Recent advances of high-efficiency single crystalline silicon solar cells in processing technologies and substrate materials

Single crystalline silicon solar cells have demonstrated high-energy conversion efficiencies up to 24.7% in a laboratory environment. One of the recent trends in high-efficiency silicon solar cells is to fabricate these cells on different silicon substrates. Some silicon wafer suppliers are also involved in such development. Another recent trend is the increased production of high-efficiency silicon cells, some of them with low-cost structures. This paper will discuss the progress at the University of New South Wales, and these trends in other organisations.     

Optimization of fabrication process of high-efficiency and low-cost crystalline silicon solar cell for industrial applications

The process conditions for a high-efficiency and low cost crystalline silicon solar cell were optimized. Novel approaches such as wafer cleaning and saw -damage removal using 0.5 wt% of 2,4,6-trichloro-1,3,5-triazine, silicon surface texturing with optimized pyramid heights (∼5 μm), and a third step of drive-in after phosphosilicate glass (PSG) removal followed by oxide removal were investigated. A simple method of chemical etching adopted for edge isolation was optimized with edge etching of 5-10 μm, without any penetration of chemicals between the stacked wafers. The conversion efficiency, open-circuit voltage, short-circuit current, and fill factor of the cell fabricated with the optimized process were a maximum of 17.12%, 618.4 mV, 5.32 A, and 77% under AM1.5 conditions, respectively.     

Degradation of carrier lifetime in Cz silicon solar cells

The lifetime degradation induced by light illumination or carrier injection which is observed in Czochralski-grown silicon (Cz-Si) leads to a significant decrease of solar cell efficiency. Thus, the reduction of this effect has a high potential for the improvement of Cz-Si solar cells. In the present work both, the analysis of the underlying defect and its technological reduction are discussed. A clear correlation of the Cz-specific metastable defect with the oxygen and boron concentration in Cz-Si has been observed. Especially, recently performed lifetime measurements on oxygen-free boron-doped p-type MCz silicon and gallium-doped oxygen-contaminated Cz-silicon, both of which show no degradation, confirm this hypothesis. While the quantitative correlation between the defect concentration and boron is linear, the increase of the defect concentration induced by the interstitial oxygen concentration is superlinear, i.e. it follows a potential law of power approximately 5. Beyond the defect analysis, two different ways to reduce the metastable defect concentration are discussed. A proper material choice by substituting or reducing one of the major components of the metastable defect can completely avoid the degradation effect. The excellent performance of oxygen-free MCz-Si and gallium-doped Cz-Si is reflected in the achieved record efficiencies of 22.7% and 22.5%, respectively. In standard boron-doped oxygen-contaminated p-type Cz-Si a strong reduction of the metastable defect concentration can be achieved by a high-temperature process step resulting in an improvement of the stable bulk lifetime by a factor of 2–4.     

Interface effects on the carrier transport and photovoltaic properties of hydrogenated amorphous silicon/crystalline silicon solar cells

Current-voltage-temperature (I-V-T) characteristics evaluated near 150K and 300K were used to study the photovoltaic property variations in hydrogenated amorphous silicon (a-Si:H)/crystalline silicon (c-Si) solar cells. The possible carrier transport mechanisms in such devices were examined from the I-V-T data which indicated a significant influence of the amorphous /crystalline interface on the short-circuit current density (J_sc) and open-circuit voltage (V_oc) of the solar cells. Carrier transport near 300K for forward biases was by a multi-tunneling mechanism and became space charge limited with increasing bias. For devices having low J_sc and V_oc an additional region was seen in both forward and reverse biases, at low temperatures, where the current simply varied linearly with the applied bias. This characteristic manifested in both high and low temperatures region for devices with still lower photovoltaic properties, which has been reasoned to be due to a higher interface density. Passivating the c-Si surface with HF just prior to the amorphous layer deposition resulted in a large improvement in the properties. The most significant effect was on the J_sc which improved by an order of magnitude. The treatment also affected the lower temperature I-V-T data in that the current fell to very low levels. The spectral response of the treated solar cells showed enhanced blue/violet response compared with the unpassivated devices. The interface passivation plus reducing a-Si thickness has improved the solar cell efficiency from 0.39% to 9.5%.     

Development status of high-efficiency HIT solar cells

This paper describes the development status of high-efficiency heterojunction with intrinsic thin-layer (HIT) solar cells at SANYO Electric. Presently, the conversion efficiency of our standard HIT solar cell has reached a level of 23.0% for a practical size of (100.4 cm²) substrate. On the other hand, we have developed special technologies for effectively using thinner substrates for HIT solar cells. Surprisingly, we have achieved a quite high open circuit voltage (V_oc) of 743 mV, and a high conversion efficiency of 22.8% using only a 98-μm-thick substrate. A 98-μm-thick cell also exhibits a good temperature coefficient, and allows the thickness of the substrate to be reduced by more than 50% while maintaining its efficiency. These results suggest that the HIT solar cell has the potential to further improve cost-performance.     

High-efficiency low-cost integral screen-printing multicrystalline silicon solar cells

This paper describes how the efficiency and throughput of industrial screen-printed multi-Si solar cells can be increased far beyond the state-of-the-art production cells. Implementation of novel processes of isotropic texturing, shallow emitter or single diffusion selective emitter, combined with screen-printed metallization fired through a PECVD SiN_x ARC layer, have been described. Novel dedicated fabrication equipment for emitter diffusion and a PECVD SiN_x deposition system are developed and implemented thereby removing the processing bottlenecks linked to the diffusion and bulk passivation processes. Several types of back-contacted solar cells with improved visual appeal required for building integrated photovoltaic (BIPV) application have been developed.     

Present status and future of crystalline silicon solar cells in Japan

Crystalline silicon solar cells show promise for further improvement of cell efficiency and cost reduction by developing process technologies for large-area, thin and high-efficiency cells and manufacturing technologies for cells and modules with high yield and high productivity.In this paper, Japanese activities on crystalline Si wafers and solar cells are presented. Based on our research results from crystalline Si materials and solar cells, key issues for further development of crystalline Si materials and solar cells will be discussed together with recent progress in the field. According to the Japanese PV2030 road map, by the year 2030 we will have to realize efficiencies of 22% for module and 25% for cell technologies into industrial mass production, to reduce the wafer thickness to 50–100 μm, and to reduce electricity cost from 50 Japanese Yen/kWh to 7 Yen/kWh in order to increase the market size by another 100–1000 times.     

Optimization of front surface texturing processes for high-efficiency silicon solar cells

This paper presents the results of an experimental study regarding the increase in the efficiency of the silicon solar cells by texturing the front surface. Designing, patterning and surface etching processes led to refined structures with very low losses of the incident optical radiation. Photolithography has been used to generate patterns (disc hole) through the silicon dioxide layer grown at the beginning on silicon wafers. The holes (4 μm in diameter) have been uniformly distributed on the entire surface (2×2) cm² and the distance between the hole centres was determined to be 20 μm. Semispherical walls have been defined in holes by isotropic etching up to join together of the wells.     

New concepts for high-efficiency silicon solar cells

This paper gives an overview about recent activities in the industrial application of high-efficiency monocrystalline silicon solar cells. It also presents the latest results achieved at Fraunhofer ISE, especially a new patented process for the formation of back-contact points on dielectrically passivated cells called laser-fired contacts and its application to thin wafers.     

A simple fabrication process for 20% efficient silicon solar cells

Recently, a substantially simplified PERC silicon solar cell has been developed at ISFH with independently confirmed 1-sun efficiencies of up to 20.0%. This paper describes the details of the relatively simple cell fabrication process and experimentally characterizes the new cells. The simplified design involves reflection control by means of random pyramids, the direct evaporation of the front metal grid onto the random pyramids, elimination of the need for nontextured areas underneath the contact grid, and the use of a single phosphorous diffusion (1-step emitter).     

Characterization of multicrystalline silicon wafers by non-invasive measurements

Non-invasive transient photoconductance measurements of large grain multicrystalline silicon wafers (ρ=1 Ω cm) are presented. It is shown that the surfaces of untreated wafers can be characterized as infinite sinks for excess charge carriers. The value 24.5 cm² s⁻¹ for the minority carrier diffusion constant was determined in all samples. So in untreated wafers, surface recombination yields a known contribution to the decay time measured and the volume lifetime can be determined. Application of these measurements as a standard characterization of multicrystalline silicon wafers is discussed.     

Interconnection through vias for improved efficiency and easy module manufacturing of crystalline silicon solar cells

It has become an opportune to develop new module technologies because manufacturers are using larger wafers leading to problems with interconnection of cells. ECN has developed a new cell and module design for crystalline silicon solar cells called pin-up module (PUM) based on old patents (Jong, US Patent 3,903,428, 1975; Pack, US Patent 3,903,427, 1975). In this design a limited number of holes serve as vias for interconnection of the front-side metallisation to a foil at the rear side by using pins. In this way the busbars at the front side are eliminated, thus reducing shadow losses. Calculations show that for 100 cm² cells, the efficiency will be 0.4% absolute higher. For larger cells, the efficiency gain will be as high as 1%. The PUM concept gives the possibility to increase cell dimensions without reducing the output.     

Rapid thermal technologies for high-efficiency silicon solar cells

This paper shows that rapidly formed emitters in less than 6 min in the hot zone of a conveyor belt furnace or in 3 min in an rapid thermal processing (RTP) system, in conjunction with a screen-printed (SP) RTP Al-BSF and passivating oxide formed simultaneously in 2 min can produce very simple high-efficiency n⁺-p-p⁺ cells with no surface texturing, point contacts, or selective emitter. It is shown for the first time that an 80 Ω/□ emitter and SP Al-back surface field (BSF) formed in a high throughput belt furnace produced 19% FZ cells and greater than 17% CZ cells with photolithography (PL) contacts. Using PL contacts, we also achieved 19% efficient cells on FZ, >18% on MCZ, and 17% boron-doped CZ by emitter and SP Al-BSF formation in <10 min in a single wafer RTP system. Finally, manufacturable cells with 45 Ω/□ emitter and SP Al-BSF and Ag contacts formed in the conveyor belt furnace gave 17% efficient cells on FZ silicon. Compared to the PL cells, the SP cell gave 2% lower efficiency along with a decrease in J_sc and fill factor. This loss in performance is attributed to a combination of the poor blue response, higher series resistance and higher contact shading in the SP devices     

c-Si wafer-equivalent epitaxial thin-film solar cells on isolating substrates

A new cell concept has been developed that enables epitaxial c-Si thin-film solar cells to be made using isolating substrates. The Recrystallised Wafer-Equivalent on an Isolating Substrate (RexWISe) cell concept relies on an array of mini-silicon rods through the substrate to enable standard contacting. Processing techniques have been developed to produce the rods by drilling holes through the substrate, coating the holes with an intermediate layer, filling the holes with a seeding layer deposition and then recrystallising the seeding layer. Subsequently, the active layers of the cell are epitaxially grown onto the recrystallised layer and then this “Wafer-Equivalent” structure is metallised like a standard wafer solar cell. The first solar cells have been produced to test the RexWISe process and a “proof-of-concept” efficiency of almost 8% was achieved.     

Growth and properties of SiGe multicrystals with microscopic compositional distribution for high-efficiency solar cells

The growth technique and physical properties of SiGe multicrystals with microscopic compositional distribution are demonstrated for new high-efficiency solar cells in which the wavelength dependence of the absorption coefficient can be freely designed by controlling the compositional distribution in the SiGe multicrystals. This growth technique is suitable for the practical casting method, and it is made up of melt growth of SiGe multicrystals with wide and microscopic distribution of the composition from Si to Ge all over the crystals. It is studied how much widely the microscopic compositional distribution in SiGe multicrystals grown from binary Si–Ge melts can be controlled by the melt composition and the cooling process. The range of the microscopic compositional distribution becomes wider as the starting Si concentration in the growth melt becomes larger. SiGe multicrystals with various microscopic compositional distribution can be freely controlled by optimizing the melt composition and the cooling process. The wavelength dependence of the absorption coefficient of such SiGe multicrystals can also be freely designed. Using the experimentally determined absorption coefficient of a SiGe crystal with microscopic compositional distribution, the short circuit photo-current of solar cells was calculated and it is demonstrated that the short circuit photo-current can be much larger for SiGe with microscopic compositional distribution than for SiGe with uniform composition. Si thin film can be easily grown on such a SiGe multicrystal and the Si/SiGe heterostructure can be obtained. These results show that SiGe multicrystals with microscopic compositional distribution are hopeful for new high-efficiency solar cell applications by using the practical casting method.     

Super high-efficiency multi-junction and concentrator solar cells

III–V compound multi-junction (MJ) (tandem) solar cells have the potential for achieving high conversion efficiencies of over 50% and are promising for space and terrestrial applications.We have proposed AlInP–InGaP double hetero (DH) structure top cell, wide-band gap InGaP DH structure tunnel junction for sub cell interconnection, and lattice-matched InGaAs middle cell. In 2004, we have successfully fabricated world-record efficiency concentrator InGaP/InGaAs/Ge 3-junction solar cells with an efficiency of 37.4% at 200-suns AM1.5 as a result of widening top cell band gap, current matching of sub cells, precise lattice matching of sub cell materials, proposal of InGaP–Ge heteroface bottom cell, and introduction of DH-structure tunnel junction. In addition, we have realized high-efficiency concentrator InGaP/InGaAs/Ge 3-junction solar cell modules (with area of 7000 cm²) with an out-door efficiency of 27% as a result of developing high-efficiency InGaP/InGaAs/Ge 3-junction cells, low optical loss Fresnel lens and homogenizers, and designing low thermal conductivity modules.Future prospects are also presented. We have proposed concentrator III–V compound MJ solar cells as the 3rd-generation solar cells in addition to 1st-generation crystalline Si solar cells and 2nd-generation thin-film solar cells. We are now challenging to develop low-cost and high output power concentrator MJ solar cell modules with an output power of 400 W/m² for terrestrial applications and high-efficiency, light-weight and low-cost MJ solar cells for space applications.     

A thermal failure model of solar cells and its experimental studies

Within silicon, silver is an impurity with fast diffusivity and deep levels. It forms effective recombination centres in silicon acting as either acceptor or donor levels. That has been confirmed by a depth-profile analysis with the SIMS. The silver atoms do exist near the barrier region of a solar cell with Ti/Pd/Ag electrodes heated at 245°C for 308 h. The open-circuit voltage at low injection decreases as recombination actions increase in the barrier region. According to these phenomena, an estimation for the lifetime of solar cells is given by using acceleration stress tests.     

A new generation of crystalline silicon solar cells: Simple processing and record efficiencies for industrial-size devices

In contrast to the general opinion that very high efficiencies can only be obtained using complex processing, with the novel technologically simple and environmentally sound obliquely evaporated contact (OECO) type solar cell efficiencies exceeding 21% could be obtained without applying masks or photolithography. Two different approaches of OECO cells using MIS contacts and exclusively Al as metallization are discussed: (i) with a diffused n⁺-emitter (MIS-n⁺p) and (ii) with an inversion layer emitter (MIS-IL). The most important results particularly for industrial production are efficiencies of 19% and 20% for simply to fabricate 10×10 cm² OECO cells on commercial CZ-Si and FZ-Si, respectively. These are the highest efficiencies ever reported for solar cells of industrial size.     

A new approach to high-efficiency solar cells by band gap grading in Cu(In,Ga)Se2 chalcopyrite semiconductors

High efficiencies in Cu(In,Ga)(S,Se)₂ solar cells result from alloying CuInSe₂ base material with the corresponding Ga- or S-containing compound. Compositional grading is one important issue in these devices. To obtain high efficiencies a reconstructed Cu-depleted absorber surface is essential. We consider this Cu/In grading non-intentional, process related and present a model which explains its importance. Another approach to improve performance is controlled intentional band gap grading via Ga/In and S/Se grading during the deposition. We show that appropriate grading can improve current and voltage of the device simultaneously. The key objective is to design a larger band gap for recombination and a lower band gap for absorption to energetically separate the mechanisms of carrier recombination and current generation.     

Novel materials for high-efficiency III–V multi-junction solar cells

As a result of developing wide bandgap InGaP double hetero structure tunnel junction for sub-cell interconnection, InGaAs middle cell lattice-matched to Ge substrate, and InGaP-Ge heteroface structure bottom cell, we have demonstrated 38.9% efficiency at 489-suns AM1.5 with InGaP/InGaP/Ge 3-junction solar cells by in-house measurements. In addition, as a result of developing a non-imaging Fresnel lens as primary optics, a glass-rod kaleidoscope homogenizer as secondary optics and heat conductive concentrator solar cell modules, we have demonstrated 28.9% efficiency with 550-suns concentrator cell modules with an area of 5445 cm². In order to realize 40% and 50% efficiency, new approaches for novel materials and structures are being studied. We have obtained the following results: (1) improvements of lattice-mismatched InGaP/InGaAs/Ge 3-junction solar cell property as a result of dislocation density reduction by using thermal cycle annealing, (2) high quality (In)GaAsN material for 4- and 5-junction applications by chemical beam epitaxy, (3) 11.27% efficiency InGaAsN single-junction cells, (4) 18.27% efficiency InGaAs/GaAs potentially modulated quantum well cells, and (5) 7.65% efficiency InAs quantum dot cells.