Power characteristics of multiple inductively coupled RF discharges inside a metallic chamber

The characteristics of an innovative configuration of multiple radiofrequency (RF) coils immersed in a large metallic chamber are presented. Water-cooled copper coils were mounted within the slits of double-walled glass tubes, which were immersed into a stainless-steel chamber. The coils were connected in parallel to a gamma-type matching network, powered by an RF generator operating at industrial frequency. Adjustable leads enabled optimisation of the line impedances and thus uniformly distributed RF power across the four coils. Transitions from E- to H-mode and vice versa were measured for all coils at various oxygen pressures between 5 and 25 Pa. A uniform plasma was sustained in H-mode at the absorbed power threshold, which increased monotonously with increasing pressure in the metallic chamber. All coils exhibit the same E- to H-mode transition hysteresis and need the same amount of power for transitioning from E- to H-mode. The setup enables maintaining uniform plasma in virtually any number of coils at high power without the risk of arcing and without the dead volume typical for a classical configuration with coils mounted outside the metallic chamber.     

Plasma characteristics of direct current enhanced cylindrical inductively coupled plasma source

Experimental results of a direct current enhanced inductively coupled plasma (DCE-ICP) source which consists of a typical cylindrical ICP source and a plate-to-grid DC electrode are reported.With the use of this new source,the plasma characteristic parameters,namely,electron density,electron temperature and plasma uniformity,are measured by Langmuir floating double probe.It is found that DC discharge enhances the electron density and decreases the electron temperature,dramatically.Moreover,the plasma uniformity is obviously improved with the operation of DC and radio frequency (RF) hybrid discharge.Furthermore,the nonlinear enhancement effect of electron density with DC + RF hybrid discharge is confirmed.The presented observation indicates that the DCE-ICP source provides an effective method to obtain high-density uniform plasma,which is desirable for practical industrial applications.     

感应耦合等离子体源制备硬质类金刚石膜的研究

采用感应耦合等离子体源(ICPS)成功地实现化学气相沉积硬质类金刚石(DLC)膜,并考察了基片负偏压对类金刚石膜沉积过程和薄膜性质的影响。薄膜的微观形貌、显微硬度、沉积速率以及结构成分分析表明感应耦合等离子体源适于制备硬质类金刚石膜,并且在相对较低的基片负偏压条件就可以获得高硬度的类金刚石膜。基片负偏压对类金刚石膜化学气相沉积过程和薄膜性质都有显著影响。     

Study of electron-extraction characteristics of an inductively coupled radio-frequency plasma neutralizer

Inductively coupled radio-frequency (RF) plasma neutralizer (RPN) is an insert-free device that can be employed as an electron source in electric propulsion applications.Electron-extraction characteristics of the RPN are related to the bulk plasma parameters and the device's geometry.Therefore,the effects of different electron-extraction apertures and operational parameters upon the electron-extraction characteristics are investigated according to the global nonambipolar flow and sheath model.Moreover,these models can also be used to explain why the electron-extraction characteristics of the RPN strongly depend upon the formation of the anode spot.During the experimental study,two types of anode spots are observed.Each of them has unique characteristics of electron extraction.Moreover,the hysteresis of an anode spot is observed by changing the xenon volume-flow rates or the bias voltages.In addition,the rapid ignited method,gas-utilization factor,electron-extraction cost and other factors that need to be considered in the design of the RPN are also discussed.     

Extraction Characteristics of Radio Frequency ICP Ion Source

An inductively coupled radio frequency ion source has been developed and its extraction characteristics measured. Beam current density up to 0.11 mA/ cm2 was obtained with argon at a rf discharge power of about 140 W. The dependences of ion beam on the discharge parameters such as rf source power, gas pressure and gas flow rate was studied.     

Effects of direct current discharge on the spatial distribution of cylindrical inductively-coupled plasma at different gas pressures

Stable operations of single direct current(DC) discharge, single radio frequency(RF) discharge and DC?+?RF hybrid discharge are achieved in a specially-designed DC enhanced inductivelycoupled plasma(DCE-ICP) source. Their plasma characteristics, such as electron density,electron temperature and the electron density spatial distribution profiles are investigated and compared experimentally at different gas pressures. It is found that under the condition of single RF discharge, the electron density distribution profiles show a ‘convex' shape and ‘saddle' shape at gas pressures of 3 m Torr and 150 m Torr respectively. This result can be attributed to the transition of electron kinetics from nonlocal to local kinetics with an increase in gas pressure.Moreover, in the operation of DC?+?RF hybrid discharge at different gas pressures, the DC discharge has different effects on plasma uniformity. The plasma uniformity can be improved by modulating DC power at a high pressure of 150 m Torr where local electron kinetics is dominant,whereas plasma uniformity deteriorates at a low pressure of 3 m Torr where nonlocal electron kinetics prevails. This phenomenon, as analyzed, is due to the obvious nonlinear enhancement effect of electron density at the chamber center, and the inherent radial distribution difference in the electron density with single RF discharge at different gas pressures.     

电感耦合等离子体质谱法测定硼同位素丰度

以硼同位素标准参考物质NIST SRM 951配制的标准溶液,在优化的操作条件下对电感耦合等离子体质谱(ICP-MS)测定的硼同位素质量进行校正,求出校正因子,确定了样品的线性浓度范围.在同样的仪器条件下测定了硼同位素浓缩过程中样品三氟化硼甲醚络合物中的硼同位素丰度比,测定结果的相对标准偏差为1.095%.此外考查了仪器的稳定性.实验结果表明,本文建立的测定硼同位素丰度的方法"记忆效应"小,结果可靠,测量精度高.     

Simulation study on electron heating characteristics in magnetic enhancement capacitively coupled plasmas with a longitudinal magnetic field

The electron heating characteristics of magnetic enhancement capacitively coupled argon plasmas in presence of both longitudinal and transverse uniform magnetic field have been explored through both theoretical and numerical calculations. It is found that the longitudinal magnetic field can affect the heating by changing the level of the pressure heating along the longitudinal direction and that of the Ohmic heating along the direction which is perpendicular to both driving electric field and the applied transverse magnetic field, and a continuously increased longitudinal magnetic field can induce pressure heating to become dominant. Moreover, the electron temperature as well as proportion of some low energy electrons will increase if a small longitudinal magnetic field is introduced, which is attributed to the increased average electron energy. We believe that the research will provide guidance for optimizing the magnetic field configuration of some discharge systems having both transverse and longitudinal magnetic field.     

Time-resolved evaluation of uranium plasma in different atmospheres by laser-induced breakdown spectroscopy

This work reports spectroscopic studies of uranium containing plasma generated in air and argon environments. The 532 nm Q-switched Nd:YAG laser generates the optical breakdown plasma, which was recorded by a spectrometer and an intensified charge coupled device having a resolution of 25 pm. Neutral and ionized uranium lines in the wavelength range of 385.8–391.9 nm indicate significant width and shift variations during the first few microseconds. Electron temperature and density of the plasma are determined using the Boltzmann plot and the Saha–Boltzmann equation at various time delay. The study reveals the power law decay pattern of electron temperature and density, which changes to exponential decay pattern if large gate- width is used to acquire the signal, due to an averaging effect.     

Measurement of Electron Density and Ion Collision Frequency with Dual Assisted Grounded Electrode DBD in Atmospheric Pressure Helium Plasma Jet

The properties of a helium atmospheric-pressure plasma jet（APPJ）are diagnosed with a dual assisted grounded electrode dielectric barrier discharge device.In the glow discharge,we captured the current waveforms at the positions of the three grounded rings.From the current waveforms,the time delay between the adjacent positions of the rings is employed to calculate the plasma bullet velocity of the helium APPJ.Moreover,the electron density is deduced from a model combining with the time delay and current intensity,which is about 10¹¹cm^-3.In addition,The ion-neutral particles collision frequency in the radial direction is calculated from the current phase difference between two rings,which is on the order of 10⁷ Hz.The results are helpful for understanding the basic properties of APPJs.     

Estimation of plasma parameters in the process of micro-scale powder plastic and characteristics of its products

The temperature and density of plasma jets were estimated with a Boltzmann plot and Stark broadening of Ar I (696.54 nm) lines by optical emission spectroscopy (OES) in the process of plasma plastic, and the morphology and microstructure of tungsten (W) powders were investigated by scanning electron microscope (SEM) and x-ray Diffraction (XRD), respectively. The results show that the assumption of local thermodynamic equilibrium (LTE) was invalid at the end of the plasma jets, and earlier than this after the injection of tungsten powder. The temperature and electron density of the plasma jets were up to about T=6797 K with Q_c=50 slpm and n_e=1.05×10¹⁶ cm⁻³ with Q_s=115 slpm at Z=60 mm, respectively, and both dropped rapidly with the injected tungsten powders of 20 μm. After the plasma plastic process, the spherical tungsten powders were prepared and there were some satellite particles on the surface of the spherical products. The tungsten powders were both composed of a single equilibrium α-W phase with a body centered cubic (bbc) crystal structure before and after plasma treatment.     

Electron population properties with different energies in a helicon plasma source

The characteristics of electrons play a dominant role in determining the ionization and acceleration processes of plasmas. Compared with electrostatic diagnostics, the optical method is independent of the radio frequency(RF) noise, magnetic field, and electric field. In this paper, an optical emission spectroscope was used to determine the plasma emission spectra, electron excitation energy population distributions(EEEPDs), growth rates of low-energy and highenergy electrons, and their intensity jumps with input powers. The 56 emission lines with the highest signal-to-noise ratio and their corresponding electron excitation energy were used for the translation of the spectrum into EEEPD. One discrete EEEPD has two clear different regions,namely the low-energy electron excitation region(neutral lines with threshold energy of13–15 eV) and the high-energy electron excitation region(ionic lines with threshold energy?19 e V). The EEEPD variations with different diameters of discharge tubes(20 mm, 40 mm,and 60 mm) and different input RF powers(200–1800 W) were investigated. By normalized intensity comparison of the ionic and neutral lines, the growth rate of the ionic population was higher than the neutral one, especially when the tube diameter was less than 40 mm and the input power was higher than 1000 W. Moreover, we found that the intensities of low-energy electrons and high-energy electrons jump at different input powers from inductively coupled(H) mode to helicon(W) mode; therefore, the determination of W mode needs to be carefully considered.     

Numerical Investigation of Flow Fields in Inductively Coupled Plasma Wind Tunnels

Numerical simulations of 10 kW and 110 kW inductively coupled plasma （ICP） wind tunnels were carried out to study physical properties of the flow inside the ICP torch and vacuum chamber with air as tile working gas. Two-dimensional compressible axisymmetric Navier- Stokes （N-S） equations that took into account 11 species and 49 chemical reactions of air, were solved. A heat source model was used to describe the heating phenomenon instead of solving the electromagnetic equations. In the vacuum chamber, a four-temperature model was coupled with N-S equations. Numerical results for tile 10 kW ICP wind tunnel are presented and discussed in detail as a representative case. It was found that the plasma flow in the vacuum chamber tended to be in local thermoehemical equilibrium. To study the influence of operation conditions on the flow field, simulations were carried out for different chamber pressures and/or input powers. The computational results for the above two ICP wind tunnels were compared with corresponding experimental data. The computational and experimental results agree well, therefore the flow fields of ICP wind tunnels can be clearly understood.     

Theoretical Study on the Characteristics of Atmospheric Radio Frequency Discharges by Altering Electrode Gap

In this paper, we present a theoretical study on the discharge characteristics of radio-frequency discharges at atmospheric pressure driven by a higher frequency of 40.68 MHz while the electrode gap is altered. Based on the analytical equations and simulation data from a one-dimensional fluid model, an optimal gap between electrodes, at which the largest electron density is obtained, can be observed under a constant power condition; however, as the electrode gap increases the time-averaged electron temperature decreases, and the underpinning physics is also discussed based on the simulation results. This study indicates that at a constant power by choosing an appropriate electrode spacing, the rf discharge can be effectively optimized at atmospheric pressure.     

Spatio-temporal evaluation of Zr plasma parameters in a single-beam-splitting double-pulse laser-induced plasma

The plasma shielding effect is one of the major weaknesses of laser-induced breakdown spectroscopy(LIBS) as it causes non-linearity in signal strength. Although LIBS is typically carried out in constant laser energy, this non-linearity causes a reduction in sensitivity. In this work, we systematically examine laser-induced plasma, formed by two different excitation source modes, i.e. single pulse(SP)-excitation and single-beam-splitting double-pulse(SBSDP)-excitation over Zr-2.5% Nb alloy. The two most important plasma parameters influencing the emission line intensity, plasma temperature(T_e) and electron density(N_e) were studied and compared for both modes of laser excitation. Comparison of the results conclusively demonstrates that due to the splitting of the laser energy in the SBS-DP mode, the plasma shielding effect is significantly reduced. The reduced plasma shielding translates to an increased laser–sample coupling under SBS-DP mode. Temporal imaging of the total intensity of the laserinduced plasma in both excitation modes was also studied. The study shows how the plasma shielding effect can be reduced to improve the analytical quality of the LIBS methodology.     

Research on phase shift characteristics of electromagnetic wave in plasma

The phase shift characteristics reflect the state change of electromagnetic wave in plasma sheath and can be used to reveal deeply the action mechanism between electromagnetic wave and plasma sheath. In this paper, the phase shift characteristics of electromagnetic wave propagation in plasma were investigated. Firstly, the impact factors of phase shift including electron density,collision frequency and incident frequency were discussed. Then, the plasma with different electron density distribution profiles were employed to investigate the influence on the phase shift characteristics. In a real case, the plasma sheath around the hypersonic vehicle will affect and even break down the communication. Based on the hypersonic vehicle model, we studied the electromagnetic wave phase shift under different flight altitude, speed, and attack angle. The results indicate that the phase shift is inversely proportional to the flight altitude and positively proportional to the flight speed and attack angle. Our work provides a theoretical guidance for the further research of phase shift characteristics and parameters inversion in plasma.     

Characteristics of inductively coupled plasma(ICP) and helicon plasma in a singleloop antenna

Large area uniform plasma sources, such as high-density magnetized inductively coupled plasma(ICP) and helicon plasma, have broad applications in industry. A comprehensive comparison of ICP and helicon plasma, excited by a single-loop antenna, is presented in this paper from the perspectives of mode transition, hysteresis behavior, and density distribution. The E-H mode transition in ICP and the E-H-W mode transition in helicon plasma are clearly observed in the experiments. Besides, the considerable variation of hysteresis behavior from inverse hysteresis to normal hysteresis by the influence of the magnetic field is explored. The bi-Maxwellian and Maxwellian electron energy distribution functions in each discharge are used to explain this phenomenon, which is essentially related to the transition from a nonlocal kinetic property to a local kinetic property of electrons. In addition, we notice that the plasma density, in the radial direction, is peaked in the center of the tube in ICP, but a complicated distribution is formed in helicon plasma. In the axial direction, the maximum plasma density is still in the center of the antenna in ICP, whereas the highest plasma density is located downstream, far away from the antenna, in helicon plasma. It is believed that the reflected electrons in the sheath and pre-sheath by the upper metallic endplate and downstream propagated helicon wave will be responsible for this plasma density profile in helicon plasma. Due to the constrained electron motion in the magnetic field, an extremely uniform density distribution will be obtained with an appropriate axial magnetic field in the wave discharge mode.