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1.
This work treats the Al2O3-ER sample surface using dielectric barrier discharge fluorination(DBD-F),DBD silicon deposition(DBD-Si),atmospheric-pressure plasma jet fluorination(APPJ-F)and APPJ silicon deposition(APPJ-Si).By comparing the surface morphology,chemical components and electrical parameters,the diverse mechanisms of different plasma modification methods used to improve flashover performance are revealed.The results show that the flashover voltage of the DBD-F samples is the largest(increased by 21.2%at most),while the APPJ-F method has the worst promotion effect.The flashover voltage of the APPJ-Si samples decreases sharply when treatment time exceeds 180 s,but the promotion effect outperforms the DBD-Si method during a short modified time.For the mechanism explanation,firstly,plasma fluorination improves the surface roughness and introduces shallow traps by etching the surface and grafting fluorine-containing groups,while plasma silicon deposition reduces the surface roughness and introduces a large number of shallow traps by coating SiOx film.Furthermore,the reaction of the DBD method is more violent,while the homogeneity of the APPJ modification is better.These characteristics influence the effects of fluorination and silicon deposition.Finally,increasing the surface roughness and introducing shallow traps accelerates surface charge dissipation and inhibits flashover,but too many shallow traps greatly increase the dissipated rate and facilitate surface flashover instead.  相似文献   

2.
In this study, the density of metastable He2* in an atmospheric-pressure plasma jet operating in helium with 0.001% nitrogen has been measured using an auxiliary measuring electrode technique. In the glow discharge mode, waveforms from two grounding electrodes, including one main discharge electrode and one auxiliary electrode, are captured. The isolated current peak formed by Penning ionization in waveforms from the auxiliary measuring electrode is identified to calculate the density of metastable He2*. In our discharge environment, the helium metastable densities along the jet axis direction are between 2.26× 1013 and 1.74× 1013 cm-3, which is in good agreement with the results measured by other techniques. This measurement technique can be conveniently applied to the diagnosis of metastableHe2* in an atmospheric-pressure plasma jet array.  相似文献   

3.
Atmospheric pressure glow discharge (APGD) plasma in air has high application value.In this paper,the methods of generating APGD plasma in air are discussed,and the characteristics of dielectric barrier discharge (DBD) in non-uniform electric field are studied.It makes sure that APGD in air is formed by DBD in alternating current electric field with using the absorbing electron capacity of electret materials to provide initial electrons and to end the discharge progress.Through designing electric field to form two-dimensional space varying electric field and three-dimensional space varying electric field,the development of electron avalanches in airgap is suppressed effectively and a large space of APGD plasma in air is generated.Further,through combining electrode structures,a large area of APGD plasma in air is generated.On the other hand,by using the method of increasing the density of initial electrons,millimeter-gap glow discharge in atmospheric pressure air is formed,and a maximum gap distance between electrodes is 8 ram.By using the APGD plasma surface treatment device composed of contact electrodes,the surface modification of high polymer materials such as aramid fiber and polyester are studied and good effect of modifications is obtained.The present paper provides references for the researchers of industrial applications of plasma.  相似文献   

4.
In this work, a single Al2O3 particle packed dielectric barrier discharge (DBD) reactor with adjustable discharge gap is built, and the influences of the particle shape (ball and column) and the residual gap between the top electrode and particle on the electrical and optical characteristics of plasma are studied. Our research confirms that streamer discharge and surface discharge are the two main discharge patterns in the single-particle packed DBD reactor. The strong electric field distortion at the top of the ball or column caused by the dielectric polarization effect is an important reason for the formation of streamer discharge. The length of streamer discharge is proportional to the size of the residual gap, but the number of discharge times of a single voltage cycle shows an opposite trend. Compared to the column, a smooth spherical surface is more conducive to the formation of large and uniform surface discharges. The surface discharge area and the discharge intensity reach a maximum when the gap is equal to the diameter of the ball. All in all, the results of this study will provide important theoretical support for the establishment of the synergistic characteristics of discharge and catalysis in plasma catalysis.  相似文献   

5.
In this paper,volume coupled surface barrier discharge(V-SBD) with three structures possessing different volumes is excited by sine AC power in atmospheric air.Discharge images,waveforms of applied voltage and discharge current,and optical emission spectra simulating rotational and vibrational temperatures are recorded and analyzed.The effects of applied voltage on emission intensities of N_2(C~3Π_u→ B~3Π_g) and N_2~+(B~2∑_u~+ → X~2E_g~+),and rotational and vibrational temperatures are investigated.The results show that as applied voltage rises,emission intensities and rotational temperatures increase while vibrational temperatures decrease.In addition it is found that,as applied voltage varies,the rotational temperature of surface discharge changes faster than that of volume discharge.  相似文献   

6.
Matching optimization of resonant parameters among the high power inverters, low power transformers and plasma reactors have significant effects on the performance and output of the reactor array when applying the partitioned operation method. In this paper, the Matlab/ Simulink electrical model was established based on the method of partitioned operation. The matching relation between resonant parameters is analyzed on the basis of experimental result. As a consequence, transformer leakage inductance and working frequency are the important parameters influencing the operational efficiency of system, leakage inductance of transformer should be adjusted based on the equivalent capacitance of plasma reactor to realize the matching optimization of resonant parameters.  相似文献   

7.
Epoxy resin (EP) tends to accumulate a large amount of charge on its surface when exposed to a high-voltage DC electric field,which leads to a reduction in its insulative performance and an increase in potential safety risks in power systems.To suppress charge accumulation,improve the flashover voltage of the EP,and reduce the risk of gas insulated switchgear (GIS)/gas insulated transmission line (GIL) failure,we used two plasma-etching methods,i.e.,atmospheric-pressure dielectric barrier discharge (DBD) and the atmospheric-pressure plasma jet(APPJ),to modify the surface of the EP.The surface morphology and electrical properties of the modified materials were explored as a function of time.The results show that after DBD treatment,the roughness of the sample increases by 103.9 nm,the conductivity increases by3.9?×?10~(–18)S,and the flashover voltage increases by 14.4%;after APPJ treatment,the roughness of the sample increases by 223.5 nm,the conductivity increases by 3.4?×?10~(–17)S,and the flashover voltage increases by 18%.This shows that both plasma-etching methods can improve the insulation properties of materials by improving the surface-charge characteristics.The two methods are compared with each other:the APPJ treatment method is better at improving the surface roughness and electrical properties of materials,and this flexible treatment method has greater potential in industrial applications.  相似文献   

8.
Atmospheric pressure helium/water dielectric barrier discharge(DBD) plasma is used to investigate the generation of reactive species in a gas–liquid interface and in a liquid. The emission intensity of the reactive species is measured by optical emission spectroscopy(OES)with different discharge powers at the gas–liquid interface. Spectrophotometry is used to analyze the reactive species induced by the plasma in the liquid. The concentration of OH radicals reaches 2.2 μm after 3 min of discharge treatment. In addition, the concentration of primary longlived reactive species such as H_2O_2, NO_3~- and O_3 are measured based on plasma treatment time.After 5 min of discharge treatment, the concentration of H_2O_2, NO_3~-, and O_3 increased from 0 mg?·?L~(-1) to 96 mg?·?L~(-1), 19.5 mg?·?L~(-1), and 3.5 mg?·?L~(-1), respectively. The water treated by plasma still contained a considerable concentration of reactive species after 6 h of storage. The results will contribute to optimizing the DBD plasma system for biological decontamination.  相似文献   

9.
In the present paper,we carried out a theoretical study of dielectric barrier discharge (DBD) filled with pure methane gas.The homogeneous discharge model used in this work includes a plasma chemistry unit,an electrical circuit,and the Boltzmann equation.The model was applied to the case of a sinusoidal voltage at a period frequency of 50 kHz and under a gas pressure of 600 Torr.We investigated the temporal variation of electrical and kinetic discharge parameters such as plasma and dielectric voltages,the discharge current density,electric field,deposited power density,and the species concentration.We also checked the physical model validity by comparing its results with experimental work.According to the results discussed herein,the dielectric capacitance is the parameter that has the greatest effect on the methane conversion and H2/CH4 ratio.This work enriches the knowledge for the improvement of DBD for CH4 conversion and hydrogen production.  相似文献   

10.
In the plasma etching process, the edge roughness and mask pattern usually play a significant role in the deformation of holes under the influence of the charging effect. The competitive effect between these two factors has been investigated, focusing on the surface charging in a hexagonal array, with various values of roughness parameters (amplitude (A) and wavelength (W)) and distances between holes (L). A series of classical particle dynamic simulations of surface charging, surface etching and profile evolution were used to investigate the effect of roughness and pattern on charging. This study showed that various roughness and patterns (represented by different values of L) can significantly influence surface distributions of the electric-field (E-field) and the etching rates on the mask surface. The simulations also showed that (1) the shape of the pattern array influences the mask hole profile during the etching process, i.e. a hexagonal array pattern tends to deform the profile of a circular mask hole into a hexagonal hole; (2) pattern roughness is aggravated during the etching process. These factors were found to be significant only at a small feature pitch and may be ignored at a large feature pitch. Possible mechanisms of these results during the etching process are discussed. This work sheds light on the ways to maintain pattern integrity and further improve the quality of the pattern transfer onto the substrate.  相似文献   

11.
The oxygen plasma reactor based on dielectric barrier discharge principle can produce a high concentration of reactive oxygen species, which can cooperate with hydraulic cavitation gas–liquid mixer to realize the application of advanced oxidation technology in water treatment. In this technology, the work pressure of the oxygen plasma reactor is decreased by the vacuum suction effect generated in the snap-back section of the gas–liquid mixed container. In this paper, the characteristics of single micro-discharge at different pressures were investigated with the methods of discharge image, electrical characteristics and spectral diagnosis, in order to analyze the electrical characteristics and reactive oxygen species generation efficiency of oxygen plasma reactor at the pressure range from 60 kPa to 100 kPa. The study indicated that, when the pressure decreases, the duty ratio of ionization in the discharge gap and number of electrons with high energy increases, leading to a rise in reactive oxygen species production. When the oxygen reaches the maximum ionization, the concentration of reactive oxygen species is the highest. Then, the discharge intensity continues to increase, producing more heat, which will decompose the ozone and lower the production of reactive oxygen species. The oxygen plasma reactor has an optimum working pressure at different input powers, which makes the oxygen plasma reactor the most efficient in generating reactive oxygen species.  相似文献   

12.
The dielectric barrier discharge(DBD) in air at atmospheric pressure is not suitable for industrial applications due to its randomly distributed discharge filaments. In this paper, the influence of the electric field distribution on the uniformity of DBD is theoretically analyzed and experimentally verified. It is found that a certain degree of uneven electric field distributions can control the development of electron avalanches and regulate their transition to streamers in the gap. The discharge phenomena and electrical characteristics prove that an enhanced Townsend discharge can be formed in atmospheric-pressure air with a curved-plate electrode. The spectral analysis further confirms that the gas temperature of the plasma produced by the curved-plate electrode is close to room temperature, which is beneficial for industrial applications. This paper presents the relationship between the electron avalanche transition and the formation of a uniform DBD, which can provide some references for the development and applications of the DBD in the future.  相似文献   

13.
Fast photography and optical emission spectroscopy are implemented in a 5 mm neon gap dielectric barrier discharge (DBD) at atmospheric pressure with quartz glass used as the dielectric layer. Results show that it starts with a Townsend discharge and ends at a sub-normal glow discharge in neon DBD. Based on the Townsend discharge, the first ionization coefficient of neon is measured. The measurements are consistent with those at low pressure. Optical emission spectroscopy indicates that the spectra are mainly composed of atomic lines of neon, molecular bands and molecular ion bands originating from inevitable gas impurities (mainly nitrogen). Moreover, spectral lines emitted from atomic neon corresponding to the transitions (2p5 3p → 2p5 3s) are predominant. Although the second positive system of N2(C3Πu → B3Πg) is observed, their intensities are too weak compared with neon's spectrum. The molecular nitrogen ion line of 391.4 nm is observed. It reveals that Penning ionization between high energy neon excited states and the inevitable gas impurities plays an important role in the value of the α coefficient.  相似文献   

14.
Improvement of polytetrafluoroethylene surface energy by non-thermal plasma treatment is presented, using a nanosecond-positive-edge repetitive pulsed dielectri...  相似文献   

15.
A comparative study of radio-frequency atmospheric pressure glow discharge(rf APGD)generated in helium with and without dielectric electrodes to investigate the effect of electrodes insulation on electrical features of APGD is presented. In the α mode, both the rf APGDs remain volumetric, stable and uniform. In the γ mode, the APGD without dielectric electrodes shrinks into a constricted plasma column whereas APGD with dielectric electrodes remains stable and retains the same volume without plasma constriction even at higher densities of discharge current. A comparison of electrical features of both rf APGDs in normal and abnormal glow discharge regimes is presented. In both APGDs with and without dielectric electrodes,impedance measurements have been performed and compared with equivalent circuit models.The measured impedance data is found to be in good agreement with simulated data.  相似文献   

16.
The effects of the arrangement position and control parameters of nanosecond dielectric barrier discharge(NS-DBD)plasma actuators on lift enhancement for flying wing aircraft were investigated through wind tunnel experiments at a flow speed of 25 m s~(-1).The aerodynamic forces and moments were obtained by a six-component balance at angles of attack ranging from-4°to 28°.The lift,drag and pitching moment coefficients were compared for the cases with and without plasma control.The results revealed that the maximum control effect was achieved by placing the actuator at the leading edge of the inner and middle wing,for which the maximum lift coefficient increased by 37.8%and the stall angle of attack was postponed by 8°compared with the plasma-off case.The effects of modulation frequency and discharge voltage were also investigated.The results revealed that the lift enhancement effect of the NS-DBD plasma actuators was strongly influenced by the modulation frequency.Significant control effects were obtained at/=70 Hz,corresponding to F~+≈1.The result for the pitching moment coefficient demonstrated that the plasma actuator can induce the reattachment of the separation flows when it is actuated.However,the results indicated that the discharge voltage had a negligible influence on the lift enhancement effect.  相似文献   

17.
In this paper, volume barrier discharge with different gap distances is added on the discharge border of high-voltage electrode of annular surface barrier discharge for generating volume added surface barrier discharge (V-SBD) excited by bipolar nanosecond high-voltage pulse power in atmospheric air. The excited V-SBDs consist of surface barrier discharge (d=0 mm) and volume added surface barrier discharges (d=2 mm and 3 mm). The optical emission spectra are recorded for calculating emission intensities of N2 (C 3u →B3Πg ) and N2+ (B 2Σu+ → X 2Σg+ ), and simulating rotational and vibrational temperatures. The influences of gap distance of V-SBD on emission intensity and plasma temperature are also investigated and analyzed. The results show that d=0 mm structure can excite the largest emission intensity of N 2 (C 3 Πu →B 3Πg ), while the existence of volume barrier discharge can delay the occurrence of the peak value of the emission intensity ratio of N2+ (B 2Σu+ → X 2Σg+ )/N 2(C3Πu →B3Πg ) during the rising period of the applied voltage pulse and weaken it during the end period. The increasing factor of emission intensity is effected by the pulse repetition rate. The d=3 mm structure has the highest threshold voltage while it can maintain more emission intensity of N2(C3 Π u →B 3Πg ) than that of d=2 mm structure. The structure of d=2 mm can maintain more increasing factor than that of the d=3 mm structure with varying pulse repetition rate. Besides, the rotational temperatures of three V-SBD structures are slightly affected when the gap distance and pulse repetition rate vary. The vibrational temperatures have decaying tendencies of all three structures with the increasing pulse repetition rate.  相似文献   

18.
The influence of actuating voltage and discharge gap on plasma assisted detonation initiation by alternating current dielectric barrier discharge was studied in detail.A loose coupling method was used to simulate the detonation initiation process of a hydrogen–oxygen mixture in a detonation tube under different actuating voltage amplitudes and discharge gap sizes.Both the discharge products and the detonation forming process assisted by the plasma were analyzed.It was found that the patterns of the temporal and spatial distributions of discharge products in one cycle keep unchanged as changing the two discharge operating parameters.However,the adoption of a higher actuating voltage leads to a higher active species concentration within the discharge zone,and atom H is the most sensitive to the variations of the actuating voltage amplitude among the given species.Adopting a larger discharge gap results in a lower concentration of the active species,and all species have the same sensitivity to the variations of the gap.With respect to the reaction flow of the detonation tube,the corresponding deflagration to detonation transition(DDT) time and distance become slightly longer when a higher actuating voltage is chosen.The acceleration effect of plasma is more prominent with a smaller discharge gap,and the benefit builds gradually throughout the DDT process.Generally,these two control parameters have little effect on the amplitude of the flow field parameters,and they do not alter the combustion degree within the reaction zone.  相似文献   

19.
Silicon etching is an essential process in various applications,and a major challenge for etching process is anisotropic high aspect ratio etching characteristics.The etch profile is determined by the plasma parameters and process parameters.In this study,the plasma state with each process parameters were analyzed through the optical emission spectroscopy(OES)plasma diagnostic sensor by both chemical and physical approaches.Electron temperature and electron density were additionally acquired using the corona model with OES data that provides chemical species information,and the etch profile was evaluated through scanning electron microscope measurement data.The results include changes in profile with gas ratio,bias power,and pressure.We figure out that factors like ion energy and ion angular distribution as well as chemical reaction affect the anisotropic profile.  相似文献   

20.
Electromagnetic interference(EMI) shielding composites with good flexibility and weatherability properties have attracted increased attention. In this study, we combined the surface modification method of sub-atmospheric pressure glow discharge plasma with in situ atmospheric pressure surface dielectric barrier discharge plasma(APSDBD) reduction to prepare polyethylene terephthalate supported silver(Ag/PET). Due to the prominent surface modification of PET film, mild plasma reduction, and effective control of the silver morphology by polyvinylpyrrolidone(PVP), a 3.32 μm thick silver film with ultralow sliver loading(0.022 wt%) exhibited an EMI shielding efficiency(SE) of 39.45 d B at 0.01 GHz and 31.56 d B at 1.0 GHz(30 d B in the range of 0.01–1.0 GHz). The SEM results and EMI shielding analysis indicated that the high performance originated from the synergistic effect of the formation of silver nanoparticles(Ag NPs) with preferentially oriented cell-like surface morphologies and layer-by-layer-like superimposed microstructures inside, which demonstrated strong microwave reflection properties. Fourier transform infrared spectrometer and x-ray diffractometer showed that the surface structures of the heat-sensitive substrate materials were not destroyed by plasma.Additionally, APSDBD technology for preparing Ag/PET had no special requirements on the thickness, dielectric constant, and conductivity of the substrate, which provides an effective strategy for manufacturing metal or alloy films on surfaces of heat-sensitive materials at a relatively low cost.  相似文献   

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