基于Allan方差法的MEMS惯性器件随机噪声分析

地震仪测量的通常为水平分量,而对旋转分量的测量与研究还相对较少.单独运用陀螺仪测量振动的旋转分量,准确度不高,而且测量结果的漂移量较大.基于MEMS惯性器件的无陀螺捷联惯导技术或者陀螺仪-加速度计组合技术,为六自由度振动测量提供了便利.由于受其加工工艺的限制,MEMS惯性器件的测量精度还存在较大的差异,因此需要对MEMS惯性器件的误差特性进行对比测试与分析.文章应用Allan方差法对两种MEMS惯性器件的随机噪声进行了分析,得到了量化噪声、速度随机游走、零偏不稳定性、加速度随机游走、速率斜坡等5项随机噪声指标.随机噪声分析的结果表明,Allan方差法能有效地对MEMS惯性器件的随机噪声进行评估和分析.     

MEMS惯性器件的主要失效模式和失效机理研究

针对微机电系统(MEMS)器件的可靠性问题,通过大量的历史资料调研和失效信息收集等方法,针对微机电系统(MEMS)器件的可靠性问题,对冲击、振动、湿度、温变、辐照和静电放电(ESD)等不同环境应力条件下的MEMS惯性器件典型失效模式及失效机理进行了深入分析和总结,研究结果有利于指导未来MEMS惯性器件的失效分析和可靠性设计.     

超声辅助钛合金切削的表面残余应力数值仿真北大核心CSCD

针对钛合金加工后表面残余应力严重影响其使用性能的问题,采用Johnson-Cook失效准则,通过施加边界条件,以非线性有限元技术Abaqus/Explicit建立了钛合金TC4二维正交切削热力耦合切削仿真模型,分析了超声切削和普通切削在不同切削速度下钛合金的切削过程,获得了不同工况下的表面残余应力分布规律。结论表明:钛合金TC4已加工表面层的残余应力是拉应力,沿深度方向由拉应力逐渐过渡到压应力;在相同的切削参数下,超声切削后工件表面的残余拉应力较普通切削时小,最大残余压应力较普通切削时大,且最大残余压应力出现的位置相对较浅。     

MEMS器件用Cavity-SOI制备中的晶圆键合工艺研究

微机电系统(MEMS)器件用预埋腔体绝缘体上硅(Cavity-SOI)直接键合制备过程中,预埋腔体刻蚀后残余应力导致的衬底层变形会影响绝缘体上硅(SOI)晶圆的面形参数和键合质量.对衬底层残余应力变形与Cavity-SOI键合质量的关系进行了实验研究,分析了衬底片残余应力变形与SOI面形之间的对应关系,用破坏性剪切试验...     

SiC晶须和SU-8复合增强的MEMS惯性开关研究

MEMS惯性开关是通过检测外界的加速度来控制电路通断的器件,在测试控制、消费电子、生物医疗等领域都有较为广泛的应用.之前对惯性开关研究多偏向于性能角度,例如增强接触时间或可以感应多个方向加速度,而忽略了惯性开关中材料的创新性.SU-8负性光刻胶和SiC晶须因其在微机电系统加工技术中的良好表现而引起关注,因此采用SiC晶须掺杂的SU-8负性光刻胶作为MEMS惯性开关可动电极,通过牺牲层工艺将可动电极从基底上脱离之后与固定电极组合构成惯性开关.对掺杂前后的SU-8材料进行了杨氏模量等力学参数的测试,并对制作的惯性开关器件进行了仿真和阈值加速度测试,结果显示掺杂2wt％的SiC晶须之后,增强复合材料的杨氏模量相比纯SU-8胶提高了12％,惯性开关的阈值加速度提高了20％.     

“中国微米纳米”一种低温制备的高灵敏度MEMS电容传声器

MEMS传声器是将声音信号转换成电信号的传感器.目前,MEMS传声器的研究主要涉及 MEMS电容传声器和MEMS压电传声器压阻传感器2种.与其它类型的MEMS传声器相比,MEMS电容传声器具有高灵敏度、高信噪比、频率响应平坦、低温度系数等突出的优点,被广泛使用在便携式设备、多媒体系统、助听器、信息采集等方面.设计和制备了一种高灵敏度的MEMS电容传声器,而且制备器件的工艺温度最高为300 ℃,可以兼容IC工艺.在本文,利用牺牲层的方法实现圆形振动薄膜,避免了方形薄膜存在的应力集中问题,并克服了干法制备圆形薄膜成本高的问题.基于聚酰亚胺材料,优化成膜工艺参数,实现低应力的圆形振动薄膜.通过设计防粘连结构,避免器件释放干燥过程中出现的薄膜粘连问题.根据振动膜应力为5 MPa,半径为2.5 mm,厚度为1 μm,电极半径为380 μm,间隙为1 μm的设计参数进行理论计算,该器件的电容在1 Pa 声压下的变化量为千分之一.与市场流通的MEMS传声器相比,高出约一个数量级,可被用于远场拾音,从信噪比极低的环境中拾取关键的声音信息.     

微惯性测量单元设计及其误差补偿模型的研究

针对微惯性测量单元(MIMU)小体积、低功耗、低成本、高实时性的应用需求,设计了一种基于ARM和MEMS惯性器件的MIMU系统,并根据实验中得到的惯性器件的误差特性建立了一种惯性器件误差补偿模型,然后在硬件系统上进行了实验验证.利用该模型对惯性器件测量结果进行修正,可以有效抑制误差,提高MIMU的测量精度.整个系统能满足使用精度要求.     

MEMS惯性开关的原理及研究进展

MEMS惯性开关是一种无源电子器件,集传感器与执行器为一体,具有尺寸小、制造成本低、可批量生产等多种优点,在玩具、汽车电子、物联网和军事等领域有着广泛的应用前景.由于惯性开关具有在未触发状态时待机功耗为零的特点,其在远程监控等电量有限的应用场景下有着明显的优势.介绍了MEMS惯性开关的基本物理模型和工作原理,并对影响器件工作效果的重要性能参数进行了分析.根据器件的导通方式、接触增强的设计方法、开关的敏感冲击方向和敏感的阈值大小,对国内外研究的惯性开关进行了分类和阐述.此外,还讨论了MEMS惯性开关的微加工工艺和测试.对MEMS惯性开关器件进行了相应的总结和展望,为之后的研究提供了参考.     

圆片级低真空封装的MEMS压电振动能量收集器结构设计

MEMS低真空封装技术能为MEMS器件的可动部分提供低阻尼环境,降低能量损耗,有效提高器件的能量转换效率,具有重要的研究意义和应用前景,是MEMS技术的研究热点和难点。为了进一步提高MEMS压电振动能量收集器的输出性能,提出了圆片级低真空封装的共质量块MEMS压电悬臂梁阵列振动能量收集器新结构,通过有限元分析方法对器件结构参数进行了优化设计,在优化结构参数下仿真器件输出性能：在610 Hz、2 gn加速度下,器件的输出电压为8.88 V,输出功率为1220μW,能满足实际应用需求;根据器件结构设计了加工工艺流程,对低真空封装结构的实现和封装工艺探索具有重要意义。     

针对不同类型热敏MEMS器件的高性能前置放大器设计

针对不同应用的热敏MEMS器件的界面电路设计高性能放大器,提出建立与CMOS工艺兼容的热敏MEMS器件前置放大器的IP库的概念。通过提取相关热敏器件的典型参数,设计低功耗、低噪声且分别符合精度和速度等特殊要求的前置放大器,对3种不同结构的放大器进行分析研究,并利用Cadence软件,基于CSMC 0.5μm标准CMOS工艺库进行设计仿真。仿真结果表明:3种不同结构的放大器可以用于相应性能要求的热敏MEMS器件中。     

Only connect: teaching, technology and telesis

Abstract This paper describes an approach to the design of interactive multimedia materials being developed in a European Community project. The developmental process is seen as a dialogue between technologists and teachers. This dialogue is often problematic because of the differences in training, experience and culture between them. Conditions needed for fruitful dialogue are described and the generic model for learning design used in the project is explained.     

European Community policy and the market

Abstract This paper starts with some reflections on the policy considerations and priorities which are shaping European Commission (EC) research programmes. Then it attempts to position the current projects which seek to capitalise on information and communications technologies for learning in relation to these priorities and the apparent realities of the marketplace. It concludes that while there are grounds to be optimistic about the contribution EC programmes can make to the efficiency and standard of education and training, they are still too technology driven.     

一种自适应子融合集成多分类器方法

融合集成方法已经广泛应用在模式识别领域,然而一些基分类器实时性能稳定性较差,导致多分类器融合性能差,针对上述问题本文提出了一种新的基于多分类器的子融合集成分类器系统。该方法考虑在度量层融合层次之上通过对各类基多分类器进行动态选择,票数最多的类别作为融合系统中对特征向量识别的类别,构成一种新的自适应子融合集成分类器方法。实验表明,该方法比传统的分类器以及分类融合方法识别准确率明显更高,具有更好的鲁棒性。     

Avoiding semantic and temporal gaps in developing software intensive systems

Development of software intensive systems (systems) in practice involves a series of self-contained phases for the lifecycle of a system. Semantic and temporal gaps, which occur among phases and among developer disciplines within and across phases, hinder the ongoing development of a system because of the interdependencies among phases and among disciplines. Such gaps are magnified among systems that are developed at different times by different development teams, which may limit reuse of artifacts of systems development and interoperability among the systems. This article discusses such gaps and a systems development process for avoiding them.     

Designing economic np control charts: A programmed simulation approach

This paper presents control charts models and the necessary simulation software for the location of economic values of the control parameters. The simulation program is written in FORTRAN, requires only 10K of main storage, and can run on most mini and micro computers. Two models are presented - one describes the process when it is operating at full capacity and the other when the process is operating under capacity. The models allow the product quality to deteriorate to a further level before an existing out-of-control state is detected, and they can also be used in situations where no prior knowledge exists of the out-of-control causes and the resulting proportion defectives.     

The development of robot art

Going through a few examples of robot artists who are recognized worldwide, we try to analyze the deepest meaning of what is called “robot art” and the related art field definition. We also try to highlight its well-marked borders, such as kinetic sculptures, kinetic art, cyber art, and cyberpunk. A brief excursion into the importance of the context, the message, and its semiotics is also provided, case by case, together with a few hints on the history of this discipline in the light of an artistic perspective. Therefore, the aim of this article is to try to summarize the main characteristics that might classify robot art as a unique and innovative discipline, and to track down some of the principles by which a robotic artifact can or cannot be considered an art piece in terms of social, cultural, and strictly artistic interest. This work was presented in part at the 13th International Symposium on Artificial Life and Robotics, Oita, Japan, January 31–February 2, 2008     

Explanation and prediction: an architecture for default and abductive reasoning

Although there are many arguments that logic is an appropriate tool for artificial intelligence, there has been a perceived problem with the monotonicity of classical logic. This paper elaborates on the idea that reasoning should be viewed as theory formation where logic tells us the consequences of our assumptions. The two activities of predicting what is expected to be true and explaining observations are considered in a simple theory formation framework. Properties of each activity are discussed, along with a number of proposals as to what should be predicted or accepted as reasonable explanations. An architecture is proposed to combine explanation and prediction into one coherent framework. Algorithms used to implement the system as well as examples from a running implementation are given.     

Three Process Perspectives: Organizations, Teams, and People

This paper provides the author's personal views and perspectives on software process improvement. Starting with his first work on technology assessment in IBM over 20 years ago, Watts Humphrey describes the process improvement work he has been directly involved in. This includes the development of the early process assessment methods, the original design of the CMM, and the introduction of the Personal Software Process (PSP)^SM and Team Software Process (TSP){^SM}. In addition to describing the original motivation for this work, the author also reviews many of the problems he and his associates encountered and why they solved them the way they did. He also comments on the outstanding issues and likely directions for future work. Finally, this work has built on the experiences and contributions of many people. Mr. Humphrey only describes work that he was personally involved in and he names many of the key contributors. However, so many people have been involved in this work that a full list of the important participants would be impractical.     

基于复小波噪声方差显著修正的SAR图像去噪

提出了一种基于复小波域统计建模与噪声方差估计显著性修正相结合的合成孔径雷达(Synthetic Aperture Radar,SAR)图像斑点噪声滤波方法。该方法首先通过对数变换将乘性噪声模型转化为加性噪声模型,然后对变换后的图像进行双树复小波变换(Dualtree Complex Wavelet Transform,DCWT),并对复数小波系数的统计分布进行建模。在此先验分布的基础上,通过运用贝叶斯估计方法从含噪系数中恢复原始系数,达到滤除噪声的目的。实验结果表明该方法在去除噪声的同时保留了图像的细节信息,取得了很好的降噪效果。     

How do children do mathematics with LOGO?

Abstract  This paper considers some results of a study designed to investigate the kinds of mathematical activity undertaken by children (aged between 8 and 11) as they learned to program in LOGO. A model of learning modes is proposed, which attempts to describe the ways in which children used and acquired understanding of the programming/mathematical concepts involved. The remainder of the paper is concerned with discussing the validity and limitations of the model, and its implications for further research and curriculum development.