基于AFM纳米硬度测量系统的实验

为了解决用AFM自身压痕软件进行纳米硬度测量时无法直接获得载荷-压深曲线和由于受到扫描陶管扫描范围的限制而进行多点压痕实验范围有限的问题,建立了三维微动工作台和原子力显微镜相结合的纳米压痕硬度测量系统.基于该系统,对单晶薄膜材料进行了单点压痕实验,得出该系统适合进行纳米硬度测量的结论;并对薄膜材料的纳米硬度和弹性模量进行了分析,讨论了尺寸效应对两者的影响.另外,进行了40×40的点阵压痕实验,得到了材料整个压痕面的三维形貌图和三维硬度图.     

用于纳米级表面形貌测量的光学显微测头

为了满足纳米级表面形貌样板的高精度非接触测量需求,研制了一种高分辨力光学显微测头。以激光全息单元为光源和信号拾取器件,利用差动光斑尺寸变化探测原理,建立了微位移测量系统,结合光学显微成像系统,形成了高分辨力光学显微测头。将该测头应用于纳米三维测量机,对台阶高度样板和一维线间隔样板进行了测量实验。结果表明：该光学显微测头结合纳米三维测量机可实现纳米级表面形貌样板的可溯源测量,具有扫描速度快、测量分辨力高、结构紧凑和非接触测量等优点,对解决纳米级表面形貌测量难题具有重要实用价值。     

利用计量型原子力显微镜进行纳米台阶高度测量

计量型原子力显微镜纳米测量系统主要由扫描器、测针位置传感器和一体化微型激光干涉三维测量系统等部分构成．针对计量型原子力显微测量系统,采用三维激光干涉测量系统作为测量基准,以实现原子力测量系统的纳米尺度量值溯源和校准工作．建立了校准模型,分析了扫描器9项主要误差项,并将该模型应用到原子力显微镜扫描器的校准中．校准后的结果表明,除z轴位置误差不超过±2nm外,其他8项的残余误差均不超过±1nm．通过台阶高度国际比对,建立了台阶高度标准计算方法及不确定度分析模型．台阶高度国际比对的测量结果表明,计量型原子力显微镜的测量值与参考值相差均小于1．5nm．     

浩视（中国）有限公司

HIROX公司成立于1978年，是日本著名的光学镜头及集成显微系统制造商。自创立以来公司始终位于世界数字显微光学设计和系统制造领域的最前沿。其专利产品三维视频显微系统能提供最大7000倍的显微观察，既能方便地存储高清晰的图像又可快速地重建及测量三维立体形貌。桌上型扫描电镜放大30-100000倍，分辨率5纳米。长工作距离显微镜的工作距离从15厘米到1米以外，最佳分辨率1．1微米。浩视（中国）有限公司系HIROX在华子公司，负责提供售前和售后服务。     

纳米压痕硬度计测方法的研究进展

针对纳米尺度下的材料硬度测量,利用纳米硬度计得到压痕的载荷-压深曲线,并用原子力显微镜得到压痕的三维形貌图.通过载荷-压深曲线和压痕形貌图,以及相应的计算方法,可以得到纳米压痕硬度.纳米压痕硬度计测方法不同,得到的材料硬度值也不同.分析现有的几种纳米压痕硬度计测方法,找出它们的优缺点,并对未来发展方向做了展望.     

对计量型原子力显微镜纳米测量系统的比对验证

原子力显微镜是广泛应用的纳米测量仪器。中国计量科学研究院成功研制了计量型原子力显微镜纳米测量系统,本文介绍了该系统的技术特点和指标,并通过与发达国家的比对测试验证了该系统在测量原理、测量精度及可溯源性方面已达到了国际先进水平。     

对计量型原子力显微镜纳米测量系统的比对验证

原子力显微镜是广泛应用的纳米测量仪器。中国计量科学研究院成功研制了计量型原子力显微镜纳米测量系统，本文介绍了该系统的技术特点和指标，并通过与发达国家的比对测试验证了该系统在测量原理、测量精度及可溯源性方面已达到了国际先进水平。     

NiTi形状记忆合金硬度的不唯一性

试验中通常认为SMA较软,但采用不同的入射光源照明所观察到的硬度压痕有明显的差别,用原子力显微镜（AFM）研究维氏显微硬度压痕,得到定量的三维压痕形貌,观察到SMA的压痕呈星形分布,而不是正方形,表现出硬度的不唯一性,其主要原因是SMA的超弹性。     

两面顶低温超高压烧结纳米碳化硅的研究

采用两面顶低温超高压（LT-HP）技术在压力4．5GPa、温度（1250±50）℃、烧结时间20min的条件下烧结制备了纳米碳化硅（SiC）陶瓷，研究了烧结体的物相组成、化学成分、微观结构、显微硬度、纳米压痕力学性能等。结果表明，不添加烧结助剂且在较低温度下获得的SiC烧结体的相对密度高达98．4％，其显微硬度达到HV3520；纳米压痕测试硬度高达H31．74GPa、弹性模量E313GPa；烧结体的晶粒尺寸约为89nm，结构致密，无气孔。     

激光干涉共焦显微镜

光学共焦显微镜现己广泛地应用于微机械、生物样品、材料及微电子器件的三维测量,但经典的光学共焦显微镜由于原理性限制,其分辨率与精确度远低于接触式传感器。现结合双频激光干涉仪和共焦显微镜的优点,使激光干涉共焦显微镜不仅横向分辨率高,而且使纵向分辨率达到0．1nm,扩展不确定度U95=13．4nm,使之能测量纳米量级形位变化,而且测量值直接溯源至激光波长。     

Adaptive optics in microscopy

The imaging properties of optical microscopes are often compromised by aberrations that reduce image resolution and contrast. Adaptive optics technology has been employed in various systems to correct these aberrations and restore performance. This has required various departures from the traditional adaptive optics schemes that are used in astronomy. This review discusses the sources of aberrations, their effects and their correction with adaptive optics, particularly in confocal and two-photon microscopes. Different methods of wavefront sensing, indirect aberration measurement and aberration correction devices are discussed. Applications of adaptive optics in the related areas of optical data storage, optical tweezers and micro/nanofabrication are also reviewed.     

Tour de force microscopy

Scanning probe microscopy (SPM) is capable of imaging synthetic polymers and biomolecular systems at sub-molecular resolution, without the need for staining or coating, in a range of environments including gas and liquid, so offering major advantages over other forms of microscopy. However, there are some limitations, which could be alleviated by (i) reducing the force interaction between the probe and specimen and (ii) increasing the rate of imaging. New developments in instrumentation from the SPM group at the University of Bristol to overcome these limitations are discussed and illustrated here.The invention of scanning tunneling microscopy (STM) in 1981 began a revolution in microscopy¹, which has led to a whole new family of about a dozen microscopies known collectively as scanning probe microscopy (SPM). The importance of this development is comparable to that of the invention of electron microscopy in the 1930s and arguably as fundamental as the development of the first optical microscopes, since SPM uses an entirely different principle from optical and electron microscopy to achieve imaging at high resolution.     

Application of carbon extraction replicas in grain-size measurements of high-strength steels using TEM

In this paper, the application of carbon extraction replicas in grain-size measurements is introduced and discussed. Modern high-strength microalloyed steels, used as structural or pipeline materials, have very small grains with substructures. Replicas used in transmission electron microscopes can resolve the grain boundaries and can be used for systematic measurement of grain size in cases where the small size of the grains pushes the resolution of conventional optical microscopes. The grain-size variations obtained from replicas are compared with those obtained from optical and scanning electron microscopy. An emphasis is placed on the importance of using the correct technique for imaging and the optimal magnification. Grain-size measurements are used for estimation of grain-boundary strengthening contribution to yield strength. The variation in grain size is also correlated with hardness in the base metal of several microalloyed steels, as well as the fine-grained heat-affected zone of a weld structure with several heat inputs.     

Theory of near-field magneto-optical imaging

Scanning near-field optical microscopy has been recently applied to the imaging of magnetic samples. It was shown experimentally that an apertureless microscope suffers a substantial loss of resolution when used for magneto-optical imaging compared with that for conventional imaging. No such change is observed for aperture microscopes. We explain this observation by developing a model for the imaging process that incorporates the response of the probe. We calculate real observable properties such as the rotation of polarization at the detector or the circular dichroism signal and thus simulate magneto-optical images of a domain structure in cobalt for both aperture and apertureless microscopes.     

Confocal simultaneous phase-shifting interferometry

In order to implement the ultraprecise measurement with large range and long working distance in confocal microscopy, confocal simultaneous phase-shifting interferometry (C-SPSI) has been presented. Four channel interference signals, with π/2 phase shift between each other, are detected simultaneously in C-SPSI. The actual surface height is then calculated by combining the optical sectioning with the phase unwrapping in the main cycle of the interference phase response, and the main cycle is determined using the bipolar property of differential confocal microscopy. Experimental results showed that 1?nm of axial depth resolution was achieved for either low- or high-NA objective lenses. The reflectivity disturbance resistibility of C-SPSI was demonstrated by imaging a typical microcircuit specimen. C-SPSI breaks through the restriction of low NA on the axial depth resolution of confocal microscopy effectively.     

Imaging systems and materials characterization

This paper provides a broad background for the historical development and modern applications of light optical metallography, scanning and transmission electron microscopy, field-ion microscopy and several forms of scanning probe microscopes. Numerous case examples illustrating especially synergistic applications of these imaging systems are provided to demonstrate materials characterization especially in the context of structure-property-performance issues which define materials science and engineering.     

Low Voltage Transmission Electron Microscopy of Graphene

The initial isolation of graphene in 2004 spawned massive interest in this two‐dimensional pure sp² carbon structure due to its incredible electrical, optical, mechanical, and thermal effects. This in turn led to the rapid development of various characterization tools for graphene. Examples include Raman spectroscopy and scanning tunneling microscopy. However, the one tool with the greatest prowess for characterizing and studying graphene is the transmission electron microscope. State‐of‐the‐art (scanning) transmission electron microscopes enable one to image graphene with atomic resolution, and also to conduct various other characterizations simultaneously. The advent of aberration correctors was timely in that it allowed transmission electron microscopes to operate with reduced acceleration voltages, so that damage to graphene is avoided while still providing atomic resolution. In this comprehensive review, a brief introduction is provided to the technical aspects of transmission electron microscopes relevant to graphene. The reader is then introduced to different specimen preparation techniques for graphene. The different characterization approaches in both transmission electron microscopy and scanning transmission electron microscopy are then discussed, along with the different aspects of electron diffraction and electron energy loss spectroscopy. The use of graphene for other electron microscopy approaches such as in‐situ investigations is also presented.     

近贴X射线成像系统调制传递特性联合检测方法

利用光学调制传递函数评价原理,在建立了各个成像子系统信号传递关系的基础上,提出了一种近贴式X射线成像光学调制传递特性检测方法。从像增强器约束、射线源约束和噪声约束这3个角度对近贴式X射线成像系统光学调制传递函数进行理论定标。将近贴式X射线成像系统后端的CCD望远系统换成CCD显微系统并对不同空间分辨率的铅栅进行成像与对比度拟合。实验结果表明:时域均衡可以有效提高拟合精度。其拟合结果表明空间分辨率为10线对/mm时其调制传递函数仍有10%,与理论定标结果基本一致。故传统近贴式X射线成像系统的望远光学镜头分辨率才是真正的成像瓶颈。     

Transmission-type angle deviation microscopy

We present a new microscopy technique that we call transmission angle deviation microscopy (TADM). It is based on common-path heterodyne interferometry and geometrical optics. An ultrahigh sensitivity surface plasmon resonance (SPR) angular sensor is used to expand dynamic measurement ranges and to improve the axial resolution in three-dimensional optical microscopy. When transmitted light is incident upon a specimen, the beam converges or diverges because of refractive and/or surface height variations. Advantages include high axial resolution (approximately 32 nm), nondestructive and noncontact measurement, and larger measurement ranges (+/- 80 microm) for a numerical aperture of 0.21 in a transparent measurement medium. The technique can be used without conductivity and pretreatment.