Multi-Directional Growth of Aligned Carbon Nanotubes Over Catalyst Film Prepared by Atomic Layer Deposition

The structure of vertically aligned carbon nanotubes (CNTs) severely depends on the properties of pre-prepared catalyst films. Aiming for the preparation of precisely controlled catalyst film, atomic layer deposition (ALD) was employed to deposit uniform Fe₂O₃ film for the growth of CNT arrays on planar substrate surfaces as well as the curved ones. Iron acetylacetonate and ozone were introduced into the reactor alternately as precursors to realize the formation of catalyst films. By varying the deposition cycles, uniform and smooth Fe₂O₃ catalyst films with different thicknesses were obtained on Si/SiO₂ substrate, which supported the growth of highly oriented few-walled CNT arrays. Utilizing the advantage of ALD process in coating non-planar surfaces, uniform catalyst films can also be successfully deposited onto quartz fibers. Aligned few-walled CNTs can be grafted on the quartz fibers, and they self-organized into a leaf-shaped structure due to the curved surface morphology. The growth of aligned CNTs on non-planar surfaces holds promise in constructing hierarchical CNT architectures in future.     

Growth evolution of rapid grown aligned carbon nanotube forests without water vapor on Fe/Al2O3/SiO2/Si substrate

This paper presents the growth evolutions in terms of the structure, growth direction and density of rapid grown carbon nanotube (CNT) forests observed by scanning and transmission electron microcopies (SEM/TEM). A thermal CVD system at around 700 °C was used with a catalyst of Fe films deposited on thin alumina (Al₂O₃) supporting layers, a very fast raising time to the growth temperature below 25 °C/s, and a carbon source gas of acetylene diluted with hydrogen and nitrogen without water vapor. Activity of Fe catalyst nanoparticles was maintained for 5 min during CVD process, and it results in CNT forests with heights up to 0.6 mm. SEM images suggest that the disorder in CNT alignment at the initial stage of CNTs plays a critical role in the formation of continuous CNT growth. Also, the prolonged heating process leads to increased disorder in CNT alignment that may be due to the oxidation process occurring at the Fe nanoparticles. TEM images revealed that both double- and few-walled CNTs with diameters of 5-7 nm were obtained and the CNT density was controlled by thickness of Fe catalytic layer. The number of experiments at the same conditions showed a very good repeatability and reproducibility of rapid grown CNT forests.     

Growth of carbon nanotube forests between a bi-metallic catalyst layer and a SiO2 substrate to form a self-assembled carbon–metal heterostructure

A special nanostructure was formed by the growth of carbon nanotubes (CNTs) between a substrate and a thin bi-metallic catalyst layer using a thermal chemical vapor deposition process. The catalyst layer is composed of adjacently disposed Cr and Ni phases formed prior to CNT growth. The Cr/Ni layer serves as a bi-metallic catalyst layer, which is pushed away from the substrate as a thin and continuous nanomembrane with the growth of CNTs. The self-assembled CNT–catalyst heterostructure possesses a smooth surface (RMS = 2.9 nm) with a metallic shine. Directly interlinked to the Cr/Ni layer, dense and vertically aligned multi-walled CNTs are found. Compared to conventional CNT films, the structure has significant advantages for CNT integration. From technology point of view, the structure allows further processing without impact on the CNTs as well as transfer of pristine vertically aligned CNTs to arbitrary substrates. Moreover, the as-grown CNT films provide an interface ideal for further electrical, thermal and mechanical contacting of CNT films. We present structural investigations of this special CNT–metal heterostructure. Furthermore, we discuss possible interface mechanisms during catalyst layer formation and CNT growth.     

Electrochemical properties of electrospun PAN/MWCNT carbon nanofibers electrodes coated with polypyrrole

The multi-walled carbon nanotube (CNT)-embedded activated carbon nanofibers (ACNF/CNT) and activated carbon nanofibers (ACNF) were prepared by stabilizing and activating the non-woven web of polyacrilonitrile (PAN) or PAN/CNT prepared by electrospinning. Both ACNF and ACNF/CNT were partially aligned along the winding direction of the drum winder. The average diameter of ACNF was 330 nm, while that of ACNF/CNT was lowered to 230 nm with rough surface. This was attributed to the CNT-added polymer solution in the electrospinning process providing finer fibers by increasing the electrical conductivity compared with the CNT-free one. The specific surface area and electrical conductivity of ACNF were 984 m²/g and 0.42 S/cm, respectively, while those of ACNF/CNT were 1170 m²/g and 0.98 S/cm, respectively. PPy was coated on the electrospun ACNF/CNT (PPy/ACNF/CNT) by in situ chemical polymerization in order to improve the electrochemical performance. The capacitances of the ACNF and PPy/ACNF electrodes were 141 and 261 F/g at 1 mA/cm², respectively, whereas that of PPy/ACNF/CNT was 333 F/g. This improvement in capacitance was attributed to the following: (i) the preparation of aligned nano-sized ACNF/CNT by electrospinning and the addition of CNT and (ii) the formation of a good charge-transfer complex by the PPy coating on the surface of the aligned nano-sized ACNF/CNT. The former leads to a good morphology and superior properties, such as a higher surface area, the formation of mesopores and an increase in electrical conductivity. The latter offers a refined three-dimensional network due to the highly porous structure between ACNF/CNT and PPy.     

Vertically aligned carbon nanotube arrays grown on a lamellar catalyst by fluidized bed catalytic chemical vapor deposition

Large amount of vertically aligned carbon nanotube (CNT) arrays were grown among the layers of vermiculite in a fluidized bed reactor. The vermiculite, which was 100-300 μm in diameter and merely 50-100 μm thick, served as catalyst carrier. The Fe/Mo active phase was randomly distributed among the layers of vermiculite. The catalyst shows good fluidization characteristics, and can easily be fluidized in the reactor within a large range of gas velocities. When ethylene is used as carbon source, CNT arrays with a relatively uniform length and CNT diameter can be synthesized. The CNTs in the arrays are with an inner diameter of 3-6 nm, an outer diameter of 7-12 nm, and a length of up to several tens of micrometers. The as-grown CNTs possess good alignment and exhibit a purity of ca. 84%. Unlike CNT arrays grown on a plane or spherical substrate, the CNT arrays grown in the fluidized bed remain their particle morphologies with a size of 50-300 μm and the good fluidization characteristics were preserved accordingly.     

Dry spinning yarns from vertically aligned carbon nanotube arrays produced by an improved floating catalyst chemical vapor deposition method

Carbon nanotube (CNT) yarn was drawn directly from super aligned CNT arrays synthesized by an improved floating catalyst chemical vapor deposition method. The synthesis of aligned CNT was performed as a multi-step interim reactant supply reaction to produce a double-layered CNT array in a horizontal quartz tube reactor. During the growth period, most impurities were blocked on the top surface of the first layer and therefore the top aligned CNT layer was unspinnable. However, the bottom CNT layer was super aligned CNTs, which were with clean surface and a tortuosity factor of 1.07. During the dry spinning process, the tangles, friction, and van der Waals interaction between CNTs served to hold them into CNT yarns. The tensile strength of the as-obtained CNT yarn can be further improved from 0.24 to 0.30 GPa by twisting.     

Controlling the diameter distribution of carbon nanotubes grown from camphor on a zeolite support

Single-wall and multi-wall carbon nanotubes (SWNTs and MWNTs, respectively) of controlled diameter distribution were selectively grown by thermal decomposition of a botanical hydrocarbon, camphor, on a high-silica zeolite support impregnated with Fe-Co catalyst. Effects of catalyst concentration, growth temperature and camphor vapor pressure were investigated in wide ranges, and diameter distribution statistics of as-grown nanotubes was analyzed. High yields of metal-free MWNTs of fairly uniform diameter (∼10 nm) were grown at 600-700 °C, whereas significant amounts (∼30%) of SWNTs were formed at 850-900 °C within a narrow diameter range of 0.86-1.23 nm. Transmission electron microscopy and micro-Raman spectroscopy reveal that camphor-grown nanotubes are highly graphitized as compared to those grown from conventional CNT precursors used in chemical vapor deposition.     

Direct growth of vertically aligned carbon nanotubes on a planar carbon substrate by thermal chemical vapour deposition

Uniform, vertically aligned multiwalled carbon nanotube arrays (VACNTs) were grown on glassy carbon-like thin films by thermal chemical vapour deposition (CVD). Thin (5 nm) aluminum and iron catalyst layers were pre-deposited by evaporation on the carbon substrates and VACNTs were grown at 750 °C by water-assisted CVD using ethylene as the carbon source. The aluminum layer was shown to be essential for aligned nanotube growth. VACNT arrays adhered strongly to the carbon film with low contact resistance between the VACNTs and the substrate. The VACNT arrays grown directly on the planar conducting carbon substrate have attractive properties for use as electrodes. Excellent voltammetric characteristics are demonstrated after insulating the arrays with a dielectric material.     

Optimization of water assisted chemical vapor deposition parameters for super growth of carbon nanotubes

The optimization of water assisted chemical vapor deposition (WA-CVD) was carried out to synthesize ultra long, vertically aligned, densely packed carbon nanotube (CNT) forests. The effect of various WA-CVD parameters (viz. the flow rate of the reactant gas mixture and its injection temperature, growth kinetics, ramp rate and growth temperature) on the height of the CNTs was studied. A hypothesis for catalytic activity is proposed on the basis of the X-ray photoelectron spectroscopic analysis of the CNT grown substrates and further verified at the optimum condition. The effect of temperature on the growth of the CNTs is studied. The gas flow rate and injection temperature influence the onset of oxidation of the substrates, which in turn affects the CNT growth rate. A growth kinetics study is performed in order to monitor the growth temperature. The role of the onset of oxidation of the iron catalyst in the growth of the CNTs is studied by varying the ramp rate. The precise CNT growth temperature for WA-CVD is determined by growth temperature studies. The optimum condition allows ∼2.2 ± 0.002 mm long CNTs to be obtained.     

Synthesis of vertically aligned, double-walled carbon nanotubes from highly active Fe-V-O nanoparticles

Monodispersed Fe-V-O nanoparticles were prepared by a liquid-phase synthesis to be used as catalysts for carbon nanotube (CNT) growth. Vertically aligned, dense CNTs have been grown from the highly active Fe-V-O nanoparticles by chemical vapor deposition. Diameter distribution of CNTs (3.7 ± 0.6 nm) was consistent with that of the original nanoparticles (3.1 ± 0.5 nm), and the value was smaller than those of other reported vertically aligned CNTs from as-prepared nanoparticles. TEM study showed that the CNTs consisted mainly of double-walled CNTs (single: 14%, double: 74%, and triple: 12%). The CNT diameter increased to 4.4 ± 0.8 nm as the growth temperature was increased from 810 to 870 °C. Energy dispersive X-ray spectroscopy of nanoparticles before and after the CNT growth revealed that the V content decreased from 7.2 to 2.7 at.%, suggesting that the segregation of Fe and V played an important role for the high activity of the Fe-V-O nanoparticles.     

Growth and characterization of vertically aligned centimeter long CNT arrays

Record-long (21.7 mm) vertically aligned MWNT arrays were synthesized using water-assisted thermal CVD process. The catalyst lifetime was maintained for 790 min at optimized experimental condition. The growth of the centimeter long CNT was observed by real time photography at different growth conditions. The growth length increased linearly with increasing growth time followed by a sudden growth end. The ratio of ethylene and H₂ concentration as well as the water and ethylene concentration was studied and optimized which led to prolong catalyst lifetime. Transmission electron microscope images confirmed that most CNTs were double wall and the number of wall distribution was uniform along different height position. Raman spectra showed that the I_D/I_G ratio remained constant at the 3 studied positions along the CNT. TGA demonstrated negligible impurity incorporation in the CNT array.     

Growth and electrical characterization of high-aspect-ratio carbon nanotube arrays

The remarkable properties of carbon nanotubes (CNTs) make them attractive for microelectronic applications, especially for interconnects and nanoscale devices. In this paper, we describe a microelectronics compatible process for growing high-aspect-ratio CNT arrays with application to vertical electrical interconnects. A lift-off process was used to pattern catalyst (Al₂O₃/Fe) islands to diameters of 13 or 20 μm. After patterning, chemical vapor deposition (CVD) was involved to deposit highly aligned CNT arrays using ethylene as the carbon source, and argon and hydrogen as carrier gases. The as-grow CNTs were characterized by transmission electron microscopy (TEM), scanning electron microscopy (SEM) and X-ray photoelectron spectroscopy (XPS). The results demonstrated that the CNTs have high purity, and form densely-aligned arrays with controllable array size and height. Two-probe electrical measurements of the CNT arrays indicate a resistivity of ∼0.01 Ω cm, suggesting possible use of these CNTs as interconnect materials.     

Growth of conformal single-walled carbon nanotube films from Mo/Fe/Al2O3 deposited by electron beam evaporation

We discuss growth of high-quality carbon nanotube (CNT) films on bare and microstructured silicon substrates by atmospheric pressure thermal chemical vapor deposition (CVD), from a Mo/Fe/Al₂O₃ catalyst film deposited by entirely electron beam evaporation. High-density films having a tangled morphology and a Raman G/D ratio of at least 20 are grown over a temperature range of 750-900 °C. H₂ is necessary for CNT growth from this catalyst in a CH₄ environment, and at 875 °C the highest yield is obtained from a mixture of 10%/90% H₂/CH₄. We demonstrate for the first time that physical deposition of the catalyst film enables growth of uniform and conformal CNT films on a variety of silicon microstructures, including vertical sidewalls fabricated by reactive ion etching and angled surfaces fabricated by anisotropic wet etching. Our results confirm that adding Mo to Fe promotes high-yield SWNT growth in H₂/CH₄; however, Mo/Fe/Al₂O₃ gives poor-quality multi-walled CNTs (MWNTs) in H₂/C₂H₄. An exceptional yield of vertically-aligned MWNTs grows from only Fe/Al₂O₃ in H₂/C₂H₄. These results emphasize the synergy between the catalyst and gas activity in determining the morphology, yield, and quality of CNTs grown by CVD, and enable direct growth of CNT films in micromachined systems for a variety of applications.     

A pressure-dependent selective growth of single-walled and multi-walled carbon nanotubes using plasma enhanced chemical vapor deposition

Pressure-induced transition (5−100 kPa) of carbon nanotube (CNT) morphology in plasma enhanced chemical vapor deposition (PECVD) is presented. High-purity, vertically-aligned single-walled CNTs (SWCNTs) were synthesized only when PECVD was used at atmospheric pressure, while multi-walled CNTs were preferentially synthesized when the total pressure was lower than 20 kPa. In the reduced pressure range, nanostructured catalysts were easily coagulated at the initial stage of CNT nucleation even if an excess supply of reactive species and high-energy ion bombardment were absent. If catalyst coagulation was avoided at the moment of CNT nucleation, SWCNTs were grown in the root growth regime even at 5 kPa; however, the top CNT layer was severely contaminated by amorphous carbon, produced as a result of excess supply of reactive species.     

Multiple “optimum” conditions for Co-Mo catalyzed growth of vertically aligned single-walled carbon nanotube forests

Carbon nanotubes (CNTs) were grown directly on substrates by alcohol catalytic chemical vapor deposition using a Co-Mo binary catalyst. Optimum catalytic and reaction conditions were investigated using a combinatorial catalyst library. High catalytic activity areas on the substrate were identified by mapping the CNT yield against the orthogonal gradient thickness profiles of Co and Mo. The location of these areas shifted with changes in reaction temperature, ethanol pressure and ethanol flow rate. Vertically aligned single-walled CNT (SWCNT) forests grew in several areas to a maximum height of ca. 30 μm in 10 min. A pure Co catalyst yielded a vertically aligned SWCNT forest with a bimodal diameter distribution. The effects of Mo on the formation of catalyst nanoparticles and on the diameter distribution of SWCNTs are discussed and Mo as thin as a monolayer or thinner was found to suppress the broadening of SWCNT diameter distributions.     

Prevention of Si-contaminated nanocone formation during plasma enhanced CVD growth of carbon nanotubes

We investigated the growth behavior and morphology of vertically aligned carbon nanotubes (CNTs) on silicon (Si) substrates by direct current (DC) plasma enhanced chemical vapor deposition (PECVD). We found that plasma etching and precipitation of the Si substrate material significantly modified the morphology and chemistry of the synthesized CNTs, often resulting in the formation of tapered-diameter nanocones containing Si. Either low bias voltage (∼500 V) or deposition of a protective layer (tungsten or titanium film with 10-200 nm thickness) on the Si surface suppressed the unwanted Si etching during growth and enabled us to obtain cylindrical CNTs with minimal Si-related defects. We also demonstrated that a gate electrode, surrounding a CNT in a traditional field emitter structure, could be utilized as a protection layer to allow growth of a CNT with desirable high aspect ratio by preventing the nanocone formation.     

Synthesis of carbon nanofibers and measurements of hydrogen storage

The synthesis of carbon nanofibers was carried out by catalytic decomposition of ethylene in presence of hydrogen. Bimetallic catalysts, e.g. Fe-Cu or Ni-Cu, were synthesized by coprecipitation, reduction-precipitation and reverse microemulsion techniques and were proven to have a strong influence on the morphology of the nanofibers. The best results in terms of synthesis homogeneity were obtained by supporting the bimetallic catalyst on a high surface area silica support by the “incipient wetness” method. The hydrogen storage capacity of carbon nanofibers was tested in a custom made Sievert apparatus operating up to 160 bar and 450 °C. Several “in situ” activation procedures were experimented, however according to our data carbon nanofibers do not seem a suitable candidate for hydrogen storage. With the purpose of promoting a “spillover” function, 2 wt.% Pd-doped nanofibers were prepared. After loading at 77 bar, a hydrogen storage of 1.38 ± 0.30 wt.% was measured at room temperature.     

Influence of carbon nanotube scaffolds on human cervical carcinoma HeLa cell viability and focal adhesion kinase expression

Five types of carbon nanotube (CNT) scaffolds were prepared by vacuum filtration of the dispersed single-wall carbon nanotubes (SWCNTs), acid-treated SWCNTs, multi-wall carbon nanotubes (MWCNTs), acid-treated MWCNTs, and amylose-wrapped SWCNTs in water onto porous poly(vinylidene chloride) membranes. The influence of these scaffolds on human cervical carcinoma HeLa cells was investigated by WST-1 assay, acridine orange/ethidium bromide double staining and 1,1′-dioctadecyl-3,3,3′,3′tetram-ethylindocarbocyanine perchlorate staining. The results indicated that the viability of HeLa cells cultured on these scaffolds decreased in the following order: amylose-wrapped SWCNTs > acid-treated MWCNTs > MWCNTs > acid-treated SWCNTs > SWCNTs. Cells cultured on SWCNTs and on acid-treated SWCNTs were found undergoing apoptosis with damaged cell membrane and condensed chromatin. The result of an immunocytochemical test showed that both “dot-like” and “dash-like” focal adhesion kinases (FAKs) mainly distributed at the periphery of cells cultured on SWCNTs, while “dot-like” FAKs distributed in the whole cell body of cells cultured on MWCNTs. We therefore hypothesize that FAK expression might play a key role in controlling cell viability for cells cultured on CNT scaffolds.     

Carbon nanotube growth mechanism switches from tip- to base-growth with decreasing catalyst particle size

The growth of carbon nanotubes by a plasma assisted catalytic chemical vapor deposition was investigated using cobalt, nickel and iron catalyst particles of different sizes. For the three catalysts examined, it was shown that the growth mode switches from “tip-growth” for large particles (>>5 nm) to “base-growth” for smaller ones (<5 nm). While single-walled nanotubes and those with few walls (typically <7 walls) grow from their base, larger multi-walled nanotubes are fed with carbon via their tips which support the catalyst particle. A growth scenario involving two different pathways for carbon diffusion is proposed in order to explain the change in growth mode.     

Electroconductive Alumina-TiC-Ni nanocomposites obtained by Spark Plasma Sintering

In the present work, the processing and characterization of electroconductive Alumina-TiC-Ni nanocomposites obtained by Spark Plasma Sintering (SPS) are described. These nanocomposites are singular due to the excellent mechanical properties they present (particular regarding Vickers hardness, 25.6 ± 0.7 GPa), as well as their extremely good wear behaviour, studied under “ball-on-disk” dry sliding conditions. The wear rate obtained was 25 times (almost 1.5 orders of magnitude) smaller than the value obtained for a monolithic alumina sintered under the same conditions. Flexural strength had been improved up to 75% with respect to the monolithic alumina processed under the same conditions. As these nanocomposites can be machined by electroerosion (EDM), they can adopt any shape for devices requiring a good mechanical performance and low wear rates.