Capacitive sensor for relative angle measurement

Based on a capacitive angle and angular rate sensor, a sensor measuring the relative angle between two rotating shafts has been developed. Two rotatable electrodes are placed between two sensor plates. The relative angle between the two rotors and the absolute position of the rotor blades are calculated from measurements of the capacitive coupling between different transmitting stator segments and a single receiving electrode. A prototype of this sensor has been developed with a range of the relative angle of /spl plusmn/7.5/spl deg/ with a resolution of 0.1/spl deg/.     

A novel resolver-to-360/spl deg/ linearized converter

A novel and simple resolver-to-dc converter is presented. It is shown that by appropriate processing of the sine and cosine resolver signals, the proposed converter may produce an output voltage proportional to the shaft angle. A dedicated compensation method is applied to produce an almost perfectly linear output. This enables determination of the angle with reasonable accuracy without a processor and/or a look-up table. The tests carried out under various operating conditions are satisfactory and in good agreement with theory. This paper gives the theoretical analysis, the computer simulation, the full circuit details, and experimental results of the proposed scheme.     

Shear mode coupling and tilted grain growth of AlN thin films in BAW resonators

Polycrystalline AlN thin films were deposited by RF reactive magnetron sputtering on Pt(111)/Ti electrode films. The substrates were tilted by an angle ranging from 40/spl deg/ to 70/spl deg/ with respect to the target normal. A low deposition temperature and a high sputter gas pressure were found ideal for tilted growth. The resulting grain tilt angle amounts to about half the substrate tilt angle. For coupling evaluation, 5 GHz solidly mounted resonator structures have been realized. The tilted grain AlN films exhibited a permittivity in the 9.5-10.5 range and loss tangent of 0.3%. Two shear modes as well as the longitudinal mode could be clearly identified. The coupling coefficient k/sub eff//sup 2/, of the fundamental thickness shear mode (TSO) was found to be about 0.5%, which is compatible with a c-axis tilt of about 6/spl deg/.     

Obliquely sputtered TbFe giant magnetostrictive films with in-plane anisotropy

We have found that in-plane magnetostriction characteristics at low fields can be greatly improved by an oblique sputtering technique. We report a study of deposition of in-plane anisotropic TbFe giant magnetostrictive films by dc magnetron oblique sputtering, including the influences of deposition angle on TbFe film magnetic and magnetostrictive performances. The in-plane magnetization of TbFe films at 1600 kA/m is drastically increased with a change of deposition angles from 90/spl deg/ to 15/spl deg/. Magnetic domain structures explored by magnetic force microscopy indicate that the easy magnetization directions of the films can be gradually changed from perpendicular to the film plane at sufficiently shallow deposition angles. The in-plane magnetostrictive coefficients /spl lambda/ at 16 kA/m also can be increased by decreasing the deposition angles from 90/spl deg/ to 15/spl deg/. The significant variation in the in-plane magnetic and magnetostrictive performances can be explained by the decrease of perpendicular anisotropy of TbFe films.     

Position Measurement in Industrial Drives by Means of Low-Cost Resolver-to-Digital Converter

A fully integrated board for resolver-to-digital conversion is proposed in this paper. It is based on a combined analog/digital circuit, which allows one to track the shaft angle of a standard resolver in a digital form. Furthermore, the board also provides the feeding signal for the resolver-rotor circuit. All the tuning and configuration settings, which allow one to adapt different kind of resolvers to the proposed system, can be easily implemented directly on the board. The final assembly is a compact low-cost resolver-to-digital converter. The entire board design and implementation are described in this paper. In addition, several tests at different resolver speeds have been performed for validation.     

Switching time of single magnetic particle and maximum recording frequency of perpendicular magnetic recording

We investigated the switching time of a magnetic particle-which may impose limits on magnetic recording frequency-by computer simulation. We found that the difference in switching time between low and high temperatures decreases with increasing the angle /spl xi/ between the applied field and the easy direction, and scarcely changes with temperature if the angle is larger than a few degrees. This can be explained by considering the energy contour and locus of magnetization in switching. The switching times derived by using divided models, in which the particle is divided into 2/spl times/2/spl times/2 or 4/spl times/4/spl times/4 cells, are smaller than those derived by using an undivided model. But the difference between the switching times derived with the divided and undivided models is less than 1% if the angle /spl xi/ is larger than 1/spl deg/. We derived equations to express the switching times of the particle for the divided models at /spl xi/=0, and we used the equations to estimate the maximum recording frequency in perpendicular recording.     

Design and fabrication of a mode rectangular X-cut quartz resonator with zero temperature coefficient

Rectangular X-cut quartz crystal resonators with cut angles /spl theta/ > 5.0/spl deg/ and aspect ratios R/sub zy/ (= width 2z/sub 0//length 2y/sub 0/) from 0.3 to 0.5 are investigated. The resonators oscillate mode is a length-extensional mode. A semiempirical frequency equation was derived from the stress expressed in terms of the trigonometric and the hyperbolic transcendental functions with constants estimated by the regression curve fit to the stress simulated by the finite-element method (FEM). Contours on which a point satisfies a zero first order temperature coefficient condition are shown in a cut angle /spl theta/ and R/sub zy/ diagram. We proved that a fabricated resonator with R/sub zy/ = 0.400 and /spl theta/ = 16.0/spl deg/, whose design parameter is located in the area of the contour, had a zero temperature coefficient.     

一种基于感应比例电桥平衡法的同步分解标准器校准装置

针对工业自动化和国防军事领域同步分解电角度量值溯源需求,提出了一种基于多盘感应比例电桥平衡原理的同步分解电角度校准方法,并组建了一套同步分解标准器校准装置。该装置通过电桥的准电压平衡和不平衡误差电压解算的方法获得同步分解电角度的标准值,并通过相对简单的接线方式,实现同步和分解两种模式下0°～360°电角度的校准。对同步模式下电角度校准装置的不确定度进行了评估,不确定度达到0.00013°(0.47″)。该方法具有准确度高、操作简单、测量速度快的特点,使同步分解电角度量值溯源到感应电压比例标准。     

Temperature stable Hall effect sensors

Magnetic field sensors are needed for high-accuracy position, angle, force, strain, torque, and current flow measurements. Molecular beam epitaxy was used to grow tellurium-doped indium-gallium antimonide thin films. Hall effect sensors made from these films have been studied for their magnetic sensitivity and thermal stability. For a range of alloy composition near In/sub 0.8/Ga/sub 0.2/Sb and n-type doping levels near 2/spl times/10/sup 17/ cm/sup -3/, high magnetic sensitivity from -40/spl deg/C to +200/spl deg/C was found with a resolution of better than /spl plusmn/0.5% over the entire temperature range.     

A CMOS rotary encoder using magnetic sensor arrays

A new type of small magnetic rotary encoder is presented. The device detects the magnetic field of a permanent magnet attached to the end of the rotating shaft using complementary metal-oxide semiconductor (CMOS) magnetic sensors [magnetic field effect transistor (MAGFET) arrays] set in a square arrangement. The sensor array is integrated onto a CMOS chip along with angle-detection circuits, leading to the realization of a compact, cost-effective rotary encoder. A prototype sensor chip with dimensions of 4.3/spl times/4.3 mm/sup 2/ is shown to provide error as low as 3.5/spl deg/ without offset calibration and 0.36/spl deg/ with offset calibration, based on an angle calculation method with mean square estimation. This result shows that the CMOS rotary encoder can achieve resolution of 10 bits/rotation at the cost of calibration.     

Surface and pseudo surface acoustic waves in langatate: predictions and measurements

Langatate (LGT, La/sub 3/Ga/sub 5.5/Ta/sub 0.5/O/sub 14/) is a recent addition to materials of the trigonal crystal class 32. In this paper SAW contour plots of the phase velocity (v/sub p/), the electromechanical coupling coefficient (K/sup 2/), the temperature coefficient of delay (TCD), and the power flow angle (PFA), are given showing the orientations in space in which high coupling is obtained, with the corresponding TCD, PFA, and vp characteristics for these orientations. This work reports experimental results on the SAW temperature fractional frequency variation (/spl Delta/f/fo) and the TCD for several LGT orientations on the plane with Euler angles: (0/spl deg/, 132/spl deg/, /spl psi/). The temperature behavior has been measured directly on SAW wafers from 10 to 200/spl deg/C, and the results are compared with numerical predictions using our recently measured temperature coefficients for LGT material constants. This research also has uncovered temperature compensated orientations, which we have experimentally verified with parabolic behavior, turnover temperatures in the 130 to 160/spl deg/C range, and /spl Delta/f/fo within 1000 ppm variation from 10 to 260/spl deg/C, appropriate for higher temperature device applications. Regarding the pseudo surface acoustic waves (PSAWs), results of calculations are presented for both the PSAW and the high velocity PSAW (HVPSAW) for some selected, rotated cuts. This study shows that propagation losses for the PSAWs of about 0.01 dB/wavelength, and phase velocities approximately 20% higher than that of the SAW, exist along specific orientations for the PSAW, thus showing the potential for somewhat higher frequency SAW device applications on this material, if required.     

Directional velocity estimation using focusing along the flow direction. II: Experimental investigation

For pt. I see ibid., vol. 50, no. 7, p. 857 (2003). A new method for directional velocity estimation is investigated through a number of flow rig measurements. The method uses beam-formation along the flow direction to generate data, where the correct velocity magnitude can directly be estimated from the shift in position of the received consecutive signals. The shift is found by cross-correlating the beamformed lines. The approach can find the velocity in any direction, including transverse to the traditionally emitted ultrasound beam. The method is investigated using a flow rig with a peak velocity of 0.15 m/s. A 7-MHz linear array transducer is used together with a dedicated sampling system to acquire signals from 64 transducer elements simultaneously. A technique for obtaining 128-element data using multiplexing is also presented. The data is beamformed off-line on a PC. A relative standard deviation of 1.4% can be obtained for a beam-to-flow angle of 45/spl deg/ and 4.3% at 90/spl deg/. Color flow images are displayed showing that the correct velocity magnitude can be obtained with the method for beam-to-flow angles of 60 and 90/spl deg/ with an accuracy of 3 to 4%.     

Fabrication and characterization of nano-sized SrTiO/sub 3/-based oxygen sensor for near room-temperature operation

Nano-sized SrTiO/sub 3/-based oxygen sensors were fabricated from synthesized SrTiO/sub 3/ and commercial SrTiO/sub 3/ using the high-energy ball milling and the thick-film screen-printing techniques. The particle sizes, microstructural properties, oxygen-sensing properties, and humidity effects of the synthesized nano-sized SrTiO/sub 3/-based oxygen sensors were characterized using X-ray diffraction (XRD), transmission electron microscope, scanning electron microscope (SEM), and gas sensing measurements. Experimental results showed that the particle size of the powders was milled down to be around 27 nm. The effect of different annealing temperatures (400/spl deg/C, 500/spl deg/C, 600/spl deg/C, 700/spl deg/C, and 800/spl deg/C) on the gas sensing properties of the synthesized SrTiO/sub 3/ sensor from nitrogen to 20% oxygen was characterized. The commercial SrTiO/sub 3/ devices annealed at 400/spl deg/C, both with 0-h and 120-h milling time, were used for comparison. The optimal relative resistance (R/sub nitrogen//R/sub 20%oxygen/) value of 6.35 is obtained for the synthesized SrTiO/sub 3/ sample annealed at 400/spl deg/C and operating at 40/spl deg/C. This operating temperature is much lower than that of conventional metal oxide semiconducting oxygen gas sensors (300/spl deg/C-500/spl deg/C) and SrTiO/sub 3/ oxygen gas sensors (>700/spl deg/C). The response and recovery times are 1.6 and 5 min, respectively. The detected range is 1-20% oxygen. The impedance of the synthesized SrTiO/sub 3/ sensor with annealing at 400/spl deg/C and operating at 40/spl deg/C (from 1 mHz to 10 MHz) in 20% oxygen ambient was found to be independent of the relative humidity (dry, 20% RH, 80% RH, near 100% RH).     

Magnetic and structural properties of Co ion-implanted GaN

A GaN epilayer was grown on Al/sub 2/O/sub 3/ substrate by metal-organic chemical vapor deposition, and Co/sup -/ ions with a dose of 3/spl times/10/sup 16/ cm/sup -2/ were implanted into GaN at 350/spl deg/C. The implanted samples were postannealed at 700/spl deg/C-900/spl deg/C to recrystallize the samples and to remove implantation damage. We have investigated the magnetic and structural properties of Co ion-implanted GaN by using X-ray diffraction (XRD), superconducting quantum interference device (SQUID) magnetometer, and X-ray photoelectron spectroscopy (XPS). XRD results did not show any peaks associated with the second phase formation, and only the diffraction from the GaN layer and substrate structure were observed. The temperature dependence of magnetization taken in zero-field-cooling and field-cooling conditions showed the features of superparamagnetic system in films annealed at 700/spl deg/C-900/spl deg/C. The magnetization curves at 5 K for samples annealed at 700/spl deg/C-900/spl deg/C exhibits ferromagnetic hysteresis loops, and the highest residual magnetization (M/sub R/) and coercivity (H/sub c/) of M/sub R/=1.5/spl times/10/sup -4/ emu/g and H/sub c/=107 Oe were found in the 800/spl deg/C annealed sample. XPS measurement showed the metallic Co 2p core levels and the metallic valence band spectra for as-implanted and 700/spl deg/C-900/spl deg/C annealed samples. From these, it could be explained that the magnetic property of our films originated from Co and CoGa magnetic clusters.     

Capacitive angular-position sensor with electrically floating conductive rotor and measurement redundancy

This paper presents a capacitive angular-position sensor with a contactless electrically floating conductive rotor and an interface electronic circuit that is designed to maximize the performance/cost ratio. The sensor includes two separate and independent measurement sections that sense the same angle and provide redundancy in critical applications. The electronic interface is based on a relaxation oscillator that, for each of the two sections, measures an appropriate quantity that relates capacitance ratio to angular position and provides a dc output voltage that varies ratiometrically with respect to the supply voltage. The sensor was built in a version with /spl plusmn/11/spl deg/ measuring range for each section. Experimental tests showed a linearity better that 1% of the span.     

Power aware attitude computation during rapid rotational motion

A technique for increasing the accuracy of attitude update calculations when data sample rates are low is described. The technique is based on the use of a fixed-point coordinate rotation digital computer (CORDIC) function. In addition to improved accuracy, power consumption is reduced at lower data rates. The technique is also useful for maintaining computational accuracy during high angular rate inputs. The result of an experiment employing microelectromechanical system (MEMS) gyroscopes and comparing the CORDIC-based method with Taylor series approximations is described. In the experiment, a second-order Taylor's series approximation resulted in computed errors in the Euler angle of greater than 5/spl deg/ and 15/spl deg/ at respective sample rates of 60 and 30 samples/s, while the CORDIC-based method was accurate to within 2 arcseconds. Power consumption estimates are provided for several input data rates for CORDIC-based field-programmable gate array (FPGA) and application-specific integrated circuit (ASIC) implementations.     

High temperature circular position sensor based on a giant magnetoresistance nanogranular Ag/sub x/Co/sub 1-x/ alloy

A new circular position sensor based on giant magnetoresistances has been developed. The sensing film is an AgCo nanogranular thin film patterned in a circular Wheatstone bridge configuration. This alloy shows a high magnetoresistance (8%) at room temperature within the field generated by an NdFeB permanent magnet that provides a sensitivity of 440 /spl mu/V/V/(/spl deg/). The operational temperature range of this sensor is -40/spl deg/C/+120/spl deg/C, although the magnetic film tolerates higher temperatures up to 200/spl deg/C. These parameters and the contactless way of sensing make this device appropriate for automotive applications. The developed sensor presents excellent characteristics for life, since it is not sensitive to pollution; it is frictionless and does not present any type of electrical noise generated by contacts.     

CO-sensing properties of In/sub 2/O/sub 3/-doped SnO/sub 2/ thick-film sensors: effect of doping concentration and grain size

In/sub 2/O/sub 3/-doped SnO/sub 2/ nanoparticles were prepared using sol-gel technique from 0.1-M solutions of both stannic chloride (SnCl/sub 4/ 5H/sub 2/O) and indium nitrate. The doping concentration was varied from 7.718/spl times/10/sup -5/ to 3.859/spl times/10/sup -4/ moles. The average particle size, as measured from XRD, SEM, and TEM analyses, varies from 34-130 nm as a result of powder calcination at different temperatures ranging from 300/spl deg/C-900/spl deg/C. Thick-film samples with a thickness of /spl sim/15 /spl mu/m, were tested for low concentration (15-1000 ppm) of CO in air ambient. The optimal temperature for CO sensing is found to be 220/spl deg/C-240/spl deg/C. A blue shift in the sensing temperature and increase in sensitivity factor (S/sub f/) is observed with increasing doping concentration of indium oxide. Maximum sensitivity factor of /spl sim/5 is found for the highest doping concentration (3.859/spl times/10/sup -4/ moles) at 1000 ppm of CO concentration. The morphological and elemental studies of the film are carried out using SEM, TEM, XRD, and EDAX techniques. The results are discussed based on elemental analyses and available theories.     

Miniaturized independently controllable multichamber thermal cycler

This paper presents the design, fabrication, and characterization of a miniaturized multichamber thermal cycler that is independently controllable with multiplex thermal protocols for the polymerase chain reaction (PCR) of nucleic acids. Thermal isolation between multiple chambers is achieved by an etch-through slot on a silicon membrane containing the reaction chambers, while keeping the silicon substrate unheated by directly contacting the substrate with a bottom heat sink. The thermal response is very fast due to reduced parasitic thermal mass. Typical ramping and cooling rates achieved are 15-100/spl deg/C/s and 10-70/spl deg/C/s, respectively. In contrast to uniform heating, as reported by other research groups, a side-heating scheme is used in this study to improve the temperature uniformity inside the reaction chamber. Finite-element-analysis (FEA) is used to predict and optimize the thermal performance. A temperature uniformity of 相似文献   

Triangular/square-wave generator with independently controllable frequency and amplitude

A triangular/square-wave generator with current-controllable frequency and amplitude is presented. The generator utilizes operational transconductance amplifiers as switching elements. A prototype circuit built with commercially available components exhibits less than 2% nonlinearity in its current-to-frequency transfer characteristic from 1 to 10 kHz and -150 ppm//spl deg/C temperature coefficient of frequency over 15/spl deg/C to 35/spl deg/C. The circuit also displays wide sweep capability and good linearity of current to amplitude. The application of the circuit to a current-controllable saw-tooth waveform generator is also presented.