基于MOSFET比例差值特性的器件表征方法

利用比例差值方法给出了MOS器件的一种新特性——比例差值输出特性，该特性具有谱峰特征，其峰位、峰高与器件的特征参数相关．采用了一个分析模型来表征谱峰与器件特性参数关系，可以直接提取MOS器件特征参数．模型计算结果与实验数据保持了很好的一致性．实际测量中不同衬底条件和不同的比例差值常数对提取参数的影响也作了分析．     

0.13μm MOSFET 器件的可靠性分析技术

随着大规模集成化芯片上的器件尺寸微型化，MOSFET器件的按比例缩小的一个突出的影响是饱和区趋向消失，给器件特征参数(饱和电流，饱和电压，阈值电压，载流子迁移率)的确定和可靠性评估带来困难。为解决微小尺度的各种功能器件关键参数的直接提取及建立一种在线的综合检测与可靠性分析技术，本文运用一种新的数据处理运算概念，即比例差值算符，揭示了元器件的另一种本征特性——比例差值特性。经过严格的理论与实验证明，只要代表元器件性能的函数满足比例差值谱函数定理，那么元器件的比例差值特性具有谱峰，其谱峰的位置，谱峰的高度决定了元器件的基本性质，使得元器件特征参数的确定可以在最佳状态(准理想状态)下实现，为微尺度器件的在线质量检测与可靠性判定提供了新的依据。     

新一代半导体器件参数的比例差值谱系统

1.引言 随着大规模集成芯片上的器件尺寸的微型化,为了解决微小尺度的各种功能器件关键参数的直接提取及建立一种在线的综合检测与分析技术,半导体器件参数比例差值谱系统运用了一种新的数据处理运算概念,即比例差值算符,揭示了元器件的另一种本征特性--比例差分特性.     

超薄栅MOS结构恒压应力下的直接隧穿弛豫谱

随着器件尺寸的迅速减小 ,直接隧穿电流将代替 FN电流而成为影响器件可靠性的主要因素 .根据比例差值算符理论和弛豫谱技术 ,针对直接隧穿应力下超薄栅 MOS结构提出了一种新的弛豫谱——恒压应力下的直接隧穿弛豫谱 (DTRS) .该弛豫谱保持了原有弛豫谱技术直接、快速和方便的优点 ,能够分离和表征超薄栅 MOS结构不同氧化层陷阱 ,提取氧化层陷阱的产生 /俘获截面、陷阱密度等陷阱参数 .直接隧穿弛豫谱主要用于研究直接隧穿注入的情况下超薄栅 MOS结构中陷阱的产生和复合 ,为超薄栅 MOS结构的可靠性研究提供了一强有力工具 .     

超薄栅MOS结构恒压应力下的直接隧穿弛豫谱

随着器件尺寸的迅速减小,直接隧穿电流将代替FN电流而成为影响器件可靠性的主要因素.根据比例差值算符理论和弛豫谱技术,针对直接隧穿应力下超薄栅MOS结构提出了一种新的弛豫谱--恒压应力下的直接隧穿弛豫谱(DTRS).该弛豫谱保持了原有弛豫谱技术直接、快速和方便的优点,能够分离和表征超薄栅MOS结构不同氧化层陷阱,提取氧化层陷阱的产生/俘获截面、陷阱密度等陷阱参数.直接隧穿弛豫谱主要用于研究直接隧穿注入的情况下超薄栅MOS结构中陷阱的产生和复合,为超薄栅MOS结构的可靠性研究提供了一强有力工具.     

用于SPICE-Ⅱ程序的耗尽型MOS器件模型

分析了SPICEⅡ程序模拟耗尽型MOS器件所遇到的限制及其原因,用线性区阈电压和饱和区阈电压描述耗尽型器件线性区和饱和区特性,讨论了饱和区阈电压与线性区阈电压之差随衬偏电压变化的关系,建立了耗尽型MOS器件模型及其参数提取的新方法.模拟结果与实验基本吻合.     

共振隧穿二极管基础电路的模拟与分析

简单介绍了RTD的器件特性和器件模型,用HSPICE模拟出RTD与电阻、MOS晶体管、RTD本身结合的电路特性.通过对不同电路参数I-V特性的模拟和分析,为理解RTD器件机理和构造复杂电路提供了初步的基础.     

电子器件

0611445 比例差值谱技术在微尺度器件可靠性研究中的最新应用[刊,中]／纪志罡／／中国集成电路．-2006,(1)．- 65-70(G) 本文应用比例差分(PDO．Proportional Difference Operator)技术提出了一种新的表征微尺度MOS器件负偏置温度不稳定性(Negative Bias Temperature Insta-     

共振隧穿二极管基础电路的模拟与分析

简单介绍了RTD的器件特性和器件模型 ,用HSPICE模拟出RTD与电阻、MOS晶体管、RTD本身结合的电路特性。通过对不同电路参数I V特性的模拟和分析 ,为理解RTD器件机理和构造复杂电路提供了初步的基础     

Si3N4栅MOS器件的隧穿电流模拟

随着MOS器件尺寸按比例缩小到亚100 nm时代,栅绝缘层直接隧穿(Direct Tunnel-ing,DT)电流逐渐增大.使用Si3N4材料作为栅介质,利用其介电常数高于SiO2的特性,可以在一定时期内有效地解决隧穿电流的问题.文章在二维器件模拟软件PISCES-II中首次添加了模拟高k材料MOS晶体管的器件模型,并对SiO2和Si3N4栅MOS晶体管的器件特性进行了模拟比较.     

Resolution Enhancement Technology:Integrated Process Solutions using OPC

DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Study of waveguide coupling efficiency in hybrid silicon lasers

This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel＇s.     

A rigorous proof of MIMO channel capacity’s increase with antenna number

It is well known that adding more antennas at the transmitter or at the receiver may offer larger channel capacity in the multiple-input multiple-output（MIMO） communication systems. In this letter, a simple proof is presented for the fact that the channel capacity increases with an increase in the number of receiving antennas. The proof is based on the famous capacity formula of Foschini and Gans with matrix theory.     

Teleportation of an arbitrary unknown N-qubit entangled state under the controlling of M controllers

A new quantum protocol to teleport an arbitrary unknown N-qubit entangled state from a sender to a fixed receiver under M controllers(M < N) is proposed. The quantum resources required are M non-maximally entangled Greenberger-Home-Zeilinger (GHZ) state and N-M non-maximally entangled Einstein-Podolsky-Rosen (EPR) pairs. The sender performs N generalized Bell-state measurements on the 2N particles. Controllers take M single-particle measurement along x-axis, and the receiver needs to introduce one auxiliary two-level particle to extract quantum information probabilistically with the fidelity unit if controllers cooperate with it.     

Diode-end-pumped Nd:YVO4/LBO lasers with 4.2W continuous-wave output at 457 nm

A continuous-wave (CW) 457 nm blue laser operating at the power of 4.2 W is demonstrated by using a fiber coupled laser diode module pumped Nd: YVO4 and using LBO as the intra-cavity SHG crystal With the optimization of laser cavity and crystal parameters, the laser operates at a very high efficiency. When the pumping power is about 31 W, the output at 457nm reaches 4.2 W, and the optical to optical conversion efficiency is about 13.5% accordingly. The stability of the out putpower is better than 1.2% for 8 h continuously working.     

Call for Papers

正Wireless Body-area Networks The last decade has witnessed the convergence of three giant worlds:electronics,computer science and telecommunications.The next decade should follow this convergence in most of our activities with the generalization of sensor networks.In particular with the progress in medicine,people live longer and the aging of population will push the development of wireless personal networks