Terfenol-D/SAW谐振器/Terfenol-D复合磁传感器

设计了一种由超磁致伸缩材料Terfenol-D和SAW谐振器构成的复合磁传感器,在磁场作用下,Terfenol-D沿长度方向伸缩,并将应力应变传递至SAW谐振器,使其产生应变,造成谐振频率改变,通过测量SAW谐振器谐振频率的变化来测量磁场强度.分析了该磁传感器的传感原理,建立了该复合磁传感器的静态模型,对弹性敏感元件进行了受力分析,根据压磁方程和受力平衡得到该磁传感器的静态特性.实验结果表明:该复合磁传感器灵敏度可达341.6Hz/Oe,较Terfenol-D/SAW谐振器结构灵敏度提高了3倍;测量谐振频率的分辨率为1Hz,SAW谐振器频率稳定度为0.1×10-6时,该磁传感器对磁场的分辨率为10-6T.     

Development of SAW based gyroscope with high shock and thermal stability

A novel surface acoustic wave (SAW)-based gyroscope with an 80 MHz central frequency was developed on a 128° YX LiNbO₃ piezoelectric substrate. The developed sensor was composed of a SAW resonator, metallic dots, and two SAW delay lines. A SAW resonator was employed to generate a stable standing wave with a large amplitude, metallic dots were used to induce a Coriolis force and to form a secondary SAW, and two delay lines were formed to extract the Coriolis effect by comparing the resonance frequencies between these two delay lines. Coupling of modes (COM) modeling was conducted to determine the optimal device parameters prior to fabrication. According to the simulation results, the device was fabricated and then measured on a rate table. When the device was subjected to an angular rotation, resonant frequency differences between the two oscillators were observed because of the secondary wave, generated by the Coriolis force, perturbed the propagation of the SAW in the sense element. Depending on the angular velocity, the difference of the resonance frequency was linearly modulated. The obtained sensitivity was approximately 172 Hz deg^?1 s^?1 at an angular rate range of 0–500 deg/s. Device performances depending on different mass weights and temperatures were also characterized. Good thermal and shock stabilities were observed during the evaluation process.     

Development of SAW-based multi-gas sensor for simultaneous detection of CO2 and NO2

A 440 MHz wireless and passive surface acoustic wave (SAW)-based multi-gas sensor integrated with a temperature sensor was developed on a 41° YX LiNbO₃ piezoelectric substrate for the simultaneous detection of CO₂, NO₂, and temperature. The developed sensor was composed of a SAW reflective delay lines structured by an interdigital transducer (IDT), ten reflectors, a CO₂ sensitive film (Teflon AF 2400), and a NO₂ sensitive film (indium tin oxide). Teflon AF 2400 was used for the CO₂ sensitive film because it provides a high CO₂ solubility, with good permeability and selectivity. For the NO₂ sensitive film, indium tin oxide (ITO) was used. Coupling of mode (COM) modeling was conducted to determine the optimal device parameters prior to fabrication. Using the parameters determined by the simulation results, the device was fabricated and then wirelessly measured using a network analyzer. The measured reflective coefficient S₁₁ in the time domain showed high signal/noise (S/N) ratio, small signal attenuation, and few spurious peaks. The time positions of the reflection peaks were well matched with the predicted values from the simulation. High sensitivity and selectivity were observed at each target gas testing. The obtained sensitivity was 2.12°/ppm for CO₂ and 51.5°/ppm for NO₂, respectively. With the integrated temperature sensor, temperature compensation was also performed during gas sensitivity evaluation process.     

基于基片集成波导和消逝模谐振腔的压力传感器设计

提出一种新型的基于基片集成波导和消失模谐振腔的压力传感结构。设计了圆形空腔,当施加外界压力时,圆形空腔发生形变从而使谐振腔谐振频率变化。采用共面波导线对谐振腔进行耦合馈电并将频率信号传输出来。通过读取传感器的回波损耗参数( S11)来表征压力与频率的关系。利用高频仿真软件HFSS对谐振腔进行了仿真设计和优化,设计尺寸为30 mm×30 mm×1.93 mm,与传统谐振腔相比体积明显减小。传感器基底为Rogers 4003C板材,采用PCB技术进行加工。搭建压力测试平台对传感器进行测试,结果表明在0~3 N的压力范围内变化100 MHz,绝对灵敏度为25 MHz/N。仿真和实测结果比较吻合,验证了所设计压力结构的有效性。     

Highly sensitive mass sensor using film bulk acoustic resonator

Film bulk acoustic resonators (FBAR) have recently been adopted as alternatives to surface acoustic wave (SAW) in high frequency devices, due to their inherent advantages, such as low insertion loss, high power handling capability and small size. FBAR device can also be one of the standard components as mass sensor applications. FBAR sensors have high sensitivity, good linearity, low hysteresis and wide adaptability. In this study, a highly sensitive mass sensor using film bulk acoustic resonator was developed. The device structure of FBAR is simulated and designed by the Mason model, and fabricated using micro electromechanical systems (MEMS) processes. The fabricated FBAR sensor exhibits a resonant frequency of 2442.188 MHz, measured using an HP8720 network analyzer and a CASCADE probe station. Experimental results indicate that the mass loading effects agree with the simulated ones. Results of this study demonstrate that the sensitivity of the device can be achieved as high as 3654 Hz cm²/ng.     

NEMS diaphragm sensors integrated with triple-nano-ring resonator

Two types of circular diaphragm, made by Si and Si/SiO₂, integrated with hexagonal photonic crystal (PhC) lattice with triple-nano-ring (TNR) resonator created at the centre are proposed as nano-scale force and pressure sensor. The optimized channel drop effect of the TNR resonator brings a strong forward drop resonant peak in both the cases and with Q-factor of 1602 and 1737, respectively. The resonant wavelength peak experience red shifts upon the applied load on the circular diaphragm along the normal direction, in terms of a 2nd-order polynomial relationship. The devices can detect a wide range of applied load. Si diaphragm based micro force sensor gives minimum detectable force of 0.847 μN in the region of applied force from 10 to 20 μN. Si/SiO₂ diaphragm based pressure sensor gives minimum detectable pressure of 4.17 MPa in the region of applied pressure from 20 to 40 MPa. From the derived wavelength shift versus a given centre displacement of the diaphragm, Si diaphragm based sensor shows higher sensitivity than Si/SiO₂ diaphragm sensor.     

Sensing liquid density using resonant flexural plate wave devices with sol–gel PZT thin films

This study presents the design, fabrication and possible applications in liquid density sensing and biosensing of a flexure plate wave (FPW) resonator using sol–gel-derived lead zirconate titanate (PZT) thin films. The resonator has a two-port structure with a reflecting grating on a composite membrane of PZT and SiN_x. The design of the reflecting grating is derived from a SAW resonator model using COM theory to generate a sharp resonant peak. A comparison between the theoretical mass and the viscosity effects reveals the applications and the constraints of the proposed device in liquid sensing. Multiple coatings of sol–gel-derived PZT films are employed because of the cost advantage and the strong electromechanical coupling effect over other piezoelectric films. Issues of fabrication of the proposed material structure are addressed. Theoretical estimates of the mass and the viscosity effects are compared with the experimental values. The resonant frequency relates quite linearly to the density of low-viscosity liquids, revealing the feasibility of the proposed device. An erratum to this article can be found at     

无源声表面波谐振器的无线温度传感系统

介绍了一种基于声表面波谐振器的无源无线温度传感系统。作为传感器的谐振器受到正弦脉冲串的无线激励。因激励信号的中心频率不同于谐振器的谐振频率，所以回波信号是一调幅信号，其包络的主频就是谐振器的谐振频率和激励信号中心频率的差频。给出了传感系统的电路设计以及信号处理方法。实验数据和器件的温度系数吻合。     

Compact quad‐channel high‐temperature superconducting diplexer based on stub‐loaded square ring resonator

A compact quad‐channel high‐temperature superconducting diplexer based on stub‐loaded square ring resonator (S‐LSRR) is proposed. The proposed resonator consists of a square ring with symmetrically loaded two open‐circuited stubs and provides four resonant modes for quad‐channel applications. Even‐ and odd‐mode methods are applied to analyze the S‐LSRR. Analytical study shows that four resonant modes of one S‐LSRR can be designed in two pairs and applied to construct two of four channels of the designed diplexer. A square patch is added to the resonator for providing an additional parameter to tune the resonant modes. Based on the proposed resonator, a quad‐channel diplexer with center frequencies of 2.4, 3.2, 3.9, and 5.6 GHz is designed. For demonstration, the diplexer is fabricated on 2‐in‐diameter 0.5 mm‐thick MgO wafer with double sided YBa₂Cu₃O_y films and measured at 77 K. Good agreement between the simulation and measurement is obtained. The diplexer has a compact size of 0.25 λ_g × 0.45 λ_g, where λ_g is guided wave length at the center frequency of first channel.     

A nitric oxide gas sensor based on Rayleigh surface acoustic wave resonator for room temperature operation

A Rayleigh surface acoustic wave (RSAW) resonator with polyaniline/tungsten oxide nanocomposite thin film is investigated as a gas sensor for detecting the presence of nitric oxide (NO) in air. The sensor developed in this work was sensitive to NO gas at room temperature. It is shown that the sensor had a frequency shift of 1.2 ppm when it was exposed to 138 ppb NO. The negative frequency response increased with NO concentration increasing. The response and recovery times of the NO sensor in this work were about 20-80 s. In addition, this RSAW sensor also exhibited reversibility and repeatability to the presence of NO gas. Especially, the presented sensor showed high selectivity with NO gas to separate from NO₂ and CO₂ gases.     

A phase-locked loop frequency tracking system for portable microelectromechanical piezoresistive cantilever mass sensors

A closed-loop circuit is developed in this work for tracking the resonant frequency of silicon microcantilever mass sensors. The proposed closed-loop system is mainly based on a phase-locked loop (PLL) circuit. To lock onto the resonant frequency of the resonator, an actuation signal generated from a voltage-controlled oscillator is fed back to the input reference signal of the cantilever sensor. In addition to the PLL circuit, an instrumentation amplifier and an active low-pass filter are connected to the system for gaining the cantilever output signal and transforming a rectangular PLL output signal into a sinusoidal signal used for sensor actuation, respectively. To demonstrate the functionality of the system, a self-sensing silicon cantilever resonator with a built-in piezoresistive Wheatstone bridge is fabricated and integrated with the circuit. A piezoactuator is employed to actuate the cantilever into resonance. From the measurement results, the integrated closed-loop system is successfully employed to characterize a 9.4 kHz cantilever sensor under ambient temperature cross-sensitivity yielding a sensor temperature coefficient of ?32.8 ppm/°C. In addition to it, the sensor was also exposed to exhaled human breath condensates and e-cigarette aerosols to test the sensor sensitivity obtained from mass-loading effects. With a high frequency stability (i.e., a frequency deviation as low as 0.02 Hz), this developed system is intended to support the miniaturization of the instrumentation modules for cantilever-based nanoparticle detectors (CANTORs).     

Finite element modeling and experimental proof of NEMS-based silicon pillar resonators for nanoparticle mass sensing applications

The potential use of nanoelectromechanical systems (NEMS) created in silicon nanopillars (SiNPLs) is investigated in this work as a new generation of aerosol nanoparticle (NP)-detecting device. The sensor structures are created and simulated using a finite element modeling (FEM) tool of COMSOL Multiphysics 4.3b to study the resonant characteristics and the sensitivity of the SiNPL for femtogram NP mass detection in 3-D structures. The SiNPL arrays use a piezoelectric stack for resonance excitation. To achieve an optimal structure and to investigate the etching effect on the fabricated resonators, SiNPLs with different designs of meshes, sidewall profiles, heights, and diameters are simulated and analyzed. To validate the FEM results, fabricated SiNPLs with a high aspect ratio of approximately 60 are used and characterized in resonant frequency measurements where their results agree well with those simulated by FEM. Furthermore, the deflection of a SiNPL can be enhanced by increasing the applied piezoactuator voltage. By depositing different NPs [i.e., gold (Au), silver (Ag), titanium dioxide (TiO₂), silicon dioxide (SiO₂), and carbon black NPs] on the SiNPLs, the decrease of the resonant frequency is clearly shown confirming their potential to be used as airborne NP mass sensor with femtogram resolution level. A coupling concept of the SiNPL arrays with piezoresistive cantilever resonator in terms of the mass loading effect is also studied concerning the possibility of obtaining electrical readout signal from the resonant sensors.     

基片表面力负载对SAW谐振器的特性影响研究

分析了SAW谐振器表面力负载对谐振器谐振频率和机械损耗产生的影响。进行了两种表面力加载方式的实验研究,对比实验结果表明:基片底面固定时,表面力负载对SAW谐振器谐振频率的影响主要与负载在基片表面产生的应力大小有关,而谐振器的机械损耗主要与力在基片表面的分布有关。实验结果为SAW力传感器的结构设计提供了参考。     

Distilling determination of water content in hydraulic oil with a ZnO/glass surface acoustic wave device

Detection of water content in hydraulic oil is critical to identify abnormal wear conditions for purpose of predicting possible machinery failure in hydraulic systems. The paper reports a feasibility study of measuring the water content in the hydraulic oil using a ZnO thin film surface acoustic wave (SAW) device combined with the standard distillation method. The shift of resonant frequency of the SAW device increases with the increase of water content in hydraulic oil, and reaches 919 kHz for 0.80 wt% water content in oil samples. The results indicate that the ZnO SAW sensor can detect water content in hydraulic oil with high sensitivity.

     

A novel 3D cavity diplexer with compact size using LTCC technologies for V‐band wireless communication systems

In this article, a novel concept of 3D integrated V‐band diplexer, which permits the realization of compact size using a dual‐mode cavity and four single‐mode cavities, has been realized in low‐temperature cofired ceramic technologies. The dual‐mode cavity resonator acting as one resonator for both Rx and Tx filters is developed to generate two resonant modes (TE₁₀₂ and TE₁₀₃) at the center frequency of Rx (56.5–58.5 GHz) and Tx (64–66 GHz) channels, separately. Meanwhile, this dual‐mode cavity becomes the interconnect between Rx/Tx channels and help to realize good isolation without using conventional T‐junction. In the measurement, each filter designed for Rx and Tx channels exhibits excellent performance. Channel‐to‐channel isolations better than 35 dB across the Rx band and better than 32.5 dB across the Tx band are also obtained. © 2014 Wiley Periodicals, Inc. Int J RF and Microwave CAE 25:141–145, 2015.     

A compact tri‐band microwave resonator for ethanol gas detection

This article presents the design, simulation, fabrication, and testing of a compact two‐port microwave resonator coated with nanomaterials for ethanol gas sensing applications. The proposed gas sensor consists of a transmission line loaded with three triangular split ring resonators for ethanol detection at three frequency bands viz. 2.2, 4.6, and 6.3 GHz. The transmission line has all‐pass characteristics in which band gaps are introduced using three split ring resonators. The TiO₂ and ZnO nanorods are used as sensitive layers for the proposed sensing application. The nanorods, which are grown on a glass substrate of thickness 1 mm, are loaded on to the two‐port microwave resonator making the device sensitive to ethanol. The microwave behavior of the sensor is analyzed using the scattering parameters. The absorption of the ethanol gas causes frequency detuning which is used to analyze the presence of ethanol and its concentration. From the experiments, it is understood that there is an increase in the frequency shift with an increase in the concentration of ethanol gas. The sensing device with ZnO as a sensitive layer showed a higher average sensitivity of 2.35 compared to TiO₂ whose average sensitivity is 1.29.     

Surface acoustic wave gas sensors based on polyisobutylene and carbon nanotube composites

Surface acoustic wave (SAW) gas sensors based on polyisobutylene (PIB) and composites (PIB and carbon nanotubes) as sensitive layers were investigated for the detection of octane and toluene (volatile organic compounds) and other atmospheric pollutants (H₂, CO, NO₂ and NH₃) at room temperature. In order to study the effect of nanotubes in the response of SAW sensors, several composites based on PIB with different percentages of multiwalled carbon nanotubes (MWNTs) were tested and compared to the response obtained from PIB SAW sensors. Sensors exhibit high responses and selectivity to volatile organic compounds (VOCs) with fast response and recovery times as well as good repeatability and reproducibility. Experimental results show as small percentages of nanotubes improve the response to octane.     

A bandpass filter using asymmetric stepped‐impedance resonators and symmetric T‐shape interdigital capacitor structures with wide out‐of‐band rejection

In this study, a novel stepped impedance resonator (SIR) is proposed. This SIR is composed of two stepped impedance transmission‐lines and an interdigital capacitor structure. The proposed resonator has a high ratio of the first spurious frequency f_s to the fundamental frequency f₀ and is suitable to design wide stopband filters. An equivalent model is used to analyze the resonant properties of the resonator. The design guidelines of the proposed resonator are summarized. Moreover, the coupling properties of the resonator are simulated and analyzed. Finally, a small high‐temperature superconducting bandpass filter is designed and fabricated using the proposed SIRs. The stopband of the filter is extended up to 4.0 f₀ and 3.5 f₀ with 30 and 60 dB out‐of‐band rejection levels, respectively.     

Flexible H2 sensor fabricated by layer-by-layer self-assembly of thin films of polypyrrole and modified in situ with Pt nanoparticles

A novel flexible H₂ gas sensor was fabricated by the layer-by-layer (LBL) self-assembly of a polypyrrole (PPy) thin film on a polyester (PET) substrate. A Pt-based complex was self-assembled in situ on the as-prepared PPy thin film, which was reduced to form a Pt-PPy thin film. Microstructural observations revealed that Pt nanoparticles formed on the surface of the PPy film. The sensitivity of the PPy thin film was improved by the Pt nanoparticles, providing catalytically active sites for H₂ gas molecules. The interfering gas NH₃ affected the limit of detection (LOD) of a targeted H₂ gas in a real-world binary gas mixture. A plausible H₂ gas sensing mechanism involves catalytic effects of Pt particles and the formation of charge carriers in the PPy thin film. The flexible H₂ gas sensor exhibited a strong sensitivity that was greater than that of sensors that were made of Pd-MWCNTs at room temperature.     

Synthesis of Ag2Se nanomaterial by electrodeposition and its application as cataluminescence gas sensor material for carbon tetrachloride

In this paper, we presented a carbon tetrachloride gas sensor with strong cataluminescence response based on Ag₂Se nanomaterial, which was synthesized via the electrodeposition on the surface of Al foil by directly using a non-aqueous dimethyl sulfoxide (DMSO) solution with CH₃COOAg and SeCl₄. The deposited Ag₂Se material was characterized by scanning electron microscopy (SEM), X-ray diffraction (XRD) and X-ray photoelectron spectroscopy (XPS). Then, the prepared Ag₂Se material along with the Al foil substrate was employed to design the carbon tetrachloride gas sensor. Under the optimized conditions, the present gas sensor exhibited a broad linear range of 0.9-228 μg mL⁻¹, with a limit of detection of 0.3 μg mL⁻¹ (S/N = 3). The proposed gas sensor showed good characteristics with high selectivity, fast response and long lifetime.