Growth and characterization of epitaxial anatase TiO2(001) on SrTiO3-buffered Si(001) using atomic layer deposition

Epitaxial anatase titanium dioxide (TiO₂) films have been grown by atomic layer deposition (ALD) on Si(001) substrates using a strontium titanate (STO) buffer layer grown by molecular beam epitaxy (MBE) to serve as a surface template. The growth of TiO₂ was achieved using titanium isopropoxide and water as the co-reactants at a substrate temperature of 225-250 °C. To preserve the quality of the MBE-grown STO, the samples were transferred in-situ from the MBE chamber to the ALD chamber. After ALD growth, the samples were annealed in-situ at 600 °C in vacuum (10^− 7 Pa) for 1-2 h. Reflection high-energy electron diffraction was performed during the MBE growth of STO on Si(001), as well as after deposition of TiO₂ by ALD. The ALD films were shown to be highly ordered with the substrate. At least four unit cells of STO must be present to create a stable template on the Si(001) substrate for epitaxial anatase TiO₂ growth. X-ray diffraction revealed that the TiO₂ films were anatase with only the (004) reflection present at 2θ = 38.2°, indicating that the c-axis is slightly reduced from that of anatase powder (2θ = 37.9°). Anatase TiO₂ films up to 100 nm thick have been grown that remain highly ordered in the (001) direction on STO-buffered Si(001) substrates.     

Growth of Cu2ZnSnS4 thin films on Si (100) substrates by multisource evaporation

Cu₂ZnSnS₄ films were grown on Si (100) by vacuum evaporation using elemental Cu, Sn, S and binary ZnS as sources. X-ray diffraction patterns of films grown at different substrate temperatures indicated that polycrystalline growth was suppressed and the orientational growths were relatively induced in a film grown at higher temperatures. Tetragonal structure of Cu₂ZnSnS₄ films was confirmed by studying RHEED patterns. The existence of c-axis ([001] direction) growth, two kinds of a-axis (〈100〉 direction) growth and four kinds of {112} twins which can be classified as two symmetrical pairs is proposed. Broad emissions at around 1.45 eV and 1.31 eV were observed in the photoluminescence spectrum measured at 13 K.     

Reflection high energy electron diffraction and X-ray studies of AlN films grown on Si(111) and Si(001) by organometallic chemical vapour deposition

The crystallinity of AlN films on silicon substrates grown by organometallic chemical vapour deposition was investigated using X-ray diffraction and reflection high energy electron diffraction (RHEED). Single-crystal films of good quality with atomically smooth surfaces can be epitaxially grown on Si(111) substrates. Epitaxial films can also be grown on Si(001) substrates. These films have previously been reported to have a fibre structure. Different RHEED patterns were observed from the films on Si(111) and Si(001). It is established that the films grown on Si(001) consist of two types of crystallite with the following orientations: [11$\text{2}$0]_AlN//[110]_Si and [11$\text{2}$0]_AlN//[1$\text{1}$0]_Si The thickness dependence of the crystallinity was also investigated. The standard deviation σ of the X-ray rocking curve for the films grown on Si(111) is less than that for the films on Si(001) and is independent of the film thickness. The σ values for the films on Si(001) decrease markedly with increasing film thickness. On the basis of these observations, the growth mechanism of AlN epitaxial films on Si(111) and Si(001) is discussed.     

Fabrication of epitaxial conductive LaNiO3 films on different substrates by pulsed laser ablation

LaNiO₃ (LNO) thin films were deposited on (1 0 0) MgO, SrTiO₃ (STO) and LaAlO₃ (LAO) crystal substrates by pulsed laser deposition (PLD) under 20 Pa oxygen pressure at different substrate temperatures from 450 to 750 °C. X-ray diffraction (XRD), ex situ reflection high energy electron diffraction (RHEED) and atomic force microscopy (AFM) were employed to characterize the crystal structure of LNO films. LNO films deposited on STO and LAO at a temperature range from 450 to 700 °C exhibit high (0 0 l) orientation. XRD ψ scans and RHEED observations indicate that LNO films could be epitaxially grown on these two substrates with cubic-on-cubic arrangement at a wide temperature range. LNO films deposited at 700 °C on MgO (1 0 0) substrate have the (l l 0) orientation, which was identified to be bicrystalline epitaxial growth. La₂NiO₄ phase appears in LNO films deposited at 750 °C on three substrates. The epitaxial LNO films were tested to be good metallic conductive layers by four-probe method.     

Crystal Structure and Superconductivity of MgB2 Thin Films Grown on Various Oxide Substrates

The crystal structure and superconductivity of MgB₂ thin films grown on various oxide substrates were investigated by X-ray diffraction and resistance measurement. The films were prepared by a two-step method, in which precursors B films were annealed in Mg vapor at 900^○C. The X-ray diffraction shows that the MgB₂ films grown on C–AL₂O₃, R–AL₂O₃, and MgO (001) are c-axis oriented while the films grown on SrTiO₃ (001), LaAlO₃ (001), and ZrO₂ (001) are aligned with the (101) direction normal to the substrate planes. All the grown films show superconductivity and their transition temperature varies with the substrates in the range of 34–39 K. We think that the transition temperature variation is probably due to the lattice matching between the film and the substrate, as well as the interdiffusion at the film/substrate interface. The experimental results suggest that if there is no severe interdiffusion at the film/substrate interface in the high temperature annealing process, more substrates could be used for the growth of MgB₂ films using the two-step method.     

Transmission electron microscopy studies of nanostructured TiO2 films on various substrates

A chemical vapour deposition (CVD) synthetic route to the production of nanocrystalline titanium dioxide has been carefully investigated on various substrates. CVD was performed at a relatively low temperature of 320 °C on KCl crystal, Al foil, KBr pellet and freshly sliced MICA substrates. The influence of substrate material on film formation was studied in order to find a titanium dioxide film with good intercalation properties for an electrode in a dye-sensitized solar cell. Intercalation properties depend on average grain sizes and porosity in nanophased materials. These films were thoroughly characterized with respect to their surface morphology, crystal structure and the phase composition. Transmission electron microscopy (TEM) accompanied by selected area electron diffraction (SAED) was employed for structural characterization of TiO₂ films. The studies showed that films deposited on KCl crystal, KBr pellet and MICA are solely composed of an anatase phase whereas in the film deposited onto Al foil, the brookite phase of TiO₂ is also present. The structural parameters of anatase were determined using the Rietveld refinement of electron diffraction data. By comparison of anatase lattice parameters with their corresponding bulk values, the significant deviation in values of lattice parameters a and c in anatase phase was observed and attributed to the thin-film features. The average grain size and the grain size distribution obtained by TEM were compared for TiO₂ films deposited on different substrates.     

Low temperature preparation of transparent, antireflective TiO2 films deposited at different O2/Ar ratios by microwave electron cyclotron resonance magnetron sputtering

A serial of crystalline titanium oxide ceramic films were deposited at low temperature using microwave electron cyclotron resonance (MW-ECR) magnetron sputtering with different O₂/Ar ratios. The influences of O₂/Ar ratio on the deposition rate, morphology, crystalline nature, optical adsorption property of the obtained titanium oxide thin films were investigated by means of X-ray diffraction (XRD), atomic force microscopy (AFM) and UV-Vis spectra. Therefore, the optimum O₂/Ar ratio for deposition of anatase TiO₂ thin films on unheated glass substrate was realized in a MW-ECR magnetron sputtering process. The as-deposited anatase TiO₂ films were transparent and were antireflective in the visible region.     

Biaxial CdTe/CaF2 films growth on amorphous surface

A continuous and highly biaxially textured CdTe film was grown by metal organic chemical vapor deposition on an amorphous substrate using biaxial CaF₂ nanorods as a buffer layer. The interface between the CdTe film and CaF₂ nanorods and the morphology of the CdTe film were studied by transmission electron microscopy (TEM) and scanning electron microscopy. Both the TEM and X-ray pole figure analysis clearly reveal that the crystalline orientation of the continuous CdTe film followed the {111}<121> biaxial texture of the CaF₂ nanorods. A high density of twin faults was observed in the CdTe film. Furthermore, the near surface texture of the CdTe thin film was investigated by reflection high-energy electron diffraction (RHEED) and RHEED surface pole figure analysis. Twinning was also observed from the RHEED surface pole figure analysis.     

Structure, morphology and optical properties of nanocrystalline yttrium oxide (Y2O3) thin films

Yttrium oxide (Y₂O₃) thin films were grown onto Si(1 0 0) substrates using reactive magnetron sputter-deposition at temperatures ranging from room temperature (RT) to 500 °C. The effect of growth temperature (T_s) on the growth behavior, microstructure and optical properties of Y₂O₃ films was investigated. The structural studies employing reflection high-energy electron diffraction RHEED indicate that the films grown at room temperature (RT) are amorphous while the films grown at T_s = 300-500 °C are nanocrystalline and crystallize in cubic structure. Grain-size (L) increases from ∼15 to 40 nm with increasing T_s. Spectroscopic ellipsometry measurements indicate that the size-effects and ultra-microstructure were significant on the optical constants and their dispersion profiles of Y₂O₃ films. A significant enhancement in the index of refraction (n) (from 2.03 to 2.25) is observed in well-defined Y₂O₃ nanocrystalline films compared to that of amorphous Y₂O₃. The observed changes in the optical constants were explained on the basis of increased packing density and crystallinity of the films with increasing T_s. The spectrophotometry analysis indicates the direct nature of the band gap (E_g) in Y₂O₃ films. E_g values vary in the range of 5.91-6.15 eV for Y₂O₃ films grown in the range of RT-500 °C, where the lower E_g values for films grown at lower temperature is attributed to incomplete oxidation and formation of chemical defects. A direct, linear relationship between microstructure and optical parameters found for Y₂O₃ films suggest that tuning optical properties for desired applications can be achieved by controlling the size and structure at the nanoscale dimensions.     

Characterization of low pressure chemically vapour- deposited thin silicon nitride films

Silicon nitride films prepared on silicon by low pressure chemical vapour deposition (LPCVD) were characterized by electrical measurements (current-voltage and capacitance-voltage), Auger electron spectroscopy (AES) and reflection high energy electron diffraction (RHEED). The contact current versus contact field characteristics were interpreted in terms of the Fowler-Nordheim tunnelling of holes from silicon into silicon nitride, with the field of charged traps and the effect of changing the triangular shape of the barrier under steady state conditions taken into account and on the assumption of a Poole-Frenkel detrapping mechanism. AES data show that the LPCVD process yields stoichiometric Si₃N₄ films. RHEED data shows that films of thickness more than 10 nm are amorphous. Some crystalline structures of Si₃N₄ and SiO₂ are observed for thicknesses of less than 10 nm.     

X-ray microstructural analysis of nanocrystalline TiZrN thin films by diffraction pattern modeling

A detailed microstructural characterization of nanocrystalline TiZrN thin films grown at different substrate temperatures (T_S) was carried out by X-ray diffraction (XRD). Total diffraction pattern modeling based on more meaningful microstructural parameters, such as crystallite size distribution and dislocation density, was performed to describe the microstructure of the thin films more precisely. This diffraction modeling has been implemented and used mostly to characterize powders, but the technique can be very useful to study hard thin films by taking certain considerations into account. Nanocrystalline films were grown by using the cathodic pulsed vacuum arc technique on stainless steel 316L substrates, varying the temperature from room temperature to 200 °C. Further surface morphology analysis was performed to study the dependence of grain size on substrate temperature using atomic force microscopy (AFM). The crystallite and surface grain sizes obtained and the high density of dislocations observed indicate that the films underwent nanostructured growth. Variations in these microstructural parameters as a function of T_S during deposition revealed a competition between adatom mobility and desorption processes, resulting in a specific microstructure. These films also showed slight anisotropy in their microstructure, and this was incorporated into the diffraction pattern modeling. The resulting model allowed for the films' microstructure during synthesis to be better understood according to the experimental results obtained.     

Growth of ZnIn2Te4 thin films

Bulk ZnIn₂Te₄ was prepared by melting the constituent elements in stoichiometric proportions. ZnIn₂Te₄ thin films were then grown by the flash evaporation technique. The bulk material and the films were characterized by X-ray diffraction and transmission electron microscopy. The effects of substrate temperature on the structural properties and the electrical resistivity of the films have been studied. It was found that single-phase polycrystalline stoichiometric films could be grown in the substrate temperature range 423 ⩽ T_s ⩽ 523 K and the films deposited at 523 K had the minimum electrical resistivity. The implications are discussed.     

Crystal Structure and Superconductivity of MgB2 Thin Films Grown on Various Oxide Substrates

The crystal structure and superconductivity of MgB₂ thin films grown on various oxide substrates were investigated by X-ray diffraction and resistance measurement. The films were prepared by a two-step method, in which precursors B films were annealed in Mg vapor at 900C. The X-ray diffraction shows that the MgB₂ films grown on C–AL₂O₃, R–AL₂O₃, and MgO (001) are c-axis oriented while the films grown on SrTiO₃ (001), LaAlO₃ (001), and ZrO₂ (001) are aligned with the (101) direction normal to the substrate planes. All the grown films show superconductivity and their transition temperature varies with the substrates in the range of 34–39 K. We think that the transition temperature variation is probably due to the lattice matching between the film and the substrate, as well as the interdiffusion at the film/substrate interface. The experimental results suggest that if there is no severe interdiffusion at the film/substrate interface in the high temperature annealing process, more substrates could be used for the growth of MgB₂ films using the two-step method.     

Crystallinity and photocatalytic activity of TiO2 films deposited by reactive sputtering with radio frequency substrate bias

TiO₂ films with thicknesses of 400-460 nm were deposited on the unheated non-alkali glass by radio frequency (rf) reactive magnetron sputtering using a Ti metal target. Depositions were carried out using a 3-in. 1000 G magnetron cathode with various rf substrate bias voltages (V_sb, dc component of self bias) of 10-80 V under total gas pressure of 1.0 or 3.0 Pa. The oxygen flow ratio [O₂/(O₂ + Ar)] and rf sputtering power were kept constant at 60% and 200 W, respectively. Photocatalytic activity on photoinduced oxidative decomposition of acetaldehyde (CH₃CHO) of the TiO₂ films showed a clear tendency to decrease with the increase in the V_sb during the deposition. Most of the films consisted of the mixture of anatase and rutile polycrystalline portions. It was confirmed that the rutile phase content increased and anatase phase content decreased markedly with increasing V_sb, where the crystallinity of anatase phase was much higher than that of rutile phase.     

Optical and structural properties of nanocrystalline anatase (TiO2) thin films prepared by non-aqueous sol-gel dip-coating

Anatase (TiO₂) thin films were grown by non-aqueous sol-gel dip-coating using titanium (IV) n-butoxide as precursor and 1-butanol as solvent. High withdrawal speed of 4.7 mm/s in dip-coating resulted in defect free films of 100 nm average film thickness after subsequent heat treatments. According to scanning electron microscope and X-ray diffraction measurements, the films consisted of nanocrystalline anatase with 30 nm mean crystallite size. Refractive index n(λ) and extinction coefficient k(λ) were determined over the wavelength range from 200 to 1650 nm. The optical band gap of the film material was approximately 3.2 eV. The results showed very similar optical characteristics to those that are accomplished with chemically more reactive aqueous sol-gel processes. Furthermore, it was found that in addition to porosity, coordination number of Ti atoms to nearest oxygen neighbors is likely to have a significant role in explaining differences of optical properties between bulk anatase and thin film materials of the present work.     

Epitaxial growth of anatase by reactive sputter deposition using water vapor as the oxidant

The growth of TiO₂ films in the anatase crystal structure was investigated using reactive sputter deposition with H₂O serving as the oxidizing species. With water vapor, the formation of phase-pure anatase TiO₂ thin films via epitaxial stabilization on (001) LaAlO₃ was achieved, although crystallinity was slightly inferior to that obtained when O₂ was employed. Films grown using water vapor exhibited a rougher surface morphology indicating a difference in growth mechanisms. At low H₂O pressure, the formation of a Ti_nO_2n−1 Magnéli phase was observed. When hydrogen was employed during growth, mixed phase films of rutile and anatase resulted. The development of crystallinity and phase as a function of deposition temperature and oxidant pressure are discussed.     

Structural, morphological and optical properties of TiO2 films prepared using aqueous sol–gel methods

The influence of the preparation conditions on the structural, morphological and optical properties of TiO₂ thin films deposited on silicon substrate (Si), indium tin oxide coated glass (ITO) and alkali-free borosilicate glass (AFG), respectively is studied in this work. The X-ray diffraction analysis revealed that all TiO₂ samples had a polycrystalline structure. The TiO₂ films coated on Si showed a mixed phase of anatase and rutile while in the case of those on ITO and AFG only the pure anatase phase was observed. The crystallite size within the TiO₂ thin films varied with the calcinations temperature, solvent lateral chain and catalyst type. The optical transmittance, band gap, reflective index and porosity were strongly affected by the annealing temperature, substrate nature and solvent.     

Raman spectroscopy study of the phase transformation on nanocrystalline titania films prepared via metal organic vapour deposition

Raman spectroscopy (RS) was used to study the phase transformations of nanocrytalline TiO₂ thin films. The films were grown by a vertical-flow cold-wall metal organic chemical vapour deposition system, using Ti(C₁₀H₁₄O₅) as the source reagent, at different substrate temperatures. The results indicate that the anatase phase is present at around 550 °C and the rutile phase starts to form at 620 °C. The anatase phase completely transforms into the rutile phase at 680 °C. We have demonstrated that RS can be used as a powerful nondestructive technique for a quick and efficient determination of the phase of TiO₂ thin films.     

Epitaxial growth of topological insulator Bi2Se3 film on Si(111) with atomically sharp interface

Atomically sharp epitaxial growth of Bi₂Se₃ films is achieved on Si(111) substrate with molecular beam epitaxy. Two-step growth process is found to be a key to achieve interfacial-layer-free epitaxial Bi₂Se₃ films on Si substrates. With a single-step high temperature growth, second phase clusters are formed at an early stage. On the other hand, with low temperature growth, the film tends to be disordered even in the absence of a second phase. With a low temperature initial growth followed by a high temperature growth, second-phase-free atomically sharp interface is obtained between Bi₂Se₃ and Si substrate, as verified by reflection high energy electron diffraction (RHEED), transmission electron microscopy (TEM) and X-ray diffraction. The lattice constant of Bi₂Se₃ is observed to relax to its bulk value during the first quintuple layer according to RHEED analysis, implying the absence of strain from the substrate. TEM shows a fully epitaxial structure of Bi₂Se₃ film down to the first quintuple layer without any second phase or an amorphous layer.     

Titanium dioxide thin films prepared by electrolysis from aqueous solution of titanium-lactic acid complex for dye-sensitized solar cells

Titanium oxide (TiO_x) thin films were prepared on transparent conducting substrate (fluorine-doped tin oxide) by cathodic electrolysis of a solution containing a titanium bis(ammonium lactato)dihydroxide and an ammonium nitrate at 323 K. Post-deposition treatment: calcination at 723 K or hot-water treatment at > 363 K promoted the growth of an anatase type crystalline phase in the TiO₂ thin film, as evidenced by X-ray diffraction and X-ray photoelectron spectroscopy. The calcined films were used as electrodes of a dye-sensitized solar cells and the cells' energy conversion efficiency was comparable to that obtained with commercially available TiO₂ nanoparticle electrodes.