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1.
低温APCVD法制备氮化硅薄膜   总被引:7,自引:0,他引:7  
孟祥森  宋晨路 《陶瓷学报》1999,20(3):119-122
本实验用常压化学气相沉积法(APCVD)在平玻璃基板上沉积了氮化硅薄膜,研究了基板温度、反应气体比例,热处理等对氮化硅薄膜制备的影响,发现在700℃以下,NH3/SiH4流量比例为15/1时制得较纯的氮化硅薄膜,比常规APCVD法制备温度低大约150℃。  相似文献   

2.
DC—PCVD法快速制备Si3N4薄膜   总被引:2,自引:1,他引:2  
周海  吴大兴 《硅酸盐学报》1997,25(4):489-493
采用DC-PCVD方法,控制工艺参数,在GCr15钢试样上获得40μm厚的,以Si3N4为主要成分的非晶态绝缘薄膜,沉积速率约为37A/s,讨论了沉积速率高的原因。  相似文献   

3.
用热丝辅助射频等离子体化学气相沉积法(PCVD)合成:c-BN薄膜获得成功。实验结果表明,灯丝温度、反应气压、衬底温度、灯丝与衬底距离对薄膜质量有重要影响。  相似文献   

4.
丝光沸石对α—蒎烯异构化的催化作用   总被引:1,自引:0,他引:1  
对经化学气相沉积法修饰的天然丝光沸石进行NH3-TPD和孔径测试,并用该系列催化剂催化α-蒎烯异构化反应。发现经CVD修饰后孔径变化不大,而催化活性与酸量成正比,酸强度对反应活性及选择性无影响。  相似文献   

5.
甲醇胺化有关产品的汽-液平衡测定   总被引:4,自引:0,他引:4  
本文测定了与甲醇胺化产物有关的NH_3-CH_3OH,NH_3-二甲胺(DMA),NH_3-一甲胺(MMA),NH_3-H_2O,DMA-CH_3OH,DMA-H_2O,MMA-CH_3OH,MMA-H_2O和MMA-三甲胺(TMA)九个二元系在20,30,40,50,60,70,80,90,100和120℃下的总压P和汽液总组成数据,用间接推算法计算了等温汽-液相平衡数据,给出了以实验数据拟合所得Wilson参数Λ_(12)和Λ_(21),随温度变化关联式的常数。对所用仪器精度进行的误差分析表明,测定的最大相对误差为1.7%。  相似文献   

6.
甲醇胺化有关产品的汽—液平衡测定   总被引:1,自引:0,他引:1  
本文测定了与甲醇胺化产物有关的NH3-CH3OH,NH3-二甲胺(DMA),NH3-一甲胺(MMA),NH3-H2O,DMA-CH3OH,DMA-H2O,MMA-CH3OH,MMA-H2O和MMA-三甲胺(TMA)九个二元系在20,30,40,50,60,70,80,90,100和120℃下的总压P和汽液总组成数据,用间接推算法计算了等温汽-液相平衡数据,给出了以实验数据拟合所得Wilson参数A  相似文献   

7.
用差示扫描量热法研究环氧封端酚酞聚芳醚腈的固化特性   总被引:3,自引:1,他引:2  
利用差示扫描量热法研究了环氧封端酚酞聚芳醚腈(简称E-PCE)中固化剂类型对E-WCE树脂固化反应温度、反应热的影响,结果表明,固化剂与E-PC E树脂反应的活性为MDA>DDE>DDS;E-PCE/DDS体系的最低固化反应温度为163.2℃,固化反应峰顶温度为228,1℃,固化反应表观活化能为81.27kJ/mol,固化反应级数为0.90。  相似文献   

8.
对化学气相沉积(CVD)法制备SiC的热力学进行了系统研究,考察了H2-MTS,Ar-SiO-C,H2-SiO-CxHy,H2-SiH4-CxHy等体系,着重研究了温度、压力、载气量和初始反应气体浓度对沉积单相SiC的影响,以CVD相图的形式给出了计算结果,这些相图对CVD法制备SiC的实验具有指导作用.  相似文献   

9.
合成2,6-二甲基苯胺的催化剂及工艺条件研究   总被引:2,自引:1,他引:1  
通过实验筛选出该反应的催化剂为V2O5 - Cr2O3 - Al2O3 ,确定了浸渍法制备的浸渍液质量分数为13-2% ,催化剂中主催化剂V2O5 的最佳质量分数为10 % ,最佳改性金属氧化物为Cr2O3及最适宜比例为n(V2O5)∶n(Cr2O3) =10∶1 。通过工艺条件考察,筛选出最佳工艺条件为:反应温度370 ℃,原料配比n(C7H7NH2)∶n(CH3OH)∶n(H2O)= 1∶3∶1,液时空速0-5/h,原料中加入水可明显提高目的产物选择性。反应转化率为74-29 % ,目的产物选择性为51-24 % 。  相似文献   

10.
气相法合成2—乙基—3,5—二甲基吡啶的研究   总被引:1,自引:0,他引:1  
肖国民  孔祥翔 《化工时刊》1999,13(10):17-19
介绍了催化剂的制备方法,用微型反应色谱系统在常压,350℃,原料物质的量配比为NH3:C3H6O=1:2的条件下,考察了各种催化剂对2-乙基-3,5-二甲基吡啶(EDMP)收率的影响,催化剂为Co3Al2(PO4)4时,EDMP的收率最高;考察了催化剂粒度圣转化率的影响,粒径小于0.8mm时转化率较高,研究了温度对EDMP收率的影响,确定合适温度为350~400℃。  相似文献   

11.
Oxynitride glass fibers were drawn from the melt in N2 atmospheres. The fibers were tested for their alkali durability in 10% NaOH at 96°C for 6 h. The durability is reported as weight loss in mg/cm2. The photomicrographs of the fibers before and after testing are presented. Calcium silicate oxynitride fibers have good durability because of a protective surface layer of Ca(OH)2. Yttria-containing glasses have the best durability among the compositions reported here.  相似文献   

12.
Tailoring glass compositions can raise the viscosity of SiREAl oxynitride glasses. In the present study, viscosity data are obtained by determining the compressive creep response of bulk glasses in air. The findings reveal that increasing both the nitrogen-to-oxygen and the yttrium-to-aluminum ratios of the glasses shifts the glass viscosity to higher temperatures. In addition, the substitution of progressively smaller rare earths in the glass composition results in a further increase in the glass viscosity. These effects have important implications in the creep resistance of silicon nitride ceramics where the amorphous intergranular films are a major factor in creep resistance.  相似文献   

13.
A smart window is a device controlling the energy of solar flux entering building or car and makes the interiors comfortable and the solar energy utilization more effective. We have developed an optimized APCVD technology for thin film deposition on conductive glass. The films are capable to change their transmittance if a small voltage is applied across the film.  相似文献   

14.
玻璃基板上硅薄膜附着力的研究   总被引:1,自引:0,他引:1  
朱建强  姜英娜  宋晨路  韩高荣 《玻璃》2005,32(2):3-4,21
采用APCVD工艺,以SiH4为原料在不同温度的玻璃基板上硅质薄膜的制备,采用划痕法测量薄膜与基板之间的附着力,研究了薄膜附着力随基板温度变化趋势.说明了吸附、扩散的增强以及沉积速率的增大等都会导致薄膜附着力的增加.  相似文献   

15.
《Ceramics International》2015,41(6):7565-7572
A variety of advanced functions such as hydrophilicity and hydrophobicity are required for transparent glass plates recently. This paper reports a new procedure to produce transparent silica thin films on glass plates obtained from sodium silicate as inexpensive silica source by its dip coating and subsequent deposition of silica with (NH4)2SO4 solution. When the thin films were prepared using bovine serum albumin (BSA), the resulting transparent films became more hydrophobic than that obtained without BSA and had good adhesion with water droplet, the so-called “petal effect”. Water droplet on the silica thin film did not slide down even when the substrate turned vertically and upside down. Although no BSA was included in the silica thin film, BSA contributed to the formation of nano-sized asperity structures in the film, producing more hydrophobic (less hydrophilic) property and the petal effect.  相似文献   

16.
Oxynitride glasses combine a high refractoriness, with Tg typically >850°C, and remarkable mechanical properties in comparison with their parent oxide glasses. Their Young's modulus and fracture toughness reach 170 GPa and 1.4 MPa m.5, respectively. Most reports show good linear relationships between glass property values and nitrogen content. There is a clear linear dependence of Young's modulus and microhardness on fractional glass compactness (atomic packing density). They also have a better resistance to surface damage induced by indentation or scratch loading. The improvements stem from the increase of the atomic network cross-linking—because of three-fold coordinated nitrogen—and of the atomic packing density, despite nitrogen being lighter than oxygen and the Si–N bond being weaker than the Si–O bond. For constant cation composition, viscosity increases by ∼3 orders of magnitude as ∼17 eq.% oxygen is replaced by nitrogen. For rare earth oxynitride glasses with constant N content, viscosity, Young's modulus, Tg, and other properties increase with increasing cation field strength (decreasing ionic radius). Research continues to find lighter, stiffer materials, including glasses, with superior mechanical properties. With higher elastic moduli, hardness, fracture toughness, strength, surface damage resistance, increased high temperature properties, oxynitride glasses offer advantages over their oxide counterparts.  相似文献   

17.
Glass laminates, fabricated to include periodic thin layers containing biaxial compressive stresses, exhibit a threshold strength, i.e., a stress below which failure will not occur. Ion-exchange treatments in KNO3 at 350°–450°C for periods of 3–72 h were used to create residual compressive stresses at the surface of soda lime silicate glass sheets. Wafer direct bonding of the ion-exchanged glass sheets resulted in glass laminates with thin layers of compressive stress adjacent to the glass interface and perpendicular to the laminate top surface. Critical strain energy release measurements of the bonded interface were used to optimize the bonding temperature/time to avoid significant relaxation of the stress produced by ion exchange. Stress profiles, determined via the wafer curvature measurement method, showed a residual compressive stress maximum of 328 MPa for an ion exchange temperature of 450°C. The threshold flexural strength of the ion exchanged glass laminates was determined to be 112 MPa after the introduction of indentation cracks with indent loads ranging from 1 to 5 kg. In contrast to similar ceramic laminates, where cracks either propagate across the compressive layer or bifurcate within the compressive layer, the cracks in the glass laminates were deflected along the interface between the bonded sheets.  相似文献   

18.
氧氮化物玻璃是一种特种玻璃。与氧化物玻璃相比,其性能和结构上都存在较大差异。本文分析了几种与氮化硅有关的氧氮化物玻璃的形成范围及其网络结构特征。同时,对氧氮化物玻璃的密度、显微硬度、杨氏模量、断裂韧性、粘度及转变温度和析晶性与含N量之间的关系进行了探讨。  相似文献   

19.
The leaching of acid-soluble oxides from a silicate glass forms a silica-rich surface film that is permeable to further acid attack. A quantitative study has been made of the effect of baking these surface films at various temperatures. The baking decreases the permeability of the films and thus makes the glass more resistant to attack by acid solutions.  相似文献   

20.
氧氮玻璃具有比氧化物玻璃更高的密度、折射率、杨氏模量、玻璃转变温度、软化温度和导电性能,更优异的化学稳定性,在陶瓷焊接,核废料固化,陶瓷增韧等方面都有广泛的应用前景.本文介绍了氧氮玻璃的系统、氧氮玻璃的制备方法、氧氮玻璃的结构、性能和氧氮玻璃的应用.  相似文献   

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