激光预处理硬质合金衬底沉积金刚石薄膜研究

研究了准分子激光辐照对ＷＣ－６ｗｔ％Ｃｏ（ＹＧ６）硬质合金工具衬底沉积金刚石膜的影响。证实准分子激光辐照可产生钴选择性蒸发和表面粗糙化；从而有效地降低表面钴含量，消除钴对金刚石膜沉积的有害影响。硬质合金ＹＧ６工具衬底沉积金刚石薄膜工艺参数范围较窄，采用阶段沉积法可以得到质量良好，附着力强的金刚石薄膜。     

硬质合金表面渗硼处理对CVD金刚石涂层形成的影响

采用渗硼工艺对ＹＧ６硬质合金表面进行预处理,探讨了渗硼预处理对硬质合金金刚石薄膜涂层形成的影响。研究结果表明,渗硼时Ｃｏ在硬质合金表面同Ｂ形成ＣｏＢ、Ｃｏ２Ｂ化合物层。该硼化物层在金刚石沉积过程中,能有效阻挡硬质合金中粘结相Ｃｏ向表面扩散,消除了Ｃｏ对金刚石薄膜涂层形成时的不利影响,改善了薄膜涂层质量,提高了附着力。     

激光预处理硬质合金衬底沉积金刚石薄膜研究

研究了准分子激光辐照对ＷＣ－６ｗｔ％Ｃｏ硬质合金工具衬底沉积金刚石膜的影响。证实准分子激光辐照可产生钴选择性蒸发和表面粗糙化；从而有效地降低表面钴含量，消除钴对金刚石膜沉积的有害影响。     

碳源浓度对金刚石薄膜涂层刀具性能的影响

用热丝ＣＶＤ法,以丙酮为碳源,在ＷＣ－Ｃｏ硬质合金衬底上沉积金刚石薄膜,研究了碳源浓度对金刚石薄膜涂层刀具性能的影响,结果表明,碳源浓度对金刚石涂层薄膜质量、形貌和粗糙度、薄膜与衬底间的附着力、刀具的耐用度用度发削性能有显著影响,合理控制碳源浓度对获得实用化的在硬质合金刀具基础上沉积高附着强度、低粗糙度金刚石薄膜的新技术具有重要的意义。     

大孔径内孔表面金刚石薄膜涂层的制备

应用热丝化学气相沉积（HFCVD）工艺,并采用合适的衬底预处理方法和优化的工艺参数,在大孔径硬质合金内孔表面沉积了金刚石薄膜。分别采用SEM、EDS和喇曼光谱依次对衬底预处理前后内孔表面及沉积的金刚石薄膜进行了表征,并通过压痕实验评估了薄膜的附着强度。该压痕实验结果与薄膜的SEM及喇曼光谱表征的结果具有一致性。结果表明：采用合适的衬底预处理方法和优化的HFCVD工艺,可以在大孔径硬质合金内孔表面沉积高质量的金刚石薄膜。     

用热丝法在激光预处理的硬质合金表面沉积金刚石薄膜的研究

研究了准分子激光对硬质合金（ＹＧ６）表面产生的选择性蒸发和表面改性作用（粗糙化），探索在硬质合金表面沉积金刚石薄膜的工艺参数，讨论了温度、气体流量及甲烷浓度对沉积金刚石薄膜的影响规律．     

微晶/纳米金刚石复合涂层的沉积与表征

采用偏压增强热丝CVD(HFCVD)法,通过引入惰性气体Ar,在经过甲醇新预处理方法处理后的硬质合金衬底表面成功沉积了微晶/纳米金刚石复合涂层。对金刚石复合涂层的表面形貌、成分、表面粗糙度进行了分析和研究。研究结果表明:新的预处理方法能够提高金刚石薄膜与衬底之间的附着强度。Ar的引入使得金刚石薄膜二次形核率更高,颗粒也更加细小,纳米金刚石复合涂层不但具有高的附着强度,而且具有非常低的表面粗糙度。对于拓展纳米金刚石涂层在精密加工领域中的应用具有一定的作用。     

CVD金刚石涂层硬质合金衬底预处理新方法研究

本文研究了甲醇预处理方法对硬质合金衬底表面抑制Co催石墨化作用。将甲醇预处理方法融入到传统的两步处理方法中,提出了新的两步预处理方法,通过电镜和EDX等手段对预处理后的衬底表面形貌、成分进行了分析。采用偏压增强热丝CVD(HFCVD)法,在预处理后的衬底表面成功沉积了金刚石薄膜。并以制做钻头为例,验证了两步法对复杂形状衬底的预处理及金刚石薄膜制备效果。研究结果表明:采用甲醇预处理方法能够有效抑制Co对金刚石薄膜的不利影响,新的两步预处理方法既能保证金刚石薄膜与衬底之间的附着强度,又非常适用于复杂形状整体式回转硬质合金刀具、拉拔模具等衬底,对于拓展金刚石涂层在涂层刀具领域的应用具有一定的参考作用。     

TiC中间过渡层对硬质合金表面沉积（类）金刚石的影响

采用ＣＨ＿４－Ｈ＿２－Ｏ＿２微波等离子体化学气相沉积法在硬质合金表面沉积金刚石薄膜，研究了ＴｉＣ中间过渡层对金刚石薄膜沉积效果的作用及粘结机理。结果表明在相同沉积条件下ＴｉＣ中间过渡层可以显著提高硬质合金表面沉积金刚石薄膜的生长速率，而且还可提高金刚石薄膜与基体的结合力。     

TiC中间过渡层对硬质合金表面沉积（类）金刚石的影响

采用ＣＨ４－Ｈ２－Ｏ２微波等离子体化学相沉积法在硬质合金表面沉积金刚石薄膜，研究了ＴｉＣ中间过渡层对金刚石沉积效果的作用及粘结机理，结果表明在相同沉积条件下ＴｉＣ中间过渡层可以显著提高硬质合金表面沉积金刚石薄膜的生长速率，而且还可提高金刚石薄膜与基体的结合力。     

193nm和248nm波长准分子激光对玻璃及聚合物刻蚀特性的比较

将波长为193 nm的Ar F准分子激光和波长为248 nm的Kr F准分子激光经光学系统分别垂直照射到不同材料的表面,通过改变激光脉冲数目,在大气背景下进行实验,用三维轮廓仪对照射后的样品表面形貌及表面粗糙度进行测试分析。研究了准分子激光与非金属材料相互作用的机理,并对比得到了193、248 nm激光对聚合物材料PMMA(聚甲基丙烯酸甲酯)及HF4光学玻璃的刻蚀特性。结果表明:在激光能量密度为1.5 J/cm2时,波长193 nm激光比波长248 nm激光在刻蚀PMMA时能得到更好的效果,而在刻蚀HF4光学玻璃时却恰好相反。在准分子激光与非金属材料相互作用的过程中,既不是光源的波长越短,刻蚀效果越好,也不是光与物质相互作用中的光化学机理所占的比重越大,刻蚀效果越好;最终刻蚀效果的好坏取决于很多因素。     

准分子激光微加工与熔覆特性的研究进展

介绍了准分子激光微加工的机理、特点和应用。激光微加工具有非接触、有选择性加工、热影响区域小、高精度与高重复率等优点。既可以通过材料去除方式，也可以通过材料加成方式进行微加工成形。探讨了准分子激光的熔覆特性，实验表明：准分子激光瞬时产生很高的功率密度，具有很高的温度梯度。在基体表面发生剧烈的光热交互作用；同时产生巨大的光压和等离子体．形成大量等离子体小颗粒，沉积在熔池周围。另外，由于准分子激光的脉冲作用，熔池中有明显的液相冲击波纹会影响激光熔覆层的表面质量，可以通过优化激光工艺参数改善熔覆层的表面质量。     

Laser-assisted laser ablation method for high-quality hydroxyapatite coating onto titanium substrate

Hydroxyapatite (HAp) coating on titanium (Ti) or Ti alloy implant materials is one of the important technologies for improving the bioactivity of their surface. We recently developed a new HAp coating method using two laser beams, laser-assisted laser ablation method (LALA method). In this method, two excimer lasers were used. One laser beam from KrF laser, the ablation laser, is used for ablation of a HAp target. The other beam from ArF laser, the assist laser, is used to irradiate a Ti substrate surface during formation of the HAp coating. The assist laser plays an important role in the formation of a crystalline HAp coating and improves the strength of adhesion to the Ti substrate.The coating quality varied with the timing of the assist laser irradiation. A coating deposited with a long assist laser delay contained a large amorphous component. High-quality coatings were obtained with delay time between 2 and 10 μs.Using the present method, we succeeded in fabricating thin (≤1 μm) HAp coatings with high crystallinity and high adhesion strength.     

钛合金表面激光熔覆TiB2-TiC/Ni复合涂层的真空摩擦磨损性能

采用激光熔覆技术在TC4钛合金表面制备以反应合成TiB2和TiC颗粒为增强相的Ni基复合涂层,利用УТИТВ-100型销-盘摩擦磨损试验机研究了激光熔覆层在真空(10-5Pa)中的干滑动摩擦磨损性能,利用光学显微镜和扫描电子显微镜观察了摩擦偶件的磨损表面形貌,讨论了激光熔覆层的磨损机制。结果表明,激光熔覆层的摩擦系数在0.25～0.5之间,明显低于TC4合金的摩擦系数(0.45～0.8),磨损体积约为TC4合金的40%。随法向载荷和滑动速度的增加,激光熔覆层的磨损体积增加,激光熔覆层的磨损机制主要为粘着磨损和粘附转移物引起的磨粒磨损。     

Observation of explosive crystallization during excimer laser annealing using in situ time-resolved optical reflection and transmission measurements

XeF excimer laser-induced melting and recrystallization of amorphous silicon was investigated using in situ on-line time-resolved reflection and transmission measurements with a nanosecond time resolution. Explosive crystallization was observed for 900 Å thick amorphous silicon on SiO₂ deposited on non-alkali glass substrate upon 25 ns pulse duration of excimer laser by continuous-wave He-Ne probe laser. Three distinct regrowth regimes were investigated on the basis of various excimer laser fluences. Scanning electron microscopy, Raman spectroscopy and atomic force microscopy were used to evaluate the excimer laser-irradiated region of the sample. Grain size, surface roughness and melt duration as a function of various laser fluences are also determined.     

Micro-machinability of monocrystal silicon by direct etching using excimer laser

The high flexibility of laser direct writing and its potential capability of fabricating micro-mechanical structure are discussed. Aiming at providing knowledge for micro-engineering application, experiments on direct etching of monocrystal silicon with focusing KrF excimer laser beam (λ = 248 nm) were carried out. The validity of non-thermal excimer laser material processing was examined by SEM observation on the “heat-affected zone (HAZ)”. An empirical formula establishing the relationship of etching depth versus laser energy per pulse and the number of laser pulses has been derived from the experiments. Impact damage at the underside of silicon wafer has been observed. Its relevant causes are analyzed.     

Effect of Pulsed Laser Ablation and Continuous Laser Heating on the Adhesion and Cohesion of Cold Sprayed Ti-6Al-4V Coatings

The individual and cumulative effects of in situ pulsed laser ablation and continuous laser pre-heating on adhesion and cohesion strength of cold sprayed Ti-6Al-4V coatings are investigated. Laser beams were coupled to a cold spray gun in order to ablate and pre-heat the substrate surface a few milliseconds prior to the impact of the spray particles. Cohesion and adhesion strength were evaluated by scratch test, standard ASTM C633 pull test and laser shock (LASAT) technique. The effects of laser ablation before and during cold spray operations were investigated. Results demonstrate that laser ablation of the substrate before cold spraying led to a smooth surface which improved adhesion strength. However, when laser ablation was maintained throughout the cold spray process, i.e., in between the coating layers, a reduction of cohesion and adhesion was observed. These negative effects were circumvented when laser ablation and laser pre-heating were combined.     

Influence of surface laser cleaning combined with substrate preheating on the splat morphology

The morphology of sprayed splats influences the coating adhesion and properties, which are determined by the spraying parameters. Many studies in this field show that the substrate surface temperature is a very relevant factor for the splat shape: the hypotheses of substrate surface wettability and contamination or adsorption layer on the surfaces are supported by the fact that the near-disk-shaped splat can be obtained by increasing the substrate temperature. In this work, a short-duration pulsed laser was used to ablate the substrate just before powder spraying. This ablation was powerful enough to eliminate the contaminants on the substrate surface and to improve the adhesion. In this study the analyses of NiAl splat morphology on the polished TA6V (Ti-6Al-4V) substrate were carried out using laser ablation with different substrate temperatures and different heating modes: the flame and another laser. Results show that the temperature at which the disk-shaped splat can be obtained decreased dramatically by laser ablation. Moreover, laser ablation combined with another laser increased the adhesion strength of the coatings. The original version of this article was published as part of the ASM Proceedings, Thermal Spray 2003: Advancing the Science and Applying the Technology, International Thermal Spray Conference (Orlando, FL), May 5–8, 2003, Basil R. Marple and Christian Moreau, Ed., ASM International, 2003.     

In-situ nanoscale Al<Subscript>2</Subscript>O<Subscript>3</Subscript> spherical particle formation in Al-matrix of Al–Si/SiC<Subscript>P</Subscript> MMC foil by laser pulsing

An excimer pulse laser treatment is gaining more popularity for the surface modification of a metallic material due to its non-equilibrium processing character, ease of process, minimal depth of modification, effective absorptivity and extremely high cooling rate. In the present study, the laser surface treatment of the Al–Si/SiC_P Metal Matrix Composite foil was carried out by pulse excimer laser. The parameter used for the surface modifications are: pulse energy 1980 J m^–2 and number of pulses 1, 5 and 10. The microstructural characterization was carried out by SEM and TEM (Transmission Electron Microscopy), whereas the compositional analysis was done by TEM/EDS (Energy dispersive spectroscopy). The work demonstrates the possibility of in situ formation of fine scale, nano- to sub-micrometer, Al₂O₃ particles in the surface layer of Al-matrix composite. After a pulse of laser is irradiated on the Metal Matrix Composite surface, spherical Al₂O₃ particles are observed to nucleate and grow heterogeneously, whereas after 5 pulses of laser treatment, the fraction of Al₂O₃ particles increased. Later, at 10 pulses, it further increases ~30% of the surface. The particles showed a size distribution, the higher size limit increase with number of pulses, but it remains same around (2–20 nm) for lower range. Transmission Electron Microscopy study indicates the nucleation of the new Al₂O₃ phase with laser pulse cycle concurrent with the growth of the already existing particles.