TC4钛合金表面电弧离子镀TiN/CrN纳米多层薄膜研究

用电弧离子镀技术在TC4钛合金基体上通过改变偏压制备了4组TiN/CrN薄膜,对薄膜的表面形貌、厚度、相结构、硬度、膜基结合力和摩擦系数等组织、性能进行了测试表征。结果表明,薄膜是由TiN相和CrN交替叠加构成的纳米多层薄膜,薄膜的调制周期为60 nm,总的厚度约为480 nm。与基体钛合金相比,镀膜后样品的表面性能与偏压幅值密切相关并有显著提高:显微硬度从基体的3 GPa提高到16.5~24.7 GPa;摩擦系数从基体的0.35大幅度降低到0.14~0.17;薄膜与基体结合牢固,膜基临界载荷在60~80N之间。经电弧离子镀TiN/CrN纳米多层薄膜处理后,TC4钛合金可以满足沙粒和尘埃磨损条件下的耐磨性能要求。     

脉冲偏压电弧离子镀CrAlN薄膜研究

在高速钢和不锈钢基体上用脉冲偏压电弧离子镀技术制备了CrAlN薄膜,研究了脉冲偏压对薄膜成分、结构和性能的影响,并进行了900℃下的高温抗氧化性能检测。结果表明,薄膜中Al的相对含量随着脉冲偏压的增加而降低;薄膜的相结构由立方CrN和Al相组成;薄膜的硬度随脉冲偏压的增加而增大,在偏压幅值为-500 V时,硬度可达21.5 GPa;薄膜具有高达70 N的膜基结合力;此外,薄膜在900℃的大气中保温10 h,没有出现明显的氧化现象;在合成的三种薄膜中,在脉冲偏压为-500 V×40 kHz×40%时的薄膜具有最好的综合性能。     

负偏压对PET上磁控溅射氧化铝薄膜的影响

以PET(对苯二甲酸已二醇脂)为基体,采用磁控溅射方法在其上制备Al2O3阻隔膜,研究负偏压对基体温度、镀膜表面形貌和镀膜化学成份的影响.研究表明,基体温度随着负偏压的增加而升高;Al2O3薄膜的表面形貌随着负偏压的增加粗糙度显著降低.XPS分析表明薄膜是满足化学成分配比的AlO3,而且薄膜的成分在较大的负偏压的范围内保持稳定;适当的负偏压有利于提高薄膜的阻隔性.     

高功率脉冲磁控放电等离子体注入与沉积CrN薄膜研究

采用高功率脉冲磁控放电等离子体离子注入与沉积的方法在不锈钢基体上制备了高膜基结合力的CrN硬质薄膜,并研究了不同的Ar/N流量比对薄膜形貌、结构及性能的影响.采用扫描电子显微镜、X射线衍射对其表面形貌和结构进行分析,发现制备的薄膜表面光滑、致密,相结构单一,主要是CrN(200)相.对薄膜的结合力、硬度、弹性模量、耐磨...     

基体负的低偏压对氟化非晶态碳膜结构及性能的影响

为了研究基体负的低偏压Vb对氟化非晶态碳膜的结构、纳米硬度和疏水性能的影响,采用等离子体浸没与离子注入装置,CF4和CH4作为气源,在不同的基体偏压下制备了一系列氟化非晶态碳膜.使用XPS、ATR-FTIR和Raman谱对其成份和结构进行了表征.薄膜硬度通过纳米压痕仪进行测量,采用躺滴法测量薄膜与双蒸水之间的接触角来评价其疏水性能.XPS和FTIR结果表明薄膜中存在C-CF、C-Fx基团.Raman谱结果表明:随着基体偏压的增加,薄膜从类聚合物状结构逐渐转变为类金刚石结构,薄膜的硬度逐渐增加.接触角测量结果表明:在低偏压范围内,单纯地依靠调节偏压并不能显著地提高薄膜的疏水性能.     

基底负偏压对直流磁控溅射CrN薄膜择优取向及表面形貌的影响

直流磁控溅射法制备不同基底负偏压下的CrN薄膜,采用XRD分析薄膜相结构,EDS分析薄膜表面成分,SEM观察薄膜表面形貌,并对偏压作用机制进行了探讨。结果表明,当Ar流量6ml/min、N2流量30ml/min时,在基底负偏压增大过程中,CrN薄膜始终由CrN相组成,但薄膜生长发生了(111)(-50V)向(200)(-125V)再向无明显择优生长(-225V)的转变。低偏压时,CrN薄膜[111]向[200]取向转变主要是轰击表面氮离子浓度增加导致;高偏压时,薄膜中Ar浓度大幅增长,高能离子长时间轰击破坏晶粒取向性,使薄膜呈无择优取向。同时,负偏压增加使薄膜表面形貌从具有棱角的不规则形状逐渐变为粒状结构,且晶粒逐渐细小。     

磁控溅射工艺参数对氧化钛薄膜晶体结构的影响

用非平衡磁控溅射技术制备氧化钛薄膜.研究了基体偏压、沉积温度、基体性质及溅射功率对薄膜晶体结构的影响.结果表明,到达基体的粒子的能量和离子/原子比是影响氧化钛薄膜晶体结构的主要因素;而到达基体的离子/原子比是生成完全金红石结构氧化钛薄膜的决定性因素.     

氮气流量对电弧离子镀CrN薄膜组织结构和性能的影响

利用电弧离子镀技术在高速钢基体上于不同氮气流量条件下制备CrN薄膜样品,通过纳米压痕仪、XP-2台阶仪、SEM和XRD测试分析了薄膜的硬度、弹性模量、厚度、表面形貌和物相结构.实验结果表明,氮气流量对CrN薄膜的组织结构和力学性能都具有较为明显的影响.     

AZ31镁合金表面低偏压磁控溅射TiAlN薄膜的结构与耐蚀耐磨性能

针对镁合金不抗蚀、不耐磨2大问题,采用直流磁控溅射的方法,通过对基体施加偏压调控,在AZ31镁合金表面制备了TiAlN薄膜.借助XRD和SEM等方法研究了薄膜的微观结构,通过电化学工作站和销盘式摩擦磨损试验机评估了薄膜的耐腐蚀和耐磨性能.结果 表明:施加偏压后的镀膜基体结构发生很大变化,薄膜由岛状生长模式转变为层状生长...     

不锈钢表面沉积DLC膜的结构和性能

应用线性离子束复合磁控溅射技术在不锈钢和硅片基体上制备DLC膜,研究了基体偏压和过渡层的厚度和结构对DLC薄膜结构和性能的影响。结果表明,在过渡层相同偏压为-200 V的条件下,薄膜中的sp3键含量更低,但是薄膜结构致密性的提高使其硬度和膜基结合力反而提高;在偏压为-200V的条件下,随着过渡层厚度及层数的增加DLC薄膜中sp3含量均降低,同时过渡层和多层薄膜的硬度减小;在偏压为-100V条件下,过渡层厚度和层数对DLC薄膜sp3的含量没有明显的影响。当过渡层厚度为1.7μm、结构为Cr/CrC时,在11Cr17不锈钢基体上可制备出厚度为4.92μm、硬度为29.4 GPa、摩擦系数小于0.1、结合力高于70 N综合性能最佳的DLC薄膜。     

Si3N4和52100钢对磨副材料对CrN薄膜干摩擦学行为的影响

利用阴极电弧离子镀技术在316L不锈钢基体上制备了CrN薄膜。采用扫描电子显微镜(SEM)、X射线衍射仪(XRD)、纳米压痕仪对CrN薄膜的形貌、成分和力学性能进行了表征。为了研究Si_3N_4和52100钢对磨副材料对CrN薄膜和316L不锈钢干摩擦行为的影响,在2N、5N、8N三种载荷下,将CrN薄膜和316L不锈钢基体与Si_3N_4陶瓷球和52100钢球分别进行了往复式滑动干摩擦实验。采用扫描电子显微镜观察了磨痕的微观形貌,并对CrN薄膜和316L不锈钢基体的磨损机制进行了分析。结果表明:CrN薄膜表面平整,缺陷较少;CrN薄膜的纳米硬度约为28GPa,弹性模量约为350GPa;与Si_3N_4陶瓷球相比,CrN薄膜与52100钢球摩擦时摩擦因数相对较小(保持在0.7左右)且更加稳定;316L不锈钢的摩擦因数远大于CrN薄膜且波动较大;对磨球为Si_3N_4陶瓷球时,CrN薄膜的主要磨损机制为磨粒磨损,伴有少量的氧化和黏着磨损,316L不锈钢的磨损机制主要为磨粒磨损和塑性变形,伴有少量的氧化和黏着磨损;对磨球为52100钢球时,CrN薄膜的主要磨损机制为黏着磨损,伴有少量的氧化,316L不锈钢的磨损机制主要为黏着磨损,伴有少量的氧化和磨粒磨损。CrN薄膜与两种对磨球的磨损量均小于316L不锈钢基体的磨损量,说明CrN薄膜有效提高了基体的耐磨性。     

RF／DC溅射316L／SiO2复合膜力学性能与显微结构的研究

利用射频／直流磁控测射法制备了316L不锈钢／SiO2复合薄膜,并对其组织,相结构和力学性能进行了测试分析,结果表明,直流磁控溅射316L不锈钢薄膜呈柱状晶结构,主要由Fe-Cr和r-Fe相构成,在Fe-Cr(110)晶面出现明显择优取向,由于SiO2的掺合,使316L不锈钢／SiO2复合薄膜柱状晶变细小,出现明显的二次柱状晶,Fe-Cr的（110）晶面掺优取向消失,而Fe-Cr的（211）晶面衍射峰强度明显增强,316不锈钢膜硬度明显高于316L块体,掺入SiO2的金属／陶瓷复合薄膜耐磨性有显著的提高。     

Ti/TiN纳米多层薄膜改性层在Troyde s模拟体液中的抗腐蚀性能

用电弧离子镀设备，在医用不锈钢基体上沉积Ti／TiN纳米多层薄膜，考察薄膜在Troyde’s模拟体液中的抗腐蚀性能．结果表明，在中性与酸性模拟体液中316L Ti／TiN(45／45s)体系的击穿电位分别提高5倍和2倍，腐蚀电流密度为基体的1／8与1／3，明显降低发生局部腐蚀的敏感性，但滞后环的出现说明薄膜被击穿后自修复能力较差．分析说明薄膜的纳米多层结构与纯Ti层的存在可有效提高医用不锈钢在Troyde’s模拟体液中的抗点蚀能力．     

掺钽TiO2薄膜的生物活性研究

采用射频磁控溅射技术在表面纳米化316L不锈钢基体上制备掺钽TiO2薄膜,研究了不同掺钽量对表面纳米化316L不锈钢基TiO2薄膜形貌、结构、亲水性和生物活性的影响规律。结果表明掺杂适量的钽能够细化TiO2薄膜颗粒;掺钽能够改善TiO2薄膜的亲水性和生物活性;含钽36%的TiO2薄膜表面自由能比未掺杂时提高了30.1mN/m,在SBF溶液中能促进羟基磷灰石在其表面晶化。     

Analysis on microstructure and characteristics of TiAlN/CrN nano-multilayer films deposited by cathodic arc deposition

In this study, TiAlN/CrN multilayer thin films were deposited on SUS 403 stainless steel by cathodic arc deposition. The effects of substrate orientation (substrate surface parallel/perpendicular to target surface) and rotation speed were investigated in detail. Microstructure of the coatings was analyzed by X-ray diffraction, X-ray photoelectron spectroscopy and scanning electron microscopy. Meanwhile, tribological and corrosion tests were performed. The experimental results showed that the as-deposited films exhibit a nano-scale multilayer structure consisting of TiAlN and CrN phases. The TiAlN/CrN multilayer films prepared by a parallel orientation and a rotation speed of 4 rpm not only possesses the best coating hardness and hardness/elastic modulus ratio, but also reveals superior abrasion resistance and corrosion resistance.     

Corrosion protection of CrN/TiN multi-coating for bipolar plate of polymer electrolyte membrane fuel cell

The electrochemical corrosion cells will be generated from the possible pinholes of the promising CrN and TiN coatings in a PEMFC environment. To prevent the elution of possible pinholes, CrN/TiN multi-coatings on SS have been considered. This study examined the electrochemical behavior of three CrN/TiN coatings on 316L stainless steel deposited at different CrN/TiN thickness ratios by rf-magnetron sputtering as potential bipolar plate materials. Potentiodynamic tests of CrN/TiN-coated 316L stainless steel carried out in a 1 M H₂SO₄ + 2 ppm HF solution at 70 °C revealed a significantly lower corrosion current density than that of uncoated 316L SS, as well as a decrease in the corrosion current density with decreasing inner-layer CrN thickness. Electrochemical impedance spectroscopy also showed that the CrN/TiN-coated 316L SS sample had higher charge transfer resistance than the uncoated 316L SS sample, which increased with decreasing inner-layer CrN thickness. This was attributed to the crystalline-refined CrN/TiN(200).     

反应溅射TiN纳米晶薄膜的结构特征和耐蚀性

利用直流反应溅射技术在不锈钢和硅基体上沉积了TiN纳米晶薄膜,采用场发射扫描电镜(FESEM)、X射线衍射(XRD)和电化学阻抗谱(EIS)技术研究了薄膜的表面形貌、相结构和耐蚀性与偏压的关系。结果表明,TiN薄膜的表面结构明显取决于所施加的偏压,适当提高偏压有利于获得细小、均匀、致密和光滑的膜层。XRD分析发现,TiN薄膜为面心立方结构,其择优取向为(111)面。实验显示,对应0V和-35V偏压的薄膜为欠化学计量比的,而偏压增加至-70V和-105V时的薄膜为化学计量比的TiN。EIS结果表明,较高偏压下的TiN薄膜几乎在整个频率范围内均表现为容抗特征,其阻抗模值明显高于低偏压下的膜层,这主要与较高偏压下的薄膜具有相对致密的微结构有关。较低偏压的TiN薄膜因结构缺陷较多其耐蚀性低于基体不锈钢。EIS所揭示的薄膜结构特征与FESEM观测结果一致。可见,减少穿膜针孔等结构缺陷有利于改善反应溅射TiN纳米晶薄膜耐蚀性。     

Bias effects on microstructure, mechanical properties and corrosion resistance of arc-evaporated CrTiAlN nanocomposite films on AISI 304 stainless steel

CrTiAlN films were deposited on AISI 304 stainless steel by cathodic arc evaporation under a systematic variation of the substrate bias voltage. The effects of substrate bias on the coating morphology and mechanical properties, such as structure, composition, adhesion, hardness and Young's modulus, were studied in details using field emission scanning electron microscopy, X-ray diffraction, electron probe microanalysis and indenter. Polarization test and immersion test were also carried out to evaluate the corrosion behavior of the various films. CrTiAlN films are nanocrystalline that exhibit a CrN/TiAlN multi-layered morphology. At the optimal value of substrate bias voltage (i.e., − 150 V), the CrTiAlN film showed an increased Cr content and improved properties, such as higher adhesion, higher hardness (38 ± 2 GPa), and greater Young's modulus (319 ± 16 GPa) vs. the films deposited at other substrate bias voltages. Moreover, the optimum film has better corrosion resistance in 3.5 wt.% NaCl and 20 vol.% HCl solutions.     

Influence of sigma phase on corrosion behavior of 316L stainless steel in high temperature and high pressure water

In order to elucidate the impact of σ phase on the oxidation film formation and stress corrosion cracking (SCC) resistance of 316L stainless steel, corrosion, SCC and three-point bending tests were conducted and the microstructures of the σ phase in 316L safe-end pipes were characterized via optical microscopy, environmental scanning electron microscopy and scanning Kelvin probe force microscopy. The results indicated that the σ phase was detrimental to the SCC resistance of 316L in high temperature and high pressure environments and the existence of inherently hard and brittle σ phase could change the cracking mode.     

Corrosion resistance and hemocompatibility of multilayered Ti/TiN-coated surgical AISI 316L stainless steel

Ti/TiN-multilayered films were prepared on surgical AISI316L stainless steel by arc ion plating. The crystallographic orientation and surface morphology were studied using XRD and SEM. The corrosion resistance of the coated specimen was evaluated by open-circuit test and potentiodynamic polarization test. It was found that the multilayered Ti/TiN-coated specimen had a weaker tendency towards corrosion and higher corrosion resistance in simulated bodily fluid than the bare substrate and the TiN-coated specimen. Additionally, in vitro hemocompatibility of the multilayered film and AISI316L was evaluated by dynamic clotting time and platelet adhesion experiments. The results indicated that for the multilayered Ti/TiN-coated specimen, the clotting time was lengthened and the adhesion and mutual interaction of platelets on its surface was also restrained.