/4 of conventional device sizes) with IDTs with a small number of finger pairs and very small reflectors, for the first time.     

Investigation on SAW properties of LGS and optimal cuts for high-temperature applications

A promising perspective for surface acoustic wave (SAW) device applications at high temperature has been opened by langasite (LGS). The SAW properties of LGS in singly and doubly rotated cuts at 250 degrees C are investigated. Three noticeable regions for SAW-cut orientations and propagation directions at high temperature are put forward and are defined by Euler angles [0 degrees, 20 degrees --> 50 degrees, 35 degrees --> 45 degrees], [0 degrees, 85 degrees --> 110 degrees, 0 degrees --> 5 degrees], and [0 degrees, 138 degrees --> 145 degrees, 20 degrees --> 23 degrees], respectively. The first region includes zero or comparatively reduced temperature coefficient of delay (TCD) (<2 ppm) and smaller electromechanical coupling factor (K2) (0.2%-0.35%); the second one exhibits higher K2 (0.35%-0.45%) and moderate TCD (<5 ppm); and the highest K2 (>0.45%) and larger TCD (25-30 ppm) characterize the last region. For some typical orientations within the above-mentioned three regions, the temperature dependency of SAW characteristics (up to 1000 degrees C) is discussed. The second region [0 degrees, 85 degrees --> 110 degrees, 0 degrees --> 5 degrees], especially the orientation [0 degrees, 90 degrees, 0 degrees], has better comprehensive characteristics of SAW and is more suitable for high-temperature applications. Therefore, we should give a top priority to the orientation [0 degrees, 90 degrees, 0 degrees] in the design of SAW devices operating at high temperature. Comparison between published experimental results and numerical predictions based on LGS constants and their temperature coefficients available in the literature reveals that the theoretical results of TCD under 250 degrees C are in agreement with the experimental ones (the relative error of TCD is within 10%).     

Medium-loss SAW filters with synthesized characteristics

Medium-loss surface acoustic wave (SAW) filters based on the in-line dot array structure are reported. This configuration is very amenable to device synthesis, potentially to specifications comparable to conventional high-loss designs. The design procedure fully allows for multiple reflections within the reflecting arrays and can handle chirps. The devices have achieved up to 0.2-dB RMS passband ripple and 32-dB rejection after direct coupling and multistrip coupler (MSC) reflection are removed. Passband loss (6-8 dB) could be reduced if transducer and MSC loss (3 dB) can be improved. The devices also have sharp cutoffs, and fairly uniform input and output impedances in the pass and transition bands. The reflectors chosen for the reflecting arrays are thin metal dots. The results of computation and experimental verification of dot reflectivity and velocity change for the particular size of dots and dot pattern used are given. The device design, and the measured results are discussed.     

SAW and pseudo-SAW properties using matrix methods

Pseudo-surface-waves (PSAW's), or leaky SAW's, were first recognized over 25 years ago and the phase velocity (v(p)) and attenuation per wavelength (alphalambda) of PSAW modes for nonpiezoelectrics were calculated soon after. Since the seventies progress has been made in exploiting the higher velocities and electromechanical coupling constants (K(2)=2Deltav/v) achievable with PSAW's for piezoelectric device applications; this has stimulated new interest in the search for piezoelectric materials with orientations which have low alphalambda, high K(2), high v (p). Procedures for calculating the PSAW properties (v(p ), alphalambda, and K(2)) are not very explicitly given. In light of the preceding we present in this paper a review of the basic features of SAW and Pseudo-SAW's using the matrix method. In this paper: the mechanically free open-circuited and short-circuited surface wave boundary value problems for piezoelectrics are formulated using the matrix method; two types of modes (SAW and PSAW) are described; and a number of computationally simple, frequency independent analytical functions are derived, from which alphalambda, v(p ), and K(2) are calculated for any direction on any material plane using commercially available PC software. The relationship of these functions to the effective permittivity concept, favoured by many researchers, is demonstrated and illustrative numerical examples for the PSAW's reveals that low-loss orientations are quite sensitive to material constant values.     

SAW and pseudo-SAW properties using matrix methods

Pseudo-surface-waves (PSAW's), or leaky SAW's, were first recognized over 25 years ago and the phase velocity (v(p)) and attenuation per wavelength (alphalambda) of PSAW modes for nonpiezoelectrics were calculated soon after. Since the seventies progress has been made in exploiting the higher velocities and electromechanical coupling constants (K(2)=2Deltav/v) achievable with PSAW's for piezoelectric device applications; this has stimulated new interest in the search for piezoelectric materials with orientations which have low alphalambda, high K(2), high v (p). Procedures for calculating the PSAW properties (v(p ), alphalambda, and K(2)) are not very explicitly given. In light of the preceding we present in this paper a review of the basic features of SAW and PseudoSAW's using the matrix method. In this paper: the mechanically free open-circuited and short-circuited surface wave boundary value problems for piezoelectrics are formulated using the matrix method; two types of modes (SAW and PSAW) are described; and a number of computationally simple, frequency independent analytical functions are derived, from which alphalambda, v(p ), and K(2) are calculated for any direction on any material plane using commercially available PC software. The relationship of these functions to the effective permittivity concept, favoured by many researchers, is demonstrated and illustrative numerical examples for the PSAW's reveals that low-loss orientations are quite sensitive to material constant values.