Principles for designing sputtering-based strategies for high-rate synthesis of dense and hard hydrogenated amorphous carbon thin films

In the present study we contribute to the understanding that is required for designing sputtering-based routes for high rate synthesis of hard and dense hydrogenated amorphous carbon (a-C:H) films. We compile and implement a strategy for synthesis of a-C:H thin films that entails coupling a hydrocarbon gas (acetylene) with high density discharges generated by the superposition of high power impulse magnetron sputtering (HiPIMS) and direct current magnetron sputtering (DCMS). Appropriate control of discharge density (by tuning HiPIMS/DCMS power ratio), gas phase composition and energy of the ionized depositing species leads to a route capable of providing ten-fold increase in the deposition rate of a-C film growth compared to HiPIMS Ar discharge (Aijaz et al., 2012). This is achieved without significant incorporation of H (< 10%) and with relatively high hardness (> 25 GPa) and mass density (~ 2.32 g/cm³). Using our experimental data together with Monte-Carlo computer simulations and data from the literature we suggest that: (i) dissociative reactions triggered by the interactions of energetic discharge electrons with hydrocarbon gas molecules is an important additional (to the sputtering cathode) source of film forming species and (ii) film microstructure and film hydrogen content are primarily controlled by interactions of energetic plasma species with surface and sub-surface layers of the growing film.     

Non-stoichiometry of (TiZrHfVNbTa)Cx and its significance to the microstructure and mechanical properties

(TiZrHfVNbTa)C_x with variable stoichiometry are fabricated by pressureless sintering utilizing self-synthesized carbide powders via carbothermal reduction reaction. The densification behavior and microstructure evolution coupled with corresponding adjustable mechanical properties are investigated. The single-phase rock-salt crystal structure is retained despite the carbon stoichiometry approaching 0.6, indicating (TiZrHfVNbTa)C_x can maintain structural stability even containing high carbon vacancy. The carbon vacancy is beneficial for promoting densification procedure. The relative density of (TiZrHfVNbTa)C_0.6 sintered at 2150 °C can reach 97.9 %, while the similar value for (TiZrHfVNbTa)C_1.0 is obtained even at 2400 °C. While, remarkable grain growth accompanied by decline in relative density also occurs for lower carbon stoichiometry. With the variation of carbon content, the concentration of carbon-metal bonds changes gradually, leading to the adjustable mechanical properties. This work provides a potential approach to synthesize non-stoichiometric high-entropy carbides with high carbon vacancy via low-temperature pressureless sintering.     

Nanostructure,mechanical and tribological properties of reactive magnetron sputtered TiCx coatings

This study describes the correlation between microstructure, mechanical and tribological properties of TiC_x coatings (with x being in the range of 0–1.4), deposited by reactive magnetron sputtering from a Ti target in Ar/C₂H₂ mixtures at ~ 200 °C. The mechanical and tribological properties were found to strongly depend on the chemical composition and the microstructure present. Very dense structures and high hardness, combined with low wear rates and friction coefficients, were observed for coatings with chemical composition close to TiC. X-ray diffraction and X-ray photoelectron spectroscopy analysis, used to evaluate coating microstructure, composition and relative phase fraction, showed that low carbon contents in the coatings lead to sub-stoichiometric nanocrystalline TiC_x coatings being deposited, whilst higher carbon contents gave rise to dual phase nanocomposite coatings consisting of stoichiometric TiC nanocrystallites and free amorphous carbon. Optimum performance was observed for nanocomposite TiC_1.1 coatings, comprised of nanocrystalline nc-TiC (with an average grain size of ~ 15 nm) separated by 2–3 monolayers of an amorphous a-DLC matrix phase.     

Synthesis of high-entropy carbides from multi-metal polymer precursors

Three compositions of high-entropy carbides, (TiHfVNbTa)C, (TiZrHfNbTa)C and (TiZrNbTaW)C were synthesized via a modified Pechini process, in which citric acid served as both a cation chelating agent and a carbon source. Through pyrolysis and spark plasma sintering, single phase high-entropy carbides were formed from the homogeneous precursors at a relatively low temperature of 1800 °C. The dispersion of cations in the polymer precursor facilitated shorter diffusion distances in polymer-derived materials, and thus compositional homogeneity was significantly improved relative to materials produced by a solid-state method, as quantified by a defined coefficient of variation applied to energy-dispersive X-ray spectroscopy. A finer microstructure in polymer-derived materials results in improved fracture toughness with a K_IC value of 4.29 MPa·m^1/2 achieved for (TiHfVNbTa)C.     

HiPIMS induced high-purity Ti3AlC2 MAX phase coating at low-temperature of 700 °C

Ti₃AlC₂, one of Ti-Al-C MAX phases, has received extensive attention due to its unique nano-laminated structure and combined properties of metals and ceramics. However, ultra-high synthesis temperature exceeding 800 °C is a critical challenge for broad application of Ti₃AlC₂ coatings on temperature-sensitive substrates. In this study, Ti-Al-C coatings were deposited on Ti-6Al-4V substrates using high-power impulse magnetron sputtering (HiPIMS) and DC sputtering (DCMS) for comparison. Different from as-deposited amorphous Ti-Al-C coating by DCMS, nanocrystalline TiAl_x compound was achieved by HiPIMS deposition due to highly ionized plasma flux with high kinetic energy. Furthermore, HiPIMS promoted the generation of dense and smooth Ti₃AlC₂ phase coating after low-temperature annealing at 700 °C, while annealed DCMS coating only obtained Ti₂AlC. In-situ XRD demonstrated such Ti₃AlC₂ phase could be early involved in crystallization at 450 °C, lowest than synthesis temperature ever reported. The mechanical properties of Ti₃AlC₂ coating were also discussed in terms of structural evolution.     

Synthesis,mechanical, and thermophysical properties of high-entropy (Zr,Ti,Nb,Ta,Hf)C0.8 ceramic

Two high-entropy carbides, including stoichiometric (Zr,Ti,Nb,Ta,Hf)C and nonstoichiometric (Zr,Ti,Nb,Ta,Hf)C_0.8, were prepared from monocarbides and ZrH₂. Their sinterability, microstructures, mechanical properties, thermophysical properties, and oxidation behaviors were systematically compared. With the introduction of carbon vacancy, the sintering temperature was lowered up to 300°C, Vickers hardness was almost unaffected, whereas the strength decreased significantly generally due to the decrease of covalent bonds. The thermal conductivity shows a 50% decrease for nonstoichiometry high-entropy carbide, which is a major consequence of the lower electrical conductivity. The oxidation resistance in high temperature water vapor was not sensitive to carbon stoichiometry.     

Advanced TiC/a-C:H nanocomposite coatings deposited by magnetron sputtering

TiC/a-C:H nanocomposite coatings have been deposited by magnetron sputtering. They consist of 2–5 nm TiC nanocrystallites embedded in the amorphous hydrocarbon (a-C:H) matrix. A transition from a columnar to a glassy microstructure has been observed in the nanocomposite coatings with increasing substrate bias or carbon content. Micro-cracks induced by nanoindentation or wear tests readily propagate through the column boundaries whereas the coatings without a columnar microstructure exhibit substantial toughness. The nanocomposite coatings exhibit hardness of 5–20 GPa, superior wear resistance and strong self-lubrication effects with a friction coefficient of 0.05 in air and 0.01 in nitrogen, under dry sliding against uncoated bearing steel balls. Especially, reversible transitions from low to ultra-low friction are observed if the atmosphere is cycled between ambient air and nitrogen. The lowest wear rate is obtained at high humidity.     

Fabrication and characterization of polymer-derived high-entropy carbide ceramic powders

Polymer-derived ceramic (PDC) route has been widely used to fabricate various ceramics or ceramic-matrix composites in recent years. However, the synthesis of high-entropy ceramics via PDC route has rarely been reported until now. Herein, we successfully synthesized a class of high-entropy carbides, namely (Hf_0.25Nb_0.25Zr_0.25Ti_0.25)C (HEC-1), via PDC route. The polymer-derived HEC-1 ceramics consisted of numerous superfine particles with the average particle size ~800 nm. Meanwhile, they possessed a rock-salt structure of metal carbides and high-compositional uniformity from nanoscale to microscale. In addition, the as-obtained HEC-1 ceramics had a low oxygen impurity content of 0.51% and a low free carbon impurity content of 2.56%. This work will open up a new research field on the fabrication of high-entropy ceramics or high-entropy ceramic-matrix composites via PDC route.     

Ultrafast high-temperature synthesis and densification of high-entropy carbides

Recently, high-entropy carbides have attracted great attention due to their remarkable component complexity and excellent properties. However, the high melting points and low self-diffusion coefficients of carbides lead to the difficulties in forming solid solution and sintering densification. In this work, six dense multicomponent carbides (containing 5–8 cations) were prepared by a novel ultrafast high-temperature sintering (UHS) technique within a full period of 6 min, and three of them formed a single-phase high-entropy solid solution. The solid solubility of the UHSed multicomponent carbides was highly sensitive to the compositional variation. The presence of Cr₃C₂ liquid had significant contributions to the formation of solid solution and the densification of multicomponent carbides. All UHSed multicomponent carbides exhibited high hardness, which, unexpectedly, did not simply increase with increasing number of the components. The highest nanohardness with a value of 36.6 ± 1.5 GPa was achieved in the (Ti_1/5Cr_1/5Nb_1/5Ta_1/5V_1/5)C_x high-entropy carbide. This work is expected to expedite the development of high-entropy carbides and broaden the application of UHS in the synthesis and densification of advanced ceramics.     

Synthesis of nonstoichiometric high entropy Nb-added carbides

A novel class of nonstoichiometric high-entropy carbide (HEC_x) materials, namely, Nb/TiC/TaC, Nb/TiC/TaC/VC and Nb/TiC/TaC/VC/WC, were produced by mechanically milled and spark plasma sintering (SPS) from Nb and carbides. XRD, SEM-EDS and S/TEM-EDS were used to characterize the phase constitution, microstructure and compositional distribution of samples, respectively. HEC_x exhibits a single-phase rock-salt crystal structure with a relatively uniform elemental distribution. Among the three different HEC_x materials, Nb/TiC/TaC/VC/WC with an average grain size of 2.15 μm sintered at 1600 °C shows an enhanced fracture toughness of 5.1 ± 0.1 MPa m^1/2 compared with transition metal carbides. The mechanically mixed and low sintering temperature lead to the formation of finer grains. The higher fracture toughness can be attributed to atomic relaxation resulting from carbon vacancies and solid solution strengthening.     

A novel approach to the rapid synthesis of high-entropy carbide nanoparticles

A novel strategy for the rapid synthesis of high-entropy carbide particles is proposed that involves the transformation of multicomponent intermetallic intermediates to multicomponent carbides (high-entropy carbide precursors). (Ti_0.25V_0.25Nb_0.25Ta_0.25)C nanoparticles with a uniform solute distribution were successfully synthesized in an Al matrix by heating Al-Ti-V-Nb-Ta-C powder mixtures at 1500°C for 10 minutes. The multicomponent aluminide intermediates led to the rapid formation of multicomponent carbides during heating to 1100°C, which transformed into a high-entropy solid solution during heating to 1500°C. We developed a new rapid approach for the synthesis of high-entropy ceramic particles.     

A correlation between the microstructure and optical properties of hydrogenated amorphous carbon films prepared by RF magnetron sputtering

Comparative and systematic studies of the effect of the radiofrequency (RF) bias on the microstructure and the optical properties of hydrogenated amorphous carbon (a-C:H) have been carried out on films deposited by RF magnetron sputtering under different RF power varying from 10 to 250 W applied to the graphite target, leading to a negative bias voltage at the target in the range of −60 to −600 V.A combination of infrared (IR) absorption experiments, which give information about the local microstructure (i.e. C–C and C–H bonding), and optical transmission measurements in the UV-visible and near IR, from which we determined the optical gap E₀₄ and the refractive index n, are applied to fully characterize the samples in their as-deposited state. The results show first that the films deposited at low RF power (i.e. low negative bias) exhibit a more open microstructure (polymeric character) with a lower density than those deposited at high RF power (i.e. high negative bias). They also indicate that the total bonded H content as well as the sp³/sp² ratio of carbon atoms bonded to H decrease with increasing RF power leading to the formation of higher proportions of C-sp² sites. The same tendency is observed for the optical gap E₀₄. On the contrary, the refractive index increases with increasing RF power, suggesting the densification of the films in going to a higher RF power.     

Microstructure and mechanical properties of Mo/DLC nanocomposite films

Mo-doped diamond-like carbon (Mo/DLC) films were deposited on stainless steel and Si wafer substrates via unbalanced magnetron sputtering of molybdenum combined with inductively coupled radio frequency (RF) plasma chemical vapor deposition of CH₄/Ar. The effects of Mo doping and sputtering current on the microstructure and mechanical properties of the as-deposited films were investigated by means of X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD), transmission electron microscopy (TEM), Raman spectroscopy, atomic force microscopy (AFM), and nano-indentation. It was found that Mo doping led to increase in the content of sp² carbon, and hence decreased the hardness and elastic modulus of Mo/DLC films as compared with that of DLC films. The content of Mo in the films increased with the increasing sputtering current, and most of Mo reacted with C atoms to form MoC nanocrystallites at a higher sputtering current. Moreover, the Mo-doped DLC films had greatly decreased internal stress and increased adhesion to the substrate than the DLC film, which could be closely related to the unique nanocomposite structure of the Mo-doped films. Namely, the Mo/DLC film was composed of MoC nanoparticles embedded in the cross-linked amorphous carbon matrix, and such a kind of nanostructure was beneficial to retaining the loss of hardness and elastic modulus.     

Synthesis of single-phase (ZrTiTaNbMo)C high-entropy carbide powders via magnesiothermic reduction process

Preparation of high-entropy carbides in bulk quantities and in powder form via simple methods at relatively low temperature is challenging. Here, we report the first synthesis of (ZrTiTaNbMo)C high-entropy carbide (HEC) powders via magnesiothermic reduction process. In this, a mixture of individual metallic oxides, graphite and magnesium is treated at a temperature of 1350 °C under Ar atmosphere. The (ZrTiTaNbMo)C powders are obtained after acid leaching, deionized water cleaning and drying process, and synthesized powders shows single-phase face-centered cubic (fcc) structure with the oxygen content of only 0.35 wt% and particle-size range of 5–60 µm. Such powders are in potential demand for additive manufacturing techniques, while high dense HEC bulk ceramic is fabricated by hot pressing sintering using ball-milled HEC powders in preliminary researches. The successful synthesis of (ZrTiTaNbMo)C powders may guide the way towards synthesis of many other high-entropy carbide powders via magnesiothermic reduction process.     

Prediction of solid solution characteristics of MC (M = Zr,Nb, and Ta) in TiC lattice using phase stability diagrams

Phase stability diagrams of Ti-M-O-C (M = Zr, Nb, and Ta, molar ratio of Ti and M = 1:1) systems at 1800 K were drawn as a function of the carbon activity, oxygen partial pressure, and solution formation characteristics. The solid solution characteristics were varied with the kind of M. The solid solution carbide, (Ti_0.5Zr_0.5)C, was less stable than the TiC-ZrC mixture while other solid solution carbides (Ti_0.5Nb_0.5)C and (Ti_0.5Ta_0.5)C were more stable than the mixtures of monocarbides. Thus, the (Ti_0.5Zr_0.5)C phase was not included in the phase stability diagram of the Ti-Zr-O-C system unlike the other solid solution carbides. The validity of the drawn stability diagrams was proved by experimental results. Thus, the conditions for synthesis of solid solution carbides by carbothermal reduction, or fabrication of TiC-based composites with solid solution phases, can be deduced using the phase stability diagrams.     

Surface energies in high-entropy carbides with variable carbon stoichiometry

The carbon vacancy in high-entropy carbides (HECs) has a significant impact on their physical and chemical properties, yet relevant studies have still been relatively few. In this study, we investigate the surface energies of HECs with variable carbon vacancies through first-principles calculations. The results show that the surface energy of the (1 0 0) surface of the stoichiometric HECs is significantly lower than that of (1 1 1) surface. With the decrease in carbon stoichiometry, the surface energies of both (1 0 0) and (1 1 1) surfaces increase gradually, which is mainly due to the weakening of covalent bonding and the decrease of metal Hirshfeld-I (HI) charges. However, the surface energy of (1 0 0) surface increases more quickly than that of (1 1 1) surface and will exceed that of (1 1 1) surface when the carbon stoichiometry decreases to a certain extent, which is primarily attributed to the greater decrease rate of metal HI charges of (1 0 0) surface.     

Ceramic TiC/a:C protective nanocomposite coatings: Structure and composition versus mechanical properties and tribology

The relationship between the structure, elemental composition, mechanical and tribological properties of TiC/amorphous carbon (TiC/a:C) nanocomposite thin films was investigated. TiC/a:C thin film of different compositions were sputtered by DC magnetron sputtering at room temperature. In order to prepare the thin films with various morphology only the sputtering power of Ti source was modified besides constant power of C source. The elemental composition of the deposited films and structural investigations confirmed the inverse changes of the a:C and titanium carbide (TiC) phases. The thickness of the amorphous carbon matrix decreased from 10 nm to 1–2 nm simultaneously with the increasing Ti content from 6 at% to 47 at%. The highest hardness (H) of ~26 GPa and modulus of elasticity (E) of ~220 GPa with friction coefficient of 0.268 was observed in case of the film prepared at ~38 at% Ti content which consisted of 4–10 nm width TiC columns separated by 2–3 nm thin a:C layers. The H3/E2 ratio was ~0.4 GPa that predicts high resistance to plastic deformation of the TiC based nanocomposites beside excellent wear-resistant properties (H/E=0.12).     

Microstructure,mechanical and tribological properties of Ti–B–C–N films prepared by reactive magnetron sputtering

Quaternary Ti–B–C–N thin films are deposited on high-speed steel substrates by the reactive magnetron sputtering (RMS) technique. The microstructure, mechanical and tribological properties of Ti–B–C–N films with different carbon contents (from 28.9 at.% to 54.2 at.%) are explored systematically. The microstructure of Ti–B–C–N films deposited by RMS is consisted mainly of Ti(C, N) nano-crystals embedded into an amorphous matrix of a-C/a-CN/a-BN/a-BC. As the carbon content increases, the crystalline size of the films diminishes, but the hardness linearly increases from 14 GPa to 26 GPa. The friction coefficient of the films sliding against steel GCr15 balls in air decreases with the increase of carbon content, which shows that Ti–B–C–N films with both higher hardness and lower friction coefficient can be obtained by means of increasing the carbon concentration in the films.     

Microstructure and tribological properties of ternary BCN thin films with different carbon contents

Boron carbon nitrogen (BCN) thin films with different carbon contents are deposited on high-speed steel substrates by reactive magnetron sputtering (RMS) and their microstructure and tribological properties are studied. The BCN films with carbon contents from 26.9 wt.% to 61.3 wt.% have an amorphous structure with variable amounts of carbon bonds (sp²C–C, sp²C–N and sp³C–N bonds). A higher carbon content enhances the film hardness but reduces the friction coefficient against GCr15 steel balls in air. BCN films with higher hardness, lower friction coefficient, and better wear resistance can be obtained by increasing the carbon content.     

Low-temperature molten salt synthesis of high-entropy carbide nanopowders

Synthesis of the powders is critical for achieving the extensive applications of high-entropy carbides (HECs). Previously reported studies focus mainly on the high-temperature (>2000 K) synthesis of HEC micro/submicropowder, while the low-temperature synthesis of HEC nanopowders is rarely studied. Herein we reported the low-temperature synthesis of HEC nanopowders, namely (Ta_0.25Nb_0.25Ti_0.25V_0.25)C (HEC-1), via molten salt synthesis for the first time. The synthesis possibility of HEC-1 nanopowders was first theoretically demonstrated by analyzing lattice size difference and chemical reaction thermodynamics based on the first-principle calculations, and then the angular HEC-1 nanopowders were successfully synthesized via molten salt synthesis at 1573 K. The as-synthesized nanopowders possessed the single-crystal rock-salt structure of metal carbides and high compositional uniformity from nanoscale to microscale. In addition, their formation mechanism was well interpreted by a classical molten salt-assisted growth.