Plasma density measurement and downstream etching of silicon and silicon oxide in Ar/NF3 mixture remote plasma source

In this study, plasma density measurements were performed near the plume region of the remote plasma source (RPS) in Ar/ NF₃ gas mixtures using a microwave cutoff probe. The measured plasma density is in the range of 10 ¹⁰ –10 ¹¹ cm ⁻³ in the discharge conditions with RPS powers of 2–4 kW and gas pressures of 0.87–4 Torr. The plasma density decreased with increasing gas pressures and RPS powers under various Ar/ NF₃ mixing ratios. This decrease in the plasma density measured at the fixed measurement position (plume region) can be understood by the reduction of the electron energy relaxation length with increases in the gas pressures and mixing ratio of NF₃/(Ar / NF₃). We also performed downstream etching of silicon and silicon oxide films in this system. The etch rate of the silicon films significantly increases while the silicon oxide is slightly etched with the gas pressures and powers. It was also found that the etch rate strongly depends on the wafer position on the processing chamber electrode, and that the etch selectivity reached 96–131 in the discharge conditions of RF powers (3730–4180 W) and gas pressures (3.6–4 Torr).     

Monopole Antenna Probe for Density Measurements in Cold Plasmas

A simple diagnostic tool for density measurements in plasma with a certain spatial resolution is proposed in the this paper. It uses the emission characteristics of monopole antenna to determine the dielectic property of plasmaε=1-ƒ_p²/ƒ², withƒ_pthe electron plasma frequency related to plasma density. We immersed a monopole antenna probe into plasma and introduced a microwave signal via a network analyzer. When the emitted power is maximized, the reflected power is minimized and there occurs a resonance. Sinceε can be derived from the resonant frequency, this is actually a method to measure the absolute electron density. Validated by a comparison with the amended Langmuir double-probe method, the monopole antenna probe is valuable. In addition, it is free from the difficulties, such as fluctuation in plasma potential.     

Fast radial scanning probe system on KTX

A fast radial scanning probe system was constructed for the Keda Torus eXperiment(KTX) to measure the profiles of boundary plasma parameters such as floating potential, electron density,temperature, transport fluxes, etc. The scanning probe system is driven by slow and fast motion mechanisms, corresponding to the stand-by movement of a stepping motor and the fast scanning movement of a high-torque servo-motor, respectively. In fast scanning, the scanner drives the probe radially up to 20 cm at a maximum velocity of 4.0 m s~(-1). A noncontact magnetic grating ruler with a high spatial resolution of 5 μm is used for the displacement measurement. New scanning probe can reach the center of plasmas rapidly. The comparison of plasma floating potential profiles obtained by a fixed radial rake probe and the single scanning probe suggests that the high-speed scanning probe system is reliable for measuring edge plasma parameter profiles on the KTX device.     

Development of a helicon-wave excited plasma facility with high magnetic field for plasma-wall interactions studies

The high magnetic field helicon experiment system is a helicon wave plasma(HWP)source device in a high axial magnetic field(B_0)developed for plasma–wall interactions studies for fusion reactors.This HWP was realized at low pressure(5?×?10~(-3)?-?10 Pa)and a RF(radio frequency,13.56 MHz)power(maximum power of 2 k W)using an internal right helical antenna(5 cm in diameter by 18 cm long)with a maximum B_0of 6300 G.Ar HWP with electron density~10~(18)–10~(20)m~(-3)and electron temperature~4–7 e V was produced at high B_0 of 5100 G,with an RF power of 1500 W.Maximum Ar~+ion flux of 7.8?×?10~(23)m~(-2)s~(-1)with a bright blue core plasma was obtained at a high B_0 of 2700 G and an RF power of 1500 W without bias.Plasma energy and mass spectrometer studies indicate that Ar~+ion-beams of 40.1 eV are formed,which are supersonic(~3.1c_s).The effect of Ar HWP discharge cleaning on the wall conditioning are investigated by using the mass spectrometry.And the consequent plasma parameters will result in favorable wall conditioning with a removal rate of 1.1?×?10~(24)N_2/m~2 h.     

Oxide Coated Cathode Plasma Source of Linear Magnetized Plasma Device

Plasma source is the most important part of the laboratory plasma platform for fundamental plasma experimental research. Barium oxide coated cathode plasma source is well recognized as an effective technique due to its high electron emission current. An indirectly heated oxide coated cathode plasma source has been constructed on a linear magnetized plasma device. The electron emission current density can reach 2 A/cm 2 to 6 A/cm ² in pulsed mode within pulse length 5–20 ms. A 10 cm diameter, 2 m long plasma column with density 10 ¹⁸ m ⁻³ to 10 ¹⁹ m ³ and electron temperature T_e ≈ 3–7 eV is produced. The spatial uniformity of the emission ability is less than 4% and the discharge reproducibility is better than 97%. With a wide range of the plasma parameters, this kind of plasma source provides great flexibility for many basic plasma investigations. The detail of construction and initial characterization of oxide coated cathode are described in this paper.     

Plasma effects on the bacteria Escherichia coli via two evaluation methods

The degradation of?Escherichia coli?bacteria?by treatment with?cold,?weakly ionised, highly dissociated oxygen plasma,?with?an?electron temperature of 3 e V, a?plasma density of 8?×?10~(15)m~(-3) and a?neutral oxygen atom density of 3.5?×?1021m~(-3) was studied. To determine the ‘real' plasma effects,?two methods were used for evaluation and determination, as well as a comparison of the number of?bacteria that had?survived: the standard plate count technique(PCT) and?advanced fluorescence-activated cell sorting(FACS). Bacteria were deposited onto glass substrates and kept below 50 °C during the experiments with oxygen plasma. The results showed that the?bacteria had?fully degraded after about 2 min of plasma treatment, depending slightly on the amount of bacteria that had been?deposited on the substrates. The very?precise determination of the O flux on?the substrates and the two-method comparison allowed for the determination of the critical dose of oxygen atoms required for the destruction of a bacterial cell wall—about 6?×?10~(24)m~(-2)—as well as deactivation of the substrates—about 8?×?1025m~(-2).These results were taken in order to discuss other results obtained by comparable studies and scientific method?evaluations in the determination of plasma effects on bacteria.     

Optical nonlinearity of Cu:SrTiO3 composite fabricated by negative ion implantation

Optical nonlinearity and dispersion were studied for Cu nanoparticle composite. Negative Cu⁻ ions with 60 keV were applied for implanting into SrTiO₃ at a flux of 10 μA/cm² up to a total fluence of 1 × 10¹⁷ ions/cm². The steady-state optical spectrum of Cu-implanted SrTiO₃ showed a surface plasmon resonance resulting from the formation of nanoparticles. Transient transmission and reflection were measured by the pump–probe method with a femtosecond laser system. Optical nonlinearity originated from Cu:SrTiO₃ nanoparticle composite and from SrTiO₃ matrix overlap, in measured transient spectra. The nonlinear component of Cu:SrTiO₃ composite was extracted from the transient spectra with the difference of time response. Nonlinear dielectric coefficient and dispersion around the surface plasmon resonance were derived from extracted transient spectra. The dispersion was compared with a local electric field factor.     

Inactivation of Staphylococcus aureus by the synergistic action of charged and reactive plasma particles

In this paper, a low-pressure capacitively coupled plasma discharge sustained in an argonoxygen mixture was studied in order to evaluate its properties in terms of inactivation of Staphylococcus aureus. The plasma parameters as electron temperature and plasma density were measured by the Langmuir probe (N_e ≈ 10¹⁵ m⁻³, T_e ≈ 1.5 eV), while the neutral atom density was in the range of 10²¹ m⁻³. In the plasma phase, oxygen radicals were taken as reference of the reactive species with antimicrobial activity, and oxygen spectral lines, over a range of plasma process parameters, were investigated by the optical emission spectroscopy. Optimal plasma conditions were found, and a count reduction of 4 log in a few minutes of the bacterium proves the potentiality of an industrial grade plasma reactor as a sterilization agent.     

Experimental investigation on the evolution of plasma properties in the discharge channel of a pulsed plasma thruster

Pulsed plasma thrusters(PPTs) are an attractive form of micro-thrusters due to advantages such as their compactness and lightweight design compared to other electric propulsion systems.Experimental investigations on their plasma properties are beneficial in clarifying the complex process of plasma evolution during the micro-second pulse discharge of a PPT. In this work, the multi-dimensional evolutions of the light intensity of the PPT plasma with wavelength, time, and position were identified. The plasma pressure was obtained using an iterative process with composition calculations. The results show that significant ion recombination occurred in the discharge channel since the line intensities of CII, CIII, CIV, and FII decreased and those of CI and FI increased as the plasma moved downstream. At the center of the discharge channel, the electron temperature and electron density were in the order of 10 000 K and 10~(17) cm~(-3),respectively. These had maximum values of 13 750 K and 2.3?×?10~(17) cm~(-3) and the maximum temperature occurred during the first half-cycle while the maximum number density was measured during the second half-cycle. The estimated plasma pressure was in the order of 10~5 Pa and exhibited a maximum value of 2.69?×?10~5 Pa.     

Study of the key factors affecting the triple grid lifetime of the LIPS-300 ion thruster

In order to ascertain the key factors affecting the lifetime of the triple grids in the LIPS-300 ion thruster,the thermal deformation,upstream ion density and component lifetime of the grids are simulated with finite element analysis,fluid simulation and charged-particle tracing simulation methods on the basis of a 1500 h short lifetime test.The key factor affecting the lifetime of the triple grids in the LIPS-300 ion thruster is obtained and analyzed through the test results.The results show that ion sputtering erosion of the grids in 5 kW operation mode is greater than in the case of 3 kW.In 5 kW mode,the decelerator grid shows the most serious corrosion,the accelerator grid shows moderate corrosion,and the screen grid shows the least amount of corrosion.With the serious corrosion of the grids in 5 kW operation mode,the intercept current of the acceleration and deceleration grids increases substantially.Meanwhile,the cold gap between the accelerator grid and the screen grid decreases from 1 mm to 0.7 mm,while the cold gap between the accelerator grid and the decelerator grid increases from 1 mm to 1.25 mm after 1500 h of thruster operation.At equilibrium temperature with 5 k W power,the finite element method(FEM)simulation results show that the hot gap between the screen grid and the accelerator grid reduces to 0.2 mm.Accordingly,the hot gap between the accelerator grid and the decelerator grid increases to 1.5 mm.According to the fluid method,the plasma density simulated in most regions of the discharge chamber is 1?×?10~(18)-8?×?10~(18)m~(-3).The upstream plasma density of the screen grid is in the range 6?×?10~(17)-6?×?10~(18)m~(-3)and displays a parabolic characteristic.The charged particle tracing simulation method results show that the ion beam current without the thermal deformation of triple grids has optimal perveance status.The ion sputtering rates of the accelerator grid hole and the decelerator hole are 5.5?×?10~(-14)kg s~(-1)and 4.28?×?10~(-14)kg s~(-1),respectively,while after the thermal deformation of the triple grids,the ion beam current has over-perveance status.The ion sputtering rates of the accelerator grid hole and the decelerator hole are 1.41?×?10~(-13)kg s~(-1)and 4.1?×?10~(-13)kg s~(-1),respectively.The anode current is a key factor for the triple grid lifetime in situations where the structural strength of the grids does not change with temperature variation.The average sputtering rates of the accelerator grid and the decelerator grid,which were measured during the 1500 h lifetime test in5 k W operating conditions,are 2.2?×?10~(-13)kg s~(-1)and 7.3?×?10~(-13)kg s~(-1),respectively.These results are in accordance with the simulation,and the error comes mainly from the calculation distribution of the upstream plasma density of the grids.     

加速器质谱测量60Fe方法的模拟研究

长寿命的放射性核素⁶⁰Fe在天体物理学等许多研究领域中有重要科学意义。利用高能量的HI-13串列加速器质谱（AMS）系统和高性能的Q3D磁谱仪,初步研究了⁶⁰Fe的测量方法。通过优化测量条件,利用⁵⁸Fe和⁵⁸Ni分别模拟⁶⁰Fe和⁶⁰Ni,获得了仪器压低同量异位素的能力。结果表明,通过ΔE-Q3D系统结合四阳极气体电离室技术,将Ni的干扰压低了10¹¹。化学方法压低Ni的干扰为10⁴。可以预测⁶⁰Fe/Fe的探测灵敏度为10^-15。     

摇摆对过冷沸腾相分布特性的影响机理分析

采用双探头光学探针测量了摇摆条件下圆管内过冷沸腾局部空泡份额、界面面积浓度及汽泡尺寸等局部相界面参数径向分布特性,根据实验及计算结果,从汽液相界面作用力角度对摇摆运动条件下过冷沸腾相分布机理进行了分析。结果表明：摇摆条件下,浮力径向分量、升力、湍流分散力和壁面润滑力量级约为10³ N/m³,附加惯性力与其余诸力相比小2～3个量级。因此摇摆条件下过冷沸腾相分布特性主要取决于周期性波动的升力、湍流分散力、壁面润滑力及浮力径向分量之间的平衡关系。     

Spectral Characteristics of Laser-Induced Graphite Plasma in Ambient Air

An experimental setup of laser-induced graphite plasma was built and the spectral characteristics and properties of graphite plasma were studied. From the temporal behavior of graphite plasma, the duration of CN partials(B~2∑~+→X~2∑~+) emission was two times longer than that of atomic carbon, and all intensities reached the maximum during the early stage from0.2 μs to 0.8 μs. The electron temperature decreased from 11807 K to 8755 K, the vibration temperature decreased from 8973 K to 6472 K, and the rotational temperature decreased from7288 K to 4491 K with the delay time, respectively. The effect of the laser energy was also studied, and it was found that the thresholds and spectral characteristics of CN molecular and C atomic spectroscopy presented great differences. At lower laser energies, the electron excited temperature, the electron density, the vibrational temperature and rotational temperature of CN partials increased rapidly. At higher laser energies, the increasing of electron excited temperature and electron density slow down, and the vibrational temperature and rotational temperature even trend to saturation due to plasma shielding and dissociation of CN molecules. The relationship among the three kinds of temperatures was T_(elec)T_(vib)T_(rot) at the same time. The electron density of the graphite plasma was in the order of 10~(17)cm~(-3) and 10~(18)cm~(-3).     

Time-Resolved Optical Emission Spectroscopy Diagnosis of CO2 Laser-Produced SnO2 Plasma

The spectral emission and plasma parameters of SnO_2 plasmas have been investigated.A planar ceramic SnO_2 target was irradiated by a CO2 laser with a full width at half maximum of 80 ns.The temporal behavior of the specific emission lines from the SnO_2 plasma was characterized.The intensities of Sn I and Sn II lines first increased,and then decreased with the delay time.The results also showed a faster decay of Sn I atoms than that of Sn II ionic species.The temporal evolutions of the SnO_2 plasma parameters(electron temperature and density) were deduced.The measured temperature and density of SnO_2 plasma are 4.38 eV to0.5 eV and 11.38×10~(17) cm~(-3) to 1.1×10~(17) cm~(-3),for delay times between 0.1 μs and 2.2 μs.We also investigated the effect of the laser pulse energy on SnO_2 plasma.     

Preparation of High Specific Activity Strontium-89 Solution in High Flux Engineering Test Reactor

⁸⁹SrCl₂ is an important radioactive drug for the bone metastasis. It is included in the new pharmacopoeia in 2015 and has a promising future in the market. Depending on the high flux engineering test reactor(HFETR), the process of preparation of high specific activity⁸⁹SrCl₂ solution by nuclear reaction ⁸⁸Sr(n, γ)⁸⁹Sr was studied. High purity enriched⁸⁸SrCO₃ was used as target material and irradiated for 56 days under the condition of thermal neutron fluence rate about 2×10¹⁴ n•cm^-2•s^-1. After dissolution and filtration, the colorless⁸⁹SrCl2 solution was obtained. The specific activity of⁸⁹SrCl₂ solution was 7.77×10⁹-1.08×10¹⁰ Bq•g^-1, the activity concentration was 3.59×10⁸-1.21×10⁹ Bq•mL^-1, the gamma impurity content was 0.11%-0.14%, the Al impurity content was much lower than 2 μg•mL^-1(activity concentration 7.4×10⁷ Bq• mL^-1).⁸⁹SrCl₂ solution had been tested to meet the requirements of the industry and could be used as raw material for the production of injection. The development of single 7.4×10¹⁰ Bq level preparation device of high purity and high specific activity of ⁸⁹Sr had been finished. This research is important for localization of isotope products.     

兰州大学的中子发生器研制及应用展望

1988年兰州大学成功研制了3×10¹² s^-1的ZF-300强流中子发生器,主要用于核数据测量、材料辐照损伤等研究。为进一步开展活化法中子核数据测量、裂变物理等研究,兰州大学启动了基于倍压加速器的ZF-400强流中子发生器研制工程,该中子发生器的设计指标为D束流能量400 keV、D束流强度大于30 mA、D-D中子产额大于5×10¹⁰ s^-1,D-T中子产额大于5×10¹² s^-1。在裂变物理研究方面,已成功发展了描述裂变核断点裂变势的势驱动模型（potential-driving model）,并开展了中子诱发典型锕系核素裂变发射中子前裂变产物的质量分布计算研究;将potential-driving model植入Geant4程序,发展了用于裂变发射中子后裂变产物质量分布、动能分布、裂变中子能谱等模拟的蒙特卡罗方法,并开展了可靠性评估研究;研制了一套用于裂变产物实验测量的双屏栅电离室（TFGIC）,并完成了初步实验测试。在中子应用技术方面,为满足小型化中子应用技术系统的研发需求,兰州大学成功研制了长度984 mm、直径234 mm的紧凑型中子发生器,通过在引出加速电极和靶之间加电阻的方式产生偏置电场,实现对靶上二次电子的抑制。在自注入靶条件和150 keV氘束流能量下,D-D中子产额可大于5×10⁸ s^-1,该中子发生器已具备产生D-T中子产额大于10¹⁰ s^-1量级的潜力。完成了基于紧凑型D-T中子发生器的快中子准直屏蔽体的设计,并研发了基于微通道板的快中子成像探测器,初步D-T快中成像测试显示,图像空间分辨率约为500 μm。开展了基于紧凑型D-D中子发生器的核燃料棒²³⁵U富集度及均匀性检测系统研发,仿真研究表明,在D-D中子产额5×10⁸ s^-1条件下,对核燃料棒中10%范围内的²³⁵U富集度相对变化的检测置信度可达到99%。     

Exposure of Equal-Channel Angular Extruded Tungsten to Deuterium Plasma

Surface morphology and deuterium retention in ultrafine-grained tungsten fabricated by equal-channel angular pressing(ECAP) have been examined after exposure to a low energy,high-flux deuterium(D) plasma at fluences of 3×10~(24) D/m~2 and 1×10~(25) D/m~2 in a temperature range of 100 ℃-150 ℃.The methods used were scanning electron microscopy(SEM) and thermal desorption spectroscopy(TDS).Sparse and small blisters(~0.1 μm) were observed by SEM after D plasma irradiation on every irradiated surface;yet they did not exhibit significant structure or plasma fluence dependence.Larger blisters or protrusions appeared after subsequent TDS heating up to 1000 ℃.The TDS results showed a single D desorption peak at ~220℃ for all samples and the D retention increased with increasing numbers of extrusion passes,i.e.,the decrease of grain sizes.The increased D retention in this low temperature range should be attributed to the faster diffusion of D along the larger volume fraction of grain boundaries introduced by ECAP.     

Comparative Study of Plasma Parameters in Magnetic Pole Enhanced Inductively Coupled Argon Plasmas

Langmuir probe measurements of radio frequency (RF) magnetic pole enhanced inductively coupled (MaPE-ICP) argon plasma were accomplished to obtain the electron number densities and electron temperatures. The measurements were carried out with a fixed RF frequency of 13.56 MHz in a pressure range of 7.5 mTorr to 75 mTorr at an applied RF power of 10 W and 100 W. These results are compared with a global (volume average) model. The results show good agreement between theoretical and experimental measurements. The electron number density shows an increasing trend with both RF power and pressure while the electron temperature shows decreasing trend as the pressure increases. The difference in the plasma potential and floating potential as a function of electron temperature measured from the electrical probe and that obtained theoretically shows a linear relation with a small difference in the coefficient of proportionality. The intensity of the emission line at 750.4 nm due to 2p 1 → 1s 2 (Paschen’s notation) transition closely follows the variation of n e with RF power and filling gas pressure. Measured electron energy probability function (EEPF) shows that electron occupation changes mostly in the high-energy tail, which highlights close similarity of 750.4 nm argon line to n e .     

Spatial Evolution Study of EEDFs and Plasma Parameters in RF Stochastic Regime by Langmuir Probe

An RF compensated cylindrical Langmuir probe system has been developed and used to characterize an RF capacitive two temperature plasma discharge in a stochastic mode. The novelty of the work presented here is the use of the driven electrode （cathode） without ground shield. Measurements of the electron energy distribution function （EEDF） and plasma parameters were achieved under the following conditions： 50 W of RF power and 5× 10-2 mbar of argon pressure. The probe measurements are performed at 3 cm above the electrode and the probe was shifted radially （r direction） from the center （r = 0 cm） of the inter-electrodes region towards the chamber wall （R = 10.75 cm）. The results show that the EEDF is bi-Maxwellian and its shape remains the same through the scanned region. The farther the probe from the central region, the lower the EEDF maximum. The plasma density is observed to decrease according to a Gaussian profile along the radial direction and falls to 50% of its maximum when close to the cathode edge （r = 5.5 cm）. At the same time the effective electron temperature remains constant for r〈4 cm and increases for r≥4 cm. The high-temperature and low-temperature electrons＇ densities and temperatures are also discussed in the article.     

125I在压实北山花岗岩粉中毛细管内扩散

为了解¹²⁹I在我国深地质处置库重点研究区围岩中的迁移行为,为选址预评价提供基础数据,利用批式吸附实验法和改进的毛细管内扩散法研究了碘离子在北山花岗岩粉中的吸附和扩散行为,分析了不同控制条件对碘离子的表观扩散系数(D_a)的影响。结果表明：在固液比为20 g/L,碘离子在北山花岗岩粉上的吸附几乎可以忽略;扩散实验中¹²⁵I^-的D_a值为8.2×10^-11~1.4×10^-9 m²/s,表明碘离子在压实北山花岗岩岩粉中的扩散速率很快;¹²⁵I^-的D_a值随扩散温度的升高而变大,随扩散源液离子强度的增加而变大,随同位素载体浓度的升高而变大,¹²⁵I^-的扩散速率随溶液pH值的上升整体有减小的趋势。