ADI发布3轴运动检测微机电系统技术

日前，美国模拟器件公司（ADI）发布了3轴运动检测微机电系统（MEMS）技术。该3轴iMEMS（集成MEMS）Motion Signal Processing技术能将包含薄的、鲁棒性运动传感器和先进的信号调理电路的非常小的低功耗3轴（XYZ）加速度计集成在一颗低功耗芯片上。带有2轴和3轴MEMS运动传感器的移动电话和其它便携式设备都能对位置、方向和运动做出智能地响应。     

一种改进的双螺旋结构MEMS加热器的设计和制造（英文）

设计制造了一种改进的双螺旋结构MEMS加热器,可用于高温气体传感器作为加热和传感单元。该MEMS加热器以Si为基底,SiO2/Si3N4纳米薄膜作为绝热层,Pt/Ti金属薄膜作为加热单元和传感单元。通过应用并联的线宽由内向外逐渐减小的双螺旋结构,实现温度的均匀性和低功耗。用Comsol进行仿真优化结构,通过MEMS工艺加工制造出器件并进行了测试,用红外显微测温仪测试器件在不同电压下的电热特性。该器件表现出低功耗、响应迅速、高可靠性和高的温度电阻系数(TCR)等特点。器件加热到687.7℃,功耗仅120 mW。器件的升温(23～600℃)响应时间和降温(600～23℃)响应时间分别为1 ms和2.5 ms。该加热器可以在687.7℃的高温下工作至少5 h而保持性能不变。     

MEMS传感器技术及其在海洋观测中的应用

MEMS技术是在微电子和半导体技术及超精密机械加工技术基础上发展起来的多学科交叉的前沿研究领域。基于MEMS技术制造的传感器具有高集成度、高灵敏度、高分辨率、智能化、低功耗、低成本等优点,为海洋观测技术的智能化、网络化、小型化提供了技术支持和发展方向。从MEMS传感器的基本原理出发,介绍了MEMS传感器技术及其在海洋观测中的应用。     

中国电科MEMS加速度传感器产品在国际招标中获胜

日前,由中国电科第13研究所研制的MEMS加速度传感器突破了高精度SOI工艺加工、圆片级可调阻尼封装、低功耗ASIC专用集成电路等关键技术,在国际招标项目中,一举战胜美国PCB公司和瑞士奇石乐等国际知名传感器厂商。这是国产MEMS加速度传感器首次在国际招标中获胜,标志着中国电科MEMS加速度传感器已达到国际先进产品水平。     

ADI超低功耗MEMS加速度计大幅提升电池寿命

高性能信号处理解决方案供应商Analog Devices（ADI）公司最近推出一款低功耗MEMS加速度计ADXL362。ADXL362是一款3轴数字MEMS加速度计，在运动检测唤醒模式下功耗仅为300nA。ADI公司宣称，该器件与最接近的竞争传感器相比，相同模式下的功耗低60％。     

二维MEMS风速风向传感器的设计与测试

给出一种基于MEMS工艺的二维风速风向传感器的设计、制造以及测试结果。该传感器加热电阻采用圆形结构，四个测温电阻对称分布在芯片四周。传感器芯片在玻璃衬底上采用两步MEMS剥离工艺加工，加工工艺简单可靠。该传感器采用恒功率工作方式，利用热温差原理测量风速和风向。经过风洞测试，传感器可以完成360°风向检测，误差不超过10°。     

HT56R64：TinyPower A/D with LCD型MCU

HT56R64是HOLTEK半导体新推出的8位TinyPowerA／DwithLCD型MCU。该产品使用HOLTEK半导体的TinyPower技术，具有超低功耗、快速唤醒、多重时钟信号来源及多种工作模式等特点，可大幅降低整体使用功耗，达到绿色环保的需求。适用于仪器表、水表、家电产品、量测仪表、运动表头及智能卡卡片阅读机等产品。     

安森美半导体扩大全球分销代理产品阵容

安森美半导体宣布,因收购AMI半导体而得到的广泛专用标准产品（ASSP）系列,如今已透过全球认可分销代理商网络提供给客户,这些ASSP涵盖汽车、医疗和工业等应用,包括收发器、步进电机驱动器、数字信号处理器（DSP）系统、超低功耗（ULP）存储器、以太网供电（POE）电源器件、驱动器、时钟和图像传感器等产品。     

消费电子

ADI第四代高性能低功耗MEMS陀螺仪 ADI开发出高性能、低功耗、数字输出的ADXRS450 iMEMS陀螺仪,专门用于恶劣环境中的角速率（旋转）检测,以满足不断提高的精度、稳定度和抗振动抗冲击需求。新产品基于ADI前三代MEMS陀螺仪开发．采用先进的差分四传感器设计,可在强烈冲击和振动状态下精确地工作。     

美新半导体：掌握MEMS和CMOS的“Know-How”

目前,世界上唯一能把MEMS(微机电系统)同标准的CMOS集成在单芯片上开发出低成本、高可靠性加速度传感器者,是一家中国公司。美新半导体(MEMSIC)有限公司董事长赵阳表示,“美新独特的热气体加速度传感器技术,允许我们生产出更优质和更低成本的产品。”美新是一家专注于加速度传感器研发和生产的半导体公司,其采用热力学原理来测量速度变化的单芯片解决方案,可用来测量加速度、振动、冲击、运动和重力X、Y相限的加速度变化。     

MEMS电容式压力传感器检测电路比较研究

介绍了MEMS电容式压力传感器检测电路的5种实现方式:脉宽调制法、运算放大器法、电荷注入法、调频法和AC运放法。并从稳定性、测量灵敏度及抗杂散性等方面介绍了不同方式下检测电路的优缺点,为MEMS电容式压力传感器提供了参考。     

Semiconductor‐Type MEMS Gas Sensor for Real‐Time Environmental Monitoring Applications

Low power consuming and highly responsive semiconductor‐type microelectromechanical systems (MEMS) gas sensors are fabricated for real‐time environmental monitoring applications. This subsystem is developed using a gas sensor module, a Bluetooth module, and a personal digital assistant (PDA) phone. The gas sensor module consists of a NO₂ or CO gas sensor and signal processing chips. The MEMS gas sensor is composed of a microheater, a sensing electrode, and sensing material. Metal oxide nanopowder is drop‐coated onto a substrate using a microheater and integrated into the gas sensor module. The change in resistance of the metal oxide nanopowder from exposure to oxidizing or deoxidizing gases is utilized as the principle mechanism of this gas sensor operation. The variation detected in the gas sensor module is transferred to the PDA phone by way of the Bluetooth module.     

光谱式MEMS/CMOS兼容气敏传感器

光谱技术是化学分析的终极手段. 将光谱技术与MEMS (micro-electro-mechanical systems）和CMOS技术结合是解决当前气敏传感器灵敏度低、选择性差、体积大、功耗高、不便于阵列化和高度集成以至于无梯度立体矢量探测能力等问题的有效手段. 本文介绍了一种制作于（110）硅片上的集成光谱式MEMS/CMOS兼容气敏传感器,详述了该气敏传感器的工作原理、传感器结构和制造工艺.     

A Temperature Compensated CMOS Ring Oscillator for Wireless Sensing Applications

This paper presents a CMOS voltage controlled ring oscillator (VCO) with temperature compensation circuit suitable for low-cost and low-power MEMS gas sensor. This compensated ring oscillator is dedicated to Chopper Stabilized CMOS Amplifier (CHS-A). To operate at low frequency, a control voltage generated by a CMOS bandgap reference (BGR) is described and the measurement results of the fabricated chips are presented. The output voltage of the reference is set by resistive subdivision. In order to achieve small area and low power consumption, n-well resistors are used. This design features a reference voltage of 1 V. The chip is fabricated in AMS 0.35 μm CMOS process with an area of 0.032 mm². Operating at 1.25 V, the output frequency is within 200?±?l0 kHz over the temperature range of ?25 °C to 80 °C with power consumption of 810 μW.     

一种新型MEMS加速度传感器的研制

针对传统机械类传感器体积比较大、耗电量高、长期监测稳定性差的不足,研发出一种新颖的基于MEMS（微机械加工）技术的无线传感器。分析了加速度传感器的检测原理,设计了信号检测模块、微控制器模块及无线收发模块等硬件集成电路,并进行了软件实现。设计实验系统对所研发的加速度传感器动态特性进行了研究,实验结果表明：该传感器在不同的加速度输入输出反复实验中,具有良好的线性响应,线性拟合度在0.999%F.S以上,重复稳定性好,动态响应快,适用于结构的低频振动测试。     

A review: crystalline silicon membranes over sealed cavities for pressure sensors by using silicon migration technology

A silicon pressure sensor is one of the very first MEMS components appearing in the microsystem area.The market for the MEMS pressure sensor is rapidly growing due to consumer electronic applications in recent years.Requirements of the pressure sensors with low cost,low power consumption and high accuracy drive one to develop a novel technology.This paper first overviews the historical development of the absolute pressure sensor briefly.It then reviews the state of the art technology for fabricating crystalline silicon membranes over sealed cavities by using the silicon migration technology in detail.By using only one lithographic step,the membranes defined in lateral and vertical dimensions can be realized by the technology.Finally,applications of MEMS through using the silicon migration technology are summarized.     

Application of the thermoelectric MEMS microwave power sensor in a powerradiation monitoring system

A power radiation monitoring system based on thermoelectric MEMS microwave power sensors is studied. This monitoring system consists of three modules: a data acquisition module, a data processing and display module, and a data sharing module. It can detect the power radiation in the environment and the date information can be processed and shared. The measured results show that the thermoelectric MEMS microwave power sensor and the power radiation monitoring system both have a relatively good linearity. The sensitivity of the thermoelectric MEMS microwave power sensor is about 0.101 mV/mW, and the sensitivity of the monitoring system is about 0.038 V/mW. The voltage gain of the monitoring system is about 380 times, which is relatively consistent with the theoretical value. In addition, the low-frequency and low-power module in the monitoring system is adopted in order to reduce the electromagnetic pollution and the power consumption, and this work will extend the application of the thermoelectric MEMS microwave power sensor in more areas.     

A 0.5–2.5 GHz 910 uW complementary LNA employing positive–negative feedback

A 0.5–2.5 GHz ultra low power differential resistive feedback common gate low noise amplifier (RFCGLNA) without the use of inductor is presented. The proposed RFCGLNA adopts the NMOS and PMOS complementary topology to reduce the power consumption by half. Based on common-gate topology, the proposed RFCGLNA employs capacitive cross-coupling (CCC) and resistive feedback techniques. The CCC technique can further reduce the power consumption by half. The resistive feedback technique can constrain the common mode voltages of the proposed RFCGLNA and meanwhile, improve the third-order input intercept point (IIP3). The DC path is supplied by the current source transistor which forms a positive feedback loop to improve the gain at low frequency. Implemented with 65 nm standard complementary metal oxide semiconductor (CMOS) technology, the measured performance achieves 15 dB gain with S₁₁ < ?10 dB in the 0.5–2.5 GHz band. The noise figure (NF) is 3.9–5.0 dB and the IIP3 is 3.1–3.6 dBm. The power consumption is only 910 uW.     

一种基于MEMS芯片的新型地面大气电场传感器

该文基于MEMS电场敏感芯片,研制出了一种新型的地面大气电场传感器,解决了现有场磨式电场仪易磨损、功耗大、故障率高等问题。敏感芯片采用SOIMUMPS加工工艺制备,其芯片面积仅为5.5 mm5.5 mm。该文提出了传感器敏感芯片的弱信号检测方法,设计出了满足环境适应性的传感器整体结构方案,并建立了传感器的灵敏度分析模型。对电场传感器进行测试,测量范围为-50 kV/m~50 kV/m,总不确定度为0.67%,分辨力达到10 V/m,功耗仅为0.62 W。外场试验结果表明,MEMS地面大气电场传感器在晴天和雷暴天的电场探测结果,与Campbell公司场磨式电场仪探测结果都有较好的一致性,说明该传感器能满足预测雷暴要求,实现雷电监测和预警功能。     

A novel micro-pellistor based on nanoporous alumina beam support

The traditional design of the catalytic combustion gas sensor in Micro ElectroMechanical Systems (MEMS) micro-hotplate employs a Pt resistive track as the micro-heater. The realized structure and fabrication are the key elements of the micro-hotplate. Directly fabrication of micro-pellsitor catalyst is very difficult because of the small dimensions of the active area. In this paper, a novel micro-pellistor was designed by combining micro fabrication technique and nano technology. The supporting beams and micro-hotplate of the micro-pellistor were made of nonoporous alumina film. The active area of the designed and fabricated micro-pellistors ranges from 200×200 ??m² to 450×300 ??m². The micro-pellistor was heated by platinum thin film heater and the Pd catalyst was deposited by dipping the PdCl₂ solution on the detecting element. The lowest power consumption is 50 mW at 500 °C and the maximum temperature can reach 900 °C before rupture. The response of the devices to methane is also tested. The new design provides a new way to fabricate micro-pellistor.