Development of Low-cost Chemical and Micromechanical Sensors Based on Thick-film,Thin-film and Electroplated Films

Various films could be used as sensing materials or as constructional materials for the fabrication of chemical and micromechanical sensors. To illustrate this potential, three sensors fabricated by very different film deposition technologies are given as examples. The sensors are a humidity sensor in thickfilm technology, a multi-functional gas sensor in thin-film technology and a three-dimensional acceleration sensor chip manufactured by electroplating techniques. Design, fabrication and characterisation of these sensors are described in this paper.     

Piezoresonance Chemical Sensors on Elastic Polymer Films

Measurement Techniques - A method for measuring the concentration of chemicals in gases and liquids using sensors based on piezoelectric resonators with sensitive films of elastic polymers is...     

层状多孔ZnO厚膜的制备及其气敏性能研究

由片状材料的定向自组装得到的层状结构可以使膜具有良好的取向性和特殊的物理化学性能。通过对ZnSO4.7H2O在150℃进行水热反应合成出高径厚比的碱式硫酸锌薄片,然后将这种大面积的薄片组装成一定厚度的自持膜并进一步热处理成具有多孔结构的层状ZnO厚膜。通过对600℃、700℃和800℃热处理得到的材料进行XRD及SEM分析,研究了其成分及多孔结构的产生过程,并结合气敏测试结果证明由烧结温度所带来的多孔结构的变化确实会对其气敏性能造成一定的影响。对不同气体进行的气敏性能测试表明,这种层状多孔ZnO结构是一种理想的气敏传感材料,特别适合用于检测H2S气体。     

Microstructure and Micromechanical Properties of SiC-W Multilayer Films

SiC-W multilayer thin films with various modulation wavelengths were prepared by a magnetron sputtering system. Using low-angle x-ray diffraction (LXD), their interface microstructure and the modulation period were studied. The mechanical properties of these films were investigated using an ultramicrohardness (UMH) tester with loads smaller than 20 mN. It was shown that the UMH values of multilayer films varies with applied load L and modulation wavelength. When L was 5 mN, was 10 nm, the UMH reached a maximum, 19.869 GPa, which was 1.02 times higher than that of the homogeneously mixed film. The anomalous peak effect of UMH varying with the modulation wavelength is discussed.     

Stretchable Electronic Sensors of Nanocomposite Network Films for Ultrasensitive Chemical Vapor Sensing

A stretchable, transparent, and body‐attachable chemical sensor is assembled from the stretchable nanocomposite network film for ultrasensitive chemical vapor sensing. The stretchable nanocomposite network film is fabricated by in situ preparation of polyaniline/MoS₂ (PANI/MoS₂) nanocomposite in MoS₂ suspension and simultaneously nanocomposite deposition onto prestrain elastomeric polydimethylsiloxane substrate. The assembled stretchable electronic sensor demonstrates ultrasensitive sensing performance as low as 50 ppb, robust sensing stability, and reliable stretchability for high‐performance chemical vapor sensing. The ultrasensitive sensing performance of the stretchable electronic sensors could be ascribed to the synergistic sensing advantages of MoS₂ and PANI, higher specific surface area, the reliable sensing channels of interconnected network, and the effectively exposed sensing materials. It is expected to hold great promise for assembling various flexible stretchable chemical vapor sensors with ultrasensitive sensing performance, superior sensing stability, reliable stretchability, and robust portability to be potentially integrated into wearable electronics for real‐time monitoring of environment safety and human healthcare.     

SnO_2复合薄膜甲烷气敏传感器研究进展

甲烷是具有稳定四面体分子结构的碳氢化合物,其键能大、分解困难且活性低,是煤矿安全生产的主要障碍及一种温室气体。SnO2半导体薄膜制备工艺简单、成本低廉、性能稳定,是甲烷传感器研发的主流气敏材料。科技人员进行了很多相关研究以提高传感器的性能,如新气敏材料的研究、催化剂/添加剂的使用、气敏机理的探索、传感器结构改进及气敏膜的表面修饰改性等。本文从气敏膜制备与改性、传感器结构设计及气敏机理研究三个方面,综述了近年来SnO2复合薄膜甲烷传感器的研究进展,结果表明:①应开发复合型金属氧化物半导体及高分子气敏材料,以提高灵敏度、选择性与稳定性;②研发微型智能传感器是未来发展的主要方向,而自组装技术应可用于制备金属氧化物半导体薄膜气体传感器微纳阵列;③气敏机理应与实验测试、材料设计及器件制备进行对照研究。     

Research Progress of Organic Field-Effect Transistor Based Chemical Sensors

Due to their high sensitivity and selectivity, chemical sensors have gained significant attention in various fields, including drug security, environmental testing, food safety, and biological medicine. Among them, organic field-effect transistor (OFET) based chemical sensors have emerged as a promising alternative to traditional sensors, exhibiting several advantages such as multi-parameter detection, room temperature operation, miniaturization, flexibility, and portability. This review paper presents recent research progress on OFET-based chemical sensors, highlighting the enhancement of sensor performance, including sensitivity, selectivity, stability, etc. The main improvement programs are improving the internal and external structures of the device, as well as the organic semiconductor layer and dielectric structure. Finally, an outlook on the prospects and challenges of OFET-based chemical sensors is presented.     

基于化学气相沉积石墨烯的传感器的研究进展

作为一种二维碳原子层材料,石墨烯(Graphene,G)具有优异且独特的力学、电学、光学和热学等性质,在传感检测等领域具有巨大的发展潜力和广阔的应用前景.基于石墨烯材料的传感器具有灵敏度高、响应快、成本低、稳定性好等优点.化学气相沉积(Chemical vapor deposi-tion,CVD)因其优异的可控性和可扩展性而被认为是制备大面积、高质量石墨烯薄膜的有效方法,而且CVD石墨烯薄膜适用于场效应晶体管的制造工艺,因此被广泛应用于物理、化学和生物等传感领域.本文介绍了近年来CVD石墨烯应用于传感检测领域的研究进展,包括制备技术、转移方法、传感特性以及在物理、化学、生物等传感领域的应用,并简要分析了基于CVD石墨烯的传感器所面临的困难与挑战.     

Selective Sensors of Nitrogen Dioxide Based on Thin Tungsten Oxide Films under Optical Irradiation

Technical Physics Letters - It is shown that NO2 present in air, beginning at a concentration of 1 ppm, can be selectively detected by sensors based on Au/WO3:Au thin films activated by laser diode...     

PbSe纳米晶薄膜制备以及其光电特性研究

以Pb(Ac)₂、Na₂SeSO₃分别作为铅源和硒源, 采用化学浴法在玻璃衬底上沉积PbSe纳米晶薄膜. 采用X射线衍射(XRD),扫描电镜(SEM),原子力显微镜（AFM）,透射光谱以及在光脉冲下的电流时间曲线(i-t)对纳米薄膜材料结构和性能进行了表征. 结果表明, 薄膜的结晶质量随络合剂浓度升高而提高, 薄膜的光学吸收边从体材料的5μm蓝移至1μm左右, 经过退火处理薄膜吸收边红移. 退火处理引起薄膜电阻显著降低, i-t测试曲线表明经过较低氧压退火处理的纳米晶薄膜具有较快的光电导性能, 而在空气气氛中退火的薄膜则出现慢光电导性能.     

光纤化学传感器的研究及其在环境分析中的应用

本文综述了光纤化学传感器的特点、工作原理、类型及各类光纤化学传感器(气敏、pH、金属离子和有机化合物等)的研究进展及其在环境分析中的应用,分析了近年来光纤化学传感器的技术发展和应用趋势。     

Chemical Preparation of Graphene‐Based Nanomaterials and Their Applications in Chemical and Biological Sensors

Graphene is a flat monolayer of carbon atoms packed tightly into a 2D honeycomb lattice that shows many intriguing properties meeting the key requirements for the implementation of highly excellent sensors, and all kinds of proof‐of‐concept sensors have been devised. To realize the potential sensor applications, the key is to synthesize graphene in a controlled way to achieve enhanced solution‐processing capabilities, and at the same time to maintain or even improve the intrinsic properties of graphene. Several production techniques for graphene‐based nanomaterials have been developed, ranging from the mechanical cleavage and chemical exfoliation of high‐quality graphene to direct growth onto different substrates and the chemical routes using graphite oxide as a precusor to the newly developed bottom‐up approach at the molecular level. The current review critically explores the recent progress on the chemical preparation of graphene‐based nanomaterials and their applications in sensors.     

The Effect of Operating Modes on the Response of Ammonia Sensors Based on Tin Dioxide Films

Technical Physics Letters - The influence of operating modes on the response of ammonia sensors based on tin dioxide films has been studied. Samples have been obtained as a result of high-frequency...     

Highly Sensitive and Stretchable Resistive Strain Sensors Based on Microstructured Metal Nanowire/Elastomer Composite Films

High sensitivity and high stretchability are two conflicting characteristics that are difficult to achieve simultaneously in elastic strain sensors. A highly sensitive and stretchable strain sensor comprising a microstructured metal nanowire (mNW)/elastomer composite film is presented. The surface structure is easily prepared by combining an mNW coating and soft‐lithographic replication processes in a simple and reproducible manner. The densely packed microprism‐array architecture of the composite film leads to a large morphological change in the mNW percolation network by efficiently concentrating the strain in the valley regions upon stretching. Meanwhile, the percolation network comprising mNWs with a high aspect ratio is stable enough to prevent electrical failure, even under high strains. This enables the sensor to simultaneously satisfy high sensitivity (gauge factor ≈81 at >130% strain) and high stretchability (150%) while ensuring long‐term reliability (10 000 cycles at 150% strain). The sensor can also detect strain induced by bending and pressure, thus demonstrating its potential as a versatile sensing tool. The sensor is successfully utilized to monitor a wide range of human motions in real time. Furthermore, the unique sensing mechanism is easily extended to detect more complex multiaxial strains by optimizing the surface morphology of the device.     

热和化学亚胺化对ODPA/ODA聚酰亚胺薄膜性能的影响

以4,4'-二胺基二苯醚(ODA)和3,3',4,4'-二苯醚四酸二酐(ODPA)为单体,采用两步法,分别经热亚胺化和化学亚胺化过程制备了两种聚酰亚胺(PI)薄膜,并对两种薄膜的性能进行了表征.傅立叶红外光谱(FT-IR)表明两种薄膜均已完全亚胺化.化学亚胺化的PI薄膜的玻璃化温度、热稳定性均高于热亚胺化的薄膜.拉伸性能测试表明热亚胺化的薄膜具有较高的断裂伸长率,而化学亚胺化的薄膜的拉伸强度、弹性模量较大.