Ultra-precision positioning using adaptive fuzzy-Kalman filter observer

In this paper, we design a hybrid controller based on adaptive fuzzy-Kalman filter observer. With external disturbances, it is hard to predict the measurement noise precisely under time varying environments. In order to improve the precision of the measuring instrument, the measurement noise covariance is updated so as to minimize the discrepancy which resides in the estimation and measurement by using Kalman filter observer and fuzzy control with covariance-matching technique.Then a new robust controller is presented by applying LQ-sliding mode control in the positioning system. Through some simulation results, the effectiveness of the proposed controller is proved. In spite of the applied disturbance signal, the LQ-sliding mode control based on fuzzy-Kalman filter observer maintains the stage position within a performance requirement and reduces the chattering effect.     

A novel inverse modeling control for piezo positioning stage

Journal of Mechanical Science and Technology - This paper focuses on the application of a novel inverse nonlinear autoregressive with exogenous input (NARX) structure and a fuzzy inference system...     

压电陶瓷微动台的复合控制

压电陶瓷微动台的迟滞非线性严重影响其动态定位精度,为了解决这一问题,采用一种改进的PI模型对微动台的迟滞非线性进行了建模.为了提高传统PID算法对压电陶瓷微动台的动态定位性能,将改进的PI模型与传统PID算法组合构成前馈复合控制算法,并进行了微动台的慢速与快速动态定位实验.结果表明,对同频曲线定位时,前馈PID复合算法的最大误差为传统PID算法的40％左右,平均误差为传统算法的20％～30％左右;对多频曲线定位时,前馈PID复合算法的最大误差和平均误差为传统PID算法的33％左右.数据表明前馈PID复合算法的动态定位性能明显优于传统PID算法.     

A model observer in a system for control of a pneumatic positioning actuator

Use of IT (a model observer) for reduction to the minimum of the number of sensors in a dynamic controllable system is discussed. The problem is solved using as an example a positioning actuator with a pneumatic engine that is the most collapsible element. It is assumed that a single sensor of the motion of the actuator is installed on the engine. The signals indicating other variables describing the state (velocity, acceleration, etc.) included in the feedback loop are generated by an observer that is constructed on the basis of a linearized nonlinear model of the controlled object (actuator). A procedure for synthesis of the structure and parameters of the actuator-observer system is discussed, as well as ways to implement the control system with an observer in digital form. Examples of numerical solution and preliminary estimates of observer applicability in controllable actuator systems are presented.     

基于降维观测器的系统最优容错控制

针对含有传感器故障的线性连续系统,利用Riccati矩阵方程设计了故障情况下的动态最优容错控制律,并设计了能同时检测出系统状态和故障状态的增广的降维故障检测器,从而实现了系统的故障检测和容错控制并能满足二次型性能指标.仿真实例验证了这种方法简单有效.     

多轴亚微米级平面定位台的滑模观测器无传感控制

针对Sawyer电机驱动的平面定位台的多轴精密定位问题(X、Y和θz轴),提出了一种新的部分无传感控制方法。用激光干涉仪检测定位台一个方向上的平移运动和摆动,并构建相应的闭环控制;同时,应用滑模观测器估计另一个方向上的平移运动并构建对应轴的闭环控制。在此基础上,通过实验从开环控制、多轴全闭环控制及部分无传感控制三方面对比了定位性能。实验结果表明:采用部分无传感控制,多轴平面定位台的重复定位精度达到亚微米(0.25μm)级;部分无传感控制下的动子行程与开环控制相同(X轴300mm、Y轴300mm),远大于基于多轴位置传感的全闭环控制下的动子行程(X轴100mm、Y轴100mm);获得的结果可满足应用设计要求。     

Modified reduced order observer based linear active disturbance rejection control for TITO systems

This paper proposes an observer based control approach for two input and two output (TITO) plant affected by the lumped disturbance which includes the undesirable effect of cross couplings, parametric uncertainties, and external disturbances. A modified reduced order extended state observer (ESO) based active disturbance rejection control (ADRC) is designed to estimate the lumped disturbance actively as an extended state and compensate its effect by adding it to the control. The decoupled mechanism has been used to determine the controller parameters, while the proposed control technique is applied to the TITO coupled plant without using decoupler to show its efficacy. Simulation results show that the proposed design is efficiently able to nullify the interactions within the loops in the multivariable process with better transient performance as compared to the existing proportional-integral-derivative (PID) control methods. An experimental application of two tanks multivariable level control system is investigated to present the validity of proposed scheme.     

Nano force sensing using symmetric double stage micro resonator

A new approach is proposed to improve a graphical approach with considering intensity coupling loss coefficients in the analytical derivation of the optical transfer functions for a symmetric double stage vertically coupled microring resonator. An optimum transmission coupling condition is determined with considering terms of couplers intensity loss which leads to low insertion loss of 1.2 dB, finesse of 1525, the out of band rejection ratio of 61.8 dB. The resonating system is used as an optical force sensing system to make the benefit of the accuracy of measurements in micro and nano scales. The sensitivity of proposed force sensor in terms of wavelength-shift is 33 nm/nN and the limit of detection is 1.6 × 10⁻² nN. The proposed sensing system has the advantages of self-calibration and the low power consumption due to the low intensity.     

LED chip accurate positioning control based on visual servo using dual rate adaptive fading Kalman filter

In this paper, to improve the positioning accuracy of LED chip, a dual rate adaptive fading Kalman filter algorithm with delay compensation is proposed and applied to the LED chip visual servo positioning system. Firstly, a structure of dual rate Kalman filter is introduced to the visual servo control system, which compensate the visual information delay and realize the accurate time sequential coordination of encoder and visual feedback. Then, considering the inaccuracy of system mathematical model, the adaptive forgetting factor is added to the iterative process of above algorithm, and the impact of accumulated model error on system stability is consequently mitigated. Finally, the experimental results show that the proposed method obviously decreases the positioning errors of LED chip and is robust to inaccuracy and uncertainty of system model parameters.     

Extended observer based on adaptive second order sliding mode control for a fixed wing UAV

This paper addresses the design of attitude and airspeed controllers for a fixed wing unmanned aerial vehicle. An adaptive second order sliding mode control is proposed for improving performance under different operating conditions and is robust in presence of external disturbances. Moreover, this control does not require the knowledge of disturbance bounds and avoids overestimation of the control gains. Furthermore, in order to implement this controller, an extended observer is designed to estimate unmeasurable states as well as external disturbances. Additionally, sufficient conditions are given to guarantee the closed-loop stability of the observer based control. Finally, using a full 6 degree of freedom model, simulation results are obtained where the performance of the proposed method is compared against active disturbance rejection based on sliding mode control.     

High-precision positioning stage using optical zooming laser interferometer for linear encoder calibration

A high-resolution positioning system for linear encoder calibration was developed. The optical sources were stabilized to a femtosecond optical comb for high accuracy and direct traceability to the optical frequency comb. This system showed a control resolution of 17 pm by using an optical zooming interferometer. The stability of the stage was 4.5 nm at 200 seconds, which can be improved by easy modification of optical setup and lasers.     

Fuzzy sliding mode observer with dual SOGI-FLL in sensorless control of PMSM drives

To improve the performance of permanent-magnet synchronous motor (PMSM) drives, a sensorless control scheme based on a sliding mode observer (SMO) with a fuzzy logic controller (FLC) and a dual second-order generalized integrator-frequency locked loop (DSOGI-FLL) is proposed in this paper. The major drawbacks of the conventional SMO, namely chattering phenomena, high-order harmonics and external noise, are discussed. These drawbacks affect the estimated accuracy of the SMO and reduce the control reliability of the system. To eliminate these drawbacks, an FLC is designed and integrated into the SMO to adjust the observer gain in a self-adaptive manner and to reduce the chattering; an existing dual synchronous frequency extract filter-phase locked loop (DSFF-PLL) is used to filter out the main components of high-order harmonics and to calculate the rotor position and speed precisely. Furthermore, to obtain an accurate fundamental frequency for the phase locked loop (PLL) and filter out the remaining harmonics and external noise signals, DSOGI-FLL processing is developed and incorporated into the DSFF-PLL. An overall PMSM sensorless control system based on the proposed SMO is designed, and an experimental platform using the TMS320F28335 DSP controller is built. Comparative experiments using the proposed SMO and the conventional SMO are performed to validate the effectiveness of the proposed FLC and the DSFF-DSOGI-FLL-PLL structures. Performance experiments of the overall proposed SMO-based sensorless control scheme are performed to verify the robustness and control reliability of the system. The results show that the proposed SMO has satisfactory performances and can be used in practical engineering.     

Compact maglev stage system for nanometer-scale positioning

Semiconductor manufacturing systems and ultra-precise machine tools now require nanometer-scale positioning accuracy. To improve positioning accuracy, it is efficient to support the top table with a noncontact guide system to prevent guide friction and heat transfer from the lower table or base. A magnetic levitation (maglev) stage can accomplish ultra-precise positioning accuracy with six-degrees-of-freedom (6DOF) control even in vacuum conditions. However, if the gravity of the levitated table is supported by the thrust of a linear motor, heat generation from the motor coil dramatically increases. In addition, a larger motor is required, which causes the moving mass to increase and the mechanical response to deteriorate. We aimed to develop a compact maglev stage for which the levitated mass is less than 1 kg and that is dramatically more lightweight than existing maglev stages. This compact feature was enabled by our newly proposed gravity compensation system with repellent force and a planar motor structure. The developed stage system also has long strokes, specifically 200 mm in the X and Y-directions on a horizontal plane. We designed a maglev stage with the following design concepts to create its compact structure: (1) Reduce top-table mass to minimize the motor dimensions and enable a light weight and high responsiveness. (2) Measure the top-table position from the base to eliminate positioning error and isolate vibrations of the coarse stage. (3) Install a motor in a symmetrical layout in view from the Z-axis to enable the same driving characteristics between the X and Y axes. The results of the performance evaluation showed that the developed maglev stage system with a compact structure with 0.81 kg levitated mass has ±10 nm positioning stability.     

State of charge estimation of lithium-ion batteries using fractional order sliding mode observer

This paper presents a state of charge (SOC) estimation method based on fractional order sliding mode observer (SMO) for lithium-ion batteries. A fractional order RC equivalent circuit model (FORCECM) is firstly constructed to describe the charging and discharging dynamic characteristics of the battery. Then, based on the differential equations of the FORCECM, fractional order SMOs for SOC, polarization voltage and terminal voltage estimation are designed. After that, convergence of the proposed observers is analyzed by Lyapunov’s stability theory method. The framework of the designed observer system is simple and easy to implement. The SMOs can overcome the uncertainties of parameters, modeling and measurement errors, and present good robustness. Simulation results show that the presented estimation method is effective, and the designed observers have good performance.     

Optimum specimen positioning in the electron microscope using a double-tilt stage

Optimal imaging of complex structures requires proper alignment relative to the optic axis of the electron microscope. This is especially important for high-voltage and intermediatevoltage microscopes, which form an in-focus image throughout the entire thickness of the object. As a result, structures at different specimen heights form overlapping and confused images that severely curtail the usefulness of these instruments. The work described here provides a generalized, flexible method for optimizing specimen orientation and eliminating or limiting image overlap by means of a commonly used double-tilt stage. Analysis of the motion about the two axes provides accurate tilting for any azimuthal direction whether or not it corresponds to a mechanical axis of the stage. An object can be positioned to minimize image overlap, to record stereopairs for any parallax axis, and to record three-dimensional data sets by the conical collection geometry. Images of muscle paracrystals are shown after tilting about an axis perpendicular to a symmetry direction. The tilted image displays higher-order symmetry, which is altered by changes of one degree. Precision double-tilting for optimizing stereopairs is shown for a desmosome recorded using different parallax axes and pretilts. A tomographic conical data-collection scheme is demonstrated by imaging a microtubule axoneme for a specific cone half-angle and arbitrary azimuthal angles.     

Adaptive MRAC-based direct torque control with SVM for sensorless induction motor using adaptive observer

This paper presents an improved direct torque control (DTC) method for induction motor (IM) drive. The main drawback of the conventional DTC is the use of hysteresis comparators which leads to high torque and flux ripples. The improvement in this paper includes using the space vector modulation to preserve a constant switching frequency and to reduce totally flux and torque ripples. Besides, the torque and stator flux regulation will be done based on model reference adaptive control (MRAC) strategy to ensure a robust control against external disturbance and less sensitivity from machine parameter variation unlike the conventional proportional-integral (PI) controllers. Furthermore, a design of an adaptive observer based on Lyapunov stability is presented for speed/flux and load torque estimation. The observer can improve the control performances and decrease the cost and increase reliability of the global control system by reducing the number of sensors. The proposed strategy will be examined under simulation tests using Matlab/Simulink and experimental implementation with real-time interface (RTI) based on dSpace 1104 board.     

Metrological atomic force microscope using a large range scanning dual stage

We developed a metrological atomic force microscope (MAFM) using a large range scanning dual stage and evaluated the performance in the measurement of lateral dimension. AFMs are widely used in nanotechnology for very high spatial resolution, but the limitation in measurement range should be overcome to expand its application in nanometrology. Therefore, we constructed new MAFM having a large measurement of 200 mm × 200 mm by using a dual stage and an AFM head module. The dual stage is composed of a coarse and a fine stage to obtain large scanning range and high resolution simultaneously. Precision surfaces and PTFE sliding pads guide the motion of coarse stage, drove by a fine pitch screw and DC motors. Flexure hinges and PZT actuators are utilized for the fine stage. Multi-axis interferometers measure the five degrees of freedom motion of the dual stage for the position control and the compensation of parasitic angular motions. The vertical displacement of AFM tip is measured by a built-in capacitive sensor in the AFM head module within the range of 38 μm. The performance of the dual stage was evaluated and the expanded uncertainty (k = 2) in the measurements of 1-D displacement L was estimated as $ U(L) = \sqrt {(2.8nm)^2 + (3.0 \times 10^{ - 7} \times L)^2 } $ U(L) = \sqrt {(2.8nm)^2 + (3.0 \times 10^{ - 7} \times L)^2 } . The relative uncertainty in pitch measurement was less than 0.02 % and the improvement of accuracy was verified by comparing with other MAFM, which are mostly due to the expansion of scan range and the compensation of angular motion. To enhance the performance, we will reduce the vibration and examine the motion of stage in the vertical direction during a long range scan.     

Adaptive observer design for nonlinear systems using generalized nonlinear observer canonical form

In this paper, we present an adaptive observer for nonlinear systems that include unknown constant parameters and are not necessarily observable. Sufficient conditions are given for a nonlinear system to be transformed by state-space change of coordinates into an adaptive observer canonical form. Once a nonlinear system is transformed into the proposed adaptive observer canonical form, an adaptive observer can be designed under the assumption that a certain system is strictly positive real. An illustrative example is included to show the effectiveness of the proposed method.     

利用补偿提高精密定位平台的定位精度

系统误差在较大程度上影响精密定位平台的定位精度,必须采取适当措施进行消除。反相补偿法可以大幅度消除系统误差的影响,是一种易行有效、花费较少的补偿手段。运用反相补偿法原理,从误差曲线中分离出系统误差并与其反相曲线叠加以消除系统误差的影响。给出了对精密定位平台宏动工作台和微动工作台进行补偿的具体实例,补偿后定位精度分别从17.4μm提高到1.3μm和从137.6 nm提高到22.2nm。理论分析和实验结果都表明,反相补偿法对于降低系统误差十分有效,但对于随机误差效果不佳。     

定位运动平台气浮导轨设计

针对高加速度高精度定位气浮平台对气浮导轨高刚度高承栽能力的要求,采用二维线性插值和有限元法推导平面气浮空气轴承的静态性能公式,利用数学软件MATLAB编写有限元程序计算气浮导轨的静态性能并分析相关参数对静态性能的影响.有限元分析结果表明:当气浮平台中节流孔之问的排距与气浮面宽度的比值为一定值、气浮厚度为另一定值时,气浮平台的角刚度和承栽能力得到较优值.研究结果为气浮导轨的静态性能优化提供了理论参考,为气浮平台的结构优化提供了方向.