Fabrication and characterization of PMN-PT single crystal cantilever array for cochlear-like acoustic sensor

We have successfully fabricated piezoelectric PMN-PT single crystal cantilever array. Each PMN-PT cantilever has a different length to achieve different resonance frequencies. The width and thickness of PMN-PT cantilever array are 200 μm and 10 μm, respectively. Resonance frequencies of PMN-PT cantilevers were measured with laser interferometer, and charge sensitivity was measured with charge-measuring device. PMN-PT cantilever array was installed in a noise-shield case. The array was then exposed to sound pressure frequency corresponding to resonance frequency to measure its sensitivity. The experimental results show that the PMN-PT cantilever array has high sensitivity to the sound pressure. This implies that the single crystal PMN-PT cantilever array is a potential candidate for a cochlear-like acoustic sensor.     

Automated surface finishing of plastic injection mold steel with spherical grinding and ball burnishing processes

This study investigates the possibilities of automated spherical grinding and ball burnishing surface finishing processes in a freeform surface plastic injection mold steel PDS5 on a CNC machining center. The design and manufacture of a grinding tool holder has been accomplished in this study. The optimal surface grinding parameters were determined using Taguchi’s orthogonal array method for plastic injection molding steel PDS5 on a machining center. The optimal surface grinding parameters for the plastic injection mold steel PDS5 were the combination of an abrasive material of PA Al₂O₃, a grinding speed of 18000 rpm, a grinding depth of 20 μm, and a feed of 50 mm/min. The surface roughness R_a of the specimen can be improved from about 1.60 μm to 0.35 μm by using the optimal parameters for surface grinding. Surface roughness R_a can be further improved from about 0.343 μm to 0.06 μm by using the ball burnishing process with the optimal burnishing parameters. Applying the optimal surface grinding and burnishing parameters sequentially to a fine-milled freeform surface mold insert, the surface roughness R_a of freeform surface region on the tested part can be improved from about 2.15 μm to 0.07 μm.     

Determination of Optimal Ball-Burnishing Parameters for Plastic Injection Moulding Steel

The objective of this study is to determine the optimal plane ball-burnishing parameters for plastic injection moulding steel PDS5 on a machining centre by utilising the Taguchi’s orthogonal array method. The design and manufacture of a burnishing tool are described. Four burnishing parameters, namely the ball material, burnishing speed, burnishing force and feed, were selected as the experimental factors in Taguchi’s design of experiments to determine the optimal burnishing parameters which have the dominant influence on surface roughness. The optimal burnishing parameters were found after carrying out the experiments specified by Taguchi’s L18 orthogonal table, by the analysis of variation, and by a full factorial experiment. The optimal plane burnishing parameters for the plastic injection moulding steel PDS5 were a combination of a tungsten carbide ball, a burnishing speed of 200 mm/min, a burnishing force of 300 N and a feed of 40 μm. The surface roughness Ra of the specimen can be improved from about 1 μm to 0.07 μm by using the optimal burnishing parameters for plane burnishing.     

Interferometric measurement using bimorph actuated staggered mirror (BASM) microsensor

For physical and chemical sensing applications, a bimorph actuated staggered mirror (BASM) microsensor was designed and fabricated by surface micromachining using a transparent quartz substrate. While the conventional cantilever sensors have angular deflection, BASM’s moving mirror performs piston-type pure vertical motion in response to environmental stimuli like temperature change and surface stress change due to molecular adsorption. Since the sensor itself has a fixed or reference mirror as well as a moving mirror, 1) an interferometric measurement is possible without an additional reference mirror in off-axis measurement setup, and 2) vibration measurement noise can be reduced. For preliminary test purposes, interferometric measurement using an optical setup was performed for temperature change. At He-Ne line (632.8 nm), a temperature change of ∼0.8 K caused a minimum-to-maximum interferometric light intensity change which corresponds to ∼144 nm shift of the moving mirror part. An optical diffraction analysis was performed and optimal device parameters were found to maximize the sensor sensitivity.     

A study on the mirror surface machining by using a micro-energy EDM and the electrophoretic deposition polishing

In order to achieve a mirror-like workpiece surface by EDM, a micro-energy EDM or a manual lapping is normally used. However, both methods are time consuming and economically unattractive. To have better performance, a sinking EDM machine was first used in this research on SKD 61 for a micro-energy discharge process followed by the electrophoretic deposition (EPD) process to coat Al₂O₃ particles uniformly on a rotation electrode. The precision polishing process was then applied on the discharged workpiece with suitable parameters including the voltage, electrode rotating speed, pH value of electrolyte, and abrasive concentration. After the EDM process, the surface roughness and the recast layer thickness of a workpiece could also be reduced. The experimental data showed that when 0.3 μm of Al₂O₃ particles was used for the EPD polishing process, the initial roughness of a discharge surface could be improved from 0.52 μm Ra (6.50 μm Rt) to a mirror-like surface of 0.068 μm Ra (0.742 μm Rt). Also, the total working time could be reduced significantly to within the range of 5 to 10 min.     

Impact drive rotary precision actuator with piezoelectric bimorphs

An impact drive rotary precision actuator with end-loaded piezoelectric cantilever bimorphs is proposed. According to finite element analysis and experiments of the dynamic characteristics of end-loaded piezoelectric cantilever bimorphs, a specific fixed-frequency and adjustable-amplitude is confirmed to control the actuator. The results show that an actuator excited by fixed-frequency and the adjustable-amplitude ramp voltage waveform works with a large travel range (180°), high resolution (1 μrad), speed (0.2 rad/min) and heavy-load ability (0.02 Nm). With advantages of high-precision positioning ability, simple structure and only one percent the cost of traditional impact drive mechanisms, the actuator is expected to be widely used in precision industries. __________ Translated from Optics and Precision Engineering, 2005, 13(3): 298–304 [译自: 光学精密工程]     

Suppression of transient processes in the oscillatory circuit of the NQR spectrometer

A simple device intended for suppressing transient processes in the oscillatory circuit of the nuclear quadrupole resonance spectrometer operating at 0.5–10 MHz is described. The transient process duration is reduced by applying active damping to the circuit immediately after the excitation pulse terminates. The switching time is ≤0.1 μs. At 3.3 MHz, the transient process duration is reduced by a factor of 5.     

Cutting Behaviour Using Variable Feed and Variable Speed when Drilling Stainless Steel with TiN-Coated Carbide Drills

Variable feed and variable speed machining is a significant method for improving the performance of cutting for hard and difficult to machine materials. Tests for optimising tool wear using variable feed and speed for drilling stainless steel using TiN-coated carbide drills are reported. This paper proposes the modelling of the feed and speed variations: f (x) = f _c [1+a sin(2π(x/L) + 3/2π)], ω(x) = ω _c [1+b sin(π(x/L) + 3/2π)], respectively. The results indicate that variable feed machining is superior to constant feed machining with respect to tool life, burr height, and surface roughness. The amplitude of variation of feed, a = 0.8 and the amplitude of variation of speed, b = 0.07, is optimum for maximum tool life. The range of surface roughness from the variable feed and variable speed can be limited from 0.7 μm to 3 μm. The cutting-edge wear and outer corner wear were the dominant mechanisms of the drill wear.     

Effect of Applied Load and Surface Roughness on the Tribological Properties of Ni-Based Superalloys Versus Ta<Subscript>2</Subscript>AlC/Ag or Cr<Subscript>2</Subscript>AlC/Ag Composites

The novel Ta₂AlC–20 vol.% Ag (TaAg) and Cr₂AlC–20 vol.% Ag (CrAg) composites were tribologically tested versus a Ni-based superalloy Inc718 (SA) by dry sliding at a sliding speed of 1 m/s at room temperature in air at loads from 3 N to 18 N. The TaAg composites were also tested at 8 and 18 N at 550 °C, and at a 3 N load against the SA with different surface roughnesses at 26 °C and 550 °C. At room temperatures, the coefficients of friction, μ’s, decreased from ~0.8–0.9 to ~0.3–0.4 for both the TaAg and CrAg composites as the applied normal force increased from 3 N to 8 N. Further increases in load to 18 N did not change the μ’s. The specific wear rates, sWR, increased with increased loads for the TaAg composite; they remained almost unchanged for the CrAg composite. This behavior was attributed to the formation of glaze tribofilms—similar to ones observed previously in these tribocouples at elevated temperatures and 3 N—promoted by the increased loads. Preconditioning of the SA surface by sliding against the TaAg composite at 550 °C and 8 N resulted in μ’s of <0.2 and sWR < 10⁻⁶ mm³/N-m in subsequent room temperature sliding at 3 N. Somewhat higher, but stable room temperature μ’s of ~0.3 and sWR of ~3 × 10⁻⁵ mm³/N-m were observed when the TaAg composites were slid versus a sandblasted SA surface at 500 °C and 3 N. It follows that in situ preconditioning of the tribo-surfaces is a powerful tool for improving the properties of the MAX/Ag-SA tribocouples. The relationship between sliding conditions, chemistries of tribofilms, and their properties are discussed.     

A study on wear and wear mechanism of exhaust valve and seat insert depending on different speeds using a simulator

The wear of engine valve and seat insert is one of the most important factors which affect engine performance. Because of higher demands on performance and the increasing use of alternative fuel, engine valve and seat insert are challenged with greater wear problems than in the past. In order to solve the above problems, a simulator was developed to be able to generate and control high temperatures and various speeds during motion. The wear simulator is considered to be a valid simulation of the engine valve and seat insert wear process with various speeds during engine activity. This work focuses on the different degrees of wear at three different singular test speeds (10 Hz, 25 Hz & multi-Hz). For this study, the temperature of the outer surface of the seat insert was controlled at 350°C, and the test load was 1960 N. The test cycle number was 6.0×10⁶. The mean (±standard error) wear depth of the valve at 10 Hz and 25 Hz was 45.1 (±3.7)μm and 81.7 (±2.5)μm, respectively. The mean wear depth of the seat insert at 10 Hz and 25 Hz was 52.7 (±3.9) μm and 91.2 (±2.7) μm, respectively. In the case of multi-Hz it was 70.7 (±2.4)/on and 77.4 (±3.8) μm, respectively. It was found that higher speed (25 Hz) cause a greater degree of wear than lower speed (10 Hz) under identical test condition (temperature, valve displacement, cycle number and test load). In the wear mechanisms of valves, adhesive wear, shear strain and abrasive wear could be observed. Also, in the wear mechanisms of seat inserts, adhesive wear, surface fatigue wear and abrasive wear could be observed.     

Micro laser welding of polymer microstructures using low power laser diodes

The use of laser welding for joining micro parts has experienced a substantial increase in popularity during recent years. Specifically translucent microfluidic devices are assembled using laser welding; however, a major issue is the laser beam size of commercially available laser-welding equipment and thus the resulting welding seam size, which may be orders of magnitude larger than microfluidic channels and structures. We have successfully achieved extremely small welding seams using focussed low-power laser diodes. Commercial laser welding stations for polymer assembly will typically operate in the power-region 15–50 Watts. The focussed laser beam will have a size of typically 500 μm × 500 μm and may, depending on optical configuration, be up to several mm². The resulting welding-seam will thus be in the area of 300–600 μm depending on beam energy distribution; additionally the melt will spread to unheated areas due to capillary forces. As microfluidic channels are in 20–100 μm regions, even a very limited amount of stray melt may completely fill a part of a channel and thus render it useless. We have used commercially available “single-die” laser-diodes of optical power 200–500 mW. The beam has been focussed and directed using simple optical installations, resulting in a beam-size in the area of 50 μm × 5 μm full width half maximum (FWHM) We have achieved firm welding seams of width <10 μm, with a welding speed of 15 mm/s and with virtually no noticeable spread of melt.     

Polycrystalline silicon carbide as a substrate material for reducing adhesion in MEMS

The in-use adhesion characteristics of polycrystalline cubic silicon carbide (poly-SiC) films when used as a substrate material in MEMS applications are investigated using micromachined polycrystalline Si (poly-Si) cantilever beam arrays. The detachment lengths greater than 1500 μm are obtained, corresponding to an apparent work of adhesion of less than 0.006 mJ/m². This is to be compared to the detachment lengths of less than 200 μm when poly-Si substrate is used, corresponding to the apparent work of adhesion of greater than 20 mJ/m². To help understand the mechanism leading to the significant reduction in in-use adhesion, the poly-SiC surfaces are characterized by X-ray photoelectron spectroscopy, atomic force microscopy, and contact angle measurement. Based on the data, it is suggested that the topography as well as the slower oxidation rate of poly-SiC films may be responsible for the observed adhesion reduction.     

A laser sensor with multiple detectors for freeform surface digitization

In this paper, an integrated laser scanning sensor for freeform surface digitization is presented. The sensor consists of a diode laser light source and four position-sensitive device (PSD) detectors. The stand-off distance of the sensor is 180 mm and the measurable range is 90 mm. The Lambert model is applied to calculate the displacement between the sensor and the measured point on the object surface along the optical axis, under the assumption of a diffusive surface. The inclination angle of the measured point from the vertical plane of the laser beam is calculated by mathematical inference. Those data are used in error compensation to improve the system precision. The new design of multiple detectors could increase the measurable angle and could solve the dead-space problem in the single-point laser of triangulation measurement. The computer simulation and actual measurements show that the displacement resolution is around 50 μm, and the system performs well in terms of stability and repeatability. The sensor system could be mounted on the NC machine or on the X–Y platform for freeform surface digitization.     

A high resolution pneumatic proximity to tactile sensing device

This paper describes the formulation and development of a pneumatic sensing device for automated recognition of objects within flexible manufacturing environments. This sensing device utilises a densely packed matrix of IC pressure sensors, providing continuous variable output. The sensing head incorporates a corresponding matrix of air jets which form boundary layers when striking the objects of interest. The back pressure levels from these form the basis for the tasks of object detection and recognition,. Objects and their features are recognised by their ‘back-pressure map’. Precise information can be obtained about features and anomalies down to a resolution of 10 μm. The system here described is a research prototype and has been evaluated on a simple test rig: in this form its is not at a stage where it can be applied to a recognition situation on the shop floor. Nevertheless the system is novel and it is hoped to publish details of an industrially applicable package in due course.     

A device for protection against pulse overvoltages based on a triggered vacuum spark gap

The scheme of an automatic protection device on the basis of a controlled vacuum spark gap with an operation time of <1 μs is proposed. The results of studying the start-up and switching characteristics of this device are presented. The high switching capability of the device is ensured by the ability of the spark gap to multiply pass pulse currents with amplitudes of up to hundreds of kiloamperes and durations of up to hundreds of microseconds and commercial-frequency currents of up to several tens of kiloamperes for several periods.     

Design and analysis of a twisting-type thermal actuator for micromirrors

This paper reports the design of a novel twisting-type micromirror actuation system. The actuating mechanism for driving the micromirror combines two paralleled bimorph actuators bending in opposite directions for rotational control of the micromirror. Each actuator is structured by gold and silicon dioxide or nickel and silicon nitride thin films with embedded polysilicon line heaters. With a size of only 15μm in width, 1.3μm in thickness, and 100μm in length, two bimorph actuators can result in a vertical displacement of 25μm at 10 volts dc with the span of 120μm, and thus the micromirror can rotate by angles over 20°, which is a significant improvement, compared to conventional tilting-type micromirrors. This paper was recommended for publication in revised form by Associate Editor Dongsik Kim Dong Hyun Kim received his B.S. and M.S. degrees in Mechanical Engineering from Hongik University, Korea, in 2005 and 2007, respectively. Mr. Kim is currently graduate student in the department of Mechanical Engineering at Hongik University in Seoul, Korea. His research interests include micro and nanoscale heat transfer and silicon crystallization technologies for displays. Kyung Su Oh received his B.S. and M.S. degrees in Mechanical Engineering from Hongik University, Korea, in 2005 and 2007, respectively. Mr. Oh is currently a research scientist at LG Chem. Ltd. His research interests include nanoscale heat transfer, nanotubes and fuel cells and molecular simulation technology. Seungho Park received his B.S. and M.S. degrees in Mechanical Engineering from Seoul National University, Korea, in 1981 and 1983, respectively. He then received his Ph.D. degree from U.C. Berkeley, U.S.A. in 1989. Dr. Park is currently a Professor at the department of Mechanical and System Design Engineering at Hongik University in Seoul, Korea. He served as a director of general affairs of KSME. Dr. Park’s research interests include micro and nanoscale heat transfer, molecular dynamics simulation and silicon crystallization technologies for displays.     

A novel stylus profiler without nonlinearity and parasitic motion for FPD inspection system

There are increasing needs to inspect micro-pattern of flat panel display (FPD) device such as PDP and LCD. The inspection system should be able to measure over large size mother glass with high productivity and accuracy. Stylus profilers are adopted as an inspection system. To scan over large and heavy FPD device specimen, a “tip-scanning” head for stylus profiler is required. A simple method to realize a tip-scanning system is to miniaturize the whole scanning unit. In this study, a novel stylus profiler is proposed as a tip-scanning stylus profiler. The novel stylus profiler has leaf spring instead of conventional lever and pivot. To measure position of stylus an optical senor is used. Linear variable differential transformer is applied to feed-back scanning stage displacement. The stage is actuated by a voice coil motor (VCM). Target performances of the stylus profiler head are in the stroke over 20 μm with high accuracy. Specifications of xy-scanning stage are over 250 μm×250 μm and high bandwidth over 20 Hz. The magnetic and elastic characteristics of the mechanism are designed based on finite element (FE) analysis. After fabrication of the head and stage, they are integrated. Current amplifier and feedback controller are also developed. The performance of the stylus profiler is also validated by inspecting standard sample.     

Dynamic Friction of SiC Surfaces: A Torsional Kolsky Bar Tribometer Study

A dynamic tribometer has been successfully developed utilizing torsional Kolsky bar (TKB) technique for tribo pairs subjected to dynamic compression and shear. The dynamic tribometric responses of ground finish (R _a = 0.17 μm) and polished finish (R _a = 0.10 μm) surfaces of silicon carbide (SiC) under compression loading up to 1.5 GPa and shear-sliding velocity to 3.8 m/s have been measured. The experimental results show Coulomb friction behavior. Hardening of shear response is found on both the ground and polished surfaces. Repeating tests on the same tribo-pair demonstrate that steady state shear response on polished surfaces can be achieved by cumulating shear-sliding distance. SEM observation of the tested surface shows that the tested surfaces are microscopically shear-damaged. The similar surface conditions after a relative longer shear-sliding distance on polished surfaces lead to the same steady state frictional coefficient, 0.61, for both finishing surfaces.     

A device for the preliminary separation of ions for mass spectrometry analysis

A device for the preliminary separation of ions based on an ion mobility increment spectrometer with cylindrical geometry of its electrodes is described. The device is operated in tandem with an atmospheric-pressure ionization mass spectrometer. The use of the spectrometer in the preliminary separation of ions of the target substance from ions of the chemical noise is illustrated by investigating the vapor above a water solution of acrylamide (CH₂=CH-CO-NH₂) with a concentration of 1.4 × 10⁻⁵ mol/L. The resolution of the device is rather low, R ∼ 10–20; nevertheless, thanks to its simplicity and availability, the device may find application to routine chemical analysis and in portable instruments.     

Measuring the extraction time of negative ions from the ionization chamber of a static mass spectrometer

A technique for measuring the time of extraction of negative ions from the ionization chamber of the ion source of an MИ-1201“B” static mass spectrometer is described. The time of extraction of SF₆ negative molecular ions equal to ∼(8.5 ± 1.0) μs is comparable to the ion time of flight in the tube of the analyzer.